JP3131273B2 - Sample liquid atomizer - Google Patents

Sample liquid atomizer

Info

Publication number
JP3131273B2
JP3131273B2 JP04072848A JP7284892A JP3131273B2 JP 3131273 B2 JP3131273 B2 JP 3131273B2 JP 04072848 A JP04072848 A JP 04072848A JP 7284892 A JP7284892 A JP 7284892A JP 3131273 B2 JP3131273 B2 JP 3131273B2
Authority
JP
Japan
Prior art keywords
gas
sample
atomizing
nebulizer
atomized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04072848A
Other languages
Japanese (ja)
Other versions
JPH05234566A (en
Inventor
光恭 岩永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP04072848A priority Critical patent/JP3131273B2/en
Publication of JPH05234566A publication Critical patent/JPH05234566A/en
Application granted granted Critical
Publication of JP3131273B2 publication Critical patent/JP3131273B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】 本発明は、高周波誘導結合プラ
ズマ装置(ICP)に使用して最適な試料液霧化装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for atomizing a sample liquid optimally used in a high frequency inductively coupled plasma apparatus (ICP).

【0002】[0002]

【従来の技術】 近年、ICPと質量分析装置(MS)
や発光分光分析装置(AES)を結合したICPーMS
やICPーAESなどが実用化されている。
2. Description of the Related Art In recent years, ICP and mass spectrometer (MS)
-MS combined with a laser and emission spectrometer (AES)
And ICP-AES have been put to practical use.

【0003】かかるICPは、プラズマを用いて試料液
をイオン化させるもので、この時、プラズマ中に試料液
を導入する方法として、図1に示されるようなネブライ
ザを用いて試料液を霧状にしてプラズマ中に噴出させる
方法がある。
In the ICP, a sample solution is ionized by using plasma. At this time, as a method of introducing the sample solution into the plasma, the sample solution is atomized by using a nebulizer as shown in FIG. There is a method of jetting into plasma.

【0004】図中、7はスプレー室であり、スプレー室
7内に開口しているネブライザ14によって霧化された
試料は取出口8から図示外のプラズマトーチへ送られ
る。スプレー室の壁面に衝突するなどして生じた液滴は
排水口13から排水される。ネブライザ14の外筒1
は、細く絞られ先端に霧化用ガス噴出口2が形成され、
外筒1の他端は底部3により塞がれている。外筒1の内
部には略同心状に内筒4が配置されており、一端は前記
噴出口2に接近して置かれ、他端が前記底部3に固定さ
れている。内筒4は前記底部3の外側に固定された試料
供給パイプ5と連通するように構成されており、ガス導
入量調整弁15を介して霧化用ガス導入管6から任意の
ガスが外筒1と内筒4との間に形成される隙間Sを通っ
て前記噴出口2に向けて噴出される。また、一般にこれ
らの各部材は耐熱性に優れた石英硝子を用いて形成され
ている。
In FIG. 1, reference numeral 7 denotes a spray chamber, and a sample atomized by a nebulizer 14 opened in the spray chamber 7 is sent from an outlet 8 to a plasma torch (not shown). Droplets generated by, for example, colliding with the wall surface of the spray chamber are drained from the drain port 13. Outer cylinder 1 of nebulizer 14
Is finely squeezed to form an atomizing gas jet 2 at the tip,
The other end of the outer cylinder 1 is closed by a bottom 3. An inner cylinder 4 is disposed substantially concentrically inside the outer cylinder 1, one end of which is placed close to the jet port 2, and the other end of which is fixed to the bottom 3. The inner cylinder 4 is configured to communicate with a sample supply pipe 5 fixed outside the bottom 3, and arbitrary gas is supplied from the atomizing gas introduction pipe 6 through the gas introduction amount adjustment valve 15 to the outer cylinder. The gas is ejected toward the ejection port 2 through a gap S formed between the inner cylinder 1 and the inner cylinder 4. In general, these members are formed using quartz glass having excellent heat resistance.

【0005】この様な構成において、図示外のガスボン
ベからガス導入量調整弁15および霧化用ガス導入管6
を介して導入されるアルゴンガスを外筒1の隙間Sを通
して噴出口2により噴出させると共に、試料供給パイプ
5より試料液を内筒4に導入すれば、試料液は噴出口2
から噴出されるアルゴンガスによって霧化された後、取
出口8から取出され、図示外のプラズマトーチ内に送ら
れてイオン化される。
In such a configuration, a gas introduction amount adjusting valve 15 and an atomizing gas introduction pipe 6 are connected to a gas cylinder (not shown).
When the argon gas introduced through the nozzle is ejected from the ejection port 2 through the gap S of the outer cylinder 1 and the sample liquid is introduced into the inner cylinder 4 from the sample supply pipe 5, the sample liquid is ejected from the ejection port 2.
After being atomized by the argon gas ejected from the nozzle, it is taken out from the outlet 8 and fed into a plasma torch (not shown) to be ionized.

【0006】[0006]

【発明が解決しようとする課題】 この様な装置におい
て、例えば、ネブライザの試料供給パイプ5に導入され
る試料液の粘度が変化した場合、最適な霧化状態を維持
するようにガス導入量調整弁15で霧化用ガス流量の調
整を行っている。この様な霧化用ガス流量の調整によ
り、図示外のプラズマトーチ内に導入されるガスの流量
が変化し、この流量変化によってプラズマ中のガスの温
度が変化する事により試料のイオン化や励起などに影響
を与えてしまい、その結果、測定感度が変化してデータ
の再現性が低下してしまう。
In such an apparatus, for example, when the viscosity of the sample liquid introduced into the sample supply pipe 5 of the nebulizer changes, the gas introduction amount is adjusted so as to maintain the optimal atomization state. The valve 15 adjusts the flow rate of the atomizing gas. By adjusting the flow rate of the atomizing gas, the flow rate of the gas introduced into the plasma torch (not shown) changes, and the change in the flow rate changes the temperature of the gas in the plasma. As a result, the measurement sensitivity changes and the reproducibility of the data decreases.

【0007】そこで本発明はかかる問題点に鑑がみてな
されたものであり、最適な霧化状態を維持すると共に、
測定感度の変動を防止する事のできる試料液霧化装置を
提供することを目的とするものである。
Therefore, the present invention has been made in view of such a problem, and maintains an optimum atomization state while
It is an object of the present invention to provide a sample liquid atomizing device capable of preventing a change in measurement sensitivity.

【0008】[0008]

【課題を解決するための手段】 上記目的を達成するた
めに、本発明は、霧化用ガス噴出口から噴出されるガス
によって試料液を霧化するネブライザと、該ネブライザ
を収容するスプレー室とを備え、該スプレー室に設けら
れた取出口から霧化された試料を取り出すようにした試
料液霧化装置において、霧化試料を取出口へ向けて送る
ための霧化試料輸送用ガスをスプレー室へ供給する噴出
口を前記ネブライザの霧化用ガス噴出口の近傍に設ける
ことを特徴とするものである。
Means for Solving the Problems In order to achieve the above object, the present invention provides a nebulizer for atomizing a sample liquid by a gas ejected from an atomizing gas ejection port, and a spray chamber for accommodating the nebulizer. In a sample liquid atomizer for removing an atomized sample from an outlet provided in the spray chamber, an atomized sample transporting gas for sending the atomized sample toward the outlet is sprayed. An outlet for supplying to the chamber is provided near the atomizing gas outlet of the nebulizer.

【0009】[0009]

【作用】 本発明は、ネブライザの霧化用ガス噴出口の
近傍に噴出口を設けて、この噴出口から霧化試料を取出
口へ向けて送るための霧化試料輸送用ガスをスプレー室
に導入するようにしている。
According to the present invention, an injection port is provided near an atomizing gas injection port of a nebulizer, and an atomized sample transport gas for sending an atomized sample from the injection port toward the output port is supplied to a spray chamber. I am trying to introduce it.

【0010】[0010]

【実施例】 以下、本発明の実施例を図面に基づいて説
明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.

【0011】図2において、図1と同一の構成要素には
同一番号が付されている。図中、12は外筒1の外周に
略同心状に設けられた最外筒であり、一端は細く絞られ
先端に噴出口10が形成されている。また、最外筒12
の底部11は外筒1の外周に融着などによって取り付け
られており、ガス導入管9から送られる任意のガスが外
筒1と最外筒12の間に形成される隙間S´を通って噴
出口10より噴出される。
In FIG. 2, the same components as those in FIG. 1 are denoted by the same reference numerals. In the figure, reference numeral 12 denotes an outermost cylinder provided substantially concentrically on the outer periphery of the outer cylinder 1, one end of which is narrowed narrowly and the ejection port 10 is formed at the tip. In addition, the outermost cylinder 12
Is attached to the outer periphery of the outer cylinder 1 by fusion or the like, and an arbitrary gas sent from the gas introduction pipe 9 passes through a gap S ′ formed between the outer cylinder 1 and the outermost cylinder 12. It is spouted from spout 10.

【0012】かかる構成において、前述したように試料
液の粘度が高くなった場合には最適な霧化状態になるよ
うに測定者は霧化用ガス導入管6の第1のガス導入量調
整弁15を開く方向に回して図示外のガスボンベから導
入されるガス導入量を増加させる。さらに、測定者がガ
ス導入管9の第2のガス導入量調整弁16を閉じる方向
に回して図示外のガスボンベから導入されるガス導入量
を減少させることにより、噴出口10と噴出口2から噴
出されるガスの総流量は一定になるように調整される。
つまり、霧化試料輸送用ガス導入管9からのガス導入量
は導入管6で増加させたガス導入量の分だけ減少される
ため、一定量のガスがスプレー室7の取出口8へ向けて
送られる。なお、逆に試料液の粘度が低くなった場合に
は、第1のガス導入量調整弁15を閉じる方向に回し、
霧化用ガスの導入量を減少させて最適な霧化状態になる
ようにするので、その場合には、第2のガス導入量調整
弁16は開く方向に回してガスの総流量が一定になるよ
うに調整される。
In this configuration, as described above, when the viscosity of the sample liquid becomes high, the measurer operates the first gas introduction amount adjusting valve of the atomization gas introduction pipe 6 so as to obtain an optimal atomization state. By turning 15 in the opening direction, the amount of gas introduced from a gas cylinder (not shown) is increased. Further, the measurer turns the second gas introduction amount adjusting valve 16 of the gas introduction pipe 9 in the closing direction to reduce the amount of gas introduced from a gas cylinder (not shown), thereby reducing the gas introduction amount from the ejection port 10 and the ejection port 2. The total flow rate of the ejected gas is adjusted to be constant.
That is, the amount of gas introduced from the gas introduction pipe 9 for transporting the atomized sample is reduced by the amount of gas introduced by the introduction pipe 6, so that a certain amount of gas is directed toward the outlet 8 of the spray chamber 7. Sent. Conversely, when the viscosity of the sample liquid decreases, the first gas introduction amount adjusting valve 15 is turned in the closing direction,
Since the amount of introduction of the atomizing gas is reduced to achieve the optimal atomization state, in this case, the second gas introduction amount adjusting valve 16 is turned in the opening direction to keep the total gas flow rate constant. It is adjusted to become.

【0013】その結果、試料液の液性が変化した場合に
おいても最適な霧化状態を維持すると共にスプレー室の
取出口から取り出されるガスの総流量を一定にすること
ができるため、プラズマトーチに導入されるガスの流量
もまた一定になる。これにより、プラズマトーチ内での
ガスの温度変化を防ぐことができるため、イオン化や、
励起の度合いが変化することなく、測定感度の変動を防
止することができる。さらに、上記実施例のように霧化
試料輸送用ガス噴出口を霧化用ガス噴出口の外周に同軸
に設けることにより、霧化試料輸送用ガスが霧化された
試料を包み込むように噴出されるため、スプレー室の内
壁に霧化試料が衝突することが減少し、衝突によって起
こる霧化試料の損失を減少させることができる。
As a result, even when the liquid property of the sample liquid changes, the optimum atomization state can be maintained and the total flow rate of the gas taken out from the outlet of the spray chamber can be kept constant. The flow rate of the gas introduced is also constant. As a result, a temperature change of the gas in the plasma torch can be prevented, so that ionization,
A change in measurement sensitivity can be prevented without changing the degree of excitation. Further, by providing the gas ejection port for atomizing sample transport coaxially around the gas ejection port for atomization as in the above embodiment, the gas for atomizing sample transport is ejected so as to enclose the atomized sample. Therefore, the collision of the atomized sample with the inner wall of the spray chamber is reduced, and the loss of the atomized sample caused by the collision can be reduced.

【0014】なお、上記実施例ではネブライザの外筒1
の外周に略同心状に霧化試料輸送用ガス供給のために最
外筒を設けたが、これに限られることなく、例えば、ネ
ブライザの近傍に取り付けてもよいし、スプレー室にお
いてネブライザとは別の位置にガス導入管を配置しても
よい。
In the above embodiment, the outer cylinder 1 of the nebulizer is used.
Although the outermost cylinder is provided substantially concentrically around the outer periphery for supplying the gas for transporting the atomized sample, the invention is not limited to this. The gas introduction pipe may be arranged at another position.

【0015】また、上記実施例ではガス導入管6および
9のガス導入量を第1および第2のガス導入量調整弁1
5、16でそれぞれ別々に調整してネブライザに供給す
るとしたが、これに限られることなく、ガス導入管6お
よび9のガスの総流量が一定になるように2つのガス導
入量調整弁を連動させるようにしてもよい。
In the above embodiment, the gas introduction amount of the gas introduction pipes 6 and 9 is controlled by the first and second gas introduction amount adjusting valves 1.
It is assumed that the gas is adjusted separately in steps 5 and 16 and supplied to the nebulizer. However, the invention is not limited to this. You may make it do.

【0016】さらに、上記実施例ではガス導入管9から
アルゴンガスを導入するとしたが、これに限られること
なく、他の熱伝導度の高いガスをガス導入管9から導入
すればプラズマ中における試料の温度を上げることがで
き、イオン化がさらに促進される。また、ガス導入管9
から試料と化学反応を起こすようなガスを導入してスプ
レー室内で反応させ、生成物がプラズマトーチ内でイオ
ン化されるようにしてもよいし、ガス導入管9から導入
されるガスの温度を可変にしてもよい。
Further, in the above embodiment, the argon gas is introduced from the gas introduction pipe 9. However, the invention is not limited to this. If another gas having high thermal conductivity is introduced from the gas introduction pipe 9, the sample in the plasma may be introduced. Can be increased, and ionization is further promoted. In addition, gas introduction pipe 9
A gas that causes a chemical reaction with the sample may be introduced and reacted in the spray chamber, and the product may be ionized in the plasma torch, or the temperature of the gas introduced from the gas introduction pipe 9 may be varied. It may be.

【0017】なお、上記実施例では同軸型のネブライザ
について述べたが、これに限られることなく、クロスフ
ロー型のネブライザを用いてもよい。
In the above embodiment, a coaxial nebulizer has been described. However, the present invention is not limited to this, and a cross-flow nebulizer may be used.

【0018】[0018]

【発明の効果】 以上詳説したように、本発明はネブラ
イザの霧化用ガス噴出口の近傍に霧化試料輸送用ガス噴
出口を設けることにより、取出口へ送られるガスの総流
量を一定にすることができる。これにより、最適な霧化
状態を維持すると共に、測定感度の変動を防止すること
ができる。
As described in detail above, the present invention provides a nebulizer with an atomized sample transporting gas outlet near the atomizing gas outlet to keep the total flow rate of gas sent to the outlet constant. can do. This makes it possible to maintain an optimal atomization state and prevent fluctuations in measurement sensitivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 図1は従来例を説明するための図。FIG. 1 is a diagram for explaining a conventional example.

【図2】 図2は本発明による一実施例装置の要部拡大
図である。
FIG. 2 is an enlarged view of a main part of an apparatus according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

9 霧化試料輸送用ガス導入管 10 霧化試料輸送用ガス噴出口 11 底部 12 最外筒 16 第2のガス導入量調整弁 S´ 隙間 Reference Signs List 9 gas introduction pipe for atomized sample transport 10 gas injection port for atomized sample transport 11 bottom 12 outermost cylinder 16 second gas introduction amount adjustment valve S 'gap

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 霧化用ガス噴出口から噴出されるガスに
よって試料液を霧化するネブライザと、該ネブライザを
収容するスプレー室とを備え、該スプレー室に設けられ
た取出口から霧化された試料を取り出すようにした試料
液霧化装置において、霧化試料を取出口へ向けて送るた
めの霧化試料輸送用ガスをスプレー室へ供給する噴出口
を前記ネブライザの霧化用ガス噴出口の近傍に設けるこ
とを特徴とする試料液霧化装置。
1. A nebulizer for atomizing a sample liquid by a gas ejected from an atomizing gas ejection port, and a spray chamber for accommodating the nebulizer, wherein a nebulizer is atomized from an outlet provided in the spray chamber. In the sample liquid atomizing apparatus configured to take out the sample, the atomizing gas jet port of the nebulizer is provided with an jet port for supplying an atomized sample transporting gas for sending the atomized sample toward the outlet to the spray chamber. A sample liquid atomizing device, which is provided in the vicinity of
JP04072848A 1992-02-24 1992-02-24 Sample liquid atomizer Expired - Fee Related JP3131273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04072848A JP3131273B2 (en) 1992-02-24 1992-02-24 Sample liquid atomizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04072848A JP3131273B2 (en) 1992-02-24 1992-02-24 Sample liquid atomizer

Publications (2)

Publication Number Publication Date
JPH05234566A JPH05234566A (en) 1993-09-10
JP3131273B2 true JP3131273B2 (en) 2001-01-31

Family

ID=13501215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04072848A Expired - Fee Related JP3131273B2 (en) 1992-02-24 1992-02-24 Sample liquid atomizer

Country Status (1)

Country Link
JP (1) JP3131273B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007114063A (en) * 2005-10-20 2007-05-10 Horiba Ltd Nebulizer and sample liquid atomizer
US9646810B2 (en) * 2012-07-17 2017-05-09 Snu R&Db Foundation Method for improving mass spectrum reproducibility and quantitative analysis method using same

Also Published As

Publication number Publication date
JPH05234566A (en) 1993-09-10

Similar Documents

Publication Publication Date Title
US8640975B2 (en) Miniature aerosol jet and aerosol jet array
US5973289A (en) Microwave-driven plasma spraying apparatus and method for spraying
EP2016206B1 (en) Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device
US5906757A (en) Liquid injection plasma deposition method and apparatus
CA2080184A1 (en) Controlled process for the production of a spray of atomized metal droplets
TW201443415A (en) Laser sampling methods for reducing thermal effects
KR20010030282A (en) Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material
US20040013800A1 (en) Device and method for feeding a liquid starting material, which has been brought into the gaseous state, into a CVD reactor
JP3131273B2 (en) Sample liquid atomizer
US12040162B2 (en) Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows
JP3567831B2 (en) Vaporizer
KR101284538B1 (en) Wire Forming Device
US5450732A (en) Distribution system for cryogen
JP3084885B2 (en) ICP emission spectrometer
JP2004074118A (en) Chemical-solution applicator
JPH0389498A (en) Induction plasma device
JP2000306840A (en) Manufacturing method and apparatus for semiconductor
JP7503345B2 (en) Microwave plasma nozzle for deposition of powder aerosol for coating, and coating device using the same with powder aerosol for coating
JPH0367498A (en) Induction plasma generation device
JPS62247836A (en) Gaseous phase exciter
JPH10321182A (en) Induction coupling plasma mass and spectral analysis device
JP2008135242A (en) Liquid jetting device
JPH09171899A (en) Control plasma generating device
JPH05180770A (en) Icp emission spectrophotometer
JPH11152582A (en) Gas deposition method and device therefor

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20001024

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081117

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091117

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101117

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101117

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111117

Year of fee payment: 11

LAPS Cancellation because of no payment of annual fees