JP3150163U - Turbo molecular pump cable layout - Google Patents

Abstract

[PROBLEMS] To eliminate the need for a fixed shield housing made by sheet metal processing, etc., at the main cable end closest to the connector, reduce the manufacturing cost of the cable assembly, simplify the connector fastening / opening operation, and improve the shielding effect A flexible cable arrangement structure is provided. A shield 18 is half-opened at an end of a main cable 9N, and a signal transmission core wire 14 is taken out and connected to a control connector 8. The power supply core wire 15 is folded back together with the shield 18, and the shield 18 is used as the shield 19N of the branch cable 11N. The power supply core wire 15 is connected to the power connector 5 via the branch cable 11N. The exposed part of each core wire and the part from the exposed part to the control connector 8 are covered with a shield 32 and a jacket 31 to ensure flexibility and closeness. [Selection] Figure 1

Description

  The present invention relates to a turbo molecular pump for generating a vacuum in a semiconductor manufacturing apparatus, a semiconductor inspection apparatus, an electron microscope, and other vacuum apparatuses for manufacturing, inspection and research using vacuum, and in particular, a power supply cable arrangement structure It is about.

  The turbo molecular pump is generally composed of a pump unit incorporating a turbo mechanism having a vacuum function and a power supply unit for supplying power (see Patent Document 1). Two sets of cables, that is, a power supply cable (hereinafter referred to as a power cable) and a signal control cable (hereinafter referred to as a control cable) are connected to the pump unit and the power supply unit. The former supplies power for floating and rotating the turbo blade from the power supply unit to the pump unit, and the latter constantly detects the floating and rotating state of the turbo blade with a sensor and transmits the signal to the power unit as a control signal. The power for floating and rotating the turbo blade is always controlled by this control signal from the start to the end of operation.

  In order to prevent the influence of the electromagnetic field from the outside in each cable, a shield wire in which the periphery of the core wire is surrounded by a conductive material is used. Since the power connector for the power cable and the control connector for the control cable have completely different currents and withstand voltages, those of different standards are selected.

  FIG. 4 shows a basic connection structure between the pump unit 1 and the power supply unit 2. The power cable 3 supplies power from the power supply unit 2 to the pump unit 1 via the power connector 4 on the pump unit 1 side and the power connector 5 on the power supply unit 2 side. Further, the control cable 6 transmits an electrical signal indicating the floating and rotating state of the turbo blade to the power supply unit 2 through the control connector 7 on the pump unit 1 side and the control connector 8 on the power supply unit 2 side. As described above, the power cable 3 and the control cable 6 are shielded to prevent electromagnetic field interference from the outside or the outside.

  5 is a connection having a configuration different from that of FIG. 4, and the power cable 3 and the control cable 6 of FIG. 4 are integrated as a main cable 9 at an intermediate portion between the pump unit 1 and the power supply unit 2. At both ends of the main cable 9 (hereinafter referred to as the main cable end), the core wire in the cable is branched for power supply and signal transmission (control), and the signal transmission core wire is supplied to the control connector 7 or 8 and power is supplied. The core wire is connected to the power connector 4 or 5 via the branch cable 10 or 11. Details of the main cable end will be described later with reference to FIG.

  At the main cable end, in order to stably protect and shield the main cable end including the exposed core wire of the main cable 9 from external force and corrosion, a box-shaped shield case surrounding the main cable 9 and the branch cable 10 or 11 is used. The body 12 or 13 is used. The shield casing 12 or 13 is usually a metal molded product such as a processed sheet metal product. When the main cable 9 integrated as shown in FIG. 5 is used instead of the power cable 3 and the control cable 6 shown in FIG. 4, the connectors on both the pump unit 1 side and the power supply unit 2 side are the same as those shown in FIG. It is the same and cable compatibility with each unit is maintained.

  FIG. 6 is a longitudinal section of the structure of the shield housing 13 having the structure shown in FIG. 5, and the end of the jacket 16 covering the outermost portion of the main cable 9 is cut off at the main cable end, and the shield 18 is exposed. Further, the exposed portion of the shield 18 is cut, the signal transmission core wire 14 and the power supply core wire 15 are taken out, and the signal transmission core wire 14 is connected to the control connector 8. Although the figure illustrates the shield housing 13, the structure of the shield housing 12 shown in FIG. 5 is similar to the shield housing 13, and detailed description on the pump unit 1 side is omitted.

  The power supply core wire 15 is connected to a power supply core wire 21 on the branch cable 11 side at a connection point J in the shield housing 13, and the power supply core wire 21 is connected to the power connector 5 via the branch cable 11. The branch cable 11 is covered with a shield 19 and a jacket 17. At the connection point J, the core wire is covered with an appropriate insulating material (not shown).

  FIG. 7 shows the power connector 4 on the pump unit 1 side shown in FIGS. 4 and 5, by using the composite connector 22 having specifications satisfying different pin ratings and insulation distances for power supply and signal transmission. In this example, the control connectors 7 are combined into one. The power supply unit 2 is required to have upward compatibility, and the connector on the power supply unit 2 side usually uses a plurality of connectors similar to those shown in FIGS. 4 and 5 as shown in FIG. 7, but is required to have upward compatibility. If not, it is possible to combine the connectors on the power supply unit 2 side into one. In FIG. 7, parts denoted by the same reference numerals as those in FIG. 5 are the same as those in FIG.

JP 2006-057547 A

  The structure of the conventional turbo molecular pump cable is as described above. However, the structure shown in FIG. 4 uses a plurality of cables of the power cable 3 and the control cable 6, which increases the manufacturing cost, and also lays and maintains the cable. Work becomes complicated. 5 and 6, since the cable is unified as the main cable 9, the manufacturing cost can be reduced and the laying and maintenance of the cable can be simplified. Therefore, the manufacturing cost is increased because the shield casing 12 or 13 is used, and the work efficiency is lowered when each connector is fastened or released due to the presence of each box-shaped shield casing. Furthermore, the shielding effect of the branching part is also limited.

  That is, taking the shield case 13 of FIG. 6 as an example, the shield case 13 surrounds the end of the main cable without gaps, and stably protects the shield 18, the shield 19, and the entire control connector 8 from external forces and corrosion for many years. In addition, high-accuracy structural design, manufacturing, and assembly work are required for shielding, which increases manufacturing costs. Further, since each shield housing is in the immediate vicinity of each connector, the operator's fingers are touched when each connector is fastened or released, and the work is hindered and the work efficiency is lowered. Furthermore, even if a highly accurate structural design is performed, there is a limit to the closeness between each fixed shield case and each flexible cable, and the shielding effect is limited.

  Further, in the structure of FIG. 7, the voltage / current rating and insulation distance of each connector pin which is different for power supply and signal transmission are satisfied, and an integrated composite connector 22 on the pump unit 1 side is required. Since the connector cannot be obtained as a general-purpose product on the market, it requires the development of a dedicated custom connector, which increases the manufacturing cost. The present invention solves these problems.

  In order to solve the above problems, a turbo molecular pump cable provided by the present invention is inserted between a turbo molecular pump unit and a power supply unit, and a power supply core wire and a signal transmission core wire each covered with a shield are inserted. A branch cable end for branching the main cable end and the power supply core wire from the main cable is inserted into an opening of a shield housing attached to a power supply unit or a pump unit, and power supply in the main cable is provided Only the core wire is inserted into the branch cable from the shield housing part, the signal transmission core wire is connected to the control connector, and the power supply core wire is connected to the power connector.

  Further, at the main cable end provided with a shield coating for covering the power supply core wire and the signal transmission core wire, a part of the shield coating is partially opened to draw out the signal transmission core wire, and a shield coating with a built-in power supply core wire. The part is folded and used as a branch shield of the branch cable.

  Further, the branch shield is brought into contact with a shield covering that covers the power supply core wire and the signal transmission core wire, and the power supply core wire is disconnected from the end of the branch cable that branches from the main cable to between the control connectors. Provide an overlying connection shield. The connection shield is made of a flexible material.

  Further, the shield covering portion is formed of a shielded wire using a braided wire, and a heat shrinkable tube is used for protection and insulation from the outside of the main cable end or the connecting portion between the control connector and the signal transmission core wire.

  According to the present invention, in order to stably protect and shield the branch portion of the main cable from external force and corrosion, it is not necessary to have a fixed shield case that is made by sheet metal processing etc. Thus, the manufacturing cost of the cable assembly is reduced, and the handling of the cable and the fastening / opening operation of the connector are simplified by the flexible structure. Further, the periphery of the main cable is covered only with a flexible shield that is in close contact with each other, so that discontinuity of the shield is avoided. Further, the resistance to electromagnetic noise from the outside is improved, the electromagnetic field radiation is reduced to the outside, and the shielding effect is improved.

It is a block diagram of the Example of this invention. It is a figure which shows the connection of the pump unit of this invention, and a power supply unit. It is a figure which shows the other Example of this invention. It is a figure which shows the connection of the conventional pump unit and a power supply unit. It is a figure which shows the connection of the conventional pump unit and a power supply unit. It is a figure which shows the structure of the connector of the conventional power supply unit side. It is a figure which shows the connection of the conventional pump unit and a power supply unit.

  This will be described with reference to the illustrated example. FIG. 1 is a sectional view of the vicinity of a main cable end in the vicinity of a control connector 8 according to an embodiment of the present invention. In the main cable 9N, the jacket 16 (see FIG. 6) is cut open at the end of the main cable, and the shield 18 is exposed. Further, a part of the shield 18 is half-opened, and the signal transmission core wire 14 is pulled out and connected to the control connector 8. The right end of the shield 32 that is in close contact with the shield 18 and the shield 19N is connected to the control connector 8. The periphery of the main cable end is covered with a jacket 31.

  The shield 18 is folded back with the power supply core wire 15 incorporated therein, and forms a shield 19N on the branch cable 11N side. The shield 19N is further covered with a jacket 17N to form a branch cable 11N. The power supply core wire 15 is connected to the power connector 5 via the branch cable 11N. The end of the shield 19N is connected to the outer periphery of the power connector 5. In addition, in order to stably protect the end of each cable and the end of each connector and each jacket from external force and corrosion, for example, the outermost periphery of the protection part is further covered with a heat shrink tube, and shrinkage is necessary at the final stage of assembly What is necessary is just to heat-process an important part.

  FIG. 2 shows a connection configuration of the pump unit 1 and the power supply unit 2 having the main cable end portion of the structure of FIG. The structure and operation of the power connector 4, the control connector 7 and the branch cable 10N are similar to those of the power connector 5, the control connector 8 and the branch cable 11N in FIG.

  FIG. 3 shows an embodiment using a Y-shaped jacket 33. That is, the periphery of the main cable end is covered with the Y-shaped jacket 33, one end thereof is used on the main cable 9N side, the other end is used on the control connector 8 side, and the other end is used on the power connector 5 side.

  The present invention is not limited to the above-described embodiments, and various modifications can be given. For example, in the embodiment of FIG. 1, the main cable 9N is connected to the control connector 8 via the main cable end, and a part of the power supply core wire 15 is connected to the power connector 5 which is a sub connector via the branch cable 11N. In this example, the main cable 9N can be connected to the power connector 5 and the branch cable 11N can be connected to the control connector 8. The parent connector and the sub connector can be freely changed according to the purpose. Further, if necessary, the cable can be further branched by providing a portion corresponding to the main cable end of the present invention at the end of the branch cable 11N, and the number of connectors of the present invention is not limited to two.

  Further, in FIG. 1, the half-opened portion of the shield 18 is placed close to the control connector 8, and the shield 18 is not folded back to the branch cable 11N side, and the control connector 8 is directly covered and fixed with the signal transmission core wire 14 incorporated. Is also possible. In this case, the power supply core wire 15 is pulled out in the half-opened portion, connected to a separately prepared power supply core wire on the side of the branch cable 11N, that is, a core wire similar to the power supply core wire 21 in FIG. . In this structure, the shield 32 can be largely replaced by the shield 18, and the shield 32 can be omitted.

  Further, as described above, a heat-shrinkable tube can be used for protection from external force and corrosion around the end of the main cable, but a heat-shrinkable tube may be used for the jacket 31, the jacket 17N or the Y-shaped jacket 33 itself. In this case, each jacket itself protects the periphery of the main cable end, so that the structure is simplified and the cost reduction effect is increased. Further, other methods such as a resilient material and an adhesive can be adopted as protection around the end of the main cable, and the present invention is not limited to the end protection method and the material used.

  Although FIG. 1 schematically shows the periphery of the main cable end, it is not necessary to leave a space inside the shield 32. Therefore, as described above, a heat-shrinkable tube is used for the jacket 31, and the entire jacket 31 is heat-treated. It may be shrunk to remove unnecessary space as much as possible to make it easier to handle. In addition to the braided wire as a flexible shield material, it is also conceivable to use a copper foil tape or the like at an appropriate location such as a shield mutual connection portion, and the shield material is not limited to the braided wire. The present invention encompasses all of these.

  The present invention can be applied to a cable arrangement structure for a turbo molecular pump that generates a vacuum in a semiconductor manufacturing apparatus, a semiconductor inspection apparatus, an electron microscope, and other vacuum apparatuses for manufacturing, inspection, and research using vacuum. it can. In addition, the present invention can be applied to an application where it is necessary to branch the core wire into a plurality of connectors at both ends or one end of one cable.

DESCRIPTION OF SYMBOLS 1 Pump unit 2 Power supply unit 3 Power cable 4 Power connector 5 Power connector 6 Control cable 7 Control connector 8 Control connector 9 Main cable 9N Main cable 10 Branch cable 10N Branch cable 11 Branch cable 11N Branch cable 12N Shield case 13 Shield case 14 Signal Transmission Core 15 Power Supply Core 16 Jacket 17 Jacket 17N Jacket 18 Shield 19 Shield 19N Shield 21 Power Supply Core 22 Composite Connector 31 Jacket 32 Shield 33 Y Type Jacket J Connection Point

Claims (5)

  A power supply core wire disposed between the turbomolecular pump unit and the power supply unit and covered with a shield, a main cable end through which the signal transmission core wire is inserted, and a branch branching the power supply core wire from the main cable The cable end is inserted into the opening of the shield housing attached to the power supply unit or the pump unit, and only the power supply core wire in the main cable is inserted into the branch cable from the shield housing portion to transmit the signal. A turbo molecular pump cable arrangement structure characterized in that the core wire is connected to the control connector and the power supply core wire is connected to the power connector.   At the end of the main cable provided with a shield coating for covering the power supply core wire and the signal transmission core wire, a part of the shield coating is partially opened to draw out the signal transmission core wire, and a shield coating with a built-in power supply core wire is provided. The turbo molecular pump cable arrangement structure according to claim 1, wherein the turbo molecular pump cable arrangement structure is used as a branch shield of the branch cable.   The branch shield is brought into contact with the shield covering that covers the power supply core wire and the signal transmission core wire, and the power supply core wire is covered from the end of the branch cable that branches from the main cable to between the control connectors. The turbo molecular pump cable arrangement structure according to claim 1 or 2, further comprising a connection shield for the turbo molecular pump.   4. The turbo molecular pump cable arrangement structure according to claim 3, wherein the connection shield is made of a flexible material.   The shield coating is constituted by a shielded wire using a braided wire, and a heat-shrinkable tube is used for protection and insulation from the outside of the main cable end or a connection portion between the control connector and the signal transmission core wire. The cable arrangement structure for a turbo molecular pump according to claim 1, claim 2, claim 3, or claim 4.

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