JPH0491670A - Supersonic motor - Google Patents

Supersonic motor

Info

Publication number
JPH0491670A
JPH0491670A JP2206235A JP20623590A JPH0491670A JP H0491670 A JPH0491670 A JP H0491670A JP 2206235 A JP2206235 A JP 2206235A JP 20623590 A JP20623590 A JP 20623590A JP H0491670 A JPH0491670 A JP H0491670A
Authority
JP
Japan
Prior art keywords
vibrator
elastic body
screw
piezoelectric element
peculiar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2206235A
Other languages
Japanese (ja)
Other versions
JP3124284B2 (en
Inventor
Takashi Maeno
隆司 前野
Takayuki Tsukimoto
貴之 月本
Hitoshi Mukojima
仁 向島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP02206235A priority Critical patent/JP3124284B2/en
Publication of JPH0491670A publication Critical patent/JPH0491670A/en
Application granted granted Critical
Publication of JP3124284B2 publication Critical patent/JP3124284B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To decrease the difference between the two flexural peculiar frequencies formed in a vibrator by providing a nonaxisymmetry means capable of mass adjustment at one part of a vibrator. CONSTITUTION:A screw hole is provided in the rear vibrating elastic body 2 of a pencil type vibrator A, and a screw 13 is provided to be screwed in it in, for example, diametrical direction. For the mounting position of the screw 13, it is provided, for example, in parallel with the center, which divides the element part of the piezoelectric element plate 3 in two, and has the slippage of 90 deg. with the center, which divides the element part of the one sheet out of the piezoelectric element plate 4. That is, by the screw 13 being added to the vibrator A, the axisymmetry of the vibrator collapses, and the two peculiar vibration frequencies 90 deg. different in phase are relieved of degeneracy, and are separated. Hereby, the peculiar frequency can be adjusted by mass adjustment, and the difference between the peculiar frequencies can be made very small.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、圧電素子等の電気−機械エネルギー変換素子
に電気エネルギーを供給することにより、電気−機械エ
ネルギー変換素子をその厚み方向両側から挟持固定する
、例えばペンシル型の振動体を屈曲振動させ、その質点
に円又は楕円運動させることで、振動体に押圧した移動
体を摩擦駆動する超音波モータに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a technique for clamping an electro-mechanical energy conversion element from both sides in the thickness direction by supplying electrical energy to the electro-mechanical energy conversion element such as a piezoelectric element. The present invention relates to an ultrasonic motor that bends and vibrates a fixed vibrating body, for example, a pencil type, and causes its mass point to move in a circular or elliptical manner, thereby frictionally driving a movable body pressed against the vibrating body.

[従来の技術] 従来の超音波モータとしては、円環形状の金属性振動弾
性体に進行性の曲げ振動を起こし、摩擦力により移動体
を駆動させるタイプの物がカメラのオートフォーカス(
AF)機構等に採用されている。
[Prior Art] Conventional ultrasonic motors are of the type that generate progressive bending vibrations in a circular ring-shaped metallic vibrating elastic body and drive a moving body using frictional force, which is used for camera autofocus (
AF) mechanism, etc.

しかし、このタイプの超音波モータは、振動弾性体をリ
ング形状としているため、摩擦力を得るための加圧機構
を含めたユニットとしてはコスト高の傾向にあり、中空
性(リング状)を要求されることのない用途としてはコ
スト上不利な点があった。
However, since this type of ultrasonic motor has a ring-shaped vibrating elastic body, it tends to be expensive as a unit that includes a pressurizing mechanism to obtain frictional force, and requires hollowness (ring shape). There was a disadvantage in terms of cost for applications that would never be used.

そこで、ペンシル型等の棒状で、加圧系の構成が簡単な
タイプの超音波モータとして、第7図及びi8図に示す
ようなモータが提案されている。
Therefore, a motor as shown in FIGS. 7 and 18 has been proposed as a rod-shaped ultrasonic motor such as a pencil type with a simple configuration of a pressurizing system.

Aはペンシル型の振動子で、ペンシル形状の前振動弾性
体1と、円柱状の後振動弾性体2との間にドーナツ状の
圧電素子板3.4を設けると共に、これら圧電素子板3
.4に交流電圧を印加するための電極板(不図示)を例
えば圧電素子板3,4の間に介挿し、ボルト6により前
振動弾性体1と後振動弾性体2との間に圧電素子板3.
4及び電極板を挟持固定する。
A is a pencil-shaped vibrator, in which a donut-shaped piezoelectric element plate 3.4 is provided between a pencil-shaped front vibrating elastic body 1 and a cylindrical rear vibrating elastic body 2, and these piezoelectric element plates 3.
.. For example, an electrode plate (not shown) for applying an alternating voltage to the piezoelectric element plate 4 is inserted between the piezoelectric element plates 3 and 4, and the piezoelectric element plate is inserted between the front vibrating elastic body 1 and the rear vibrating elastic body 2 using bolts 6. 3.
4 and the electrode plate are clamped and fixed.

圧電素子板3.4は、軸を通る断面に対称に極性を違え
て分極処理されており、圧電素子3と4はθ方向に角度
を90°ずらして配置されている。
The piezoelectric element plate 3.4 is polarized symmetrically with different polarities in a cross section passing through the axis, and the piezoelectric elements 3 and 4 are arranged at an angle shifted by 90° in the θ direction.

そして、各々の圧電素子に振動子の曲げ固有振動数に近
い周波数の交流電圧V、、V2を印加すると、圧電素子
は厚み方向に伸縮し、振動子は曲げ振動を行なう。この
とき、交流電圧v1と交流電圧■2は、例えば振幅及び
周波数か共に同じて、時間的位相が90度のづれを有し
ていると、振動子Aはその軸心を中心として縄飛びの縄
のような円運動(以下純米び振動と称す)を行なうこと
になる。また、交流電圧■。
Then, when an AC voltage V, V2 having a frequency close to the bending natural frequency of the vibrator is applied to each piezoelectric element, the piezoelectric element expands and contracts in the thickness direction, and the vibrator performs bending vibration. At this time, if the AC voltage v1 and the AC voltage ■2 have the same amplitude and frequency, but have a temporal phase difference of 90 degrees, the vibrator A will jump the rope around its axis. A circular motion like this (hereinafter referred to as pure vibration) will be performed. Also, AC voltage ■.

■2の位相を逆転することにより円運動の正逆回転が可
能となる。
(2) By reversing the phase of step 2, forward and reverse rotation of the circular motion becomes possible.

一方、Rは振動子Aの軸心lと同軸に嵌合するロータで
、その嵌合一端部が振動子の摺動部Bにバネ5のバネ力
により押圧され、振動子Aに励起される振動により摩擦
駆動されて回転する。バネ5はホルト6の先端部と、フ
ランジ付ぎのスラストベアリング7に嵌合するバネボス
ト8との間に弾装されている。
On the other hand, R is a rotor that fits coaxially with the axis l of the vibrator A, and one end of the rotor is pressed against the sliding part B of the vibrator by the spring force of the spring 5, and is excited by the vibrator A. Rotates due to friction drive caused by vibration. The spring 5 is elastically mounted between the tip of the bolt 6 and a spring post 8 that fits into a flanged thrust bearing 7.

[発明が解決しようとする課題] ところで、このような超音波モータにおいて、圧電素子
板3と圧電素子板4による屈曲固有振動数が等しいこと
か要求されるか、振動体1.2、圧電素子板3,4、ボ
ルト6の加工誤差や、電極板の加工組立誤差、また電極
板に突出形成された結線用の端子部、該端子部に固着さ
れる配線のためのハンダ等に起因して上述した2つの屈
曲固有振動数に差が生じる場合があり、特に圧電素子板
3.4の偏心、電極板の端子部の影響が大きかった。
[Problems to be Solved by the Invention] By the way, in such an ultrasonic motor, is it required that the bending natural frequencies of the piezoelectric element plate 3 and the piezoelectric element plate 4 be equal? Due to processing errors of the plates 3, 4 and bolts 6, processing and assembly errors of the electrode plate, terminal parts for connection formed protruding from the electrode plate, solder for wiring fixed to the terminal parts, etc. There may be a difference between the two bending natural frequencies described above, and the influence of the eccentricity of the piezoelectric element plate 3.4 and the terminal portion of the electrode plate is particularly large.

駆動モードの固有振動数が離れると、固有振動数近傍の
周波数で複数の屈曲モードを生じさせ、円又は楕円運動
を得る際に、必要な振幅と位相の振動を励起するのが困
難となる。
When the natural frequencies of the drive modes are far apart, multiple bending modes are generated at frequencies near the natural frequencies, making it difficult to excite vibrations with the necessary amplitude and phase when obtaining circular or elliptical motion.

このため、必要な回転数やトルクが得られない、又は変
動する、損失が大きい、効率が悪い等の問題が生じてい
た。
This has caused problems such as the required rotational speed and torque not being obtained or fluctuating, large losses, and poor efficiency.

本発明は、このような従来の問題を解決し、振動子に形
成される2つの屈曲固有振動数差を小さくすることがで
きる超音波モータを提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic motor that can solve these conventional problems and reduce the difference between two natural bending frequencies formed in a vibrator.

[5!!lを解決するための手段] 本発明の目的を実現するための構成は、棒状弾性体に配
置された電気−機械エネルギー変換素子(以下PZTで
代表する)に交流電界を印加することによフて棒状弾性
体に同形の屈曲モートの振動を異なる複数の平面内に励
起させかつ時間的に適当な位相差を持たせることにより
、振動体の表面粒子に円又は楕円運動を行わしめる振動
子と、振動体に押圧されて摩擦駆動される移動体とを有
する超音波モータにおいて、該振動子の一部に、質量調
整可能な非軸対称手段を設けたことを特徴とする。
[5! ! Means for Solving Problems l] A configuration for realizing the object of the present invention is to apply an alternating electric field to an electro-mechanical energy conversion element (hereinafter represented by PZT) arranged in a rod-shaped elastic body. By exciting the vibrations of the same-shaped bending moats in a plurality of different planes in a rod-shaped elastic body and giving them an appropriate phase difference in time, a vibrator that causes particles on the surface of the vibrator to perform circular or elliptical motion. , an ultrasonic motor having a movable body that is pressed by a vibrating body and driven by friction, characterized in that a part of the vibrator is provided with non-axisymmetric means capable of adjusting mass.

[作   用コ 上記した構成の超音波モータは、質量調整を行なうこと
により、固有振動数の調整が行なえ、固有振動数差を微
小にすることが可能となる。
[Function] By adjusting the mass of the ultrasonic motor configured as described above, the natural frequency can be adjusted, and the difference in natural frequency can be made minute.

[実 施 例] 実施例1 第1図は本発明による超音波モータの実施例1を示す斜
視図である。
[Example] Example 1 FIG. 1 is a perspective view showing Example 1 of the ultrasonic motor according to the present invention.

本実施例は、従来例と同様のペンシル型振動子Aの後振
動弾性体2にねし孔を設け、これにねじ13を例えば径
方向に沿って螺進可能に設けている。
In this embodiment, a screw hole is provided in the rear vibrating elastic body 2 of the pencil-type vibrator A similar to the conventional example, and a screw 13 is provided in the hole so as to be threadable, for example, along the radial direction.

本実施例において、ねし13の取付位置は、例えば圧電
素子板3の素子部を2分する中央部と平行に設けられ、
圧電素子板4のうちの1枚の素子部を2分する中央部と
は90”のずれを有している。
In this embodiment, the mounting position of the screw 13 is, for example, provided in parallel to the central part that divides the element part of the piezoelectric element plate 3 into two,
The piezoelectric element plate 4 has a deviation of 90'' from the center portion that divides the element portion of one of the piezoelectric element plates 4 into two.

すなわち、ねじ13が振動子Aに付加されることにより
、振動子の軸対称性はくずれ、2つの90°の位相の異
なる固有振動数は縮退をとかれて分離する。
That is, by adding the screw 13 to the vibrator A, the axial symmetry of the vibrator is broken, and two natural frequencies with different phases of 90° are degenerated and separated.

したがって、このねじを出し入れしたり、止めねじの長
さを変えたりすると、固有振動数差(△f)が変化し、
固有振動数差(△f)を調整することができ、電極10
の端子部11の加工誤差、リード線12の半田付は等に
よる固有振動の影響を調整することがて籾る。
Therefore, if you insert or remove this screw or change the length of the set screw, the natural frequency difference (△f) will change,
The natural frequency difference (△f) can be adjusted, and the electrode 10
This can be done by adjusting the effects of natural vibrations caused by machining errors in the terminal portion 11, soldering of the lead wires 12, etc.

なお、本実施例において、ねじ13は中心方向に螺進可
能としているか、その必要はなく、またネジも複数箇所
設けてもよい。
In this embodiment, the screw 13 is designed to be able to be threaded toward the center, but it is not necessary, and the screw 13 may be provided at a plurality of locations.

実施例2 第2図は実施例2を示している。Example 2 FIG. 2 shows a second embodiment.

本実施例は、後振動弾性体2の底部側周壁に、スリット
2aを設けたもので、このスリット2aの位置を調整す
ることにより、固有振動数差(△f)を調整する。後振
動弾性体2はねじ6をわずかにゆるめることにより固転
することができる。
In this embodiment, a slit 2a is provided in the bottom side circumferential wall of the post-vibration elastic body 2, and by adjusting the position of this slit 2a, the natural frequency difference (Δf) is adjusted. The post-vibration elastic body 2 can be fixed by slightly loosening the screw 6.

実施例3 第3図は実施例3を示している。Example 3 FIG. 3 shows Example 3.

上記した実施例2においては、後振動弾性体2にスリッ
トを設け、後振動弾性体2を回転させてスリットの位置
調整を行うことにより、固有振動数差を調整しているが
、本実施例では後振動弾性体2の周部にスリットに代え
て切欠部14を設けている。
In the second embodiment described above, the natural frequency difference is adjusted by providing a slit in the rear vibrating elastic body 2 and adjusting the position of the slit by rotating the rear vibrating elastic body 2. However, in this embodiment In this case, a notch 14 is provided on the circumference of the rear vibrating elastic body 2 instead of a slit.

実施例4 第4図は実施例4を示す。Example 4 FIG. 4 shows Example 4.

第1図に示す実施例1では、後弾性体2にネジ13を螺
進可能に設けているが、本実施例ではねじ13に代えて
軸15を突出させ、この軸15を必要量折って取り去る
ことにより固有振動数差の調整を行うようにしている。
In Embodiment 1 shown in FIG. 1, a screw 13 is provided on the rear elastic body 2 so as to be screwable, but in this embodiment, a shaft 15 is protruded in place of the screw 13, and this shaft 15 is bent by the necessary amount. By removing it, the natural frequency difference is adjusted.

実施例5 第5図は実施例5を示す。Example 5 FIG. 5 shows Example 5.

本実施例は、調整用突起17を有する調整リング16を
圧電素子板3.4と同軸的に弾性体1.2間に固定し、
突起17を折り曲げることにより、固有振動数差を調整
する。
In this embodiment, an adjustment ring 16 having an adjustment protrusion 17 is fixed between an elastic body 1.2 coaxially with a piezoelectric element plate 3.4,
By bending the protrusion 17, the natural frequency difference is adjusted.

実施例6 第6図は実施例6を示す。Example 6 FIG. 6 shows Example 6.

本実施例は、質量調整のための調整板18を後振動弾性
体2の後端に設け、6角穴6aを有するホルト6゛によ
り、調整板18と共に該弾性体2、圧電素子板、電極板
等を挟持固定するようにしている。
In this embodiment, an adjustment plate 18 for mass adjustment is provided at the rear end of the rear vibrating elastic body 2, and a bolt 6' having a hexagonal hole 6a is used to connect the elastic body 2, piezoelectric element plate, and electrode together with the adjustment plate 18. It is designed to clamp and fix plates, etc.

本実施例は、振動子Aの細心に対して径方向長さを不等
とした調整板18の位置を変えることにより、固有振動
数差を4整するもので、ボルト6°をゆるめて調整板1
8を回転させる際、調整板18のみ回転でき、圧電素子
板と後振動弾性体との挟持面が移動することを防げる。
In this embodiment, the natural frequency difference is adjusted to 4 by changing the position of the adjusting plate 18, which has unequal radial length with respect to the fineness of the vibrator A, and is adjusted by loosening the bolt 6 degrees. Board 1
8, only the adjusting plate 18 can be rotated, and the clamping surface between the piezoelectric element plate and the rear vibrating elastic body can be prevented from moving.

実施例7 第9図は実施例7を示す。Example 7 FIG. 9 shows Example 7.

上記した実施例は、後振動弾性体の位置を変えたり、質
量を付加したりして固有振動数差を調整しているが、圧
電素子板3.4の位置を変えることによっても同様に固
有振動数差の調整か可能である。
In the embodiment described above, the natural frequency difference is adjusted by changing the position of the rear vibrating elastic body or adding mass, but the natural frequency difference can also be similarly adjusted by changing the position of the piezoelectric element plate 3.4. It is possible to adjust the frequency difference.

本実施例は、後振動弾性体2を圧電素子板3.4を介装
して前振動体1に固定するボルト6°の頭部を後振動弾
性体2と同径に形成し、ねしをゆるめたり、締め付けた
りする操作を容易としたものである。
In this embodiment, the 6° head of the bolt for fixing the rear vibrating elastic body 2 to the front vibrating body 1 with the piezoelectric element plate 3.4 interposed is formed to have the same diameter as the rear vibrating elastic body 2, and the This makes it easier to loosen and tighten the screws.

なお、第10図に示すように、ボルト6′に切欠き14
を設けてもよい。
In addition, as shown in FIG. 10, there is a notch 14 in the bolt 6'.
may be provided.

また、第11図に示すように、ボルト6の頭部に6角穴
6aを設け、6角レンチにより、ゆるめたり、締め付け
たりすることができるようにしてもよい。
Further, as shown in FIG. 11, a hexagonal hole 6a may be provided in the head of the bolt 6 so that it can be loosened or tightened using a hexagonal wrench.

第12図は、本発明によるモータを使用して光学レンズ
の鏡筒を駆動する場合の構成例である。
FIG. 12 shows an example of a configuration in which a motor according to the present invention is used to drive an optical lens barrel.

22は移動体8と同軸的に接合された歯車で、回転出力
を歯車23に伝達し、歯車23と噛み合う歯車をもった
鏡筒24を回転させる。
A gear 22 is coaxially connected to the movable body 8 and transmits rotational output to the gear 23 to rotate a lens barrel 24 having a gear that meshes with the gear 23.

移動体8および鏡筒24の回転位置、回転速度を検出す
るために、光学式エンコーダスリット板25が歯車23
と同軸に配置され、フォトカブラ26で位置、速度を検
出する。
In order to detect the rotational position and rotational speed of the moving body 8 and the lens barrel 24, an optical encoder slit plate 25 is connected to the gear 23.
The photocoupler 26 detects the position and speed.

27は径方向に螺進可能なねしであり、第1の実施例と
同様な効果が得られる。
Numeral 27 is a screw that can be screwed in the radial direction, and the same effect as in the first embodiment can be obtained.

[発明の効果コ 以上説明してきたように、本発明によれば、圧電素子板
等の電気−機械エネルギー変換素子により複数の平面内
に励起される振動系の固有振動数を調整することができ
、これら固有動を一致あるいは略等しくすることが可能
となり、回転数、トルクの上昇、安定化が図れ、効率を
向上させることができる。
[Effects of the Invention] As explained above, according to the present invention, it is possible to adjust the natural frequency of a vibration system excited in a plurality of planes by an electro-mechanical energy conversion element such as a piezoelectric element plate. , it is possible to make these natural motions the same or substantially equal, and the rotational speed and torque can be increased and stabilized, and efficiency can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による超音波モータの実施例1を示す斜
視図、第2図(a)、(b)は実施例2を示す縦断面図
及び底部斜視図、第3図(a)、(b)は実施例3を示
す斜視図及び縦断面図、第4図は実施例4を示す斜視図
、第5図は実施例5を示す斜視図、第6図(a)、(b
)は実施例6を示す斜視図及び縦断面図、第7図は従来
の超音波モータを示す斜視図、第8図は第7図の縦断面
図、第9図は実施例7の縦断面図、第10図(a)、(
b)は実施例7の変形例を示す縦断面図及び斜視図、第
11図は実施例7の変形例を示す斜視図である。 812図は超音波モータを用いた装置の断面図を示して
いる。 A・・・振動子     1・・・前振動弾性体2・・
・後振動弾性体  10・・・電極11・・・端子部 13・・・ねじ 15−・・軸 17・・・突起 12・・・リード線 14・・・切欠部 16・・・調整リング 18・・・調整板 第1図
FIG. 1 is a perspective view showing a first embodiment of an ultrasonic motor according to the present invention, FIGS. 2(a) and (b) are a vertical cross-sectional view and a bottom perspective view showing a second embodiment, and FIG. 3(a), (b) is a perspective view and longitudinal sectional view showing Example 3, FIG. 4 is a perspective view showing Example 4, FIG. 5 is a perspective view showing Example 5, and FIGS.
) are a perspective view and a vertical sectional view showing the sixth embodiment, FIG. 7 is a perspective view showing a conventional ultrasonic motor, FIG. 8 is a vertical sectional view of FIG. 7, and FIG. 9 is a vertical sectional view of the seventh embodiment. Figure 10(a), (
b) is a vertical sectional view and a perspective view showing a modification of the seventh embodiment, and FIG. 11 is a perspective view showing a modification of the seventh embodiment. Figure 812 shows a cross-sectional view of a device using an ultrasonic motor. A... Vibrator 1... Front vibrating elastic body 2...
- Rear vibration elastic body 10... Electrode 11... Terminal portion 13... Screw 15 -... Shaft 17... Protrusion 12... Lead wire 14... Notch 16... Adjustment ring 18 ...Adjustment plate diagram 1

Claims (1)

【特許請求の範囲】 1 棒状弾性体に配置された電気−機械エネルギー変換
素子(以下PZTで代表する)に交流電界を印加するこ
とによって棒状弾性体に同形の屈曲モードの振動を異な
る複数の平面内に励起させかつ時間的に適当な位相差を
持たせることにより、振動体の表面粒子に円又は楕円運
動を行わしめる振動子と、振動体に押圧されて摩擦駆動
される移動体とを有する超音波モータにおいて、該振動
子の一部に、質量調整可能な非軸対称手段を設けたこと
を特徴とする超音波モータ。 2 請求項1に記載の超音波モータを含む装置において
、振動子に押圧されて摩擦駆動される部材から駆動力を
得る出力部材を有することを特徴とする装置。
[Claims] 1. By applying an alternating current electric field to an electro-mechanical energy conversion element (hereinafter represented by PZT) arranged on the rod-like elastic body, vibrations of the same bending mode are transmitted to a plurality of different planes in the rod-like elastic body. The vibrator has a vibrator that causes particles on the surface of the vibrator to perform circular or elliptical motion by excitation within the body and an appropriate temporal phase difference, and a moving body that is pressed by the vibrator and driven by friction. An ultrasonic motor, characterized in that a part of the vibrator is provided with non-axisymmetric means capable of adjusting mass. 2. An apparatus including the ultrasonic motor according to claim 1, further comprising an output member that obtains a driving force from a member that is pressed by a vibrator and driven by friction.
JP02206235A 1990-08-03 1990-08-03 Vibration wave drive Expired - Fee Related JP3124284B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP02206235A JP3124284B2 (en) 1990-08-03 1990-08-03 Vibration wave drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02206235A JP3124284B2 (en) 1990-08-03 1990-08-03 Vibration wave drive

Publications (2)

Publication Number Publication Date
JPH0491670A true JPH0491670A (en) 1992-03-25
JP3124284B2 JP3124284B2 (en) 2001-01-15

Family

ID=16519991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02206235A Expired - Fee Related JP3124284B2 (en) 1990-08-03 1990-08-03 Vibration wave drive

Country Status (1)

Country Link
JP (1) JP3124284B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0579491A1 (en) * 1992-07-16 1994-01-19 Canon Kabushiki Kaisha Vibration device for vibration driven motor and method for manufacturing same
US5410204A (en) * 1992-02-28 1995-04-25 Olympus Optical Co. Ltd. Ultrasonic oscillator
US5850117A (en) * 1995-06-15 1998-12-15 Nikon Corporation Vibration Actuator and adjustment method therefor
US5986385A (en) * 1992-01-29 1999-11-16 Canon Kabushiki Kaisha Vibration driven motor or actuator
FR2844114A1 (en) * 2002-08-30 2004-03-05 Centre Nat Rech Scient SINGLE-PHASE ELECTROACTIVE MOTOR
US6930436B2 (en) 2001-01-22 2005-08-16 Canon Kabushiki Kaisha Vibration element and vibration wave driving apparatus

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986385A (en) * 1992-01-29 1999-11-16 Canon Kabushiki Kaisha Vibration driven motor or actuator
US5410204A (en) * 1992-02-28 1995-04-25 Olympus Optical Co. Ltd. Ultrasonic oscillator
EP0579491A1 (en) * 1992-07-16 1994-01-19 Canon Kabushiki Kaisha Vibration device for vibration driven motor and method for manufacturing same
US5594291A (en) * 1992-07-16 1997-01-14 Canon Kabushiki Kaisha Vibration device for vibration driven motor
US5850117A (en) * 1995-06-15 1998-12-15 Nikon Corporation Vibration Actuator and adjustment method therefor
US6930436B2 (en) 2001-01-22 2005-08-16 Canon Kabushiki Kaisha Vibration element and vibration wave driving apparatus
US6989624B2 (en) 2001-01-22 2006-01-24 Canon Kabushiki Kaisha Vibration element and vibration wave driving apparatus
US7215063B2 (en) 2001-01-22 2007-05-08 Canon Kabushiki Kaisha Vibration element and vibration wave driving apparatus
FR2844114A1 (en) * 2002-08-30 2004-03-05 Centre Nat Rech Scient SINGLE-PHASE ELECTROACTIVE MOTOR
WO2004021555A3 (en) * 2002-08-30 2004-07-29 Centre Nat Rech Scient Single-phase electroactive motor

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