JP3165830U - Spectroscopic substrate - Google Patents
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- JP3165830U JP3165830U JP2010006353U JP2010006353U JP3165830U JP 3165830 U JP3165830 U JP 3165830U JP 2010006353 U JP2010006353 U JP 2010006353U JP 2010006353 U JP2010006353 U JP 2010006353U JP 3165830 U JP3165830 U JP 3165830U
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Abstract
【課題】ラマン分光および表面増強ラマン分光における入射光の多重反射がもたらされ、被分析物質のラマン信号のピーク高さや面積などの強度を著しく増大させる分光用基板を提供する。【解決手段】シリコン基板表面に四角錐状の凸凹構造を形成した後、簡易なガスデポジション法を用いてその表面に銀ナノ粒子堆積膜１を形成した構造とした。この結果、ラマン分光や表面増強ラマン分光における入射光の多重反射がもたらされ、被分析物質のラマン信号強度を著しく増大させる効果がある。また、表面増強ラマン分光における信号やその強度増大に効果的な微小突起を多数形成した膜構造とした。【選択図】図１A spectroscopic substrate is provided that causes multiple reflection of incident light in Raman spectroscopy and surface-enhanced Raman spectroscopy, and significantly increases the intensity of a Raman signal of an analyte, such as the peak height and area. A structure in which a quadrangular pyramid-shaped uneven structure is formed on the surface of a silicon substrate, and a silver nanoparticle deposited film 1 is formed on the surface of the silicon substrate using a simple gas deposition method. As a result, multiple reflection of incident light in Raman spectroscopy or surface enhanced Raman spectroscopy is brought about, which has the effect of significantly increasing the Raman signal intensity of the analyte. In addition, a film structure in which a number of small protrusions effective for increasing the signal and the intensity of the signal in the surface enhanced Raman spectroscopy were formed. [Selection diagram] Fig. 1
Description
本考案は、ラマン分光あるいは表面増強ラマン分光に用いる基板に関するものである。 The present invention relates to a substrate used for Raman spectroscopy or surface-enhanced Raman spectroscopy.
従来のラマン分光あるいは表面増強ラマン分光には、光反射率の高い金属平板や、シリコン基板表面の倒立四角錐孔あるいはシリコン基板表面の多孔質孔に、貴金属ナノ粒子を配置した構造の基板を用いている。 Conventional Raman spectroscopy or surface-enhanced Raman spectroscopy uses a substrate with a structure in which noble metal nanoparticles are arranged in a metal plate with high light reflectivity, an inverted square pyramid hole on the silicon substrate surface, or a porous hole on the silicon substrate surface. ing.
従来のラマン分光あるいは表面増強ラマン分光に用いられる基板は、光反射率の高い金属基板や、シリコン基板表面の倒立四角錐孔あるいはシリコン基板表面の多孔質孔に、貴金属ナノ粒子を配置する構造である。 Conventional substrates used for Raman spectroscopy or surface-enhanced Raman spectroscopy have a structure in which noble metal nanoparticles are placed in a metal substrate with high light reflectivity, an inverted quadrangular hole on the silicon substrate surface, or a porous hole on the silicon substrate surface. is there.
これらの基板構造では入射光の吸収が少ないためラマン信号強度が弱かったり、表面増強ラマン分光効果をもたらすために用いる基板表面の加工プロセスが複雑であるなどの課題があった。 These substrate structures have problems such as low Raman signal intensity due to low absorption of incident light and complicated processing of the substrate surface used to bring about the surface enhanced Raman spectral effect.
本考案が提供するラマン分光あるいは表面増強ラマン分光用の基板は、上記課題を解決するために、シリコン基板表面に非特許文献１記載の既知手法で四角錐状の凸凹構造を形成し、簡易なガスデポジション法を用いてその表面に銀ナノ粒子堆積膜を形成した構造とした。
In order to solve the above problems, a substrate for Raman spectroscopy or surface-enhanced Raman spectroscopy provided by the present invention forms a quadrangular pyramid-like uneven structure on the surface of a silicon substrate by a known method described in Non-Patent
本考案によれば、四角錐状凸凹構造のシリコン基板表面にガスデポジション法を用い
て銀ナノ粒子堆積膜を形成し、ラマン分光および表面増強ラマン分光における入射光の多重反射がもたらされ、被分析物質のラマン信号のピーク高さや面積などの強度を著しく増大させる効果がある。
According to the present invention, a silver nanoparticle deposition film is formed on a silicon substrate surface having a quadrangular pyramidal structure using a gas deposition method, and multiple reflections of incident light in Raman spectroscopy and surface enhanced Raman spectroscopy are brought about. This has the effect of significantly increasing the intensity, such as the peak height and area, of the Raman signal of the analyte.
さらに本考案は、表面増強ラマン分光効果をもたらす活性点となりえる、数十〜数百
nmサイズの微小突起を多数有する銀ナノ粒子堆積膜構造を形成することができ、表面増強ラマン信号を生成する場を多くするとともに、その強度を増大する効果がある。
Furthermore, the present invention provides several tens to several hundreds that can be active sites that bring about surface-enhanced Raman spectral effects.
A silver nanoparticle deposited film structure having a large number of nanometer-sized microprotrusions can be formed, which has the effect of increasing the intensity and increasing the field for generating a surface-enhanced Raman signal.
本分光用基板は、テクスチャー処理を行った四角錐状凸凹構造のシリコン基板表面に銀ナノ粒子堆積膜を形成する。成膜後の基板は数mm角に切り分けてスライドグラスなどに張り付け、ラマン分光用基板として用いる。被分析サンプルはこの基板上に、例えば水溶液状として、数マイクロリッター程度の液量を滴下して、分光分析を実施する。また同様にして、表面増強ラマン分光用基板として用いる。 In this spectroscopic substrate, a silver nanoparticle deposited film is formed on the surface of a silicon substrate having a textured square pyramidal structure. The substrate after film formation is cut into several mm squares and pasted on a slide glass or the like to be used as a substrate for Raman spectroscopy. The sample to be analyzed is spectroscopically analyzed by dropping a liquid amount of about several microliters on this substrate, for example, in the form of an aqueous solution. Similarly, it is used as a substrate for surface enhanced Raman spectroscopy.
本分光用基板に、例えばモデル化学物質として塩素系殺菌剤であるクロロタロニル40
ppm溶液を3マイクロリットル滴下し、銀蒸着膜基板を用いて同様にラマン分光分析を行った結果と比較を行った。分析には日本電子製JRS-SYSTEM2000型顕微ラマン分光装置（励起波長632.8nm、分解能1cm-1、最大出力30mW、対物レンズ50倍）を用いた。その結果、銀蒸着膜と比較し1267cm-1あるいは2240cmのピーク高さを基準にして計算すると約3倍程度の感度増加効果が確認された。同様の方法で、モデル化学物質として表面増強ラマン効果を有するネオニコチノイド系農薬のクロチアニジン水溶液と銀ナノ粒子混合液を同基板に滴下し分析を行うと、約1ppb程度の低濃度領域まで検出することが可能であった。
For example, chlorothalonil 40, which is a chlorine-based disinfectant, is used as a model chemical substance on this spectroscopic substrate.
3 microliters of a ppm solution was dropped, and the results were compared with the results of Raman spectroscopic analysis using a silver deposited film substrate. A JRS JRS-SYSTEM2000 Raman microscope (excitation wavelength 632.8 nm,
本分光用基板を用いると、食品や環境中の残留農薬や化学物質などの高感度分析を行うことができる。またその他、人間や動物由来の体液などの化学成分をごく微量のサンプルを用いて測定することが可能となる。 When this spectroscopic substrate is used, highly sensitive analysis of residual agricultural chemicals and chemical substances in food and the environment can be performed. In addition, chemical components such as human or animal-derived body fluids can be measured using a very small amount of sample.
１ 銀ナノ粒子堆積膜
２ 四角錐状凸凹構造のシリコン基板
1 Silver nanoparticle deposited
Claims (2)
A substrate for surface-enhanced Raman spectroscopy characterized by the structure of claim 1, which can be used in combination with an aqueous silver nanoparticle solution that can be detected up to about 1 ppb by surface-enhanced Raman spectroscopy using an agrochemical clothianidin aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010006353U JP3165830U (en) | 2010-09-24 | 2010-09-24 | Spectroscopic substrate |
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| JP2010006353U JP3165830U (en) | 2010-09-24 | 2010-09-24 | Spectroscopic substrate |
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| JP3165830U true JP3165830U (en) | 2011-02-10 |
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| JP2010006353U Expired - Fee Related JP3165830U (en) | 2010-09-24 | 2010-09-24 | Spectroscopic substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230073705A (en) * | 2021-11-19 | 2023-05-26 | 한국전자기술연구원 | Optical ionization gas sensor electrode and gas detection divice having the same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230073705A (en) * | 2021-11-19 | 2023-05-26 | 한국전자기술연구원 | Optical ionization gas sensor electrode and gas detection divice having the same |
| KR102556893B1 (en) | 2021-11-19 | 2023-07-18 | 한국전자기술연구원 | Optical ionization gas sensor electrode and gas detection divice having the same |
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