JP3164417U - Non-woven suction plate - Google Patents

Non-woven suction plate Download PDF

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JP3164417U
JP3164417U JP2010006231U JP2010006231U JP3164417U JP 3164417 U JP3164417 U JP 3164417U JP 2010006231 U JP2010006231 U JP 2010006231U JP 2010006231 U JP2010006231 U JP 2010006231U JP 3164417 U JP3164417 U JP 3164417U
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fiber
melting point
suction
woven fabric
fibers
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万充 田中
万充 田中
一弘 寺前
一弘 寺前
中野 正剛
正剛 中野
修三 桜井
修三 桜井
雅彦 染谷
雅彦 染谷
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Kureha Corp
SMC Corp
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Abstract

【課題】ワークを固定し、搬送する真空吸着装置などの吸着面に使用し、安価でワークに皺や吸着跡が残らず、また吸着汚れを発生させることのない不織布製吸着プレートを提供する。【解決手段】吸着プレート1は吸着面を形成する熱接着不織布Aと真空吸引側に使用する熱接着不織布Bとで形成する。該熱接着不織布A,Bは、融点100〜200℃の低融点繊維と、該低融点繊維よりも融点が70℃以上高い繊維を混綿し、カーディング,交絡加工後、熱接着してなり、1層又は複数層A,Bを重ね合わせて積層し、外周を熱プレスにて融着して形成する。又、非融着部の通気量を50〜150cc/cm2/sec、融着部C の通気量を5cc/cm2/sec以下とした。【選択図】図2The present invention provides a non-woven fabric suction plate that is used on a suction surface of a vacuum suction device or the like for fixing and transporting a work, and that is inexpensive, does not leave wrinkles or suction marks on the work, and does not generate suction dirt. A suction plate is formed of a heat-bonding nonwoven fabric A forming a suction surface and a heat-bonding nonwoven fabric B used on a vacuum suction side. The heat-bonding nonwoven fabrics A and B are a mixture of a low-melting fiber having a melting point of 100 to 200 ° C. and a fiber having a melting point of 70 ° C. or higher than the low-melting fiber. One layer or a plurality of layers A and B are laminated and laminated, and the outer periphery is fused by hot press. Further, the air flow rate of the non-fused portion was 50 to 150 cc / cm 2 / sec, and the air flow rate of the fused portion C 2 was 5 cc / cm 2 / sec or less. [Selection] Figure 2

Description

本考案は紙,フィルム,ウエハ,ガラス板,金属板等のワークを搬送あるいは固定するため、ロボットの手部分など真空吸着装置の吸着面に使用し、ワークに皺や吸着跡が残らず、また吸着汚れ等を発生させることのない不織布製吸着プレートに関するものである。   This device is used for the suction surface of the vacuum suction device such as the robot's hand to transport or fix the work such as paper, film, wafer, glass plate, metal plate, etc. The present invention relates to a non-woven fabric suction plate that does not generate suction dirt or the like.

液晶用ガラス板や半導体ウエハの精密切断や精密加工においてはワークが位置ずれしないように確実に固定されることが必要であり、その際の固定装置として真空吸着装置が一般的に使用されている。   In precision cutting and precision processing of glass plates for liquid crystals and semiconductor wafers, it is necessary to securely fix the workpiece so as not to be displaced, and a vacuum suction device is generally used as a fixing device at that time .

ところで、真空吸着装置は上記の如くワークを安定して確実に固定しなければならない関係上、吸着面が重要な役割を有しており、従来より吸着面構造に関して種々の提案がなされ、ワークに皺や吸着跡が残らなくするため、また均一に吸着がなされるためにスポンジとネオプレンにより構成された吸着部材(例えば特許文献1参照)や、ワークを高精度に保持固定するため超高分子量ポリエチレンかならる多孔質シート(例えば特許文献2参照)、あるいはステンレスまたは真鍮の焼結金属からなる多孔質吸着プレート(例えば特許文献3参照)、更に吸着面の気孔径を小さくしてより吸着を均一に行うためのセラミックス系多孔質材料(例えば特許文献4参照)などが提案されて来た。   By the way, in the vacuum suction device, the suction surface has an important role because the workpiece must be fixed stably and reliably as described above, and various proposals have been made regarding the suction surface structure. Adsorption member composed of sponge and neoprene (for example, refer to Patent Document 1) in order to eliminate wrinkles and adsorption traces and uniform adsorption, and ultrahigh molecular weight polyethylene to hold and fix a workpiece with high accuracy A porous sheet (for example, see Patent Document 2) or a porous adsorption plate made of a sintered metal of stainless steel or brass (for example, see Patent Document 3), and further reducing the pore size of the adsorption surface for more uniform adsorption Ceramic-based porous materials (see, for example, Patent Document 4) have been proposed.

特開2002−127067号公報JP 2002-127067 A 特開平8−169971号公報JP-A-8-169971 特開平6−71854号公報JP-A-6-71854 特開2004−59295号公報JP 2004-59295 A

しかし、上記各提案に係る吸着面部材は、先ず、吸着面に用いられている材料のスポンジは耐摩耗性に劣り、また多孔質シート,焼結金属とか多孔質セラミックスは一般的に通気量が少なく充分な吸着力が得難く、しかも曲げ硬さが大きいため圧縮時の密着性が乏しく、更に高価であるなどの各欠点を有していた。   However, in the suction surface member according to each of the above proposals, first, the sponge of the material used for the suction surface is inferior in wear resistance, and the porous sheet, sintered metal, or porous ceramic generally has an air flow rate. It was difficult to obtain a small amount of sufficient adsorbing force, and also had various disadvantages such as poor adhesion during compression due to high bending hardness and high cost.

本考案は上述の如き実状に対処し、特に熱接着性不織布の使用に着目し、熱接着性不織布を吸着面プレートとして使用することによりワークに皺や吸着跡を発生させることなく、かつ強い吸引力でワークを強固に把持,固定,移動を可能ならしめることを目的とするものである。   The present invention addresses the actual situation as described above, particularly focusing on the use of heat-adhesive non-woven fabric, and using the heat-adhesive non-woven fabric as a suction surface plate, without causing wrinkles or suction marks on the workpiece and strong suction The purpose is to make it possible to firmly hold, fix and move the workpiece with force.

即ち、上記目的に適合する本考案不織布製吸着プレートは、融点100〜200℃の低融点繊維と該低融点繊維よりも融点が70℃以上高い繊維を混綿し、カード,交絡加工後熱接着してなる熱接着タイプの不織布を1層又は複数層重ね合わせ、外周を熱プレスにて融着して形成され、非融着部の通気量が50〜150cc/cm2/sec,融着部の通気量が5cc/cm2/sec以下の特性を有している構成よりなる。   That is, the non-woven fabric adsorption plate of the present invention suitable for the above purpose is a mixture of a low melting point fiber having a melting point of 100 to 200 ° C. and a fiber having a melting point higher by 70 ° C. than that of the low melting point fiber. 1 layer or multiple layers of non-woven fabric of heat bonding type, and the outer periphery is fused by hot press, the air flow rate of the non-fused part is 50 to 150 cc / cm2 / sec, and the air flow of the fused part It has a configuration having an amount of 5 cc / cm 2 / sec or less.

ここで重ね合わされる熱接着性不織布は同一の繊維配合の不織布層に限らず、両繊維の混綿割合を異ならしめた不織布の重ね合わせでもよい。特に重ね合わされる不織布におけるなきは低融点繊維の混綿割合を異ならしめるときは多い方を吸着面側、すくない方を真空吸引側とすることが好適である。   The heat-adhesive nonwoven fabric to be superposed here is not limited to a nonwoven fabric layer containing the same fiber, but may be a superposition of non-woven fabrics in which the blending ratio of both fibers is different. In particular, when there is no overlap in the non-woven fabric to be overlapped, it is preferable that when the mixing ratio of the low melting point fibers is different, the larger one is the suction surface side and the less is the vacuum suction side.

なお、上記不織布に使用される低融点繊維は融点が100〜200℃、繊維径が1〜70dtex、繊維長が1〜100mmである変性ポリエステル繊維,変性ナイロン繊維,ポリプロピレン,ポリエチレンなどのオレフィン繊維あるいはポリエステル/ナイロンなどの芯鞘構造の繊維、あるいは繊維断面の半分がポリプロピレン、半分がポリエチレンなどの2成分系繊維より選ばれた少なくとも1種の繊維であり、また該繊維よりも融点が70℃以上高い繊維は繊維径が1〜70dtex、繊維長が1〜100mmのポリエステル繊維,ナイロン繊維,レーヨン繊維より選ばれた少なくとも1種の繊維が用いられる。   In addition, the low melting point fiber used for the nonwoven fabric is an olefin fiber such as a modified polyester fiber, a modified nylon fiber, a polypropylene, or a polyethylene having a melting point of 100 to 200 ° C., a fiber diameter of 1 to 70 dtex, and a fiber length of 1 to 100 mm, or A fiber having a core-sheath structure such as polyester / nylon, or at least one fiber selected from two-component fibers such as polypropylene and half of the fiber cross section are polypropylene and the melting point is 70 ° C. or higher than the fiber. As the high fiber, at least one fiber selected from polyester fiber, nylon fiber, and rayon fiber having a fiber diameter of 1 to 70 dtex and a fiber length of 1 to 100 mm is used.

本考案は上記の如く吸着プレートが比較的安価な不織布で構成され、かつ低融点繊維を含み平滑な加圧・加熱された比較的嵩密度の大きい接着タイプの不織布であるからワークに皺や吸着跡が発生することなく、また、不織布であるため吸引力(吸着力)が強く、ワークを強固に把持、固定し、移動を可能とし、ロボットの手部分など、真空吸着装置の吸着面に使用して頗る優れた効果を有する。   In the present invention, as described above, the suction plate is composed of a relatively inexpensive non-woven fabric, and includes a low melting point fiber and is a smooth pressed and heated adhesive type non-woven fabric with a relatively large bulk density. It is non-woven fabric and has a strong suction force (suction force), so that it can grip and fix the workpiece firmly and move, and can be used on the suction surface of the vacuum suction device such as the robot hand. And has an excellent effect.

本考案に係る吸着プレートの1例を示す平面図である。It is a top view which shows an example of the suction plate which concerns on this invention. 上記吸着プレートのX−X断面図である。It is XX sectional drawing of the said adsorption | suction plate. 同吸着プレートの使用態様図である。It is a use mode figure of the suction plate.

以下、添付図面を参照し本考案の具体的形態について説明する。図1は本考案に係る吸着プレートの1例を示す平面図、図2は図1のX−X断面図であり、これら図において1は吸着プレートで、図示の如く吸着面を形成する熱接着不織布Aと真空吸引側に使用される熱接着不織布Bの2層を積層することによって構成されていると共に、その外周において熱プレスなどにより融着されて融着部Cとして前記両不織布A,Bを一体化している。   Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view showing an example of a suction plate according to the present invention. FIG. 2 is a sectional view taken along line XX of FIG. 1. In these figures, reference numeral 1 denotes a suction plate. The two nonwoven fabrics A and B are formed by laminating two layers of a nonwoven fabric A and a heat-bonded nonwoven fabric B used on the vacuum suction side, and are fused by a hot press or the like at the outer periphery thereof as a fused portion C. Are integrated.

なお、図においては吸着プレート1は2層の重ね合わせにより形成されているが、1層のみであってもよく、また3層以上としてもよい。これらは吸着プレートに求められる厚さ,目付等により選択する。   In the drawing, the suction plate 1 is formed by overlapping two layers, but it may be only one layer, or may be three or more layers. These are selected according to the thickness and basis weight required for the suction plate.

ここで上記吸着プレート1に使用される熱接着不織布は低融点繊維と、該繊維よりも融点が70℃以上高い繊維とを所要比率で混綿し、カーディング,ニードルパンチ加工又は水流交絡加工等により交絡した後、熱プレスにより繊維間接着し、作成した不織布であり、目付,層厚さは使用態様により選定されるが、通常、目付300〜800g/m2,厚さ2〜5mm程度が好適である。 Here, the heat-bonding nonwoven fabric used for the adsorption plate 1 is a mixture of low melting point fibers and fibers having a melting point higher than that of the fibers by 70 ° C. or more at a required ratio, and is obtained by carding, needle punching or hydroentanglement. After entanglement, the non-woven fabric is created by bonding between fibers by hot pressing, and the basis weight and layer thickness are selected according to the mode of use, but usually a basis weight of 300 to 800 g / m 2 and a thickness of about 2 to 5 mm are suitable. It is.

そして上記熱接着不織布は前述の如く1層に限らず、複数層の重ね合わせによる積層として構成されるが、複数層の場合、各層は必らずしも同じ繊維組成のものに限らず、例えば低融点繊維が混綿される量を代え、混綿割合の異なる層の重ね合わせとすることも使用目的に応じ好適である。   And as described above, the thermal bonding nonwoven fabric is not limited to a single layer, and is configured as a laminated layer of a plurality of layers. In the case of a plurality of layers, each layer is not necessarily limited to one having the same fiber composition, for example, It is also suitable according to the intended use to change the amount of the low-melting fiber blended and to superimpose layers having different blending ratios.

例えば低融点繊維を90重量部以上、低融点繊維より融点が70℃以上高い繊維を10重量部以下からなる不織布Aと、低融点繊維を90重量部以下で、低融点繊維より融点が70℃以上高い繊維を10重量部以上混綿した不織布Bの2層を重ね合わせるときは上記熱接着不織布A側を真空吸着装置等のワーク吸着面側に、一方、熱接着不織布Bを吸引側と使用することによりワークの吸着による搬送,固定等に頗る効果を奏する。   For example, non-woven fabric A comprising 90 parts by weight or more of low melting point fibers and 10 parts by weight or less of fibers having a melting point of 70 ° C. or higher than low melting point fibers, and 90 parts by weight or less of low melting point fibers and 70 ° C. of melting point of low melting point fibers. When two layers of non-woven fabric B in which 10 parts by weight or more of high fibers are mixed are overlapped, the above-mentioned heat-bonding non-woven fabric A side is used as the work suction surface side of a vacuum suction device or the like, while the heat-bonding non-woven fabric B is used as the suction side. As a result, there is an effect over conveyance, fixation, and the like due to workpiece adsorption.

低融点繊維としては通常の熱カレンダー,ホットプレス等にて溶融固化するタイプの繊維であれば特に限定されるまのではなく、例えば変性ポリエステル繊維,変性ナイロン繊維,ポリエチレン,ポリプロピレンなどのポリオレフィン繊維、あるいはポリエステル/ナイロンなどの芯鞘構造又は繊維断面の半分がポリプロピレン,他の半分がポリエチレンの2成分系繊維などの複合繊維が通常、使用される。   The low melting point fiber is not particularly limited as long as it is a fiber that is melted and solidified by an ordinary heat calender, hot press, etc. For example, a modified polyester fiber, a modified nylon fiber, a polyolefin fiber such as polyethylene or polypropylene, Alternatively, a core-sheath structure such as polyester / nylon or a composite fiber such as a bicomponent fiber in which half of the fiber cross section is polypropylene and the other half is polyethylene is usually used.

また、これら低融点繊維は、融点が100〜200℃,繊維径が1〜70デシテックス(dtex),繊維長が1〜100mmであることが一般に好ましい。勿論、混綿,カーディング,ニードルパンチ加工あるいは水流交絡加工などの交絡加工が可能であれば上記に拘るものではない
一方、 前記低融点繊維よりも融点が70℃以上高い繊維はレギュラータイプのポリエステル繊維,ナイロン繊維,レーヨン繊維,木綿などが含まれ、これら繊維も前記と同じく混綿,カーディング,交絡加工などから繊維径1〜70dtex、繊維長1〜100mmであることが好ましい。
These low-melting fibers generally have a melting point of 100 to 200 ° C., a fiber diameter of 1 to 70 dtex, and a fiber length of 1 to 100 mm. Of course, it is not limited to the above as long as entanglement processing such as mixed cotton, carding, needle punching or hydroentanglement is possible. On the other hand, a fiber having a melting point higher by 70 ° C. than the low melting point fiber is a regular type polyester fiber. Nylon fiber, rayon fiber, cotton, etc. are included, and these fibers preferably have a fiber diameter of 1 to 70 dtex and a fiber length of 1 to 100 mm due to blending, carding, entanglement processing, and the like.

そして、前記の熱接着不織布は1層又は複数層を重ね合わせ、吸引した際に周囲からエアーが進入するのを防止するのと同時に吸着プレート本体に取り付け易くするために、外周を7〜20mm幅でホットプレスにて融着・固化し、熱接着不織布を一体化させる。この際、融着部C以外の部分においては、通気量の低下を招かないために可能な限り嵩高く仕上げるのが望ましい。また、外周の融着部Cは、装着を容易にすると共に、非融着部以外からエアーが漏れ混入し吸着力が低下することを防止している。そのため非融着部の通気量は50〜150cc/cm2/sec,融着部の通気量は5cc/cm2/sec以下であることが好適である。 The thermal bonding nonwoven fabric has a width of 7 to 20 mm so that it can be attached to the suction plate body at the same time while preventing air from entering from the surroundings when one or more layers are stacked and sucked. In a hot press, it is fused and solidified to integrate the heat-bonded nonwoven fabric. At this time, it is desirable that the portion other than the fused portion C is finished as bulky as possible in order not to cause a decrease in the air flow rate. Further, the outer peripheral fused portion C facilitates mounting and prevents air from leaking from other than the non-fused portion to reduce the adsorption power. Therefore, it is preferable that the air flow rate of the non-fused portion is 50 to 150 cc / cm 2 / sec, and the air flow rate of the fused portion is 5 cc / cm 2 / sec or less.

なお、以上の熱接着不織布よりなる吸着プレートにおいて、不織布は使用目的,使用場所により熱成型される前に常用の加工方法、即ち、含浸加工,コーティング加工あるいはスプレー加工により帯電防止剤,難燃剤などを付与することも好適である。   In addition, in the adsorption plate made of the above-mentioned heat-bonded nonwoven fabric, the nonwoven fabric is processed in a conventional manner before thermoforming depending on the purpose and place of use, that is, antistatic agent, flame retardant, etc. by impregnation processing, coating processing or spray processing. It is also suitable to give.

図3は上記吸着プレート1を真空吸着装置などの吸着部をなす真空ポート2に取り付け使用している場合を示しており、吸引プレート1をワーク固定部をなす真空ポート2内に穴あき板4を介し取り付け、吸引部3より吸引することによってワークを随時、固定・保持せしめることができる。   FIG. 3 shows a case where the suction plate 1 is attached to and used in a vacuum port 2 that forms a suction portion of a vacuum suction device or the like. The suction plate 1 has a holed plate 4 in the vacuum port 2 that forms a workpiece fixing portion. The workpiece can be fixed and held at any time by attaching through the suction and sucking from the suction portion 3.

なお、吸着プレート1は図1においては長方形状となっているが、長方形状に限らず正方形,円形,楕円形など、吸着部の構造に合わせて適宜形状に形成することができる。   Although the suction plate 1 is rectangular in FIG. 1, the suction plate 1 is not limited to a rectangular shape, and may be formed in a suitable shape according to the structure of the suction portion, such as a square, a circle, and an ellipse.

1:吸着プレート
A:吸着面側不織布
B:真空吸引側不織布
C:融着部
2:真空ポート
3:吸引部
4:穴あき板
1: Adsorption plate A: Adsorption surface side non-woven fabric B: Vacuum suction side non-woven fabric C: Fusion part 2: Vacuum port 3: Suction part 4: Perforated plate

Claims (3)

融点が100〜200℃の低融点繊維と、低融点繊維よりも融点が70℃以上高い繊維を混綿し、カーディング,交絡加工後、熱接着してなる熱接着不織布を1層又は複数層重ね合わせ、外周を熱プレスで融着して形成され、非融着部の通気量が50〜150cc/cm2/sec,融着部の通気量が5cc/cm2/sec以下の特性を有していることを特徴とする不織布製吸着プレート。 One or more layers of heat-bonded non-woven fabrics made by blending low melting point fibers with a melting point of 100-200 ° C. and fibers having a melting point 70 ° C. higher than that of the low melting point fibers and then thermally bonding them after carding and entanglement processing In addition, the outer periphery is formed by fusing with a hot press, and the non-fused portion has an air flow rate of 50 to 150 cc / cm 2 / sec and the fused portion has an air flow rate of 5 cc / cm 2 / sec or less. A non-woven fabric adsorption plate characterized by 重ね合わされる熱接着不織布が低融点繊維の混綿割合を異にする不織布である請求項1記載の不織布製吸着プレート。   The non-woven fabric adsorption plate according to claim 1, wherein the heat-bonded non-woven fabric to be superposed is a non-woven fabric having different blending ratios of low melting point fibers. 熱接着不織布に使用される低融点繊維が融点100〜200℃,繊維径が1〜70dtex、繊維長が1〜100mmである変性ポリエステル繊維、変性ナイロン繊維、ポリプロピレン、ポリエチレンなどのオレフィン繊維あるいはポリエステル/ナイロンなどの芯鞘構造の繊維、あるいは繊維断面の半分がポリプロピレン、半分がポリエチレンなどの2成分系繊維から選ばれた繊維であり、該繊維よりも融点が70℃以上高い繊維が繊維径1〜70dtex、繊維長1〜100mmのポリエステル繊維、ナイロン繊維、レーヨン繊維から選ばれた繊維である請求項1記載の不織布製吸着プレート。   Low melting point fiber used for heat-bonding nonwoven fabric has a melting point of 100 to 200 ° C., fiber diameter of 1 to 70 dtex, fiber length of 1 to 100 mm, modified polyester fiber, modified nylon fiber, olefin fiber such as polypropylene and polyethylene, or polyester / A fiber having a core-sheath structure such as nylon, or a fiber selected from bicomponent fibers such as polypropylene and half of the fiber cross section being polypropylene, and a fiber whose melting point is 70 ° C. or higher than the fiber is 1 to 1. The non-woven fabric adsorption plate according to claim 1, which is a fiber selected from 70 dtex, polyester fiber having a fiber length of 1 to 100 mm, nylon fiber, and rayon fiber.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013078810A (en) * 2011-10-03 2013-05-02 Smc Corp Vacuum suction apparatus
JPWO2016021239A1 (en) * 2014-08-07 2017-05-25 日本バイリーン株式会社 Breathable sheet
JP2017166091A (en) * 2016-03-16 2017-09-21 有限会社 エヌテック Planar structure and manufacturing and application methods thereof
JP7349351B2 (en) 2019-12-27 2023-09-22 日本バイリーン株式会社 breathable sheet

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013078810A (en) * 2011-10-03 2013-05-02 Smc Corp Vacuum suction apparatus
US8960749B2 (en) 2011-10-03 2015-02-24 Smc Kabushiki Kaisha Vacuum suction apparatus
JPWO2016021239A1 (en) * 2014-08-07 2017-05-25 日本バイリーン株式会社 Breathable sheet
JP2017166091A (en) * 2016-03-16 2017-09-21 有限会社 エヌテック Planar structure and manufacturing and application methods thereof
JP7349351B2 (en) 2019-12-27 2023-09-22 日本バイリーン株式会社 breathable sheet

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