JP3149153U - Conductance adjustment device - Google Patents

Abstract

A conductance adjusting apparatus capable of finely adjusting a pressure in a vacuum chamber or the like. A housing including a first opening, a plurality of blades and supported by one end of the housing, a second opening and the other end of the blades and 16 are provided. A rotating body that supports the first opening 20 and the second opening by moving the blades 14 and 16 by rotating the rotating body toward one side in the circumferential direction with respect to the housing 14. The opening area of the communication hole 48 is enlarged, and the rotating body rotates toward the other side in the circumferential direction with respect to the housing 12, thereby moving the blade portions 14, 16 to reduce the opening area of the communication hole 48. In the conductance adjusting device 10, the blade portions 14 and 16 are provided with a shielding portion 40 that closes the communication hole 48 when the rotating body rotates toward the other side in the circumferential direction with respect to the housing. [Selection] Figure 6

Description

  The present invention relates to a conductance adjusting device applied to an APC (Adaptive Pressure Control) valve used for pressure adjustment in a semiconductor manufacturing apparatus or the like.

  In general, in a semiconductor manufacturing apparatus or the like, it is necessary to adjust a pressure in a vacuum chamber in order to react a reaction gas more effectively in a process. Therefore, conventionally, in order to adjust the pressure in the vacuum chamber, an exhaust flow rate is adjusted by attaching an APC valve between the vacuum chamber and the exhaust pump.

A conductance adjusting device is used for this APC valve. A camera diaphragm mechanism is provided as the conductance adjusting device. Here, the diaphragm mechanism of the camera has a plurality of blade portions and a cylinder that rotatably supports each blade portion, and each blade portion is moved in the circumferential direction by rotating the cylinder with a motor or the like. The area of the opening (opening area) is enlarged or reduced (see Patent Document 1 below). Thereby, the area (opening area) of an opening part can be adjusted.
Japanese Utility Model Publication No. 60-167863

  By the way, even when each blade part of the diaphragm mechanism of the camera is rotated to reduce the area of the opening, the area of the opening does not become zero. In other words, the opening does not disappear even when the cylinder of the aperture mechanism of the camera is rotated to the maximum. For this reason, even if each blade part of the diaphragm mechanism of the camera is rotated to reduce the area of the opening, the fluid leaks from a slight gap in the opening, so that the pressure in the vacuum chamber cannot be finely adjusted.

  Therefore, an object of the present invention is to provide a conductance adjusting device capable of finely adjusting the pressure in a vacuum chamber or the like.

  The device according to claim 1 is provided with a housing having a first opening, a plurality of blades whose one end is supported by the housing, a second opening, and the other end of the blade. A rotating body that supports the first opening and the second opening by moving the blade portion by rotating the rotating body toward one side in a circumferential direction with respect to the housing. Conductance adjustment that enlarges the opening area of the communication hole and reduces the opening area of the communication hole by moving the blade portion by rotating the rotating body toward the other side in the circumferential direction with respect to the housing The apparatus is characterized in that the blade portion is provided with a shielding portion that closes the communication hole when the rotating body rotates toward the other circumferential side with respect to the housing.

  According to the first aspect of the present invention, the communication hole is closed by the shielding portion provided in the blade portion when the rotating body rotates to the maximum in the other circumferential direction with respect to the housing. As a result, when the conductance adjusting device is narrowed, the communication hole between the first opening and the second opening is closed, and the opening area becomes zero. As a result, the pressure can be finely adjusted, and the pressure adjustment accuracy of the conductance adjusting device can be increased.

  The invention according to claim 2 is the conductance adjustment device according to claim 1, wherein the shielding portion is an extending portion provided to extend from each of a pair of opposed blade portions, and the extension The portion has a linear end portion that extends in a straight line, and when the rotating body rotates toward the other side in the circumferential direction with respect to the housing, the linear end portions of the extending portion mutually The communication hole is closed to close the communication hole.

  According to the invention described in claim 2, the communication holes between the first opening and the second opening are formed by the contact between the extending portions provided extending from each of the pair of opposed blade portions. Is blocked. At this time, when the linear ends of the extending portions come into contact with each other, the extending portions can come into contact with no gap. As a result, the pressure can be finely adjusted, and the pressure adjustment accuracy of the conductance adjusting device can be further increased.

  The invention described in claim 3 is the conductance adjusting device according to claim 2, wherein the extending portion is provided with a thick portion for making surface contact when contacting each other.

  According to the third aspect of the present invention, when the extending portions contact each other, they are in surface contact with each other by the thick portion. For this reason, for example, even when each blade part is made of a thin material (low strength material), each extending part is in contact with the surface, so that each extending part is damaged or deformed. Can be prevented. Thereby, the contact precision of each extension part can be improved and stabilized. As a result, the pressure adjustment accuracy of the conductance adjusting device can be further increased.

  According to the present invention, the pressure in the vacuum chamber or the like can be finely adjusted.

  Next, the conductance adjustment device according to the first embodiment of the present invention will be described. The conductance adjustment device of the present invention is applied to an APC valve of an exhaust system used for pressure adjustment of a semiconductor manufacturing device or the like as an example, but is not limited to this, and gas, liquid It can be widely applied as a diaphragm mechanism during the induction of powder, light, sound and the like.

  As shown in FIGS. 1 to 4, the conductance adjusting device 10 (see FIG. 6) includes a housing 12, a plurality of first blade portions 14, a plurality of second blade portions 16, and a rotating body 18. ing.

  The housing 12 is formed in an annular shape as a whole, and a first opening 20 serving as a through hole is formed at the center thereof. The housing 12 is formed with a plurality of bearing holes 22 along the circumferential direction. In the present embodiment, a total of 18 bearing holes 22 are formed, and the opening angles of adjacent bearing holes 22 are set to be equal to about 20 °.

  The first blade portion 14 is formed in a curved shape (boomerang shape) as a whole. A curved portion 24 is formed at one end portion of the first blade portion 14. In addition, a fixing pin 26 is provided on the surface side of the curved portion 24 of the first blade portion 14. Further, a linear inclined portion 28 is formed at the other end portion of the first blade portion 14. A drive pin 30 is provided on the back side of the inclined portion 28 of the first blade portion 14. In the present embodiment, 16 first blade portions 14 are provided.

  The second blade portion 16 is configured so as to face each other in a state where the opening area of the communication hole 48 communicating the first opening 20 and the second opening 44 is enlarged or in a state where the communication hole 48 is closed. Is placed on top. Each second blade portion 16 is formed in a curved shape (boomerang shape) as a whole. A curved portion 32 is formed at one end of the second blade portion 16. A fixing pin 34 is provided on the surface side of the curved portion 32 of the second blade portion 16. Further, a linear inclined portion 36 is formed at the other end portion of the second blade portion 16. A drive pin 38 is provided on the back side of the inclined portion 36 of the second blade portion 16. Here, the second blade portion 16 is formed with an extending portion 40 extending from the inner peripheral surface. Each extending portion 40 is formed with a linear end portion 42 extending linearly, and when each extending portion 40 abuts when the communication hole 48 is closed, the linear end portions 42 are spaced from each other. It is comprised so that it may contact without. In the present embodiment, two second blade portions 16 are provided.

  As for the rotary body 18, the housing 12 is formed in the annular | circular shape as a whole, and the 2nd opening part 44 used as a through-hole is formed in the center part. The rotating body 18 is formed with a plurality of grooves 46 extending radially (in the radial direction). In the present embodiment, a total of 18 groove portions 46 are formed, and the opening angle of the adjacent groove portions 46 is set to be an equal angle of about 20 °.

  A driving gear (not shown) is connected to the back surface of the rotating body 18. When the drive gear is rotationally driven by a drive motor (not shown), the rotating body 18 rotates along the circumferential direction. Here, the rotation angle of the rotating body 18 is set to a range of 90 °. Note that the drive gear is not limited to the configuration provided in the rotating body 18 and may be configured on the housing 12 side. In this configuration, the housing 12 rotates along the circumferential direction.

  In addition, as a material of each structural member, it is preferable to use Hastelloy, aluminum, a ceramic material, a PEEK material etc. suitably, for example. Thereby, corrosion resistance and particle resistance can be exhibited.

  Next, the structure of the conductance adjusting device 10 will be described in detail.

  As shown in FIGS. 5 and 6, the first blade portion 14 and the second blade portion 16 are configured to be movably supported between the housing 12 and the rotating body 18. Specifically, each fixing pin 26 of each first blade portion 14 is inserted into each bearing hole 22 of the housing 12 and is rotatably supported by each bearing hole 22. In addition, each drive pin 30 of each first blade portion 14 is inserted into each groove portion 46 of the rotating body 18 and can move inside the groove portion 46.

  Here, in the state where the rotation angle of the rotating body 18 is 0 ° (the state where the rotation angle is 0 ° in FIGS. 5 and 6), each second blade portion 16 includes each opening 20 of the housing 12 and the rotating body 18. 44 are arranged at positions that do not interfere with 44 and that face each other (positions that are symmetric with respect to the center).

  A first blade portion 14 is disposed at a position adjacent to each second blade portion 16. In a state where the rotation angle of the rotating body 18 is 0 °, each first blade 14 is disposed at a position where it does not interfere with the housing 12 and the openings 20 and 44 of the rotating body 18.

  First, it sets so that the 2nd blade | wing part 16 may become a mutually opposing position, the state is fixed, and the 1st blade | wing part 14 is arrange | positioned in the position adjacent to each 2nd blade | wing part 16. FIG. At this time, the fixing pin 26 of the first blade portion 14 is inserted into the bearing hole 22 of the housing 12 adjacent to the curved portion 32 of the second blade portion 16 serving as a reference. Then, the fixing pin 26 of the next first blade portion 14 is inserted into the bearing hole 22 of the housing 12 adjacent to the curved portion 24 of the first blade portion 14. Similarly, the driving pin 30 of the first blade 14 is inserted into the groove 46 of the rotating body 18 adjacent to the curved portion 32 of the second blade 16 serving as a reference. In this manner, the fixing pins 26 of the first blade portions 14 are sequentially inserted into the other bearing holes 22 adjacent to the bearing holes 22 of the housing 12, and the other groove portions 46 adjacent to the groove portions 46 of the rotating body 18 are inserted. The drive pin 30 of each 1st blade | wing part 14 is inserted in order, and the 1st blade | wing part 14 is attached, shifting a phase.

  In addition, in attaching each 1st blade | wing part 14 and each 2nd blade | wing part 16, it performs by arranging each bending part 24 and 32, and the direction of each bending part 24 and 32 and each inclination part 28 and 36 is fixed. To.

Next, the operation of the conductance adjusting device 10 will be described.
First, in order to make it easy to understand, description will be made by focusing on the operation of only the two second blade portions 16.

  As shown in FIG. 5, in the initial state of the rotating body 18 (the state where the rotation angle is 0 ° in FIG. 5), the two second blade portions 16 are located at positions facing each other (position opened 180 °). ing. At this time, the two second blade portions 16 are located at portions that do not interfere with the first opening portion 20 of the housing 12 and the second opening portion 44 of the rotating body 18. For this reason, the opening of the communication hole 48 which connects the 1st opening part 20 and the 2nd opening part 44 is a state which opened fully. Further, each drive pin 38 of each second blade portion 16 is located at a radially outer portion of the groove portion 46.

  Next, when the drive gear is driven by the drive motor and the rotating body 18 rotates in the range of 0 ° to 45 °, each second blade portion 16 uses each fixed pin 34 as a rotation reference and each drive pin 38. Moves toward the radially inner portion of the groove 46. When the rotating body 18 rotates from 0 ° to 45 °, each drive pin 38 reaches the radially inner portion of the groove 46. At this time, the inclined portion 36 of one second blade portion 16 intersects with the curved portion 32 of the other second blade portion 16 (in a state where the rotation angle is 45 ° in FIG. 5). In this state, the two second blade parts 16 are located at a site where the first opening 20 of the housing 12 and the second opening 44 of the rotating body 18 interfere with each other. For this reason, each 2nd blade | wing part 16 is in the state over which a part of opening of the communicating hole 48 which connects the 1st opening part 20 and the 2nd opening part 44 was spanned.

  Next, when the drive gear is driven by the drive motor and the rotating body 18 rotates in the range of 45 ° to 90 °, each second blade portion 16 uses each fixed pin 34 as a rotation reference and each drive pin 38. Moves toward the radially outer portion of the groove 46. When the rotating body 18 is rotated from 45 ° to 90 °, each drive pin 38 reaches a portion on the radially outer side of the groove 46. At this time, the intersection of one second blade portion 16 and the other second blade portion 16 becomes large, and the extended portions 40 of each second blade portion 16 are at positions where the rotating body 18 has rotated 90 °. Abut (in a state where the rotation angle is 90 ° in FIG. 5). Specifically, the linear end portions 42 of the extending portions 40 of the second blade portions 16 contact each other without a gap.

  On the other hand, when the rotating body 18 is rotated in the reverse direction by the drive motor, the second blade portion 16 moves in the direction opposite to the moving direction in each of the above steps, and finally the initial state (FIG. 5). In the state of the rotation angle of 0 °.

  Next, the operation of all the first blade portions 14 and the second blade portions accompanying the rotation of the rotating body 18 will be described. As the rotating body 18 rotates, each first blade 14 also performs the same operation as the second blade 16.

  As shown in FIG. 6, in the initial state of the rotating body 18 (the state where the rotation angle is 0 ° in FIG. 6), the first blade portions 14 and the second blade portions 16 are such that adjacent blade portions overlap each other. Is located. At this time, each 1st blade | wing part 14 and each 2nd blade | wing part 16 are located in the site | part which does not interfere with the 1st opening part 20 of the housing 12, and the 2nd opening part 44 of the rotary body 18. FIG. For this reason, the opening of the communication hole 48 which connects the 1st opening part 20 and the 2nd opening part 44 is in the fully open state, The opening area is the 1st opening part 20 (2nd opening part 44). The opening area is substantially the same. Further, the drive pins 30 and 38 of the first blade portions 14 and the second blade portions 16 are located at the radially outer portions of the groove portions 46.

  Next, when the drive gear is driven by the drive motor and the rotator 18 rotates in the range of 0 ° to 45 °, each of the first blade portions 14 and each of the second blade portions 16 causes the fixing pins 26 and 34 to move. The drive pins 30 and 38 move toward the radially outer portion of the groove 46 on the basis of the respective rotations. When the rotating body 18 rotates from 45 ° to 90 °, the drive pins 30 and 38 reach the radially outer portion of the groove 46. At this time, the opening area of the communication hole 48 that communicates the first opening 20 and the second opening 44 is reduced to about 50% of the opening area when fully open (rotation angle 0 ° in FIG. 6). (A state where the rotation angle is 45 ° in FIG. 6).

  Next, when the drive gear is driven by the drive motor and the rotating body 18 rotates in the range of 45 ° to 90 °, each of the first blade portions 14 and each of the second blade portions 16 causes the fixing pins 26 and 34 to move. The drive pins 30 and 38 move toward the radially outer portion of the groove 46 on the basis of the respective rotations. When the rotating body 18 rotates from 45 ° to 90 °, the drive pins 30 and 38 of the first blade portions 14 and the second blade portions 16 reach the radially outer portion of the groove portion 46. At this time, the intersections of the first blade portions 14 that face each other and the second blade portions 16 that face each other become large, and each second blade is at a position where the rotating body 18 has rotated 90 °. The extended portions 40 of the portion 16 come into contact with each other (in a state where the rotation angle is 90 ° in FIG. 6). Specifically, the linear end portions 42 of the extending portions 40 of the second blade portions 16 contact each other without a gap.

  Here, it compares with the open / close state of each blade | wing part of the conductance adjustment apparatus to which the conventional iris mechanism is applied. As shown in FIG. 7, when the conventional iris mechanism is applied, it is composed only of a blade portion having the same shape as the first blade portion 14 of the present embodiment. That is, the second blade portion 16 of the present embodiment does not exist, and all 18 blade portions are blade portions having the same shape as the shape of the first blade portion 14. When the rotating body 18 of the conductance adjusting device having such a configuration rotates 90 °, the communication hole 48 between the first opening 20 and the second opening 44 is not completely closed, and the opening having the smallest diameter is at the center. A certain minimum opening 50 is formed (state at a rotation angle of 90 ° in FIG. 7).

  On the other hand, as shown in FIG. 6, according to the conductance adjusting device 10 of the present embodiment, each extending portion 40 is formed in each second blade portion 16, and therefore the rotating body 18 is 90. When rotated, the extended portions 40 of the second blade portions 16 come into contact with each other to close the minimum opening 50. That is, each extending portion 40 is designed to have a shape and a size that occupy the opening area of the minimum opening 50 when the extending portions 40 come into contact with each other, so that the rotating body 18 is rotated by 90 °. In such a case, the minimum opening 50 does not occur. As a result, when the rotating body 18 rotates from 0 ° to 90 °, the communication hole 48 between the first opening 20 and the second opening 44 gradually decreases and eventually disappears completely.

  On the other hand, when the rotating body 18 is rotated in the reverse direction by the drive motor, each of the first blade portions 14 and each of the second blade portions 16 moves in the direction opposite to the moving direction in each of the above steps, and finally Is returned to the initial state (the state where the rotation angle is 0 ° in FIG. 6). Thereby, the opening of the communication hole 48 between the first opening 20 and the second opening 44 is fully opened, and is substantially the same as the opening area of the first opening 20 (second opening 44).

  As described above, when the rotating body 18 is rotated to one side in the circumferential direction, the opening area of the communication hole 48 between the first opening 20 and the second opening 44 is enlarged, and the rotating body 18 is moved to the other circumferential direction. When rotated to the side, the opening area of the communication hole 48 between the first opening 20 and the second opening 44 is reduced.

  According to the conductance adjusting device 10 of the first embodiment, when the rotating body 18 is rotated from 0 ° to 90 °, the communication hole 48 between the first opening 20 and the second opening 44 is closed, The opening area becomes zero. Thereby, fine adjustment of a pressure is attained and the pressure adjustment precision of the conductance adjustment apparatus 10 can be raised.

  In particular, the communication holes 48 between the first opening 20 and the second opening 44 are blocked by the extended portions 40 extending from each of the pair of opposing second blade portions 16 contacting each other. Is done. At this time, the linear end portions 42 of the extending portions 40 come into contact with each other, so that the extending portions 40 can come into contact with no gap. As a result, the pressure can be finely adjusted, and the pressure adjustment accuracy of the conductance adjusting device 10 can be further increased.

  Moreover, since each 1st blade | wing part 14 and each 2nd blade | wing part 16 are supported by the housing 12 and the rotary body 18 via the fixing pins 26 and 34 and the drive pins 30 and 38, each 1st blade | wing part 14 and the two end portions in the longitudinal direction of each second blade portion 16. Thereby, the support strength of each 1st blade | wing part 14 and each 2nd blade | wing part 16 can be raised, and stability when each 1st blade | wing part 14 and each 2nd blade | wing part 16 operate | moves (moves). And smoothness can be increased.

  Moreover, since the support strength of each 1st blade | wing part 14 and each 2nd blade | wing part 16 can be raised, each 1st blade | wing part 14 and each 2nd blade | wing part 16 are comprised with a very thin member (member of small mass). can do. As a result, since the output of the drive motor for driving each first blade part 14 and each second blade part 16 can be reduced, the manufacturing cost can be reduced and the conductance adjusting device 10 can be reduced in size. . Further, by configuring each first blade portion 14 and each second blade portion 16 with a member having little friction, the frictional force of each first blade portion 14 and each second blade portion 16 with respect to the housing 12 and the rotating body 18 is increased. Since it falls, the operation | movement of each 1st blade | wing part 14 and each 2nd blade | wing part 16 can be made smooth.

  Next, a conductance adjusting device according to a second embodiment of the present invention will be described. Note that the same components as those of the conductance adjusting device according to the first embodiment of the present invention are denoted by the same reference numerals, and the description thereof is omitted as appropriate.

  As shown in FIG. 8, in the conductance adjustment device of the second embodiment, a thick portion 52 is provided in each extending portion 40 of each second blade portion 16. The thick part 52 may be formed so that the thickness of each extending part 40 is thicker than the other part of the second blade part 16, or a separate member is attached to each extending part 40 to each extending part 40. The thickness may be increased. Thereby, the thickness of each extension part 40 of each 2nd blade | wing part 16 becomes thick, and an intensity | strength also increases.

  According to the conductance adjusting device of the second embodiment, even when the second blade portion 16 is made of a thin material, each extension portion 40 of each second blade portion 16 has a large thickness. When the parts 40 come into contact with each other, they come into surface contact. Thereby, the intensity | strength of each extension part 40 improves and it can prevent that each extension part 40 is damaged or bending-deformed. Thereby, the contact precision of each extension part 40 can be raised. Moreover, since the pressure which each extension part 40 exerts on each other can be raised, the contact strength and contact stability of each extension part 40 can be improved.

It is a top view of the housing which comprises the conductance adjustment device concerning a 1st embodiment of the present invention. (A) is a top view of the 1st blade | wing part which comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention, (B) comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention. It is a side view of a 1st blade | wing part. (A) is a top view of the 2nd blade | wing part which comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention, (B) comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention. It is a side view of a 2nd blade | wing part. It is a top view of the rotary body which comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing which showed rotation operation | movement of the 2nd blade | wing part which comprises the conductance adjustment apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing which showed rotation operation | movement of the 1st blade | wing part and 2nd blade | wing part which comprise the conductance adjustment apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing which showed rotation operation | movement of the blade | wing part of the conductance adjustment apparatus to which the conventional iris mechanism was applied. (A) is a top view of the 2nd blade | wing part which comprises the conductance adjustment apparatus which concerns on 2nd Embodiment of this invention, (B) comprises the conductance adjustment apparatus which concerns on 2nd Embodiment of this invention. It is a side view of a 2nd blade | wing part.

Explanation of symbols

10 conductance adjusting device 12 housing 14 first blade part (blade part)
16 Second blade (blade)
18 Rotating body 20 1st opening part 40 Extension part (shielding part)
42 Straight end 44 Second opening 48 Communication hole 52 Thick part

Claims (3)

A housing having a first opening; a plurality of blades having one end supported by the housing; and a rotating body having a second opening and supporting the other end of the blade. Then, the rotating body rotates toward one side in the circumferential direction with respect to the housing, thereby moving the blade portion to enlarge the opening area of the communication hole between the first opening and the second opening. And a conductance adjusting device that reduces the opening area of the communication hole by moving the blade portion by rotating the rotating body toward the other side in the circumferential direction with respect to the housing,
A conductance adjusting device according to claim 1, wherein a shielding portion that closes the communication hole when the rotating body rotates toward the other circumferential side with respect to the housing is provided in the blade portion. The shielding part is an extending part provided to extend from each of a pair of opposed blade parts,
The extending portion has a linear end portion extending in a straight line,
When the rotating body rotates toward the other side in the circumferential direction with respect to the housing, the linear ends of the extending portions abut against each other to close the communication hole. Item 2. The conductance adjusting device according to Item 1. The conductance adjusting device according to claim 2, wherein the extending portion is provided with a thick portion for making a surface contact when abutting each other.

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