JP3152782U - Heating heater for piping - Google Patents

Abstract

A pipe heater for heating pipe connection portions of pipes connected to each other with little temperature unevenness. A pipe heater 2 is connected to a pipe connection part PC via a hinge. The pipe heater 2 heats the pipe connection part PC connected to each other by a clamp 1 fastened to cover flanges PF at the pipe end parts. When mounted, it consists of a plurality of shells that form a polyhedron comprising a peripheral wall 21 that covers the outer periphery of the clamp 1 and a side wall 22 that is connected to the peripheral wall 21 and covers the side periphery of the clamp 1 and contacts the pipe surface PS of the pipe P. A housing, a heat insulating material 27 disposed on at least an inner surface 21a of the peripheral wall 21 of each shell, and a heating element 31 supported by the inner surface 22b of the side wall 22, and when mounted, the heating element 31 is connected to the side of the flange PF. Is arranged so as to surround the flange PF. [Selection] Figure 5

Description

  The present invention relates to a heater for piping in a semiconductor manufacturing apparatus and other manufacturing apparatuses. More specifically, the present invention relates to a pipe heater that fastens pipe connection portions of pipes that are connected to each other by fastening flanges at pipe ends with clamps.

  Conventionally, in a semiconductor manufacturing apparatus, a chemical processing apparatus, and other manufacturing apparatuses, these gases or liquids are solidified or deposited on the inner wall of a pipe that transfers the gas or liquid before processing and the gas or liquid after processing. In order to prevent this, a pipe heater for heating the pipe is used.

  As a heater for pipe heating, a direct heating type pipe heater for heating a pipe by winding a heat insulation jacket in which a heating element is embedded around the pipe is known. This direct heating type pipe heater is likely to generate temperature unevenness due to variations in winding position, winding unevenness, and the like.

  In Patent Document 1, a heat insulation jacket covers a pipe so as to form a polygon along the pipe, a heating element is arranged at the corner of the polygon, and air is provided between the pipe surface and the corner of the pipe. There is a so-called space heating type pipe heater that reduces the temperature unevenness caused by the variation in winding position, such as the variation in the position of the heating element, as in the direct heating type, by heating the pipe in the presence of Proposed.

JP 2006-144942 A

  However, pipes generally have flanges at the ends and are generally connected to each other by fastening the flanges together. A clamp that is fastened so as to cover both flanges is used for fastening the flanges.

  When heating the pipe connection part of two pipes whose flanges are fastened by this clamp, the above-mentioned direct heating type pipe heater heats the pipe connection part via the clamp. Winding becomes more difficult than direct winding, and temperature unevenness due to variations in winding position, winding unevenness, etc. is more likely to occur.

  In addition, even in the technique proposed in Patent Document 1, since the heat insulation jacket forms a polyhedron so as to cover the clamp, the distance between the heating element arranged at the corner and the pipe connection part It is difficult to heat the pipe connection part efficiently.

  In view of the above circumstances, an object of the present invention is to provide a pipe heater that heats a pipe connection portion of a pipe fastened by a clamp with little temperature unevenness.

  In order to solve the above-mentioned problems, the pipe heater of the present invention covers the flanges of the two pipe ends to be connected, and the pipes are connected to each other by a clamp that fastens the flanges to each other. A heater for piping that heats a connecting portion, and is connected via a hinge and is attached to the piping connecting portion, and a peripheral wall that covers the outer periphery of the clamp, and is connected to the peripheral wall and covers the side periphery of the clamp. A housing comprising a plurality of shells forming a polyhedron comprising side walls abutting against the tube surface, a heat insulating material disposed on the inner surface of at least the peripheral wall of each shell, and a heating element supported on the inner surface of the side wall, and mounted Sometimes, the heating element is arranged so as to surround the flange on the side of the flange.

  Here, the “pipe end” means not only the pipe end but also its vicinity. The phrase “covering each flange” is not necessarily limited to the meaning of completely covering the flange, but includes the case of covering a part of the flange. The above “pipe connection portion” means not only the connection surface of the pipe but also the vicinity thereof.

  The “outer periphery” means the surface of the clamp in the direction in which the pipe extends. The “side circumference” means the surface of the clamp in a direction perpendicular to the direction in which the pipe extends. The “pipe surface” means the surface of the pipe. The term “abuts on the pipe surface” is not limited to the meaning of contacting with a predetermined pressure without a gap, and includes the case of contacting with a certain gap.

  The “polyhedron” means a solid body having a polygonal cross section surrounded by a plurality of surfaces, and all the surfaces are formed of rectangles or squares. The “inner surface” means a surface on the pipe connection portion side. The term “heat insulating material” is meant to include jacket heater type, silicon type, mica type, and clean block type heat insulating material impregnated with heat-resistant resin, especially when a clean environment is required. System is desirable.

  The heater for piping of the present invention includes a protective plate having a long hole on the inner surface of the side wall, spaced from the inner surface, and the heating element is supported between the protective plate and the side wall, The heating element may partially protrude from the long hole.

  Further, in the pipe heater according to the present invention, the heating element is supported on the inner surface of the side wall by an elastic support member, and is energized so as to partially protrude from the long hole by the elasticity of the elastic support member. There may be.

  In the heater for piping of the present invention, the elastic support member may be made of polyimide.

  In the heater for piping according to the present invention, the shell may have a snap lock in which the shape of the polyhedron is maintained by locking.

  Moreover, the heater for piping of this invention may consist of what a heat insulating material impregnated with heat-resistant resin.

  According to the heater for piping of the present invention, the peripheral wall of each shell constituting the housing connected through a hinge covers the outer periphery of the clamp, and the side wall of each shell contacts the pipe surface so as to cover the side periphery of the clamp. In addition, since at least a heat insulating material is disposed on the peripheral wall of each shell, the pipe connection portion is covered with the side wall and the heat insulating material at the time of mounting.

  In addition, since the heating element supported on the inner surface of the peripheral wall moves above the outer periphery of the clamp during mounting and surrounds the flange on the side of the flange, the piping heater of the present invention is A heating element is arranged in the vicinity of the pipe connection portion to allow space heating of the pipe connection portion, and the pipe connection portion can be heated with little temperature unevenness.

Schematic configuration diagram of piping and clamp Schematic configuration diagram of a heater for piping according to the present invention The figure which shows the mounting aspect of the heater for piping which concerns on this invention Sectional view of a heater for piping according to the present invention (Part 1) Sectional view of the heater for piping according to the present invention (Part 2) Diagram showing measurement points (1) Diagram showing measurement points (2) Figure showing measurement results

  An embodiment of a heater for piping according to the present invention will be described in detail with reference to the drawings. First, a pipe to which an embodiment of the pipe heater according to the present invention is applied and a clamp used to connect the pipe will be described.

  FIG. 1 is a schematic configuration diagram of a pipe P and a clamp 1 to which a pipe heater 2 according to an embodiment of the present invention is applied. 1 shows a front view of the pipe P connected by the clamp 1, and the right figure of FIG. 1 shows a side view of the pipe P connected by the clamp 1.

  As shown in FIG. 1, the pipe P has a flange PF projecting from the pipe surface PS in the entire circumferential direction at the pipe end, and is connected to each other with an O-ring (not shown) sandwiched between the flanges PF. ing. In the present embodiment, the vicinity of both pipe end portions having the flange PF is referred to as a pipe connection portion PC.

  As shown in FIG. 1, the clamp 1 mainly includes five blocks 11 and eight links 12 that sandwich the blocks 11 and connect the blocks 11 to each other. The link 12 is rotatably connected to the block 11 by a connecting pin 13. In addition, the connection pin 13 is provided with C-rings or the like at both ends to prevent disconnection.

  Each block 11 is formed with a groove 11b having a tapered surface 11a, and each block 11 is arranged on the entire circumference of the flange PF so that both flanges PF are fitted into the groove 11b.

  Of the blocks 11 connected in a chain through eight links 12, the blocks 11 at both ends are provided with fixing screws 14. By tightening the fixing screw 14, the two flanges PF are brought into contact with each other so that the taper surfaces 11a are pressed against each other so that the two pipes P are connected to each other.

  In the present embodiment, the surface of the clamp 1 in the direction in which the pipe P extends is referred to as the outer periphery 1a, and the surface of the clamp 1 in the direction perpendicular to the direction in which the pipe P extends is referred to as the side periphery 1b.

  Next, the heater 2 for piping which is embodiment of this invention is demonstrated. FIG. 2 is a schematic external view of the pipe heater 2. The left view of FIG. 2 shows an external side view of the pipe heater 2, and the right view of FIG. 2 shows an external front view of the pipe heater 2. FIG. 2 shows a pipe heater 2 attached to the pipe P.

  The piping heater 2 includes four shells 20. Each shell 20 includes a peripheral wall 21 that covers the outer periphery 1 a of the clamp 1, and a side wall 22 that is connected to the peripheral wall 21 and covers the side periphery 1 b of the clamp 1. I have.

  The peripheral wall 21 is connected to a power supply cable 23 that supplies power to a heating element (not shown) in the heater 2 for piping, and the side wall 22 has a quarter-circular cutout 22a for locking a snap lock 24 described later. By doing so, the notches 22a are combined to form a circle having a diameter substantially the same as the outer diameter of the pipe P.

  Each shell 20 is connected via a hinge 25, and by locking the snap lock 24, the notch 22a of the side wall 22 abuts on the pipe surface PS of the pipe P to form the housing 2a that covers the pipe connecting portion PC. . The contact between the side wall 22 and the pipe surface PS is not limited to the case where the entire circumference is contacted without a gap, and includes the case where the contact is made with a slight gap.

  Since each shell 20 is connected via the hinge 25 as described above, when mounting to the pipe connection portion PC, the snap lock 24 is unlocked, and each shell 20 is clamped as shown in FIG. 1 is performed. Further, even when the piping heater 2 is not attached to the piping connection part PC, the square shape as shown in FIG. 2 is maintained by locking the snap lock 24. Its handling is easy.

  Next, the internal structure of the pipe heater 2 will be described. 4 and 5 are sectional views of the heater 2 for piping. 4 is a cross-sectional view taken along line AA shown in the left view of FIG. 2, the left view of FIG. 5 is a cross-sectional view taken along line BB shown in the left view of FIG. 2, and the right view of FIG. Sectional drawing divided by CC shown in the left figure of FIG. 5 is shown. In addition, in the right figure of FIG. 5, in order to understand easily, the piping P is not illustrated as a cross section.

  The heater 2 for piping arrange | positions the partition block 26 in the both ends of the inner surface 21a of the surrounding wall 21, and has arrange | positioned the heat insulating material 27 in the inner surfaces 21a other than both ends. As the heat insulating material 27, specifically, a jacket heater type, a silicon type, a mica type, and a clean block type heat insulating material impregnated with a heat resistant resin are used.

  The heater 2 for piping arrange | positions the support block 28 so that the piping P may be enclosed on the inner surface 22b of each side wall 22 at the time of mounting | wearing, and it is a protection plate so that it may become substantially parallel to the side wall 22 on this support block 28. 29 is arranged. The protective plate 29 is supported by the support block 28 so that one side is positioned near the side of the flange PF of the pipe connection portion.

  Each support block 28 and each protection plate 29 sandwich an elastic support member 30, and this elastic support member 30 covers a heating element 31 at its tip. Specifically, polyimide is used for the elastic support member 30. The elastic support member 30 also covers the wiring to the heating element 31.

  The elastic support member 30 is supported by the support block 28 and the protective plates 29 in a state where the heating element 31 is urged in the direction of the pipe connection portion PC. Each protective plate 29 is provided with a long hole 29 a longer than the length of the heating element 31 in the longitudinal direction, and the heating element 31 biased in the direction of the pipe connection portion PC is elastic of the elastic support member 30. It protrudes partially from the long hole 29a by force.

  When the heater 2 for piping is mounted, each support block 28, each protection plate 29, and each elastic support member 30 so that the distance between the center in the longitudinal direction of each heating element 31 and the center of the piping P is substantially the same. And each heat generating body 31 is arrange | positioned.

  The operation of the piping heater 2 will be described. When the pipe heater 2 is attached to the pipe connection portion PC, the heat insulating material 27 disposed on the peripheral wall 21 covers the outer periphery 1a of the clamp 1, and the side wall 22 connected to the peripheral wall 21 is the side periphery 1b of the clamp 1. Since the notch 22a abuts on the pipe surface PS, a housing 2a having a space S between the pipe connection portion PC is formed.

  The elastic support member 30 that covers the heat generating element 31 at the tip is cantilevered by the support block 28 and the protective plate 29 while being urged toward the pipe connection portion PC side. Is disposed above the side periphery 1b of the clamp 1 so as to be on the side of the flange PF and surround the flange PF. After the mounting is completed, each heating element 31 space-heats the pipe connection portion PC in the space S.

  Next, a temperature distribution experiment of the pipe connection portion PC when the pipe heater 2 is applied will be described. 6A and 6B are diagrams showing measurement points in this experiment, and FIG. 7 is a diagram showing measurement results at each measurement point in this experiment. The measurement points in this experiment are five measurement points S1 to S5 arranged at equal intervals of 45 degrees on the pipe surface inside the pipe P, as shown in FIGS. 6A and 6B. In this experiment, heating element 31 was heated so that control temperature TC at control point S0 outside flange PF was 140 ° C. Moreover, in FIG. 7, the upper figure shows the measurement result of measurement point S1-S5 as a table | surface, and the lower figure shows the measurement result of each measurement point S1-S5 as a graph. For easy understanding, the clamp 1 and the heater for piping are not shown in FIG. 6, and the measurement points S1 to S5 are shown on the piping P in FIG. 6A.

  The results of this experiment will be described. As shown in FIG. 7, the temperature distribution at each of the measurement points S1 to S5 is such that the average temperature of each measurement temperature is 140.6 ° C., the maximum temperature is 141.5 ° C. at the measurement point S4, and the minimum temperature is 139. It became 7 ° C. The difference between the maximum temperature and the minimum temperature is 1.8 ° C., and the ratio of half the difference to the average temperature of 140.6 ° C., that is, the uniformity is about 0.640%. It has been shown that the heater 2 can heat the pipe joint PC with little temperature unevenness.

  Thereby, according to the heater 2 for piping which is embodiment of this invention, the clamp 1 and the piping connection part PC are covered via the space S formed by the side wall 22 and the heat insulating material 27, and the elastic support member 30 is provided. Since the heating element 31 covered with the tip heats the pipe connection part PC on the side of the flange PF so as to surround the flange PF, the heating element 31 is arranged in the vicinity of the pipe connection part PC to heat the space. Therefore, the pipe connection portion PC can be heated with little temperature unevenness.

  Further, according to the pipe heater 2, since the elastic support member 30 and the heating element 31 are arranged along the protective plate 29 inside the elastic support member 30, the pipe heater 2 is installed during the mounting operation. Even when the inside of the metal plate contacts with any obstacle, the protective plate 29 protects the elastic support member 30 and the heating element 31, and damage to the elastic support member 30 and the heating element 31 due to the contact can be reduced.

  In addition, according to the heater 2 for piping, during the mounting operation, the protrusion 31 such as a part of the connecting pin 13 and the heating element 31 protruding from the long hole 29a are present on the side periphery 1b of the clamp 1. Even when a part of the protrusions is in contact with the protrusion, the heating element 31 that is biased toward the pipe connection portion PC side by the elastic force of the elastic support member 30 is primarily bent toward the side wall 22 side. After passing through the protrusion, it partially protrudes again toward the pipe connection portion PC, so that the heating element 31 is always on the side of the flange PF even when the contact occurs during the mounting operation. And it can arrange | position so that the flange PF may be enclosed.

  In addition, in this embodiment, although the heater 2 for piping demonstrated as what forms a square along the piping P which consists of the four shells 20, it is not limited to this in particular. By increasing the number of the shells 20, the housing 2 a that forms a polygon such as a hexagon or an octagon when mounted may be used.

P piping PC piping connection portion PF flange PS pipe surface 1 clamp 1a outer periphery 1b side periphery 2 piping heater 2a housing 20 shell 21 peripheral wall 21a inner surface 22 side wall 22b inner surface 24 snap lock 25 hinge 27 heat insulating material 29 protective plate 29a long hole 30 Elastic support member 31 Heating element

Claims (6)

A pipe heater for heating pipe connection parts connected to each other by a clamp for fastening the flanges so as to cover the flanges of the two pipe end parts to be connected,
When connected to the pipe connecting portion via a hinge, the peripheral wall covers the outer periphery of the clamp, and the side wall is connected to the peripheral wall and covers the side periphery of the clamp and contacts the pipe surface of the pipe. A housing comprising a plurality of shells forming a polyhedron;
A heat insulating material disposed on the inner surface of at least the peripheral wall of each shell;
A heating element supported on the inner surface of the side wall,
The heater for piping, wherein the heating element is disposed so as to surround the flange at a side of the flange when the mounting is performed. The inner surface of the side wall is provided with a protective plate having a long hole at a distance from the inner surface,
The heater for piping according to claim 1, wherein the heating element is supported between the protective plate and the side wall, and the heating element partially protrudes from the elongated hole.   The heating element is supported on an inner surface of the side wall by an elastic support member, and is urged so as to partially protrude from the elongated hole by the elasticity of the elastic support member. Heater for piping.   The heater for piping according to claim 3, wherein the elastic support member is made of polyimide.   The pipe heater according to any one of claims 1 to 4, wherein the shell includes a snap lock in which the shape of the polyhedron is maintained by locking.   The pipe heater according to any one of claims 1 to 5, wherein the heat insulating material is impregnated with a heat resistant resin.

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