JP3136369B2 - Size separation unit and its manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter made of a porous silica material used for filtering various liquids and gases necessary for the manufacture of semiconductor devices, and a quartz glass material enclosing the filter. The present invention relates to a size separation unit having a housing and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, this kind of size separation unit has
As shown in FIG. 8, a filtration layer made of porous silica having a required pore size is laminated on the surface of a support made of porous silica having a large pore size to form a porous silica having a controlled pore size. The filter body 21 is formed of a tube-shaped (bottomed cylindrical) filter sealed at one end and made of quartz glass (amorphous silica). The filter body 21 is airtightly encapsulated, and the filter body 21 is filled with a fluid to be filtered. A cylindrical housing 24 provided with a fluid supply pipe 22 for supplying a fluid and a fluid discharge pipe 23 for discharging a filtered fluid (Japanese Patent Application Laid-Open No. 3-202106 (Japanese Patent Application No.
343702)).

[0003]

In this conventional size separation unit, the housing is attached to a cylindrical tube portion having a diameter larger than that of the filter body, an end plate for closing both ends of the tube portion, and each end plate. Since the fluid supply pipe and the liquid discharge pipe are composed of a large number of parts, there are problems that the structure becomes complicated and the production becomes complicated.

Accordingly, an object of the present invention is to provide a size separation unit having a simple structure and easy to manufacture, and a method of manufacturing the same.

[0005]

In order to solve the above-mentioned problems, a first size separation unit according to the present invention comprises a cylindrical housing made of quartz glass and a porous silica having a controlled pore diameter. A filter body formed in a tubular shape sealed at one end of a subtotal from the inner diameter of the housing is coaxially housed in the housing, and is fused to the inner peripheral surface of the housing by a flange formed at an open end thereof. And a filter.

A second size separation unit of the present invention is a cylindrical housing made of quartz glass, a circular shape made of quartz glass, having a plurality of through holes, and having an outer diameter equal to the inner diameter of the housing. And a partition plate fused to the inner peripheral surface of the housing by the outer periphery thereof, and a filter body formed of a porous silica having a controlled pore diameter and formed into a tubular shape sealed at one end. And a plurality of filter bodies which are inserted into the respective through-holes and which are fused to the partition plate by flanges formed at the opening ends of the respective filter body bodies.

A third method of manufacturing a size separation unit according to the present invention is a method of manufacturing the first size separation unit, wherein a pore diameter is controlled in a cylindrical housing member made of quartz glass. A filter body made of porous silica and having a filter body having a smaller diameter than the inner diameter of the housing component and having a tubular shape sealed at one end and a flange formed at an open end thereof is coaxially arranged with the filter body. And then fused to one end surface of the housing component by the flange, and then formed of quartz glass on the end surface of the housing component to which the flange has been fused, forming the housing in cooperation with the housing component. The end face of the cylindrical housing structure is hermetically fused.

A fourth method for manufacturing a size separation unit according to the present invention is a method for manufacturing the second size separation unit, wherein a plurality of through holes provided in a circular partition plate made of quartz glass are provided. A filter body made of porous silica having a controlled pore diameter and having a filter body having a tubular shape sealed at one end and a flange formed at an opening end thereof is inserted by the filter body, respectively. After being fused to the partition plate by the respective flanges, the partition plate is fused to the inner peripheral surface of a cylindrical housing made of quartz glass and having an inner diameter equivalent to the outer diameter of the partition plate by its outer periphery.

[0009]

According to the first and third means, the number of parts of the single type size separation unit is reduced.
Further, the housing diameter becomes the same over the entire length.

In the second and fourth means, the number of parts of the multi-type size separation unit is reduced,
Further, the housing diameter becomes the same over the entire length.

[0011]

Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a size separation unit according to a first embodiment of the present invention. This size separation unit is formed of a porous silica having a controlled pore diameter in a cylindrical housing 1 made of quartz glass, and is formed in a tube shape with one end sealed with an outer diameter appropriately smaller than the inner diameter of the housing 1. The filter body 4 having the filter body 2 and the flange 3 formed at the opening end of the filter body 2 is hermetically fused to the inner peripheral surface of the housing 1 by the outer peripheral portion of the flange 3. This is a so-called single type that is accommodated coaxially.

Here, the filter 4 having a controlled pore diameter is
A filtration layer made of porous silica having a required pore size is laminated on the surface of a support made of porous silica having a relatively large pore size.

In the size separation unit having the above-described structure, as shown by the arrow in the drawing, the fluid to be filtered which flows into one end of the housing 1 and is supplied to the filter 4 is
The filtration fluid is filtered by the housing 1
The housing 1 and the filter 4 constitute a unit, and the housing 1 has the same outer diameter over its entire length.

In order to manufacture the size separation unit having the above structure, as shown in FIG. 2, a housing structure 5 which comprises a cylindrical quartz glass tube and forms a part of the housing 1 as will be described later, includes: Filter body 2 of filter body 4 described above
Is coaxially inserted, and as shown in FIG. 3, the flange 3 of the filter 4 is fused to one end surface of the housing component 5, and then the flange 3 is attached to the end surface of the housing component 5 to which the flange 3 is fused. 3. As shown in FIG. 4, an end face of a housing structure 6 which is formed of a cylindrical quartz glass tube and forms the housing 1 in cooperation with the housing structure 5 is hermetically fused.
The housing 1 is formed by fusing the end faces of the two housing components 5 and 6 together.

FIG. 5 is a sectional view of a main part of a size separation unit according to a second embodiment of the present invention. This size separation unit is made of quartz glass and has a plurality of through holes 8 on the inner peripheral surface of a cylindrical housing 7 made of quartz glass, and has a circular outer diameter equivalent to the inner diameter of the housing 7. The partition plate 9 is hermetically fused to the outer periphery thereof, and is made of porous silica having a controlled pore diameter in each through hole 8 of the partition plate 9. A filter body 12 having a filter body 10 formed in a stopper tube shape and a flange 11 formed at an opening end thereof is inserted by the filter body 10 respectively, and each flange 11 is separated from the partition plate 9. This is a so-called multi-type device that is formed by fusing to a substrate.

Here, the filter body 12 having a controlled pore diameter is used.
As in the case of the above-described filter 4, the filter is formed by laminating a filtration layer made of porous silica having a required pore size on the surface of a support made of porous silica having a relatively large pore size.

In the size separation unit having the above-described structure, as shown by the arrows in the drawing, the fluid to be filtered which flows into one end of the housing 7 and is supplied to each filter 12 is filtered by the filter layer of each filter 12. The filtered fluid is discharged from the other end of the housing 7, and a unit is constituted by three types of components including the housing 7, the partition plate 9, and the plurality of filter bodies 12.
Has the same outer diameter over the entire length.

In order to manufacture the size separation unit having the above structure, as shown in FIG. 6, a plurality of through-holes 8 provided in a circular partition plate 9 made of quartz glass are provided with the above-described filter 12.
7 and the flange 11 of each filter 12 is fused to the partition plate 9 as shown in FIG. 7, and then, as shown in FIG. 9 is housed, and the outer peripheral portion is hermetically fused to the inner peripheral surface of the housing 7.

In each of the above-described embodiments, the case where the fluid to be filtered flows in from one end of the housings 1 and 7 and is supplied from the open ends of the filter bodies 4 and 12 to be filtered therein has been described. However, the present invention is not limited to this, and the fluid to be filtered may flow in from the other ends of the housings 1 and 7 and may be supplied from the outer portions of the filter bodies 4 and 12 to the inside to be filtered.

[0020]

As described above, according to the size separation unit of the present invention and the method of manufacturing the same, the number of parts is greatly reduced in both the so-called single type and the multi type size separation unit. It can be simple and easy to manufacture.

Further, since the diameter of the housing is the same over the entire length, there is an advantage that the unit takes up little space and no special consideration is required for connection to the piping system.

[Brief description of the drawings]

FIG. 1 is a sectional view of a size separation unit according to a first embodiment of the present invention.

FIGS. 2 to 4 are cross-sectional views illustrating respective manufacturing steps of the size separation unit according to the first embodiment of the present invention.

FIG. 5 is a sectional view of a main part of a size separation unit according to a second embodiment of the present invention.

FIGS. 6 and 7 are cross-sectional views showing respective manufacturing steps of a size separation unit according to a second embodiment of the present invention.

FIG. 8 is a sectional view of a conventional size separation unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Housing 2 Filter body 3 Flange 4 Filter 5 Housing structure 6 Housing structure 7 Housing 8 Through hole 9 Partition plate 10 Filter body 11 Flange 12 Filter

──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Kenji Takahashi 30 Soya, Hadano-shi, Kanagawa Toshiba Ceramics Co., Ltd. Central Research Laboratory (56) References Japanese Utility Model 1-83415 (JP, U) (58) Field (Int.Cl. ⁷ , DB name) B01D 35/02 B01D 39/20 B01D 46/24

Claims (4)

(57) [Claims] 1. A filter body made of quartz glass, and a filter body made of porous silica having a controlled pore diameter and formed into a tubular shape with one end sealed and having a diameter smaller than the inner diameter of the housing. Housed coaxially in
And a filter fused to the inner peripheral surface of the housing by a flange formed at an opening end of the size separating unit. 2. A cylindrical housing made of quartz glass, and a circular housing made of quartz glass, having a plurality of through holes, and having an outer diameter equivalent to the inner diameter of the housing. A partition plate fused to the inner peripheral surface, made of porous silica having a controlled pore diameter,
A plurality of filter bodies each formed in a tubular shape sealed at one end are inserted into each through-hole of the partition plate, and are fused to the partition plates by flanges formed at the opening ends of the respective filter body bodies. A size separation unit comprising a filter. 3. A filter body made of porous silica having a controlled pore size and formed in a cylindrical housing having a diameter smaller than the inner diameter of the housing structure, in a cylindrical housing structure made of quartz glass. A filter body having a main body and a flange formed at an open end thereof is coaxially inserted by the main body of the filter body, and is fused to one end surface of the housing structure by the flange, and then the housing is fused with the flange. A method for manufacturing a size separation unit, wherein an end face of a cylindrical housing component made of quartz glass and cooperating with the housing component is hermetically fused to an end face of the component. 4. A filter body formed of a porous silica having a controlled pore diameter and formed in a tubular shape sealed at one end and a plurality of openings formed in a plurality of through holes provided in a circular partition plate made of quartz glass. The filter body having a flange formed in the part is inserted by the filter body itself, and fused to the partition plate by each flange, and then made of quartz glass, and having a cylindrical shape having an inner diameter equivalent to the outer diameter of the partition plate. A method for manufacturing a size separation unit, comprising: fusing a partition plate to an inner peripheral surface of a shaped housing by an outer periphery thereof.