JP3129915B2 - INK JET HEAD AND ITS MANUFACTURING METHOD, INK JET HEAD CARTRIDGE, AND INK JET RECORDING DEVICE - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink-jet head used in an ink-jet apparatus for performing recording by ejecting a recording liquid (ink or the like) from an ejection port as flying droplets and attaching the liquid to a recording medium. More particularly, the present invention relates to an inkjet head, an inkjet head cartridge, and an inkjet apparatus for color printing. In the present invention, the term “record” is used as a word including a print on cloth, plastic, or the like.

[0002]

2. Description of the Related Art A conventional ink jet recording head is shown in FIGS. 23 (perspective view from the side opposite to an ejection port) and FIGS.
As shown in (a perspective view of the top plate viewed from the side of the bonding surface with the substrate), a plurality of ejection ports 1105 for ejecting ink, and a recess serving as a common liquid chamber for holding ink supplied to each ejection port 1105 A top plate (grooved member) 1120 in which an ink flow path 1106 communicating with the common liquid chamber and each of the discharge ports 1105 is formed. A converter (not shown) is formed by bonding silicon substrates 1119 formed corresponding to the respective ink flow paths 1106. Further, a drive circuit for driving the electrothermal transducer is built in the silicon substrate 1119, and this drive circuit is
It is electrically connected to a wire bonding pad 1122 formed at an end of the terminal 119. The silicon substrate 1119 is bonded to an aluminum plate 1121 for radiating heat from the silicon substrate 1119 with an adhesive having good thermal conductivity. A wiring board 1125 for relaying a signal between the driving circuit and the ink jet recording apparatus is fixed to the aluminum plate 1121, and a terminal of the wiring board 1125 and a wire bonding pad 1122 of the silicon substrate 1119 are connected to a bonding wire ( (External wiring) 1123.

On the other hand, when performing color printing, FIG.
As shown in FIG. 5, an ink jet unit 1150 in which a plurality of ink jet recording heads 1151 for ejecting inks of different colors are arranged. However, in this case, although there is an advantage that high-speed printing is possible,
Since a plurality of inkjet recording heads 1151 are used, it is difficult to reduce the size of the apparatus, and the cost increases by the number of inkjet recording heads 1151.

Therefore, a plurality of recesses are provided in the same top plate to form a plurality of common liquid chambers, and ink of a different color is supplied to each common liquid chamber to perform color printing with one ink jet recording head. Something that can be done is conceivable.

[0005]

In the case where a plurality of common liquid chambers are formed as described above to enable color printing with one ink jet recording head, adjacent common liquid chambers and ink flows communicating with the common liquid chambers are used. The ink in the road must be sealed so that it does not mix with each other. As a method of this sealing, a method is conceivable in which a groove extending from the end on the discharge port side to the other end is formed between each concave portion of the bonding surface of the top plate with the silicon substrate, and a sealing agent is injected into this groove. . in this case,
Since the inkjet recording head is very small,
As a result of the study, the amount of the sealant filled in the groove was less than 0.1 mg per groove. However, it is very difficult to stably control such a very small amount even with the use of a minute discharge dispenser. There is a possibility that it will flow into the ink flow path due to too long. If the sealant flows into the ink flow path, normal ink discharge will not be performed, and in the worst case, the ink flow path will be blocked and ink will not be discharged.

[0006] The simplest method for injecting the sealant is an end (hereinafter, referred to as an end) of the top plate opposite to the side where the discharge port is arranged.
There is a method of injecting from the “rear end”), but as described above, it is difficult to control the stable discharge of the sealant. It is conceivable that the sealant is reliably sealed by restricting the entrance of the sealant on the surface. To solve this problem, the present applicant has proposed a device in which the shape of the common liquid chamber separation wall is devised (Japanese Patent Application No. 6-146244).

However, the separation and sealing of the common liquid chamber must be performed so that the adjacent common liquid chamber and the ink in the ink flow path communicating with the common liquid chamber do not mix with each other. In order to stably achieve the seemingly contradictory objective that the path (the main nozzle for recording) must not be clogged, secure sealing is stably performed even with the above means. Still had challenges.

[0008] That is, in the proposal of devising the shape of the common liquid chamber separation wall, when a large amount of the sealant is injected, the structure for holding the sealant is more effective against clogging of the nozzle. Although improved, the amount of retained sealant does not necessarily act only on the amount that has entered a large amount, and as a result, the amount of sealant that enters in the forward direction is insufficient, In some cases, the sealing stops in the middle of the common liquid chamber separation groove, and another defect such as incomplete sealing may occur.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art. A plurality of common liquid chambers are formed, and the space between the common liquid chambers is sealed with a sealant. In this case, it is an object of the present invention to provide an ink jet head, an ink jet head cartridge, and an ink jet device which can easily and reliably seal between common liquid chambers.

[0010]

In order to achieve the above object, an ink jet head according to the present invention comprises: a substrate on which a plurality of energy generating elements for generating energy for discharging ink are arranged in parallel; An orifice plate having a plurality of ejection openings, a plurality of recesses constituting walls of a plurality of common liquid chambers for temporarily holding ink supplied to the respective ejection openings, and And a plurality of ink passages respectively corresponding to each of the discharge ports and communicating with any one of the recesses, and from a side where the discharge ports are arranged in a wall between the recesses. A common liquid chamber separation groove that extends to the side opposite to the side where the respective discharge ports are disposed, and separates each of the common liquid chambers by being filled with a sealant therein, is further provided. A grooved top plate on which a dummy nozzle group including a dummy nozzle communicating with the liquid passage chamber separation groove and reaching the orifice plate and dummy nozzles located on both sides of the dummy nozzle and reaching the orifice plate respectively is arranged. Wherein the height of at least a portion of the dummy nozzle that contacts the common liquid chamber separation groove of the dummy nozzle communicating with the common liquid chamber separation groove is substantially equal to the height of the common liquid chamber separation groove. From the height of the common liquid chamber separation groove
Is within a range up to a height reduced by 20% .

At this time, a cross section of a portion of the dummy nozzle which communicates with the common liquid chamber separation groove, which is in contact with the common liquid chamber separation groove,
Product is approximately the same as the cross-sectional area of the tip section of the common liquid chamber separation groove.
From the area of, the sectional area of the tip section of the common liquid chamber separation groove is 2
0% reduced area, within the common liquid chamber
Contact with the common liquid chamber separation groove of the dummy nozzle communicating with the separation groove
The width of the portion to be formed is substantially the same as the width of the common liquid chamber separation groove.
To the width obtained by reducing the width of the common liquid chamber separation groove by 20%.
It may be within the range .

[0012] In each of the dummy nozzles, the area of the cross section of the dummy nozzle in contact with the wall may be smaller than the area of the cross section of the dummy nozzle adjacent to the ink flow path side. At a boundary surface between the nozzle and the wall, a gap of 10 μm or more may be provided between an inner wall of the dummy nozzle in contact with the wall and an inner wall of the common liquid chamber.

A fluid resistance element is provided in the ink flow path, and the dummy nozzle communicating with the common liquid chamber separation groove may not have a structure corresponding to the fluid resistance element. The dummy nozzle adjacent to the ink flow path side with respect to the dummy nozzle in contact with the wall may not have a structure corresponding to the fluid resistance element.

Further, the orifice plate may be provided with a through hole communicating with the dummy nozzle communicating with the common liquid chamber separation groove, and a groove communicating with the through hole.

In these ink jet heads, inks having different densities or different colors are supplied to the plurality of common liquid chambers, respectively, and the energy generating element may be an electrothermal converter.

Further, according to the method of manufacturing an ink jet head of the present invention, an orifice having a plurality of discharge ports for discharging ink is provided on a substrate on which a plurality of energy generating elements for generating energy for discharging ink are arranged in parallel. A plate, a plurality of recesses constituting walls of a plurality of common liquid chambers each of which temporarily holds ink supplied to each of the ejection ports, and a plurality of recesses which are located corresponding to the positions of the energy generating elements; Each of the discharge ports is formed with a plurality of ink flow paths communicating with any one of the recesses, and the discharge ports are arranged from a side of the wall between the recesses where the discharge ports are arranged. A common liquid chamber separation groove that extends to the opposite side and separates each of the common liquid chambers by being filled with a sealant therein, and further communicates with the common liquid chamber separation groove. In a method for manufacturing an ink jet head, a dummy nozzle reaching the orifice plate and a grooved top plate provided with a dummy nozzle group located on both sides of the dummy nozzle and each including a dummy nozzle reaching the orifice plate are joined. Of the dummy nozzles, at least a portion of the dummy nozzle that communicates with the common liquid chamber separation groove, which is in contact with the common liquid chamber separation groove, has a height substantially equal to the height of the common liquid chamber separation groove .
The height of the common liquid chamber separation groove reduced by 20% from the height
It is characterized by being formed by laser engraving so as to fall within the above range .

[0017] At this time, a portion in contact with the common liquid chamber separation groove of the dummy nozzles communicating with the common liquid chamber separation groove, its
Is the cross-sectional area of the cross section at the tip of the common liquid chamber separation groove.
The cross section of the tip section of the common liquid chamber separation groove from the same area
Formed so that the product is within the range up to the area reduced by 20%
And a dummy nozzle communicating with the common liquid chamber separation groove.
The width of the portion in contact with the common liquid chamber separation groove is
The width of the common liquid chamber separation groove from the width similar to the width of the chamber separation groove
May be formed in a range up to a width reduced by 20% .

[0018] Further, among the dummy nozzles, the area of the cross section of the dummy nozzle in contact with the wall may be formed smaller than the area of the cross section of the dummy nozzle adjacent to the ink flow path side. A gap of 10 μm or more may be provided between the inner wall of the dummy nozzle in contact with the wall and the inner wall of the common liquid chamber at the boundary surface between the dummy nozzle in contact with the wall and the wall.

Further, a fluid resistance element is provided in the ink flow path, and the dummy nozzle communicating with the common liquid chamber separation groove does not need to have a structure corresponding to the fluid resistance element. The dummy nozzle adjacent to the ink flow path side with respect to the dummy nozzle in contact with the dummy nozzle may not have a structure corresponding to the fluid resistance element.

The orifice plate may be formed with a through hole communicating with the dummy nozzle communicating with the common liquid chamber separation groove, and a groove communicating with the through hole.

In the method of manufacturing an ink jet head, the plurality of common liquid chambers may be formed and inks having different densities or different colors may be supplied, respectively. Alternatively, an electrothermal converter may be used as the energy generating element.

The structure corresponding to the fluid resistance element may be removed by a laser, and the laser processing may be performed on the orifice plate simultaneously with the laser processing for forming the discharge port. The through hole and the groove may be processed by using a laser, and may be performed at the same time as the removal processing of the structure corresponding to the fluid resistance element or the formation of the discharge port.

At this time, the laser processing may use an excimer laser, and the top plate of these ink jet heads may be formed by injection molding.

Further, an ink jet head cartridge having the ink jet head and a liquid storage container for holding the ink to be supplied to the ink jet head may be constituted. The ink jet head cartridge is provided, and the ink is supplied based on a recording signal. An inkjet recording apparatus that performs recording by ejecting from an ejection port of the inkjet head may be configured.

[0025]

In the ink jet head of the present invention configured as described above, the width, height, and cross-sectional area of the dummy nozzle communicating with the common liquid chamber separation groove are almost the same. Therefore, at the time of injection of the sealant, the sealant that entered the common liquid chamber separation groove by capillary action from the sealant injection port at the rear end of the top plate and reached the central dummy nozzle, and the common liquid chamber separation groove The fluid smoothly enters the front of the dummy nozzle communicating with the common liquid chamber separation groove without overflowing at the connection with the dummy nozzle.

Also, the area of the cross section of the dummy nozzle in contact with the wall of the recess is made smaller than the area of the cross section of the dummy nozzle adjacent to the ink flow path side, or at the boundary surface between the wall of the recess and the dummy nozzle. By having a gap of 10 μm or more between the inner wall of the common liquid chamber and the inner wall of the dummy nozzle, a difference in capillary force is generated between the dummy nozzle in contact with the wall of the concave portion and the dummy nozzle adjacent to the ink flow path side. The sealant that has reached portions other than the dummy nozzles communicating with the common liquid chamber separation groove is drawn into the dummy nozzles that are in contact with the walls of the concave portions, and is less likely to flow in the ink flow path (main nozzle) direction.

Further, by providing a fluid resistance element in the ink flow path and removing the structure corresponding to the fluid resistance element from the dummy nozzle communicating with the common liquid chamber separation groove, a recording head capable of high-speed recording is obtained. At the same time
At the time of manufacturing, since there is no fluid resistance element structure which is a major factor in obstructing the penetration of the sealing agent, the sealing agent can be smoothly entered.

In addition, by using the excimer laser to simultaneously perform the removal of the fluid resistance element and the formation of the groove at the same time as the formation of the discharge port to the orifice plate by one positioning, the process can be shortened and the cost is not increased. .

[0029]

Next, embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) First, the structure of the ink jet head will be described.

FIG. 1 is a perspective view of the ink jet head of the present invention as viewed from a side opposite to a discharge port. The ink jet head of this embodiment is an ink jet head for color printing having a resolution of 360 dpi, and a plurality of electrothermal transducers (not shown) for generating energy for ink ejection are provided on an aluminum plate 210 as a heat radiation member. Not shown) and a top plate 2 as a grooved member to be described later.
The silicon substrate 190 to which the substrate No. 00 is bonded is bonded with an adhesive having good thermal conductivity. At the rear end of the top plate 200 (the end opposite to the orifice plate 160),
A sealant injection port 170 for injecting a sealant for sealing between the common liquid chambers described below is provided. A drive circuit for driving the electrothermal transducer is built in the silicon substrate 190, and this drive circuit is located at the rear end of the silicon substrate 190 (the end opposite to the orifice plate 160).
Bonding pad 2 which is a terminal formed on
20 is electrically connected. Further, a wiring board 250 for relaying a driving signal between the driving circuit and the ink jet device is fixed to the aluminum plate 210, and the terminals of the wiring board 250 and the wire bonding pads 220 of the silicon substrate 190 are externally connected. They are electrically connected via bonding wires 230 as wiring.

Next, the top plate 200 will be described with reference to FIGS. FIG. 2 is a perspective view of the top plate 200 of the inkjet head shown in FIG. 1 as viewed from the side of the bonding surface with the silicon substrate 190, and FIG. 3 is a top view of the top plate 200 shown in FIG.
3 is an enlarged perspective view of the vicinity of a common liquid chamber separation wall of FIG. FIG. 4 is an enlarged perspective view of the vicinity of the ink flow path of the ink jet head of the prior application, FIG. 5 is a cross-sectional view of a main part of a mold for injection molding a top plate, and FIG. It is a perspective view of a piece.

As shown in FIG. 2, the top plate 200 is formed by integrally forming an orifice plate 160 and four ink supply ports 260, and four recesses 180 are respectively separated by a common liquid chamber separation wall 150. Is formed. Each of these recesses 180 is provided with a top plate 200 and a silicon substrate 190.
(See FIG. 1) are joined to form common liquid chambers for temporarily holding ink, and ink of a different color is supplied to each common liquid chamber via the ink supply port 260. You.

As shown in FIG. 3, the orifice plate 160 is provided with a plurality of discharge ports 105. Each of the discharge ports 105 is connected to one of the recesses 180 via the ink flow path 100. Communicating.

The above-described electrothermal transducer is provided in each of the ink flow paths 10.
0 is provided, and when a voltage is applied to the electrothermal converter based on the drive signal, the ink on the electrothermal converter is rapidly heated, and bubbles are generated in the ink flow path 100,
The ink is ejected from the ejection port 105 by the expansion of the bubble.

Further, as shown in FIG.
When each ink flow path 100 communicating with 0 is a single ink flow path group, between the ink flow path groups adjacent to each other,
A plurality of dummy nozzles 110 and 111 formed in the same manner as the respective ink flow paths 100 are formed.
The width is wider than that of the common liquid chamber separation groove 130 described later. Each of the dummy nozzles 110 and 111 communicates with the outside through a hole 120 formed in the orifice plate 160, and at least the center hole 120 of each of the holes 120 is connected to a groove 125 formed on the back surface of the orifice plate 160.

On the other hand, a common liquid chamber separation groove 130 extending from the end (front end) of the orifice plate 160 to the other end (rear end) is formed on the joint surface of each common liquid chamber separation wall 150 with the silicon substrate 190. The leading end communicates with the central dummy nozzle 110. The rear end of each common liquid chamber separation groove 130 is connected to the top plate 200 and the silicon substrate 190.
After sealing the common liquid chambers, a sealant injection port 170 for injecting a sealant to seal between the common liquid chambers is provided, and the width thereof is wider than the width of the common liquid chamber separation groove 130. . That is, the opening of the sealant injection port 170 is connected to the common liquid chamber separation groove 1.
30 is larger than the cross section.

In this embodiment, polysulfone is used as a molding resin, and a plasticizing temperature of about 400 ° C. and a mold temperature of about 150 are used.
The top plate 200 was formed by injection molding under the condition of ° C. The method of forming the top plate integrally having the ink flow path and the common liquid chamber is not limited to the injection molding method, but may be a liquid casting method using a similar mold, a transfer molding method, or the like. Absent. However, the gist of the present invention is to provide an inexpensive color recording head that can be miniaturized with good mass productivity, and from such a viewpoint, an injection molding method with a short molding cycle is desirable.

Here, a mold for injection-molding the top plate 200 will be described with reference to FIGS. This mold has a piece 73 for forming a common liquid chamber and an ink flow path 1.
A piece 71 for forming the ink flow path 100 is incorporated, and a plurality of rows of grooves 72 corresponding to the ink flow path 100 are formed at the tip of the piece 71 for forming the ink flow path 100. Above the part where the piece 71 for forming the ink flow path 100 is incorporated, the molding cavity 6 of the top plate 200 is provided.
4, a nesting pin 65 for forming an ink supply port is inserted in a piece 73 for forming a common liquid chamber.

In order to realize the three-dimensional shape required for the function design of the recording head, a mold portion (piece 73, see FIG. 5) corresponding to the concave shape of the common liquid chamber is formed by electric discharge machining. A plurality of groove-shaped mold portions (pieces 71, see FIG. 6) having a pitch of 70.5 μm (in the case of the 360 dpi recording head of this embodiment) corresponding to the ink flow path 100 are formed by cutting.

Next, a step of injecting the sealing agent based on the above-described configuration will be described with reference to FIG.

FIG. 7 is a sectional view of a main part showing a state of a common liquid chamber separating and sealing step of the ink jet head shown in FIG.

As shown in FIG. 7, when the sealant is injected, first, the sealant 1 is placed on the silicon substrate 190 behind the sealant injection port 170 by an injection means such as a dispenser.
71 is applied. The sealant 171 applied on the silicon substrate 190 is removed by the common liquid chamber separation groove 130 by capillary action.
And reaches the dummy nozzle 110 at the center. Then, the central dummy nozzle 110 is connected to the sealant 171.
Is filled with the sealant 1 from the central dummy nozzle 110
71 overflows and enters from the rear of the dummy nozzle 111 adjacent on the outside. This is sequentially repeated so that each of the dummy nozzles 110 and 111 is filled with the sealant 171. Also,
Since the dummy nozzles 110 and 111 are in communication with the outside through the holes 120, the sealant 171 is
Air escape when entering inside 111
The sealant 171 can reach zero. At this time, the sealant 171 is held in the hole 120 by its surface tension, and a complete seal between the common liquid chambers is achieved.

Further, since the groove 125 connected to the central dummy nozzle 110 is formed in the orifice plate 160, the silicon substrate 190 and the orifice plate 1
The sealant 171 is also injected into the contact surface with the seal 60, and the sealing is performed at that portion. When the sealant 171 enters a relatively large amount, the sealant 171 also has an effect of releasing the large amount of the sealant 171. .

Here, the ink flow path 100 in the mold for the top plate 200 forming the black ink flow path having a discharge amount of 80 ng and the color ink flow path having a discharge amount of 40 ng.
In the prior application, the piece 71 for forming the
0 and 40 for both dummy nozzles 110 and 111 for each color
It had the same height of μm. On the other hand, in the piece 73 for forming the common liquid chamber, a common liquid chamber separation groove communicating with the common liquid chamber and the dummy nozzles 110 and 111 is processed so as to have a substantially square cross section of 80 μm width and 80 μm height. (See FIG. 4).

For this reason, the sealant 171 having entered the common liquid chamber separation groove 130 has a sharp cross-sectional reduction at the connection portion with the dummy nozzle 110 at the center, although the width is almost the same but the height is half. This structure is the dummy nozzle 1
The sealant 171 overflows not only to the nozzle 11 but also to the ink flow path 100 (the main nozzle), and if the overflow is suppressed in the plurality of dummy nozzles 111, a good product is obtained. I was

Although the sealant 171 overflows at the connection between the common liquid chamber separation groove 130 and the central dummy nozzle 110, this is due to the die design due to the functional design of the recording head as described above. There is a need to split the structure
And the piece 73 cannot be assembled with a tolerance of 0,
In contrast to the piece 71 forming the ink flow path wall 100 with priority given to the adhesion to the silicon substrate 190, the piece 73 is 1 to 10 μm.
This means that a gap is formed due to the incorporation with a certain degree of offset, from which the sealant 171 overflows.

Therefore, even if physical properties such as viscosity and tack-free time of the sealant 171 or precision control of the injection position and the injection amount from the dispenser are performed, the common liquid chamber separation groove and the dummy nozzle communicating therewith can be used. In some cases, the sealant 171 did not enter smoothly at the connection part, and overflowed into the ink flow path (main nozzle) side.

FIG. 8 is an enlarged view of a main part showing a first embodiment of the ink jet head of the present invention.

As shown in FIG. 8, in this embodiment, the height of the ink flow path 100 is 40 μm, while the height of the central dummy nozzle 110 is 80 μm. The top plate 200 was formed by using the pieces 71 for forming the top plate.

When the sealant 171 is injected based on such a configuration, the sealant 171 enters the common liquid chamber separation groove 130 from the sealant injection port 170 at the rear end of the top plate 200 by capillary action, and the central dummy nozzle Sealant 171 that has reached 110
Corresponds to the central dummy nozzle 110 and the common liquid chamber separation groove 130.
Have the same width and height, and smoothly enter the front of the central dummy nozzle 110 without overflowing at the connection between the common liquid chamber separation groove 130 and the dummy nozzle 110.

Therefore, according to the structure of the present invention, the structure in which the height of the dummy nozzle 110 causing the obstruction of entry is lower than the height of the common liquid chamber separation groove 130 is improved to provide a structure that allows smooth entry. It was confirmed that the common liquid chamber separation was performed with good yield.

In this embodiment, a room-temperature-curable liquid silicone resin (TSE-399) manufactured by Toshiba Silicone Co., Ltd. was used as the sealant 171 for sealing the common liquid chamber separation groove 130. The viscosity and the tack-free property of about 5 minutes were the most suitable sealant for this example. In addition, the amount of the sealant 171 required to actually seal between the common liquid chambers is 0.1 mg or less per one common liquid chamber separation groove 130. However, according to the configuration of the present invention, the sealant 171 is not used. Even when the application amount of 3 mg to 10 mg allows stable ejection in the mass production process, there is no danger of clogging the ink flow path 100.

As a material for sealing the common liquid chamber separation groove 130, a liquid silicone resin or the like as described above is suitable from the past studies, but such a material is supplied from the rear end of the common liquid chamber of the ink jet recording head to the orifice plate. 16
It has been found that it is desirable to provide a groove having a cross-sectional shape of about 80 μm width and 80 μm height in order to ensure that the distance to the zero side is approached. This is because the smaller the cross section, the higher the capillary force, but the sealant 171
As the flow rate increases, the flow resistance increases, the sealant 171 stops in the middle of the common liquid chamber separation groove 130, and the sealing is incomplete. On the other hand, if the cross section is enlarged, the capillary force is weak, It is based on the experimental result that it stops on the way.

As a supplement, as a result of examining how large the cross-sectional area of the rear end of the central dummy nozzle 110 can be stably sealed without any problem in mass production, the common liquid chamber separating wall 150 was examined.
It is difficult to attach the silicon substrate 190 and the silicon substrate 190 in close contact with each other, so that the area is reduced to 20%. Also, as a result of independently examining the width and height, if the cross-sectional area is within the range of 20% reduction, the width or height is also 20%.
Was the limit. That is, it has been confirmed that the same effect is exerted when the height of the dummy nozzle 110 is about 64 μm, which is a 20% reduction, with respect to the height of the common liquid chamber separation groove 130 of 80 μm.

The entire dummy nozzle 110 at the center is 6
Even if it is not 4 μm or more, if the sealant 171 can smoothly enter the vicinity of the connection portion with the common liquid chamber separation groove 130 and is 64 μm or more, the height of the central dummy nozzle 110 on the orifice plate 160 side is, for example, as shown in FIG. As shown in 4
It may be gently inclined toward the height of 0 μm.

(Second Embodiment) FIG. 10 is an enlarged view of a main part of a second embodiment of the ink jet head of the present invention.

As shown in FIG. 10, in the present embodiment, the area of the cross section of the second dummy nozzle 311 from the center in contact with the common liquid chamber separation wall 350 is the third dummy nozzle 311 from the center adjacent to the ink flow path 300 side. Is different from the first embodiment in that the structure is smaller than the area product of the cross section of the dummy nozzle 311. The other configuration is the same as that of the first embodiment, and the description thereof is omitted.

In such a configuration, while the mass production of the top plate is being continued, the pieces for precisely forming the ink flow path and the pieces for forming the common liquid chamber are not desired due to the injection pressure or the like. Even if a step of 20 μm or more is generated, and the sealant may flow out to the ink flow path 300 (main nozzle) through the clearance of 20 μm or more between the common liquid chamber separation wall 350 and the silicon substrate, the center may be removed. Since a difference in capillary force is provided between the second dummy nozzle and the third dummy nozzle, the sealant reaching the dummy nozzles 311 other than the central dummy nozzle 310 is drawn into the second dummy nozzle 311. As a result, the ink does not easily flow in the direction of the ink flow path 300 (main nozzle), so that the ink flow path clogging problem did not occur.

Although the amount of the sealant necessary to actually seal the space between the common liquid chambers is 0.1 mg or less per one common liquid chamber separation groove 330, according to the structure of the present embodiment, the amount of the sealant is not more than 0.1 mg. 5mg ~ 50 which can apply stable amount of stop agent in mass production process
mg did not cause clogging of the ink flow path.

Therefore, in this embodiment, as described above, even if the step between the ink flow path forming piece and the common liquid chamber forming piece is 20 μm or more, the top plate forming die can be manufactured without maintenance. And a stable sealing is achieved.

It is to be noted that the same effect can be obtained as in the first embodiment, as long as the sectional area of the rear end of the central dummy nozzle 310 is reduced to 20% of the sectional area of the common liquid chamber separating groove 330. is there. At this time, the central dummy nozzle 310
Even if the whole is not 64 μm or more, if the vicinity of the connection portion with the separation groove can achieve a smooth sealant penetration at 64 μm or more,
The height of the dummy nozzle on the orifice plate side may be gently inclined toward a height of 40 μm, for example, as shown in FIG.

(Third Embodiment) As shown in FIG. 14, in this embodiment, the same silicon substrate as in the first embodiment was used, but in order to realize high-speed recording at 10 kHz or more, the refilling property was increased. And the length of the ink flow path 400 is 30
A fluid resistance element 90 is provided near the rear end of the ink flow path 400 in order to set the width as short as 0 μm and to suppress meniscus vibration at the ejection port 405 (orifice). The use of the fluid resistance element 90 to realize high-speed recording is a known technique.

The specific dimensions in this embodiment are as follows: the height of the ink flow path 400 is 45 μm, the height of the fluid resistance element 90 is 20 μm, the length of the ink flow path 400 is 300 μm, and the position of the fluid resistance element 90 is 3 from the rear end of the ink flow path 400
The position was 0 μm.

Here, as shown in FIG. 12, when the fluid resistance element 91 is also provided in the central dummy nozzle 410 to separate and seal the common liquid chamber, the sealant that has entered the common liquid chamber separation groove 430 is formed. In such a case, there was a possibility that smooth entry was hindered by the structure of the fluid resistance element 91, the sealant overflowed into the ink flow path 400, and the ink flow path 400 was clogged.

On the other hand, the top plate is most preferably formed by injection molding from the viewpoint of mass productivity. In this case, the portion forming the ink flow path 400 is a piece 471, and the portion forming a plurality of common liquid chambers is a piece 473. It is desirable from the viewpoint of the selection of the processing method and the cost to incorporate into the die. However, as shown in FIG. 13, V for the fluid resistance element is provided on the groove row 472 of the piece 471 for forming the ink flow path 400.
Although the groove 92 is formed, the formation of the piece 471 that avoids the formation of the fluid resistance element 91 in the central dummy nozzle 410 communicating with the common liquid chamber separation groove 430 requires a complicated shape. Therefore, the manufacturing cost is increased.

FIG. 14 is an enlarged view of a main part showing a third embodiment of the ink jet head of the present invention. 15 is a sectional view of the ink jet head shown in FIG. 14, wherein FIG. 15A is a sectional view of an ink flow path, and FIG. 15B is a sectional view of a central dummy nozzle.

In this embodiment, as shown in FIG. 14, fluid resistance elements 90 and 91 are provided in the ink flow path 400 and the dummy nozzle 411, and the fluid resistance elements 90 and 91 are provided in the central dummy nozzle 410 communicating with the common liquid chamber separation groove 430. Is the fluid resistance element 91
This is different from the first embodiment in that the structure is not provided with the above. The other configuration is the same as that of the first embodiment, and the description thereof is omitted.

In such a configuration, at the time of ink ejection, the meniscus vibration of the ink flow path 400 is suppressed by the fluid resistance element 90, and at the same time, the common liquid chamber separating and sealing step is performed smoothly as in the first embodiment. Entry of the sealant is performed.

In this embodiment, the mass production is maintained in the method of forming the ink flow path forming piece 471, that is, the fluid resistance element 91 is also formed in the dummy nozzle 410 at the center when the top plate is formed. Means for obtaining an ink jet head as shown in FIG. 14 are also proposed.

That is, as shown in FIG. 15 (b), using a laser capable of ablation processing such as an excimer laser, a fluid resistance element 91 of a dummy nozzle and a dug portion 93 of a nozzle ceiling near the dummy nozzle. This is a method of removing.

This processing may be set as a single step. However, since an ink jet head using a top plate has a great feature in that it can be manufactured stably at low cost with good mass productivity, FIG. 15B for forming the discharge port 405 in the orifice plate 460 shown in FIG.
It is most preferable to perform the laser processing for forming the hole 420 and the groove 425 at the same time as shown in FIG.

Further, in order to sufficiently obtain the effects of the present embodiment, it is necessary to provide a through hole in the dummy nozzle proposed by the present applicant in Japanese Patent Application No. 5-305186, or to provide the through hole on the back surface of the orifice plate. Some have a carved groove for connection. These processes are performed by the ejection port 4 of the ink flow path 400.
It is possible to perform the laser processing for the formation of 05 or the like at the same time as the single positioning, which is desirable in terms of processing cost and processing accuracy.

Hereinafter, the excimer laser processing method of this embodiment will be described.

FIG. 16 is a diagram showing a configuration of an excimer laser processing apparatus. 17A and 17B are views showing a mask and a shutter for excimer laser processing. FIG. 17A is a view of a mask, and FIG. 17B is a view of a shutter for shielding the mask. FIG. 18 is a chart illustrating a state of laser processing.

In FIG. 16, the excimer laser body 3
Excimer laser light 31 oscillated from 2 passes through an optical lens unit 34, a power monitor unit 33, an optical mask 35, and a shutter 42, and is applied to a work attached to a mount 36.

The power monitor section 33 splits a part of the laser beam with a half mirror and monitors the laser power with a power meter. The optical mask 35 includes a mask portion having a through hole 51 for forming an ejection port 405 and a hole 420, and a hole 4 corresponding to a dummy nozzle 410.
Mask portion with through-holes 52 forming holes 20, holes 42
Groove through-hole 53 for forming a groove 425 communicating with zero
And a mask portion having a through-hole 54 for excavating the fluid resistance element 91 formed in the dummy nozzle 410 (see FIG. 17A). The shutter 42 is connected to the optical mask 35.
Is partially shielded, and the laser irradiation time is controlled (see FIG. 17B). The optical lens unit 34 is provided immediately after the excimer laser main body 32 and immediately before the mounting base 36, and is a lens group that irradiates a work with excimer laser light in a desired pattern. Also, the mounting base 36
, Also serves as a work moving stage and mounting and fixing, and the observation camera 37 performs image processing while observing work processing. The control unit 38 controls the laser oscillation timing, the output power of the laser, and the work position determination based on the image processing result of the observation camera 37 and the output result of the power monitor unit 33.

In the above configuration, the processing conditions are as follows: a KrF excimer laser (wavelength: 248 nm)
With respect to 00, irradiation is performed for 2 seconds at a repetition frequency of 200 PPS and a pulse energy density of 800 mJ / cm ² perpendicular to an orifice plate provided at an angle of about 10 degrees.
At this time, the shutter was opened after the irradiation for 1.5 seconds, and 100 pulses were irradiated for the remaining 0.5 seconds. FIG. 18 shows the state of this processing. Fluid resistance element 91
After the removal, the fluid resistance element 91 is not only completely removed, but also the height of the dummy nozzle is cut down to substantially the same height as the common liquid chamber separation groove (FIG. 14).

In this embodiment, ablation was performed using an excimer laser. However, depending on the material of the top plate, the amount to be removed, damage during the removal, the amount of by-products generated, and the like, A harmonic YAG laser, a TEA-CO ₂ laser capable of ablation processing, or the like may be selected.

(Fourth Embodiment) FIG. 19 is an enlarged view of a main part showing a fourth embodiment of the ink jet head of the present invention.

In this embodiment, as shown in FIG. 19, the second dummy nozzle
The second embodiment is different from the second embodiment in that a gap of 10 μm or more is provided between the second liquid chamber separation wall 550 and the end of the common liquid chamber separation wall 550. The other configuration is the same as that of the second embodiment, and the description is omitted.

With such a configuration, the common liquid chamber separation wall 5 of the top plate is formed due to a difference in molding cavities during mass production of the top plate.
Even if the gap between the substrate 50 and the substrate varies, the second dummy nozzle 511 from the center in contact with the common liquid chamber separation wall 550
And the common liquid chamber separation wall 550 are provided with a gap of 10 μm or more, and as described in the second embodiment, a difference in capillary force is generated between the second dummy nozzle and the third dummy nozzle. Dummy nozzles 5 other than the central dummy nozzle 510
The sealant reaching the rear end of the second dummy nozzle 51
1 and hardly flows in the direction of the ink flow path 500 (main nozzle), so that a large amount of a sealing agent is applied, which enters the common liquid chamber separation groove 530, and is connected to the central dummy nozzle 510. , The problems such as clogging of the ink flow path 500 and incomplete sealing are solved.

Further, while the ink flow path wall is in close contact with the substrate, the common liquid chamber separation wall 55 near the sealant injection port of the top plate.
0 is bonded with a gap of 30 μm, which is originally not desired, from the vicinity of the sealant injection port to the common liquid chamber separation groove 53.
As described above, even if the sealant enters from under the common liquid chamber wall or from inside the common liquid chamber wall, the second dummy nozzle 511 is drawn in by the capillary force as described above. It was confirmed that the effect of enlarging was exhibited.

(Fifth Embodiment) Each of the embodiments described above has
This is an example of a four-liquid-chamber head for color recording in which 24 nozzles of each color of yellow, magenta, and cyan having an ejection volume of ng are provided 24 each and 64 nozzles of black ink having an ejection volume of 80 ng are provided. However, the present embodiment is an example of a monochrome four-liquid chamber head for quinary recording of dark black ink, medium dark black ink, medium light black ink, and light black ink.

FIG. 20 is an enlarged view of a main part showing a fifth embodiment of the ink jet head of the present invention.

As shown in FIG. 20, in the present embodiment, the central dummy nozzle 610 communicating with the common liquid chamber separation groove 630 is provided.
In addition, the same fluid resistance element removing process is performed on the third dummy nozzle 611 from the center to form the dug portion 693, and the groove 625 is formed not only on the center dummy nozzle 610 but also on the third dummy nozzle 610 from the center. The difference from the first embodiment is that the dummy nozzle 611 is also provided. The other configuration is the same as that of the first embodiment, and a description thereof will be omitted.

With this configuration, the incorporation relationship between the pieces forming the common liquid chamber and the pieces forming the ink flow path and the dummy nozzle has been described.
Has a structure that does not completely adhere to the substrate and floats.
For this reason, the sealant that enters from the sealant injection port enters the common liquid chamber separation groove 630, but actually forms a meniscus slightly below and inside the common liquid chamber separation wall 650. . If the pieces for forming the ink flow path and the pieces for forming the common liquid chamber are in a normal assembling relation, there is no problem. However, as the injection molding is repeated, the assembling relation shifts due to the injection pressure (generally the difference increases). , Even if the top plate becomes 20 μm or more, the third dummy nozzle from the center is dug by the excimer laser and the cross-sectional area is increased. As a result, the second dummy nozzle has a smaller cross-sectional area than the third dummy nozzle. , Because the sealant easily forms a meniscus, and the capillary force becomes stronger than the third one,
Even for the sealant flowing out from the common liquid chamber separation groove 630 under the common liquid chamber separation wall 650, stable production can be performed without performing die maintenance for top plate molding. Further, since the groove 625 is formed not only on the orifice plate 660 side of the central dummy nozzle 610 but also from the center to the third dummy nozzle 611, the sealant may enter the third dummy nozzle by any chance. The groove also allows excess sealant to escape.

(Sixth Embodiment) FIG. 21 is an enlarged view of a main part showing a sixth embodiment of the ink jet head of the present invention.

As shown in FIG. 21, in the present embodiment, the central dummy nozzle 710 communicating with the common liquid chamber separation groove 730 is provided.
Is an example of two instead of one. The other configuration is the same as that of the first embodiment, and a description thereof will be omitted.

Even in such a structure, if the total cross-sectional area of the rear ends of the two central dummy nozzles 710 is within 20% of the cross-sectional area of the front end of the common liquid chamber separation groove 730,
The effect is exhibited by the operation described in the first embodiment.

In each of the embodiments described above, an ink jet head having four common liquid chambers is shown for convenience. However, a recording head having more common liquid chambers or two or three common liquid chambers may be used. It goes without saying that the same applies to the case of a recording head having. Also,
The ink flow paths connected to the respective common liquid chambers may be a combination in which the arrangement pitch of the ink flow paths is different, or a combination in which the same arrangement pitch and the volume of the ink discharge droplet are different.

In each of the embodiments described above,
Although an example is shown in which a hole is provided at the tip (orifice plate side) of the dummy nozzle, the gap in the dummy nozzle (about 5 to 10 μm) is provided between the orifice plate and the end face of the substrate. When air can escape to the outside, the through-hole does not necessarily have to be provided.

(Seventh Embodiment) Next, an ink jet recording apparatus using any one of the ink jet heads of the above embodiments will be described.

FIG. 22 is a schematic perspective view of one embodiment of the ink jet recording apparatus of the present invention. In FIG. 22, the lead screw 5004 in which the spiral groove 5005 is engraved is
In conjunction with the forward / reverse rotation of the drive motor 5013, the drive motor 5013 is rotationally driven via drive force transmission gears 5011 and 5009. The carriage HC is engaged with the spiral groove 5005 by a pin (not shown), and is slidably guided by the guide rail 5003, so that the carriage HC can reciprocate in the directions indicated by arrows a and b. I have. An inkjet head cartridge 5 in which an inkjet head having the same configuration as that shown in each of the above-described embodiments and a liquid storage container that holds ink to be supplied to the inkjet head are integrated.
030 is removably mounted on the carriage HC. As a result, color printing can be performed with one inkjet head, and a small-sized inkjet printing apparatus for color printing is realized.

The paper pressing plate 5002 applies the recording medium P to the platen roller 50 in the moving direction of the carriage HC.
Press against 00. Photo coupler 5007, 500
Reference numeral 8 constitutes a home position detecting means for confirming the presence of the lever 5006 of the carriage HC in this area and performing reverse rotation of the driving motor 5013 in the rotation direction.
A cap member 5022 for capping the front surface of the inkjet head cartridge 5030 includes a support member 5016.
The ink jet head cartridge 5030 is provided with a suction unit 5015 and performs suction recovery of the ink jet head cartridge 5030 through the opening 5023 in the cap. Body support plate 5
A support plate 5019 is attached to 018, and the cleaning blade 5017 slidably supported by the support plate 5019 is moved in the front-rear direction by driving means (not shown). The form of the cleaning blade 5017 is not limited to the illustrated one, and it is needless to say that a known one can be applied to this embodiment. The lever 5021 is used to start the suction recovery operation, and moves with the movement of the cam 5020 abutting on the carriage HC, and the driving force from the driving motor 5013 is transmitted by a known transmission means such as a gear 5010 or clutch switching. Movement is controlled.

The capping, cleaning, and suction recovery processes are performed at corresponding positions by the action of the lead screw 5004 when the carriage HC comes to the home position side area. If a desired operation is performed at a known timing, any of the embodiments can be applied.

The present invention is particularly directed to an ink-jet type ink-jet head which performs recording by forming flying droplets using thermal energy among ink-jet recording methods.
In the ink jet recording apparatus, an excellent effect is provided.

The typical structure and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding nucleate boiling to an electrothermal transducer arranged corresponding to the sheet or liquid path in which This is effective because heat energy is generated in the electrothermal transducer, causing film boiling on the heat-acting surface of the recording head, and as a result, air bubbles in the liquid (ink) corresponding one-to-one to this drive signal can be formed. It is. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable.

As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the structure of the ink jet head, in addition to the combination structure (a linear liquid flow path or a right-angled liquid flow path) of a discharge port, a liquid path, and an electrothermal converter as disclosed in the above-mentioned respective specifications. The present invention also includes a configuration using U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, which disclose a configuration in which a heat acting portion is arranged in a bending region.

In addition, JP-A-59-123670, which discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, or absorbs pressure waves of thermal energy. The present invention is also effective as a configuration based on JP-A-59-138461, which discloses a configuration in which an opening corresponds to a discharge unit.

It is preferable to add recovery means for the ink jet head, preliminary auxiliary means, and the like provided as components of the ink jet recording apparatus of the present invention since the effects of the present invention can be further stabilized. . If these are specifically mentioned, capping means for the inkjet head, cleaning means, pressurizing or suction means, preheating means using an electrothermal transducer or another heating element or a combination thereof, and recording Performing a preliminary ejection mode for performing another ejection is also effective for performing stable printing.

In addition, as an embodiment of the ink jet recording apparatus according to the present invention, in addition to those provided integrally or separately as an image output terminal of an information processing apparatus such as a word processor and a computer, a copying apparatus combined with a reader, May take the form of a facsimile machine having a transmission / reception function. Further, the present invention may be applied to a printing apparatus that performs recording on a cloth or a thread.

[0104]

Since the present invention is configured as described above, the following effects can be obtained.

In the ink jet head according to the first or second aspect, the cross-sectional area of the central dummy nozzle is substantially equal to or larger than the cross-sectional area of the common liquid chamber separation groove.
Since it is within 0% reduction, it enters the common liquid chamber separation groove by capillary action from the sealant injection port at the rear end of the top plate,
The sealant reaching the central dummy nozzle smoothly enters the front of the central dummy nozzle without resistance without overflowing at the connection between the common liquid chamber separation groove and the dummy nozzle.
Therefore, common liquid chamber separation can be performed with good yield.

In the ink jet head according to the third, fourth and sixth aspects, the area of the cross section of the dummy nozzle in contact with the wall of the concave portion is smaller than the area of the cross section of the dummy nozzle adjacent to the ink flow path side. Alternatively, by providing a gap of 10 μm or more between the inner wall of the common liquid chamber and the inner wall of the dummy nozzle at the boundary surface between the wall of the recess and the dummy nozzle, the dummy nozzle adjacent to the wall of the recess is adjacent to the ink flow path side. A difference in capillary force is generated between the dummy nozzle and the dummy nozzle, and the sealant that has reached a portion other than the dummy nozzle that communicates with the common liquid chamber separation groove is drawn into the dummy nozzle that is in contact with the wall of the concave portion, and the ink flow path (real nozzle) It becomes difficult to flow in the direction. Even if a large amount of sealant is applied, problems such as clogging of the ink flow path and incomplete sealing can be solved, and stable production can be performed without maintenance of a die for top plate molding.

In the ink jet head according to the fifth aspect, the fluid resistance element is provided in the ink channel, and the structure corresponding to the fluid resistance element is removed from the dummy nozzle communicating with the common liquid chamber separation groove. At the same time as obtaining a recording head capable of high-speed recording, at the time of manufacturing, there is no fluid resistance element structure which is a major factor in obstructing the penetration of the sealant, so that the sealant can be smoothly entered.

In the ink jet head according to the present invention, the dummy nozzle connected to the separation groove is provided with a through hole and communicates with the outside, so that the air in the separation groove flows from the through hole to the outside when the sealant is injected. Since it escapes, the sealant can be reliably injected into the through hole, and even if the discharge amount varies somewhat, the groove connected to this through hole absorbs,
The head can be manufactured with good yield without causing clogging of the ink flow path while realizing reliable sealing.

In the ink jet head according to the eighth aspect, recording with a plurality of types of ink can be performed by one ink jet head, and a small ink jet apparatus can be achieved.

In the ink-jet head according to the ninth aspect, by using an electrothermal converter as the energy generating element, it is possible to achieve ejection of a liquid (ink) having excellent response.

In the method of manufacturing an ink jet head according to the present invention, by excavating the dummy nozzle by using an excimer laser, it is not necessary to form a die structure excluding the fluid resistance element only at the dummy nozzle portion. Since the excavation process can be performed by excimer laser at the same time as the formation of the discharge port, it can be processed within the same time with one positioning, and there is no cost increase factor. Can be provided. Further, by manufacturing the top plate by an injection molding method, it is possible to reduce the size and provide an inexpensive color recording head with good mass productivity.

The ink jet head cartridge and the ink jet recording apparatus according to the present invention are provided with the above-described ink jet head according to the present invention. And good ink ejection can be performed. Further, recording with a plurality of types of ink can be performed by one ink jet head, and a small ink jet device can be achieved.
This is particularly effective in color printing.

[Brief description of the drawings]

FIG. 1 is a perspective view of an inkjet head of the present invention as viewed from a side opposite to a discharge port.

FIG. 2 is a perspective view of a top plate of the inkjet head shown in FIG. 1 as viewed from a bonding surface side with a silicon substrate.

FIG. 3 is an enlarged perspective view of the vicinity of a common liquid chamber separation wall of the top plate shown in FIG. 2;

FIG. 4 is an enlarged perspective view of the vicinity of an ink flow path of the ink jet head of the prior application.

FIG. 5 is a sectional view of a main part of a mold for injection-molding a top plate.

FIG. 6 is a perspective view of a piece for forming an ink flow channel array.

FIG. 7 is a cross-sectional view of a main part showing a state of a common liquid chamber separating and sealing step of the inkjet head shown in FIG. 8;

FIG. 8 is an enlarged view of a main part showing a first embodiment of the ink jet head of the present invention.

FIG. 9 is an enlarged view of a main part showing a modification of the first embodiment of the ink jet head of the present invention.

FIG. 10 is an enlarged view of a main part showing a second embodiment of the ink jet head of the present invention.

FIG. 11 is an enlarged view of a main part showing a modification of the second embodiment of the ink jet head of the present invention.

FIG. 12 is an enlarged view of a main part of the ink jet head of the prior application provided with a fluid resistance element.

FIG. 13 is a perspective view of a piece for forming an ink flow path row provided with a fluid resistance element.

FIG. 14 is an enlarged view of a main part showing a third embodiment of the ink jet head of the present invention.

15 is a cross-sectional view of the inkjet head shown in FIG. 14, wherein FIG. 15A is a cross-sectional view of an ink flow path, and FIG. 15B is a cross-sectional view of a central dummy nozzle.

FIG. 16 is a diagram illustrating a configuration of an excimer laser processing apparatus.

17A and 17B are diagrams showing a mask and a shutter for excimer laser processing, wherein FIG. 17A is a diagram of a mask, and FIG. 17B is a diagram of a shutter for shielding the mask.

FIG. 18 is a chart illustrating a state of laser processing.

FIG. 19 is an enlarged view of a main part showing a fourth embodiment of the ink jet head of the present invention.

FIG. 20 is an enlarged view of a main part showing a fifth embodiment of the ink jet head of the present invention.

FIG. 21 is an enlarged view of a main part showing a sixth embodiment of the ink jet head of the present invention.

FIG. 22 is a schematic perspective view of an embodiment of the ink jet device of the present invention.

FIG. 23 is a perspective view of a conventional single color printing ink jet head viewed from a side opposite to a discharge port.

24 is a perspective view of the top plate of the ink jet head shown in FIG. 23 as viewed from a bonding surface with a silicon substrate.

FIG. 25 is a perspective view of an inkjet unit for color printing using a plurality of inkjet heads shown in FIG. 23;

[Explanation of symbols]

31 Excimer laser beam 32 Excimer laser main body 33 Power monitor unit 34 Optical lens unit 35 Optical mask 36 Mounting base 37 Observation camera 38 Control unit 42 Shutter 51, 52 Through hole 53 Groove through hole 54 Drilling through hole 64 Molding cavity 65 Nesting pin 71, 471 piece 72, 472 groove 73 piece 90 Fluid resistance element 91 Fluid resistance element 92 V groove 93, 693 Drilling part 105, 405 Discharge port 100, 300, 400, 500, 600 Ink flow path 110, 111 , 310, 311, 410, 411, 5
00, 511, 610, 611, 710 Dummy nozzle 120, 420 hole 125, 425, 625 groove 130, 330, 430, 530, 630, 730
Common liquid chamber separation groove 150, 350, 550, 650 Common liquid chamber separation wall 160, 360, 460, 660 Orifice plate 170, 370 Sealant inlet 171 Sealant 180 Recess 190, 390 Silicon substrate 200, 400 Top plate 210 Aluminum plate 220, 420 Wire bonding pad 230, 430 Bonding wire 240, 440 Sealant coating section 250 Wiring board 260 Ink supply port 5000 Platen roller 5002 Paper press plate 5003 Guide rail 5004 Lead screw 5005 Spiral groove 5006, 5021 Lever 5007 , 5008 Photocoupler 5009, 5011 Driving force transmission gear 5010 Gear 5013 Driving motor 5015 Suction means 5016 Support member 5017 Cleaning blade 5018 Opening support plate 5019 supporting plate 5020 cam 5022 cap member 5023 in the cap 5030 ink jet head cartridge HC carriage P recording medium

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor: Masashi Miyagawa 3-30-2, Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor: Hajime Yamamoto 3-30-2, Shimomaruko, Ota-ku, Tokyo Canon Inside (72) Inventor Minoru Nozawa 3-30-2 Shimomaruko, Ota-ku, Tokyo Within Canon Inc. (56) References JP-A-7-148926 (JP, A) JP-A-61-19367 (JP) , A) (58) Field surveyed (Int. Cl. ⁷ , DB name) B41J 2/05 B41J 2/16

Claims (25)

(57) [Claims] 1. A substrate on which a plurality of energy generating elements for generating energy for discharging ink are arranged in parallel, an orifice plate having a plurality of discharge ports from which ink is discharged, and each of the discharge ports. A plurality of recesses constituting walls of a plurality of common liquid chambers for temporarily holding the supplied ink, and the plurality of ejection ports are respectively located at positions corresponding to the positions of the energy generating elements, and A plurality of ink flow paths communicating with any one of the plurality of ink passages, and extending from a side where the discharge ports are arranged to a side opposite to a side where the discharge ports are arranged in a wall between the concave portions, and A common liquid chamber separation groove that separates each of the common liquid chambers by being filled with a sealant is provided, and further, a dummy nozzle that communicates with the common liquid chamber separation groove and reaches the orifice plate. A dummy nozzle group located on both sides of the dummy nozzle and reaching the orifice plate; and a grooved top plate, and at least the common liquid chamber separation groove among the dummy nozzles The height of a portion of the dummy nozzle communicating with the common liquid chamber separation groove is substantially equal to the height of the common liquid chamber separation groove.
The height of the common liquid chamber separation groove was reduced by 20% from the height of
An inkjet head characterized by being within a range up to a height . 2. An ink jet head according to claim 1, cross sectional area of the portion in contact with the common liquid chamber separation groove of the dummy nozzles communicating with the common liquid chamber separation groove, the tip section of the common liquid chamber separation groove From the same area as the cross-sectional area of
Up to an area that is 20% smaller in cross-sectional area at the tip of the separation groove
A dummy nozzle that is within the range and communicates with the common liquid chamber separation groove.
The width of the portion of the nozzle that contacts the common liquid chamber separation groove is
The width of the common liquid chamber separation groove is set to be approximately the same as the width of the liquid passage chamber separation groove.
An ink jet head having a width up to a width reduced by 20% . 3. The ink jet head according to claim 1, wherein, among the dummy nozzles, an area of a cross section of a dummy nozzle in contact with the wall is equal to a cross section of a dummy nozzle adjacent to the ink flow path side. An inkjet head characterized by being smaller than the area. 4. The ink jet head according to claim 1, wherein at a boundary surface between the dummy nozzle in contact with the wall and the wall,
An ink jet head having a gap of 10 μm or more between an inner wall of a dummy nozzle in contact with the wall and an inner wall of the common liquid chamber. 5. The ink jet head according to claim 1, wherein a fluid resistance element is provided in the ink flow path, and the dummy nozzle communicates with the common liquid chamber separation groove. An ink jet head having no structure corresponding to the fluid resistance element. 6. The ink jet head according to claim 5, wherein a dummy nozzle adjacent to the ink flow path side does not have a structure corresponding to the fluid resistance element with respect to a dummy nozzle contacting the wall. Inkjet head. 7. The ink jet head according to claim 1, wherein the orifice plate has a through-hole communicating with a dummy nozzle communicating with the common liquid chamber separation groove, and a through-hole formed in the orifice plate. An ink-jet head having a communication groove. 8. The ink jet head according to claim 1, wherein the plurality of common liquid chambers are supplied with inks having different densities or different colors, respectively. . 9. The ink jet head according to claim 1, wherein the energy generating element is an electrothermal converter. 10. An orifice plate having a plurality of ejection openings for ejecting ink on a substrate on which a plurality of energy generating elements for generating energy for ejecting ink are arranged in parallel, and a supply to each of the ejection openings. And a plurality of recesses constituting walls of a plurality of common liquid chambers for temporarily holding ink to be performed, and each of the ejection ports is located corresponding to the position of each of the energy generating elements, and each of the discharge ports is provided in one of the respective recesses. And forming a plurality of ink flow paths communicating with one or more, and extending from a side where the discharge ports are arranged to a side opposite to a side where the respective discharge ports are arranged in a wall between the concave portions, and is internally formed. Arranging a common liquid chamber separation groove for separating each of the common liquid chambers by being filled with a sealing agent, and further, a dummy nozzle that reaches the orifice plate by communicating with the common liquid chamber separation groove. In a method of manufacturing an inkjet head for joining a grooved top plate provided with a dummy nozzle group located on both sides of the dummy nozzle and a dummy nozzle each reaching the orifice plate, at least one of the dummy nozzles the portion in contact with the common liquid chamber separation groove of the dummy nozzles communicating with the common liquid chamber separation groove, the height, the height of the common liquid chamber separation groove
The height of the common liquid chamber separation groove is reduced by 20% from the same height
A method for manufacturing an ink jet head, wherein the ink jet head is formed by laser engraving so as to fall within a range up to a reduced height . 11. The method for manufacturing an ink jet head according to claim 10, wherein a portion of the dummy nozzle communicating with the common liquid chamber separation groove, which is in contact with the common liquid chamber separation groove, has a sectional area of the common liquid chamber separation groove. From the same area as the cross-sectional area of the tip cross section of the separation groove,
Area where the cross-sectional area of the cross section at the tip of the passage separation groove is reduced by 20%
And the common nozzle of the dummy nozzle communicating with the common liquid chamber separation groove.
The width of the part in contact with the liquid chamber separation groove is the same as that of the common liquid chamber.
The width of the common liquid chamber separation groove is set to 2 from the same width as the separation groove.
A method for manufacturing an ink-jet head, wherein the ink-jet head is formed so as to be in a range up to a width reduced by 0% . 12. The method of manufacturing an ink jet head according to claim 10, wherein, among the dummy nozzles, an area of a cross section of a dummy nozzle in contact with the wall is equal to a dummy nozzle adjacent to the ink flow path side. A method for manufacturing an ink jet head, wherein the ink jet head is formed to be smaller than an area of a cross section. 13. The method for manufacturing an ink jet head according to claim 10, wherein: at a boundary surface between the dummy nozzle contacting the wall and the wall,
A method for manufacturing an ink jet head, wherein a gap of 10 μm or more is provided between an inner wall of a dummy nozzle in contact with the wall and an inner wall of the common liquid chamber. 14. The method of manufacturing an ink jet head according to claim 10, wherein a fluid resistance element is provided in the ink flow path, and the dummy nozzle communicates with the common liquid chamber separation groove. And a method for manufacturing an ink jet head, wherein a structure corresponding to the fluid resistance element is not provided. 15. The method for manufacturing an ink jet head according to claim 14, wherein the dummy nozzle adjacent to the ink flow path does not have a structure corresponding to the fluid resistance element with respect to the dummy nozzle contacting the wall. A method for manufacturing an ink jet head, comprising: 16. The method for manufacturing an ink jet head according to claim 10, wherein the orifice plate has a through hole communicating with a dummy nozzle communicating with the common liquid chamber separation groove, and A method for manufacturing an ink jet head, wherein a groove communicating with a through hole is formed. 17. The method for manufacturing an ink jet head according to claim 10, wherein inks of different densities or different colors are supplied to the plurality of common liquid chambers. A method for manufacturing an ink jet head. 18. The method for manufacturing an ink jet head according to claim 10, wherein an electrothermal converter is used as the energy generating element. 19. The method for manufacturing an ink jet head according to claim 14, wherein a structure corresponding to the fluid resistance element is removed by a laser. 20. The method for manufacturing an ink jet head according to claim 10, wherein the laser processing is performed on the orifice plate simultaneously with the laser processing for forming the discharge ports. A method for manufacturing an ink jet head, comprising: 21. The method for manufacturing an ink jet head according to claim 16, wherein the through holes and the grooves are processed using a laser, and a structure corresponding to the fluid resistance element is removed. Alternatively, the method is performed simultaneously with the formation of the discharge port. 22. The method for manufacturing an ink jet head according to claim 10, wherein said laser processing uses an excimer laser. 23. The method of manufacturing an ink jet head according to claim 10, wherein the top plate is formed by injection molding. 24. An inkjet head cartridge comprising: the inkjet head according to claim 1; and a liquid storage container that holds ink to be supplied to the inkjet head. 25. An ink jet recording apparatus comprising the ink jet head cartridge according to claim 24, wherein the recording is performed by discharging ink from a discharge port of the ink jet head based on a recording signal.