JP2001070728A - Filter for removing gas and production of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the balance between the pressure loss and the gas removal efficiency of a filter for gas removal by mutually bonding two adsorbent layers by a binder and exposing almost all of the surface area of the respective adsorbents forming both adsorbent layers. SOLUTION: A filter 1 for removing a gas to be used for removing a harmful gas in a clean room comprises two adsorbent layers 2 mutually bonded by a binder 3 of such as an adhesive and almost all of the surface area of the respective adsorbents 4 forming both adsorbent layers 2 is exposed. In this case, both adsorbent layers 2 are preferable to be arranged parallel with each other along the direction in which a gas containing the gas to be removed flows. At the time of production, a spherical adsorbent 4 is poured in layers on the flat plane to form a first adsorbent layer 2 and then a binder 3 is supplied on the surface of the layer and after that, an adsorbent 4 for a second adsorbent layer 2 is poured further of the resultant surface to mutually bond both adsorbent layers 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas removing filter and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a gas removing filter has been used, for example, in a clean room of a semiconductor factory or the like.

[0003] As shown in FIG.
There was one in which 12 was fixed (the frame base material was covered with the adsorbent and was not visible in the illustrated one). According to this, there is an advantage that the pressure loss is low because the adsorbent 12 is fixed to the frame base material having a gap.

[0004] However, there is a problem that the volume ratio of the frame base material and the space is high and the gas removing ability is not so high.

[0005]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a gas removing filter having a better balance between pressure loss and gas removing ability than before, and a method of manufacturing the same.

[0006]

In order to solve the above-mentioned problems, the present invention employs the following technical means. The gas removal filter of the present invention is characterized in that the two adsorbent layers are interconnected by a binder, and most of the surface area of each adsorbent constituting the adsorbent layer is exposed. I do.

This gas removal filter eliminates the conventional frame base material and allows the two adsorbent layers to be interconnected by a binder (general term for adhesives and adhesives). In addition, most of the surface area of each adsorbent constituting the adsorbent layer is exposed.

[0008] Accordingly, since most of the surface area of the adsorbent is exposed while suppressing the volume ratio of the frame base material and the binder, the gas removal efficiency is high despite the low pressure loss. Note that the two adsorbent layers may have some deviation or disturbance if they have the above function. The adsorbent layer may be arranged along a direction in which the gas containing the gas to be removed flows.

With this configuration, the gas is adsorbed by the adsorbent and efficiently removed while the gas flows along the adsorbent layer. A plurality of the gas removing filters may be installed substantially in parallel with a gap therebetween to form a gas removing filter element.

In the gas removing filter element thus configured, gas can be efficiently adsorbed and removed in a flow path between a plurality of gas removing filters installed substantially in parallel. The gap between the filters forming the gas flow path can be adjusted according to the type of gas to be removed. In the method for producing a gas removal filter of the present invention, a first adsorbent layer is arranged, a second adsorbent layer is supplied to a surface to which a binder has been supplied to the adsorbent layer, and the adsorbent layer is formed. It is characterized by being mutually connected.

According to this manufacturing method, the gas removing filter having the above structure can be manufactured by an easy method.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) Filter 1 for gas removal of this embodiment
Is to remove harmful gases in a clean room.

As shown in FIG. 1, two adsorbent layers 2 are connected to each other by an adhesive as a binder 3, and most of the surface area of each adsorbent 4 constituting the adsorbent layer 2 is exposed. I am trying to be.

The adsorbent layer 2 is preferably arranged in parallel along the direction in which the gas containing the gas to be removed flows (shown by double arrows). In addition, air does not need to pass particularly through the portion where the adhesive exists between the two adsorbent layers 2.

The gas removal filter 1 can be manufactured as follows.

First, the spherical adsorbent 4 is caused to flow on the flat surface so as to be one layer, and the first adsorbent layer 2 is disposed.
Then, an adhesive as a binder 3 is supplied to the adsorbent layer 2. As the adhesive, a spray-type adhesive or a hot-melt adhesive can be used. The second adsorbent layer 2 is fed and supplied to the surface where the adhesive as the binder 3 has been supplied to the first adsorbent layer 2.
Thus, the two adsorbent layers 2 are connected to each other.

According to this manufacturing method, there is an advantage that the gas removing filter 1 having the above configuration can be manufactured by an easy method.

Next, the use state of the gas removing filter 1 of this embodiment will be described.

The gas removing filter 1 is constructed such that the two adsorbent layers 2 are connected to each other by an adhesive serving as a binder 3 without a frame base as in the prior art. Most of the surface area of each adsorbent 4 constituting is exposed. Therefore, since most of the surface area of the adsorbent 4 is exposed while suppressing the volume ratio of the frame base material and the adhesive, the gas removal efficiency is high despite the low pressure loss. There is an advantage that the balance between the loss and the gas removal ability is good.

Conventionally, the proportion of the volume of the frame base material such as polyurethane foam in the gas removal filter was high, the amount of the adsorbent was relatively small, and the gas removal efficiency and the filter life were low. In this case, the adsorbent is formed in a sheet shape with a small amount of adhesive without using a frame base material. Accordingly, the pressure decreases in the volume of the frame base material and the like, and the ratio of the adsorbent is high and the pressure loss is low.

Further, since the frame base material is not used, there is an advantage that outgas generated from the frame base material or the like can be suppressed.

Further, the adsorbent layer 2 is arranged along the direction in which the gas containing the gas to be removed flows,
While the gas flows along the adsorbent layer 2, there is an advantage that the gas is adsorbed by the adsorbent 4 and is efficiently removed.
The gas to be processed is a parallel flow that flows while licking the outer surfaces of the two adsorbent layers 2 of the gas removal filter 1.

The gas removing filter 1 of this embodiment is
For example, it is very useful in a clean room such as a semiconductor factory where a decrease in semiconductor yield due to gas contamination is a problem. (Embodiment 2) Next, Embodiment 2 will be described focusing on differences from Embodiment 1.

As shown in FIG. 2, in this embodiment, a plurality of gas removing filters 1 of the first embodiment (three in the drawing) are installed substantially in parallel with a gap 5 therebetween to remove gas. The filter element 6 is formed. And it arrange | positions so that it may become parallel to the direction (illustrated by the double arrow) with which gas flows.

According to the gas removing filter element 6, gas can be efficiently adsorbed and removed in the flow path between the plurality of gas removing filters 1 installed substantially in parallel.

The length of the gap 5 between the sheet-shaped gas removing filters 1 forming the gas flow path may be adjusted according to the type of gas to be removed. (Embodiment 3) The gas removal filter 1 of Embodiment 1
It can be a filter element for gas removal by pleating, secondary processing into a honeycomb structure or corrugated structure, or introducing a spacer between filters (not shown).

It is preferable that these secondary-processed gas removal filter elements are also arranged in parallel to the gas flow as described above.

[0028]

Next, a method of manufacturing the gas removing filter will be described more specifically. (Example) First, an adsorbent (trade name B, manufactured by Kureha Chemical Industry Co., Ltd.)
AC-LP, average particle size 0.6 mm) is further poured into the container (weight of the adsorbent: 13.3 g). Next, an adhesive (styrene-butadiene spray type, manufactured by Sumitomo 3M Limited) serving as a binder is uniformly sprayed on the adsorbent layer (adhesive weight: 3.2 g). And the adsorbent (Kureha Chemical Co., Ltd.,
BAC-LP (trade name, average particle diameter: 0.6 mm) is further poured thereon (adsorbent weight: 15.8 g).

Thereafter, the obtained porous sheet-shaped two-layer adsorbent layer (total weight: 32.3 g) is cut into a tape shape having a width of 20 mm, and a spacer is inserted between the two to form a self-supporting gas. A filter element for removal was used.

The obtained filter element for gas removal is made of a porous film in which two adsorbent layers are fixed with an adhesive so that most of the surface area thereof is exposed, and the two adsorbent layers are arranged in the gas flow direction. By placing them in parallel,
The pressure loss was reduced without interrupting the gas flow as much as possible. The obtained gas removal filter element was about 10% (3.2 g) of the total weight of 32.3 g.
Was the adhesive. (Comparative Example) A frame substrate (polyester malt filter MF8, manufactured by Inoac Corporation) made of polyurethane foam was impregnated with an adhesive (trade name, Boncoat, manufactured by Dainippon Ink and Chemicals, Inc.) (base 1.0 g). ,
1.1 g of adhesive). The adsorbent (Kureha Chemical Co., Ltd.)
(Trade name: BAC-LP) was sprinkled and fixed (5.8 g of adsorbent).

Although the obtained gas removing filter has a high porosity, there is a portion that blocks a gas flow.
In addition, about 26% (2.1 g) of the obtained gas removal filter was occupied by the frame base material and the adhesive in a total weight of 7.9 g.

[0032]

The present invention is configured as described above and has the following effects.

Since the gas removal efficiency is high despite the low pressure loss, it is possible to provide a gas removal filter having a better balance between the pressure loss and the gas removal ability than before, and a method for manufacturing the same.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating Embodiment 1 of a gas removal filter of the present invention.

FIG. 2 is a perspective view illustrating a gas removal filter according to a second embodiment of the present invention.

FIG. 3 is a perspective view illustrating a conventional gas removal filter.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Gas removal filter 2 Adsorbent layer 3 Binder 4 Adsorbent 5 Gap 6 Gas removal filter element

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Kenichi Horiuchi 6-5-6 Sakyo, Nara-shi, Nara Nitayama Research Laboratories F-term (reference) 3L058 BF09 4D012 CA10 CB03 CG02 CK07 CK09 CK09

Claims (4)

[Claims] 1. A gas removing apparatus comprising: two adsorbent layers connected to each other by a binder; and a large part of the surface area of each adsorbent constituting the adsorbent layer is exposed. filter. 2. The gas removal filter according to claim 1, wherein the adsorbent layer is arranged along a direction in which a gas containing a gas to be removed flows. 3. A gas removal filter element comprising a plurality of said gas removal filters installed substantially in parallel with a gap. 4. A first adsorbent layer is arranged, a second adsorbent layer is supplied to a surface of the adsorbent layer to which a binder has been supplied, and the adsorbent layers are interconnected. A method for manufacturing a gas removal filter, comprising: