JP3137194B2 - Vibration wave drive - Google Patents
Vibration wave driveInfo
- Publication number
- JP3137194B2 JP3137194B2 JP02134317A JP13431790A JP3137194B2 JP 3137194 B2 JP3137194 B2 JP 3137194B2 JP 02134317 A JP02134317 A JP 02134317A JP 13431790 A JP13431790 A JP 13431790A JP 3137194 B2 JP3137194 B2 JP 3137194B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- vibration
- energy conversion
- conversion element
- electro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、中空状の電気−機械エネルギー変換素子を
用いて、この電気−機械エネルギー変換素子を挟持する
一方の振動体に方向の異なる屈曲モードの振動を励起
し、合成振動として上記振動体に軸心を中心とした円又
は楕円運動を生じさせる振動波駆動装置であって、中空
部内に振動体と押え体とを結合する部材を入り込ませた
ものに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention uses a hollow electro-mechanical energy conversion element and bends in different directions to one vibrating body that sandwiches the electro-mechanical energy conversion element. A vibration wave driving device that excites mode vibration and generates a circular or elliptical motion about the axis of the vibrating body as a synthetic vibration, wherein a member that couples the vibrating body and the pressing body into a hollow portion is inserted. It's about what you've done.
従来の振動波モータ等の振動波駆動装置としては、円
環に曲げ振動を起こし、摩擦力により移動体を駆動させ
る型式のものが、カメラ用AF機構などで、実用化されて
いる。しかし、リング形状であるため、加圧機構を含め
たユニットとしては、意外とコスト高であり、中空を要
求されぬモータ用途としてはコスト上不利である。そこ
で、中実型で、加圧系などの構成が容易なタイプのモー
タとして、第８図及び第９図に示す棒状振動波モータが
提案されている。2. Description of the Related Art As a conventional vibration wave driving device such as a vibration wave motor, a type that generates bending vibration in a ring and drives a moving body by frictional force has been put to practical use in a camera AF mechanism and the like. However, because of the ring shape, the cost of the unit including the pressurizing mechanism is surprisingly high, and it is disadvantageous in cost for a motor application that does not require a hollow. Therefore, a rod-shaped vibration wave motor shown in FIGS. 8 and 9 has been proposed as a solid type motor having a simple structure such as a pressurizing system.
第８図及び第９図において、１は先端部の小径軸部1a
と後端部の大径軸部1bとの間にホーン形状のホーン部1c
を形成した金属丸棒からなる中空の振動体で、軸孔にね
じ部1dが形成されている。２は振動体１の大径軸部1bと
同径の外径に形成された金属丸棒からなる押え体で、軸
心にボルト通し孔2aが形成されている。3,4は大径軸部1
bと同径の外径に形成された円環形状の圧電素子板で、
不図示の電極板を介装して振動体１と押え体２との間に
配置される。６は固定ボルトで、押え体２のボルト通し
孔2aを通して振動体１のねじ部1dに螺着し、圧電素子板
3,4を押え体２と振動体１との間に挟持固定する。圧電
素子板3,4は、例えば一面が共通電極，他面が直径方向
の中心軸線に対して対称の極性の異なる電極に形成さ
れ、一方の圧電素子板３と他方の圧電素子板４とを90゜
の角度ずらすようにして同じ向きに配置されている。一
方の圧電素子板３の２分割電極面を例えば振動体１の後
端面に接触させ、不図示の電極板を介して他方の圧電素
子板４が接し、該他方の圧電素子板４の共通電極を押え
体２の前端面に接触させている。前記電極板と振動体１
との間に交流電圧V1を、該電極板と押え体２との間に交
流電圧V2を印加することにより、圧電素子板３の厚み方
向における伸縮変位による振動と、圧電素子板４の厚み
方向における伸縮変位による振動、すなわち、90度の位
置的位相を有した屈曲モードの振動の合成により、振動
体１と押え体２からなる棒状の振動子Ａを振動させる。8 and 9, reference numeral 1 denotes a small-diameter shaft portion 1a at the tip end.
Horn-shaped horn 1c between the large-diameter shaft 1b at the rear end
This is a hollow vibrator made of a metal round bar formed with a threaded portion 1d formed in a shaft hole. Reference numeral 2 denotes a holding member made of a metal round bar having the same outer diameter as the large-diameter shaft portion 1b of the vibrating body 1, and has a bolt hole 2a formed in the shaft center. 3 and 4 are large diameter shaft 1
An annular piezoelectric element plate formed with the same outer diameter as b,
It is arranged between the vibrating body 1 and the pressing body 2 with an electrode plate (not shown) interposed. Reference numeral 6 denotes a fixing bolt, which is screwed to the threaded portion 1d of the vibrating body 1 through the bolt through hole 2a of the pressing body 2, and
3 and 4 are clamped and fixed between the holding body 2 and the vibrating body 1. The piezoelectric element plates 3 and 4 are formed, for example, on one surface with a common electrode and on the other surface with electrodes having different polarities symmetrical with respect to the center axis in the diametric direction, and the one piezoelectric element plate 3 and the other piezoelectric element plate 4 are connected to each other. They are arranged in the same direction with a 90 ° offset. For example, the two-divided electrode surface of one piezoelectric element plate 3 is brought into contact with, for example, the rear end surface of the vibrating body 1, and the other piezoelectric element plate 4 is in contact via an electrode plate (not shown). Is brought into contact with the front end face of the presser body 2. The electrode plate and the vibrating body 1
AC voltages V 1 between, by applying an alternating voltage V 2 between the electrode plate and the presser member 2, the vibration due to the expansion and contraction displacement in the thickness direction of the piezoelectric element plate 3, the piezoelectric element plate 4 The vibration caused by the expansion and contraction displacement in the thickness direction, that is, the vibration of the bending mode having a positional phase of 90 degrees is combined to vibrate the rod-shaped vibrator A including the vibrating body 1 and the pressing body 2.
交流電圧V1とV2は、振幅及び周波数が共に同じで、時
間的に位相が90゜のずれを有している。AC voltage V 1 and V 2 are both the same amplitude and frequency, is temporally phase has a 90 ° deviation.
したがって、振動子Ａは軸心を中心として縄飛びの縄
のような円運動を行うことになる。また、電圧V1とV2と
の位相を逆転すると、円運動の正逆回転が逆となる。な
お、この円運動が生じる原理については特開昭62−1419
80号等により公知であるので、説明は省略する。Therefore, the vibrator A performs a circular motion like a skipping rope around the axis. Further, when reversing the phase of the voltages V 1 and V 2, the forward and reverse rotation of the circular motion is reversed. The principle of this circular motion is described in Japanese Patent Application Laid-Open No. Sho 62-1419.
Since it is publicly known from No. 80 or the like, the description is omitted.
振動子Ａに励起する振動は、ホーン部1cに振動の山が
位置するように振動モードが設定されていて、振動体１
の先端部に嵌合するロータＲの嵌合先端部と、ホーン部
1cに形成される振動の腹の部分との摩擦接触により、ロ
ータＲを回転駆動する。５はロータＲを振動体１に加圧
接触させるためのスプリングで、固定ボルト６の先端部
と掛止めピン７の先端部との間に掛止められている。掛
止めピン７は、ロータＲの一端部に取り付けられたスラ
ストベアリング８のインナーレース部に装着され、ロー
タＲに対してスプリング５のバネ力を付与する。The vibration mode of the vibration excited in the vibrator A is set so that the peak of the vibration is located in the horn portion 1c.
And a horn part of the rotor R fitted to the tip part of the rotor R
The rotor R is driven to rotate by frictional contact with the vibration antinode formed in 1c. Reference numeral 5 denotes a spring for bringing the rotor R into pressure contact with the vibrating body 1 and is hung between the tip of the fixing bolt 6 and the tip of the latch pin 7. The latch pin 7 is mounted on an inner race portion of a thrust bearing 8 attached to one end of the rotor R, and applies a spring force of the spring 5 to the rotor R.
しかし、従来の棒状振動波モータは、圧電素子板3,4
をボルト６により振動体１と押え体２との間に挟持固定
した状態において、第10図に示すように、圧電素子の軸
方向歪み量に差が生じた。However, the conventional rod-shaped vibration wave motor has the piezoelectric element plates 3 and 4
In the state in which the piezoelectric element was sandwiched and fixed between the vibrating body 1 and the pressing body 2 by the bolt 6, as shown in FIG. 10, there was a difference in the amount of axial distortion of the piezoelectric element.
これは、圧電素子板を挟持する際、振動体１と押え体
２とが弾性変形し、ボルト６のネジ部に近い内周側、特
に振動体１の内周側に応力が集中することに起因する。This is because when the piezoelectric element plate is sandwiched, the vibrating body 1 and the pressing body 2 are elastically deformed, and stress is concentrated on the inner peripheral side near the screw portion of the bolt 6, particularly on the inner peripheral side of the vibrating body 1. to cause.
このため、ボルト６を締め付けて圧電素子板3,4を挟
持する際、圧電セラミックスからなる圧電素子板3,4が
割れ易く、また圧電素子板3,4と振動体１、押え体２と
が均一に接触しないことから振動特性にバラツキが生じ
易く、モータの効率低下を招くという問題があった。For this reason, when clamping the piezoelectric element plates 3 and 4 by tightening the bolts 6, the piezoelectric element plates 3 and 4 made of piezoelectric ceramics are easily broken, and the piezoelectric element plates 3 and 4 and the vibrating body 1 and the pressing body 2 are separated. Since there is no uniform contact, there is a problem that the vibration characteristics are apt to vary, leading to a reduction in motor efficiency.
すなわち、振動子Ａに対して屈曲モードの振動が形成
されると、振動子Ａは第８図において、Ｚ軸方向に対し
て湾曲した歪を受けることになる。この場合、圧電素子
板３、４に対する挟持圧力を大きくすれば伸縮に伴う圧
電素子板の歪量も大きくなり、前記歪量を大きくすれば
駆動力も大きくなる。したがって、軸中心から遠い外径
側の歪量が大きければ、駆動力も大きなものとなる。こ
の場合、圧電素子板３、４を内径側から外径側にわたっ
て一様圧力で挟持すれば、大きな歪を圧電素子板３、４
の外径側に与えることができるが、第10図に示すよう
に、従来では内径側の歪に対して外径側の歪が非常に小
さいので、振動子の歪に対して圧電素子板３、４の外径
側の歪が追従できず、圧電素子板３と４の間に隙間が発
生して圧電素子が離れる離反現象が生じ、この隙間によ
り圧電素子板３と圧電素子板４との機械的衝撃の繰り返
しで割れ易くなり、また、この隙間の発生で大きな振動
トルクを振動体に伝達できなくなる。That is, when the bending mode vibration is generated with respect to the vibrator A, the vibrator A is subjected to a distortion curved in the Z-axis direction in FIG. In this case, if the clamping pressure on the piezoelectric element plates 3 and 4 is increased, the amount of distortion of the piezoelectric element plate due to expansion and contraction increases, and if the amount of distortion increases, the driving force also increases. Therefore, the greater the amount of distortion on the outer diameter side far from the axis center, the greater the driving force. In this case, if the piezoelectric element plates 3 and 4 are sandwiched with uniform pressure from the inner diameter side to the outer diameter side, a large strain is generated.
As shown in FIG. 10, since the distortion on the outer diameter side is much smaller than the distortion on the inner diameter side in the related art, as shown in FIG. 4 cannot follow the distortion on the outer diameter side, a gap is generated between the piezoelectric element plates 3 and 4, and a separation phenomenon occurs in which the piezoelectric elements are separated, and the gap causes the piezoelectric element plate 3 and the piezoelectric element plate 4 to separate. It becomes easy to break due to repetition of mechanical impact, and the generation of this gap makes it impossible to transmit a large vibration torque to the vibrating body.
本発明の目的は、中空状の圧電素子板等の電気−機械
エネルギー変換素子の挟持圧力の不均一となる問題を改
善することで、電気−機械エネルギー変換素子の割れを
防止し、また駆動トルクを大きくすることができる振動
波駆動装置を提供することにある。An object of the present invention is to improve the problem of non-uniform clamping pressure of an electro-mechanical energy conversion element such as a hollow piezoelectric element plate, thereby preventing the electro-mechanical energy conversion element from cracking and also improving the driving torque. It is an object of the present invention to provide a vibration-wave driving device capable of increasing the driving force.
上記の目的を達成するために、本願第１の発明では、
中空状の振動体と、中空状の押え体と、前記振動体と前
記押え体の間に挟み込まれ、交番信号の供給によって前
記振動体に第１の方向の曲げ振動を生じさせる屈曲モー
ドの振動と、前記第１の方向とは異なる第２の方向の曲
げ振動を生じさせる屈曲モードの振動を時間的位相差を
有して励起させて、合成振動として前記振動体に軸心を
中心とした円又は楕円運動を生じさせるための中空状の
電気−機械エネルギー変換素子と、前記振動体と前記押
え体及び前記電気−機械エネルギー変換素子の各々の中
空部内に入り込み、前記電気−機械エネルギー変換素子
を間に挟んで前記振動体と前記押え体を結合する結合部
材を有する振動波駆動装置において、前記電気−機械エ
ネルギー変換素子の内径面と、前記振動体の前記電気−
機械エネルギー変換素子との当接位置の内径面及び前記
押え体の前記電気−機械エネルギー変換素子との当接位
置の内径面の領域が、前記結合部材とは非接合となるよ
うに隙間を設けている。In order to achieve the above object, in the first invention of the present application,
A hollow vibrating body, a hollow holding body, and a bending mode vibration that is sandwiched between the vibrating body and the holding body and causes the vibrating body to generate bending vibration in a first direction by supplying an alternating signal. And a bending mode vibration that causes a bending vibration in a second direction different from the first direction is excited with a temporal phase difference, and as a combined vibration, the vibration body is centered on the axis. A hollow electro-mechanical energy conversion element for generating a circular or elliptical motion; and a vibrating body, a pressing body, and a hollow portion of each of the electro-mechanical energy conversion elements, wherein the electro-mechanical energy conversion element is formed. A vibration member having a coupling member that couples the vibrating body and the pressing body with the interposition therebetween, wherein an inner diameter surface of the electro-mechanical energy conversion element and the electric-
A gap is provided so that the area of the inner diameter surface at the contact position with the mechanical energy conversion element and the area of the inner diameter surface at the contact position with the electro-mechanical energy conversion element of the pressing body are not joined to the coupling member. ing.
また、本願第２の発明では、振動体と、中空状の押え
体と、前記振動体と前記押え体の間に挟み込まれ、交番
信号の供給によって前記振動体に第１の方向の曲げ振動
を生じさせる屈曲モードの振動と、前記第１の方向とは
異なる第２の方向の曲げ振動を生じさせる屈曲モードの
振動を時間的位相差を有して励起させ、合成振動として
前記振動体に軸心を中心とした円又は楕円運動を生じさ
せるための中空状の電気−機械エネルギー変換素子と、
前記押え体及び前記電気−機械エネルギー変換素子の各
々の中空部内に入り込み、前記電気−機械エネルギー変
換素子を間に挟んで前記振動体と前記押え体を結合する
結合部を前記振動体と一体に形成した振動波駆動装置に
おいて、前記電気−機械エネルギー変換素子の内径面
と、前記振動体の前記電気−機械エネルギー変換素子と
の当接位置の内径面及び前記押え体の前記電気−機械エ
ネルギー変換素子との当接位置の内径面の領域が、前記
結合部とは非接合となるように隙間を設けている。Further, in the second invention of the present application, the vibrating body, the hollow pressing body, and the bending vibration in the first direction are sandwiched between the vibrating body and the pressing body, and the alternating vibration signal is supplied to the vibrating body in a first direction. The vibration in the bending mode to be generated and the vibration in the bending mode to generate the bending vibration in the second direction different from the first direction are excited with a temporal phase difference, and the vibration is applied to the vibrating body as an axis. A hollow electro-mechanical energy conversion element for producing a circular or elliptical motion about the heart,
A coupling portion that enters each hollow portion of the holding body and the electro-mechanical energy conversion element and couples the vibrating body and the holding body with the electro-mechanical energy conversion element interposed therebetween is integrated with the vibrating body. In the formed vibration wave driving device, the inner diameter surface of the electro-mechanical energy conversion element, the inner diameter surface of the vibrating body at a contact position with the electro-mechanical energy conversion element, and the electro-mechanical energy conversion of the pressing body are provided. A gap is provided so that the area of the inner diameter surface at the contact position with the element is not joined to the coupling portion.
さらに、本願第３の発明では、中空状の振動体と、押
え体と、前記振動体と前記押え体の間に挟み込まれ、交
番信号の供給によって前記振動体に第１の方向の曲げ振
動を生じさせる屈曲モードの振動と、前記第１の方向と
は異なる第２の方向の曲げ振動を生じさせる屈曲モード
の振動を時間的位相差を有して励起させ、合成振動とし
て前記振動体に軸心を中心とした円又は楕円運動を生じ
させるための中空状の電気−機械エネルギー変換素子
と、前記振動体及び前記電気−機械エネルギー変換素子
の各々の中空部内に入り込み、前記電気−機械エネルギ
ー変換素子を間に挟んで前記振動体と前記押え体を結合
する結合部を前記押え体と一体に形成した振動波駆動装
置において、前記電気−機械エネルギー変換素子の内径
面と、前記振動体の前記電気−機械エネルギー変換素子
との当接位置の内径面及び前記押え体の前記電気−機械
エネルギー変換素子との当接位置の内径面の領域が、前
記結合部とは非接合となるように隙間を設けている。Further, in the third invention of the present application, a bending vibration in a first direction is applied to the vibrating body by being sandwiched between the hollow vibrating body, the pressing body, and the vibrating body and the pressing body, and being supplied with an alternating signal. The vibration in the bending mode to be generated and the vibration in the bending mode to generate the bending vibration in the second direction different from the first direction are excited with a temporal phase difference, and the vibration is applied to the vibrating body as an axis. A hollow electro-mechanical energy conversion element for generating a circular or elliptical motion around a heart, and entering into the respective hollow portions of the vibrating body and the electro-mechanical energy conversion element to convert the electro-mechanical energy into In a vibration wave driving device in which a connecting portion for connecting the vibrating body and the pressing body with an element interposed therebetween is formed integrally with the pressing body, an inner diameter surface of the electro-mechanical energy conversion element and a front part of the vibrating body are provided. A gap is formed so that the area of the inner diameter surface at the contact position with the electro-mechanical energy conversion element and the area of the inner diameter surface at the contact position with the electro-mechanical energy conversion element of the pressing body are not joined to the coupling portion. Is provided.
上記各発明の振動波駆動装置では、振動体と押え体と
による、異なる方向の屈曲モードの振動を励起する電気
−機械エネルギー変換素子の外径側の挟持圧を、結合部
材又は結合部による結合力を大きくすることなく大きく
することができる。このため、電気−機械エネルギー変
換素子の割れの発生を防止しつつ、振動体と電気−機械
エネルギー変換素子との離反現象を防止でき、大きな駆
動トルク（駆動速度）を発生することができる。In the vibration wave driving device according to each of the above aspects, the clamping pressure on the outer diameter side of the electro-mechanical energy conversion element that excites vibration in bending directions in different directions by the vibrating body and the pressing body is coupled by the coupling member or the coupling portion. It can be increased without increasing the force. For this reason, it is possible to prevent separation of the vibrating body and the electro-mechanical energy conversion element while preventing cracking of the electro-mechanical energy conversion element, and to generate a large driving torque (driving speed).
しかも、電気−機械エネルギー変換素子の内径面と、
振動体の電気−機械エネルギー変換素子との当接位置の
内径面及び押え体の前記電気−機械エネルギー変換素子
との当接位置の内径面の領域が、結合部材又は結合部と
は非接合となるように隙間を設けているので、第１の方
向の屈曲モードの曲げ振動と第２の方向の屈曲モードの
曲げ振動の振動特性を低下させないようにすることがで
き、結果として振動体の運動をよりトルク（速度）の大
きな、軸心を中心とした円又は楕円運動とすることが可
能となる。Moreover, the inner diameter surface of the electro-mechanical energy conversion element,
The area of the inner diameter surface of the vibrating body at the contact position with the electro-mechanical energy conversion element and the area of the inner diameter surface of the pressing body at the contact position with the electro-mechanical energy conversion element are not bonded to the coupling member or the coupling portion. As a result, the vibration characteristics of the bending vibration in the bending mode in the first direction and the bending vibration in the bending mode in the second direction can be prevented from deteriorating. Can be converted into a circular or elliptical motion around the axis with a larger torque (speed).
実施例１ 第１図は本発明による振動波駆動装置を棒状振動波モ
ータに適用した実施例１を示す振動子の縦断面図であ
る。Embodiment 1 FIG. 1 is a longitudinal sectional view of a vibrator showing Embodiment 1 in which a vibration wave driving device according to the present invention is applied to a rod-shaped vibration wave motor.
10は振動体で、圧電素子板３と接する端面10aの内側
に凹部10bを形成し、この凹部10bよりも振動体10の先端
側にボルト６のねじ部が螺合する内ねじ部10cが形成さ
れている。第８図及び第９図に示す従来例では、圧電素
子板３が接する振動体１の端面と、ボルト６の螺合する
振動体１の内ねじ部のねじ端面とが同一平面上で一致す
るのに対し、本実施例では、内ねじ部10cの端面を凹部1
0bの深さ分の距離だけ圧電素子板３と当接する端面から
隔離させ、該凹部10bの内壁面とボルト６の外周面との
間に、ボルト６と非螺合の隙間10eを形成している。Reference numeral 10 denotes a vibrating body, which has a concave portion 10b formed inside an end face 10a in contact with the piezoelectric element plate 3, and an inner thread portion 10c to which the threaded portion of the bolt 6 is screwed is formed on the tip side of the vibrating body 10 beyond the concave portion 10b. Have been. In the conventional example shown in FIGS. 8 and 9, the end face of the vibrating body 1 with which the piezoelectric element plate 3 is in contact and the screw end face of the inner thread portion of the vibrating body 1 with which the bolt 6 is screwed coincide with each other on the same plane. On the other hand, in this embodiment, the end face of the inner screw portion 10c is
A gap 10e that is not screwed with the bolt 6 is formed between the inner wall surface of the concave portion 10b and the outer peripheral surface of the bolt 6 between the inner wall surface of the concave portion 10b and the outer peripheral surface of the bolt 6. I have.
圧電素子板3,4は従来例と同様に、押え体２との端面
と振動体10の端面との間に配設され、ボルト６により挟
持固定される。The piezoelectric element plates 3 and 4 are disposed between the end face of the pressing body 2 and the end face of the vibrating body 10 and held and fixed by bolts 6 as in the conventional example.
すなわち、ボルト６の締付けによって生じる振動体10
の最も応力集中の起りやすい箇所は、凹部10bの底部に
おける角部10fであるが、この角部10fは圧電素子板３と
当接する振動体10の端面10aと離れているため、圧電素
子板3,4に加わる挟持圧力を均一に近づける（内径側の
挟持圧力を上げずに、つまりはボルト６の締め付け力を
大きくせずに、外径側の挟持圧力を上げる）ことができ
る。That is, the vibrating body 10 generated by the tightening of the bolt 6
The point where the stress concentration is most likely to occur is the corner 10f at the bottom of the concave portion 10b. Since this corner 10f is separated from the end face 10a of the vibrating body 10 which is in contact with the piezoelectric element plate 3, the piezoelectric element plate 3 , 4 can be made uniform (the clamping pressure on the outer diameter side can be increased without increasing the clamping pressure on the inner diameter side, that is, without increasing the tightening force of the bolt 6).
これにより、第２図に示すように、圧電素子板3,4の
内外周圧縮変形量は均一化され、また接触圧力も均一化
されるため、圧電素子板3,4の割れは減少し、振動特性
のよい振動子が得られる。As a result, as shown in FIG. 2, the amount of compressive deformation of the inner and outer circumferences of the piezoelectric element plates 3 and 4 is made uniform and the contact pressure is also made uniform, so that cracks in the piezoelectric element plates 3 and 4 are reduced, A vibrator having good vibration characteristics can be obtained.
以上述べた如く本実施例は、圧電素子板の接合端面
と、ボルト６に対する振動体１の内ねじ端とを隙間10e
により軸方向において離隔させ、ボルト６による最も応
力集中の生じ易い個所と圧電素子板とを離すことで、ボ
ルト６の締め付け力を大きくせずに圧電素子板3,4の外
径側に加わる挟持圧力を上げることができる。As described above, in this embodiment, the gap 10e is formed between the joint end face of the piezoelectric element plate and the inner screw end of the vibrating body 1 with respect to the bolt 6.
By separating the piezoelectric element plate from the point where stress concentration is most likely to occur due to the bolt 6, the clamping force applied to the outer diameter side of the piezoelectric element plates 3 and 4 is increased without increasing the tightening force of the bolt 6. Pressure can be increased.
締付けるねじによって生じる最も応力集中の生じ易い
個所と、圧電素子板とを軸方向において離す構造として
は、第１図に示す実施例以外に、第３図、第４図、第５
図、第６図、第７図に示すものがある。In addition to the embodiment shown in FIG. 1, the structure in which the portion where stress concentration is most likely to occur due to the screw to be tightened is separated from the piezoelectric element plate in the axial direction is shown in FIGS.
There are those shown in FIG. 6, FIG. 6 and FIG.
第３図に示す実施例は、第９図に示す従来例における
ボルト６に代え、ボルト６′を用いて振動体１と押え体
２との間に圧電素子板3,4を挟持固定している。In the embodiment shown in FIG. 3, the piezoelectric element plates 3, 4 are sandwiched and fixed between the vibrating body 1 and the pressing body 2 using bolts 6 'instead of the bolts 6 in the conventional example shown in FIG. I have.
ボルト６′は先端部のみにねじ部６′ａを設け、ねじ
部６′ａと頭部６′ｂとの間における軸部６′ｃの周囲
に隙間を形成している。The bolt 6 'is provided with a screw portion 6'a only at the tip, and forms a gap around the shaft portion 6'c between the screw portion 6'a and the head 6'b.
ねじ部６′ａは、締付位置において振動体１の端面よ
りも内側となるように設定し、ねじの螺合端と振動体１
の端面との間を軸方向において離すようにしている。The screw portion 6'a is set inside the end face of the vibrating body 1 at the tightening position, and the screwed end of the screw and the vibrating body 1
Are separated from each other in the axial direction.
第４図に示す実施例は、第９図に示す従来例におい
て、振動体１と圧電素子板３との間にリング状のディス
タンスプレート40を介装し、振動体１の端面と圧電素子
板３との間を軸方向において離すようにしている。The embodiment shown in FIG. 4 is different from the conventional example shown in FIG. 9 in that a ring-shaped distance plate 40 is interposed between the vibrating body 1 and the piezoelectric element plate 3 so that the end face of the vibrating body 1 is connected to the piezoelectric element plate. 3 in the axial direction.
第５図に示す実施例は、振動体51に押え体52に螺合す
るねじ部53を一体に設けると共に、ねじ部53の付根部の
周囲に周溝54を形成して振動体51の端面とねじ部53の基
端との間を軸方向において離すようにしている。また、
押え体52の端面と、ねじ部53が螺合するねじ孔55の端面
とを離すため、押え体52に凹部56を形成している。In the embodiment shown in FIG. 5, the vibrating body 51 is integrally provided with a screw portion 53 screwed to the pressing body 52, and a peripheral groove 54 is formed around the root of the screw portion 53 to form an end face of the vibrating body 51. And the proximal end of the screw portion 53 in the axial direction. Also,
A recess 56 is formed in the holding body 52 to separate the end face of the holding body 52 from the end face of the screw hole 55 into which the screw portion 53 is screwed.
第６図に示す実施例は、第５図に示す実施例とは逆
に、押え体62に振動体61に螺合するねじ部63を一体に設
けている。In the embodiment shown in FIG. 6, contrary to the embodiment shown in FIG. 5, the pressing body 62 is integrally provided with a screw portion 63 screwed to the vibrating body 61.
本実施例の場合も、第５図に示す実施例と同様に、ね
じ部63の基端を押え体62の端面から軸方向内側へ位置さ
せるために周溝64を設けている。また振動体61に凹部65
を設け、振動体61の端面とねじ部63が螺合するねじ孔66
のねじ端との間を軸方向において離すようにしている。Also in the case of this embodiment, as in the embodiment shown in FIG. 5, a circumferential groove 64 is provided to position the base end of the screw portion 63 axially inward from the end face of the pressing body 62. In addition, the vibrating body 61 has a recess 65
And a screw hole 66 into which the end face of the vibrating body 61 and the screw portion 63 are screwed.
Are separated from each other in the axial direction.
第７図に示す実施例は、第１図に示す実施例における
隙間10eに剛性の低い部材70、例えばフェルト、ゴム、
樹脂、フレキシブル基板などを設けたもので、電気・機
械エネルギ変換素子の位置決め、フレキによる配線、な
どを行う。In the embodiment shown in FIG. 7, the gap 10e in the embodiment shown in FIG.
It is provided with a resin, a flexible board, etc., and performs positioning of the electric / mechanical energy conversion element, wiring by flexible, and the like.
部材70は剛性が低いため、ボルト６を締付けた際に歪
が生じても応力はあまり大きくならず、実施例１と同様
な効果が得られる。Since the member 70 has low rigidity, the stress does not increase so much even if distortion occurs when the bolt 6 is tightened, and the same effect as that of the first embodiment can be obtained.
第11図は、本発明によるモータを使用して、光学レン
ズの鏡筒を駆動する場合の構成例である。FIG. 11 shows an example of a configuration in which a lens barrel of an optical lens is driven using a motor according to the present invention.
12は移動体としてのロータＲと同軸的に接合された歯
車で、回転出力を歯車13に伝達し、歯車13と噛み合う歯
車を持った鏡筒14を回転させる。移動体としてのロータ
Ｒおよび鏡筒14の回転位置、回転速度を検出するため
に、光学式エンコーダスリット板15が歯車13と同軸に配
置され、フォトカップラ16で位置、速度を検出する。Reference numeral 12 denotes a gear coaxially joined to a rotor R as a moving body, which transmits a rotation output to a gear 13 and rotates a lens barrel 14 having a gear meshing with the gear 13. In order to detect the rotational position and rotational speed of the rotor R and the lens barrel 14 as the moving body, an optical encoder slit plate 15 is arranged coaxially with the gear 13, and the position and speed are detected by the photocoupler 16.
本発明では、中空状の振動体と中空状の押え体との間
に中空状の電気−機械エネルギー変換素子を挟み、これ
ら振動体、押え体及び電気−機械エネルギー変換素子の
中空部内に入り込ませた結合部材によって振動体および
押え体を結合させた振動波駆動装置、又は振動体および
押え体のいずれか一方を中空状とするとともに他方に結
合部を一体形成し、これら振動体および押え体の間に中
空状の電気−機械エネルギー変換素子を挟み、振動体又
は押え体及び電気−機械エネルギー変換素子の中空部内
に入り込ませた結合部によって振動体および押え体を結
合させた振動波駆動装置であって、電気−機械エネルギ
ー変換素子により振動体に第１および第２の方向の曲げ
振動を生じさせる屈曲モードの振動を励起してこの振動
体を軸心を中心とした円又は楕円運動させるものにおい
て、電気−機械エネルギー変換素子の内径面と、振動体
の電気−機械エネルギー変換素子との当接位置の内径面
及び押え体の電気−機械エネルギー変換素子との当接位
置の内径面の領域が結合部材又は結合部とは非接合とな
るように隙間を設けている。このため、結合部材又は結
合部による結合力を大きくすることなく、電気−機械エ
ネルギー変換素子の外周側の挟持圧力を大きくすること
ができる。In the present invention, a hollow electromechanical energy conversion element is sandwiched between a hollow vibrating body and a hollow pressing body, and the hollow electromechanical energy converting element is inserted into the hollow portions of the vibrating body, the pressing body, and the electromechanical energy converting element. A vibration wave driving device in which the vibrating body and the pressing body are connected by the connecting member, or one of the vibrating body and the pressing body is made hollow and a connecting portion is integrally formed with the other, and the vibrating body and the pressing body are combined. A vibration wave driving device in which a hollow electro-mechanical energy conversion element is interposed therebetween and a vibrating body or a pressing body and a vibrating body and a pressing body are connected to each other by a connecting portion inserted into a hollow portion of the electro-mechanical energy converting element. The vibrating body is excited by the electromechanical energy conversion element to generate bending mode vibrations that cause the vibrating body to bend in the first and second directions. In a circular or elliptical motion, the inner diameter surface of the electro-mechanical energy conversion element contacts the inner diameter surface of the vibrating body at the contact position with the electro-mechanical energy conversion element, and the pressing member contacts the electro-mechanical energy conversion element. A gap is provided so that the region of the inner diameter surface at the position is not joined to the coupling member or the coupling portion. For this reason, the clamping pressure on the outer peripheral side of the electro-mechanical energy conversion element can be increased without increasing the coupling force by the coupling member or the coupling portion.
ここで、振動体を屈曲振動させる場合、電気−機械エ
ネルギー変換素子の内径側の伸縮変位による曲げ発生力
を用いる場合に比べて、外径側の伸縮変位による曲げ発
生力を用いる方が、振動体の屈曲振動が大きくなり、駆
動トルク（駆動速度）の増加に効果的である。Here, when the vibrating body is bent and vibrated, it is more vibrant to use the bending generation force due to the expansion and contraction displacement on the outer diameter side than to use the bending generation force due to the expansion and contraction displacement on the inner diameter side of the electro-mechanical energy conversion element. The bending vibration of the body increases, which is effective for increasing the driving torque (driving speed).
そして、本発明によれば、上述のように結合部材又は
結合部による結合力を大きくすることなく、電気−機械
エネルギー変換素子の外周側の挟持圧力を大きくするこ
とができるため、電気−機械エネルギー変換素子の割れ
を防止しつつ、外径側の伸縮変位による曲げ発生力を効
率良く用いることができるようになる。しかも、曲げ振
動に特有な外径側における振動時での電気−機械エネル
ギー変換素子と振動体もしくは押え体との離反現象も抑
えることができる。したがって、本発明は、駆動トルク
（駆動速度）の増加にきわめて有効である。According to the present invention, the clamping pressure on the outer peripheral side of the electro-mechanical energy conversion element can be increased without increasing the coupling force by the coupling member or the coupling portion as described above. The bending force generated by the expansion and contraction displacement on the outer diameter side can be used efficiently while preventing the conversion element from cracking. In addition, it is possible to suppress the separation phenomenon between the electromechanical energy conversion element and the vibrating body or the pressing body at the time of vibration on the outer diameter side peculiar to bending vibration. Therefore, the present invention is extremely effective for increasing the driving torque (driving speed).
また、結合部材又は結合部が上記内径面のいずれかと
接合されて結合していると、周方向の接合状態のばらつ
きにより屈曲振動時の動剛性に方向による変化が生じて
しまい、振動体の第１の方向の屈曲モードの固有振動数
と第２の方向の屈曲モードの固有振動数とがずれて両屈
曲モードでの共振周波数もずれ、両屈曲モードでの曲げ
振幅に差が生じたり、第１の方向の屈曲モードの振動と
第２の方向の屈曲モードの振動の各々の方向が電気−機
械エネルギー変換素子の屈曲方向から周方向にずれたり
することになる。さらに、電気−機械エネルギー変換素
子の外径側の挟持圧力が小さいことと上記周方向の接合
状態のばらつきとの関係により、第１の方向の屈曲モー
ドでの振動時と第２の方向の屈曲モードでの振動時の一
方でのみ上記離反現象が生じ、これにより両屈曲モード
での共振周波数のずれが発生するとともにこれに伴い曲
げ振幅の差が大きくなり、円又は楕円運動が得られなく
なるおそれがある。Further, when the coupling member or the coupling portion is joined to any one of the inner diameter surfaces and joined, a variation in a joining state in a circumferential direction causes a change in dynamic rigidity at the time of flexural vibration due to a direction, and the second The natural frequency of the bending mode in the first direction deviates from the natural frequency of the bending mode in the second direction, the resonance frequency in both bending modes also deviates, and a difference occurs in the bending amplitude in both bending modes. Each direction of the bending mode vibration in the first direction and the bending mode vibration in the second direction deviates in the circumferential direction from the bending direction of the electro-mechanical energy conversion element. Further, due to the relationship between the small clamping pressure on the outer diameter side of the electro-mechanical energy conversion element and the variation in the bonding state in the circumferential direction, the vibration in the bending mode in the first direction and the bending in the second direction The above separation phenomenon occurs only on one side during the vibration in the mode, which causes a shift in the resonance frequency in both bending modes, and the difference in bending amplitude increases accordingly, so that circular or elliptical motion may not be obtained. There is.
これに対し、本発明によれば、上記隙間を設けること
で、周方向の接合状態のばらつきの問題自体がなくな
り、第１の方向の屈曲モードの固有振動数と第２の方向
の屈曲モードの固有振動数とを合わせたり、第１の方向
の屈曲モードの振動と第２の方向の屈曲モードの振動の
各々の方向を電気−機械エネルギー変換素子の屈曲方向
に略合致させることができる。すなわち、第１の方向の
屈曲モードの振動と第２の方向の屈曲モードの振動の振
動特性を低下させないようにすることができる。また、
上記一方の屈曲モードの振動時のでの離反現象も防止で
きる。このため、結果として、振動体によりトルク（速
度）の大きな、軸心を中心とした円又は楕円運動を行わ
せることができる。On the other hand, according to the present invention, by providing the gap, the problem of variation in the joining state in the circumferential direction itself is eliminated, and the natural frequency of the bending mode in the first direction and the bending mode in the second direction are reduced. The natural frequency can be matched, and the respective directions of the bending mode vibration in the first direction and the bending mode vibration in the second direction can be substantially matched with the bending direction of the electro-mechanical energy conversion element. That is, it is possible to prevent the vibration characteristics of the bending mode vibration in the first direction and the bending mode vibration in the second direction from deteriorating. Also,
The separation phenomenon during the vibration in the one bending mode can also be prevented. For this reason, as a result, it is possible to cause the vibrator to perform a circular or elliptical motion with a large torque (speed) around the axis.
なお、振動体および押え体に結合部を一体形成するこ
とにより、コスト面、組立性の向上を図ることができ
る。In addition, by integrally forming the coupling portion with the vibrating body and the holding body, it is possible to improve cost and assemblability.
第１図、第３図、第４図、第５図、第６図、第７図は、
本発明による棒状振動波モータの実施例を夫々示す振動
子の断面図、第２図は第１図に示す実施例における圧電
素子板の軸方向の歪量を示す図である。第８図は従来の
棒状振動波モータの斜視図、第９図はその断面図、第10
図はその圧電素子板の軸方向歪量を示す図、第11図は光
学レンズの鏡筒駆動機構を示す断面図である。 1,10,51,61……振動体 2,52,62……押え体 3,4……圧電素子板、6,6′……ボルト 70……剛性の低い部材FIG. 1, FIG. 3, FIG. 4, FIG. 5, FIG. 6, FIG.
FIG. 2 is a cross-sectional view of a vibrator showing an embodiment of a rod-shaped vibration wave motor according to the present invention, and FIG. 2 is a diagram showing the amount of axial distortion of a piezoelectric element plate in the embodiment shown in FIG. FIG. 8 is a perspective view of a conventional rod-shaped vibration wave motor, FIG.
The figure shows the amount of axial distortion of the piezoelectric element plate, and FIG. 11 is a cross-sectional view showing the lens barrel driving mechanism of the optical lens. 1,10,51,61… Vibrating body 2,52,62… Holding body 3,4… Piezoelectric element plate, 6,6 ′… Bolt 70… Low rigidity
フロントページの続き (56)参考文献 特開 昭64−74072（ＪＰ，Ａ) 特開 昭61−121777（ＪＰ，Ａ) 特開 昭62−247871（ＪＰ，Ａ) 特開 昭63−214381（ＪＰ，Ａ) 実開 昭56−85497（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H02N 2/16 Continuation of the front page (56) References JP-A-64-74072 (JP, A) JP-A-61-121777 (JP, A) JP-A-62-247871 (JP, A) JP-A-63-214381 (JP) , A) Shokai Sho 56-85497 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) H02N 2/16
Claims (5)
記振動体と前記押え体の間に挟み込まれ、交番信号の供
給によって前記振動体に第１の方向の曲げ振動を生じさ
せる屈曲モードの振動と、前記第１の方向とは異なる第
２の方向の曲げ振動を生じさせる屈曲モードの振動を時
間的位相差を有して励起させて、合成振動として前記振
動体に軸心を中心とした円又は楕円運動を生じさせるた
めの中空状の電気−機械エネルギー変換素子と、前記振
動体と前記押え体及び前記電気−機械エネルギー変換素
子の各々の中空部内に入り込み、前記電気−機械エネル
ギー変換素子を間に挟んで前記振動体と前記押え体を結
合する結合部材を有する振動波駆動装置において、 前記電気−機械エネルギー変換素子の内径面と、前記振
動体の前記電気−機械エネルギー変換素子との当接位置
の内径面及び前記押え体の前記電気−機械エネルギー変
換素子との当接位置の内径面の領域が、前記結合部材と
は非接合となるように隙間を設けたことを特徴とする振
動波駆動装置。A hollow vibrating body, a hollow pressing body, and a bending vibration in a first direction generated in the vibrating body by being interposed between the vibrating body and the pressing body and being supplied with an alternating signal. The vibration of the bending mode to be caused and the vibration of the bending mode to generate the bending vibration in the second direction different from the first direction are excited with a temporal phase difference, and the vibration is applied to the vibrating body as an axis. A hollow electro-mechanical energy conversion element for generating a circular or elliptical motion centered on a heart; and a vibrating body, a pressing body, and a hollow part of each of the electro-mechanical energy conversion elements, and -A vibration wave driving device having a coupling member that couples the vibrating body and the pressing body with a mechanical energy conversion element interposed therebetween, wherein: an inner diameter surface of the electro-mechanical energy conversion element; A gap was provided so that the inner diameter surface at the contact position with the energy conversion element and the area of the inner diameter surface at the contact position with the electro-mechanical energy conversion element of the pressing body were not joined to the coupling member. A vibration wave driving device characterized by the above-mentioned.
の軸心部に挿入され、前記振動体もしくは前記押え体の
一方とのみ結合したことを特徴とする請求項１記載の振
動波駆動装置。2. The vibration wave according to claim 1, wherein said coupling member is inserted into an axis of said vibrating body and said pressing body, and is coupled to only one of said vibrating body and said pressing body. Drive.
と前記押え体の間に挟み込まれ、交番信号の供給によっ
て前記振動体に第１の方向の曲げ振動を生じさせる屈曲
モードの振動と、前記第１の方向とは異なる第２の方向
の曲げ振動を生じさせる屈曲モードの振動を時間的位相
差を有して励起させて、合成振動として前記振動体に軸
心を中心とした円又は楕円運動を生じさせるための中空
状の電気−機械エネルギー変換素子と、前記押え体及び
前記電気−機械エネルギー変換素子の各々の中空部内に
入り込み、前記電気−機械エネルギー変換素子を間に挟
んで前記振動体と前記押え体を結合する結合部を前記振
動体と一体に形成した振動波駆動装置において、 前記電気−機械エネルギー変換素子の内径面と、前記振
動体の前記電気−機械エネルギー変換素子との当接位置
の内径面及び前記押え体の前記電気−機械エネルギー変
換素子との当接位置の内径面の領域が、前記結合部とは
非接合となるように隙間を設けたことを特徴とする振動
波駆動装置。3. A bending mode which is sandwiched between a vibrating body, a hollow holding body, and the vibrating body and the holding body, and causes the vibrating body to generate bending vibration in a first direction by supplying an alternating signal. And a bending mode vibration that causes a bending vibration in a second direction different from the first direction to be excited with a temporal phase difference, and the vibration is applied to the vibrating body about an axis center as a synthetic vibration. And a hollow-shaped electro-mechanical energy conversion element for generating a circular or elliptical motion as described above, and penetrates into the respective hollow portions of the pressing body and the electro-mechanical energy conversion element, and interposes the electro-mechanical energy conversion element. A vibration wave driving device in which a connecting portion for connecting the vibrating body and the pressing body is formed integrally with the vibrating body, wherein an inner diameter surface of the electro-mechanical energy conversion element and the electro-mechanical device of the vibrating body D A gap was provided so that the area of the inner diameter surface at the contact position with the energy conversion element and the area of the inner diameter surface at the contact position with the electromechanical energy conversion element of the pressing body were not joined to the coupling portion. A vibration wave driving device characterized by the above-mentioned.
と前記押え体の間に挟み込まれ、交番信号の供給によっ
て前記振動体に第１の方向の曲げ振動を生じさせる屈曲
モードの振動と、前記第１の方向とは異なる第２の方向
の曲げ振動を生じさせる屈曲モードの振動を時間的位相
差を有して励起させて、合成振動として前記振動体に軸
心を中心とした円又は楕円運動を生じさせるための中空
状の電気−機械エネルギー変換素子と、前記振動体及び
前記電気−機械エネルギー変換素子の各々の中空部内に
入り込み、前記電気−機械エネルギー変換素子を間に挟
んで前記振動体と前記押え体を結合する結合部を前記押
え体と一体に形成した振動波駆動装置において、 前記電気−機械エネルギー変換素子の内径面と、前記振
動体の前記電気−機械エネルギー変換素子との当接位置
の内径面及び前記押え体の前記電気−機械エネルギー変
換素子との当接位置の内径面の領域が、前記結合部とは
非接合となるように隙間を設けたことを特徴とする振動
波駆動装置。4. A bending mode which is sandwiched between a hollow vibrating body, a holding body, and said vibrating body and said holding body, and causes said vibrating body to generate bending vibration in a first direction by supplying an alternating signal. And a bending mode vibration that causes a bending vibration in a second direction different from the first direction to be excited with a temporal phase difference, and the vibration is applied to the vibrating body about an axis center as a synthetic vibration. And a hollow electro-mechanical energy conversion element for generating a circular or elliptical motion, and penetrate into each hollow portion of the vibrating body and the electro-mechanical energy conversion element to interpose the electro-mechanical energy conversion element. A vibration wave driving device in which a connecting portion for connecting the vibrating body and the holding body is formed integrally with the holding body, the inner surface of the electro-mechanical energy conversion element, and the electro-mechanical device of the vibrating body. D A gap was provided so that the area of the inner diameter surface at the contact position with the energy conversion element and the area of the inner diameter surface at the contact position with the electromechanical energy conversion element of the pressing body were not joined to the coupling portion. A vibration wave driving device characterized by the above-mentioned.
振動体の運動による前記振動体と前記接触体の相対移動
を用いて駆動される被駆動機構を設けたことを特徴とす
る請求項１ないし４のいずれかに記載の振動波駆動装
置。5. A device according to claim 1, further comprising: a contact body that is in contact with said vibrating body, and a driven mechanism that is driven by using a relative movement between said vibrating body and said contact body due to the movement of said vibrating body. Item 5. The vibration wave driving device according to any one of Items 1 to 4.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02134317A JP3137194B2 (en) | 1990-05-24 | 1990-05-24 | Vibration wave drive |
| DE69125525T DE69125525T2 (en) | 1990-05-24 | 1991-05-23 | Vibration wave motor |
| EP91304684A EP0458638B1 (en) | 1990-05-24 | 1991-05-23 | Vibration wave driven motor |
| US08/296,976 US5508580A (en) | 1990-05-24 | 1994-08-26 | Vibration wave driven motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02134317A JP3137194B2 (en) | 1990-05-24 | 1990-05-24 | Vibration wave drive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0429575A JPH0429575A (en) | 1992-01-31 |
| JP3137194B2 true JP3137194B2 (en) | 2001-02-19 |
Family
ID=15125479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02134317A Expired - Lifetime JP3137194B2 (en) | 1990-05-24 | 1990-05-24 | Vibration wave drive |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3137194B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6041066B1 (en) * | 2016-07-07 | 2016-12-07 | 馬見靴下事業協同組合 | Socks for improving hallux valgus |
-
1990
- 1990-05-24 JP JP02134317A patent/JP3137194B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6041066B1 (en) * | 2016-07-07 | 2016-12-07 | 馬見靴下事業協同組合 | Socks for improving hallux valgus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429575A (en) | 1992-01-31 |
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