JP3132114B2 - Ceramic grinding chip storage method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is characterized in that it is used in electronic equipment (for example, electronic calculators, home electric appliances, industrial electronic parts, etc.) as a semiconductor substrate or a cooling structure by utilizing its high thermal conductivity and insulating properties. And a method for storing ground chips of ceramic AlN.

[0002]

2. Description of the Related Art FIG. 1 is an explanatory view of a target work of the present invention. The processed groove 1 is grooved by rotating a grindstone 2 and applying a grinding fluid 5 through a coolant nozzle 4 for cooling to a processing point of the ceramic 3. At this time, the ceramic 3 moves to the arrow by a table (not shown). FIG. 2 is an explanatory diagram of the target processing apparatus. The operation described in FIG. 1 is performed by the grinding machine body 6 in FIG. The processing liquid 8 containing the grinding chips generated at this time passes through a grinding chip recovery filter (for example, a cloth mesh filter or the like) 9 and is guided to the coolant tank 10. (There is a case where a natural drop is used or a recovery pump is used.) The grinding fluid in the coolant tank 10 includes a granular form of ceramic swarf which is not collected by the swarf collection filter 9. I have. This grinding fluid becomes the applied grinding fluid 7 by the supply pump 11 and is repeatedly applied to the ceramic processing point for cooling. In the prior art, the grinding chips generated by the processing adhere to the grinding chip recovery filter 9 and settle and accumulate in the coolant tank 10. (The sediment in the coolant tank accumulates in the tank as a ground chip sediment 12 in a laminated state.) The collected ground chips are collected and removed outside the machine for the purpose of cleaning and maintenance of the apparatus.
The collected and removed grinding chips were collected in a plastic bag and sent to the grinding chip recycling process (the ceramics of the captured grinding chips were effectively used). When AlN is used as ceramics in the prior art during storage of grinding chips while being sent to the furnace, an exothermic reaction is generated by the chemical reaction shown in (Equation 1) described below to generate ammonia NH ₃ . The reason for this is that the collected and removed ground chips in the plastic bag were stored in an indoor storage (only ventilation) for a certain period of time. If left in a plastic bag or the like, the water content of the chips decreases and the ambient temperature increases, or a significant exothermic reaction occurs when a chemical reaction proceeds inside the ground chips.

Regarding the properties of AlN, see Kuramoto, Aluminum Nitride Powder and Its Current State New Ceramics (1987)
There is 1).

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for storing a ceramic ground chip for suppressing a chemical reaction between a ground chip AlN and a coolant represented by (Equation 1).

AlN + 3H ₂ O = Al (OH) ₃ + NH ₃ (Equation 1) H ₂ O in (Equation 1) is, for example, ground cutting chips of about 1 μm to 20 μm formed into powder by processing with water in the grinding fluid. The sludge-like material containing water and water is the collected and removed grinding chips.

[0006]

Means for Solving the Problems A used grinding chip collection filter to which grinding chips are attached and a settling powder collected in a coolant tank are collected in a plastic bag, immediately put in a freezer and frozen.

[0007]

The chemical reaction represented by the formula (1) is suppressed by immediately freezing the grinding chips collection filter and the grinding chips precipitate to which the grinding chips have adhered from the processing machine. Formula 1 is a specific example for AlN ceramics, but a storage method that suppresses the freezing reaction of other new materials that react with water and generate heat is effective.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A used grinding chip collection filter 9 to which grinding chips have adhered and a sludge-like grinding chip deposit 12 deposited on a coolant tank 10 are removed and collected outside the machine, and put into a plastic bag. Immediately put in the freezer and freeze.

As an example of implementation, ground chips of 40 kg (water content) can be stably frozen and stored in a freezer (capacity: -30 ° C.) with a capacity of 285 l at 45 kwh / month. Even if the place where the processing machine is installed and the place where the ceramics recycling equipment in the grinding chips are installed are far apart, if the frozen powder that can be moved is used, it can be moved for a long time in a stable storage state.

[0010] This satisfies the condition that the recycling of new materials is concentrated and carried out efficiently.

[0011]

(1) When collecting and storing AlN ground chips, the ammonia generation mechanism can be simply and reliably prevented.
Ammonia gas countermeasures (prevention of effects on human body and explosion)
It is possible to improve the environment and prevent problems caused by heating due to reaction heat.

(2) It is possible to stably store for a long time with respect to a recycling technique such as chip recycling of a new material or the like, so that the condition for efficiently reusing the equipment in one place is satisfied.

(3) It is effective as a specific method for suppressing the exothermic reaction in the cutting chips of ceramics of a new material other than AlN, which is a remarkable environmental improvement.

In particular, in recent years, the grinding fluid has been used for its ceramics because of its water solubility, and freezing means by freezing can be easily employed for the grinding chips.

(4) Recently, high-efficiency grinding technology has been remarkably elongated, and it is possible to process even ceramics at a level of 2600 mm ³ / min or more, and a technology for collecting grinding chips is an important issue. The present invention is a specific measure.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram for explaining a work to be patented;

FIG. 2 is an explanatory diagram of a target processing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Processed groove, 2 ... Whetstone, 3 ... Ceramic, 4 ... Coolant nozzle, 5 ... Grinding fluid, 6 ... Grinding machine main body, 7 ... Applied grinding fluid, 8 ... Working fluid containing grinding chips, 9 ... Grinding chip recovery filter, 10: coolant tank, 11: supply pump, 12: grinding chip sediment.

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hideaki Sasaki 1 Horiyamashita, Hadano-shi, Kanagawa Inside the Kanagawa Plant, Hitachi, Ltd. (56) References JP-A-64-42310 (JP, A) Field (Int. Cl. ⁷ , DB name) B24B 55/12 C04B 35/00

Claims (1)

(57) [Claims] 1. A method for collecting and storing ground chips generated by grinding a ceramic by a processing machine, wherein the ground chips are supplied to a processing point of the ceramic during the grinding and generated by the grinding. Is passed through a grinding swarf collection filter and stored in a tank, and the grinding swarf settled in the working liquor in the tank, and the grinding swarf adheres due to the passage of the working liquor. The collected grinding chips are collected from the processing machine, the collected grinding chips and the collected grinding chips are immediately put in a freezer and frozen. A method for collecting and storing ground chips, comprising storing the ground chip recovery filter.