JP3121858B2 - Cooling structure of electrical equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling structure for cooling electric equipment such as a static induction device or a semiconductor converter by the latent heat of evaporation of a cooling medium.

[0002]

2. Description of the Related Art FIG. 9 is a cross-sectional view showing an example of a conventional cooling structure for electric equipment (see, for example, Japanese Patent Publication No. 60-14493). An electric device body 1 as a heating element is housed in a sealed tank 2 in which an insulating gas 3 such as SF ₆ gas is sealed. A liquid reservoir 6 for storing a liquefied cooling medium 4 is disposed at the bottom of the tank 2. Further, a liquid feed pipe 8 for guiding the cooling medium 4 of the liquid reservoir 6 to a sprayer 9 by a pump 7 interposed is provided outside the tank 2. The sprayer 9 is disposed in the upper part of the internal space of the tank 2, and a number of small holes through which the cooling medium 4 passes are provided on the lower surface of the sprayer 9. And tank 2
A condenser 10 communicating with the internal space of the tank 2 is disposed on a side surface of the tank 2.

[0003] In FIG. 9, the electric apparatus main body 1 is cooled by receiving a flow 4 A of a cooling medium 4 sprayed from an upper sprayer 9. That is, when the cooling medium 4 approaches or comes into contact with the heat generating portion of the electric device main body 1, the cooling medium in that portion is heated and evaporated, thereby removing latent heat of evaporation from the electric device main body 1. The evaporated cooling medium 4 moves to the condenser 10 by natural convection together with the insulating gas 3. The cooling medium 4 liquefied by the condenser 10 flows by gravity.
It becomes 4B and returns to the reservoir 6.

[0004]

However, the conventional apparatus as described above has a drawback that it is difficult to uniformly spray the cooling medium in a liquid state over the entire surface of the main body of the electric equipment.

That is, in the conventional sprayer, the cooling medium is sprayed from the upper portion of the electric device main body. After the cooling medium is sprinkled on the electric device main body, it flows downward along the surface thereof by gravity. The cooling medium that has not risen to the boiling point falls in the liquid reservoir in the liquid state. However, if there is a locally extremely heated part in the electric device main body, the cooling medium evaporates there, so that the liquid is withered below and the flow of the cooling medium stops. In addition, if the electric device main body has a dent or an intricate portion, the cooling medium may not flow along the surface of the portion. Conventionally, in order to cover these drawbacks, it has been necessary to devise a measure such as flowing a large amount of cooling medium or providing a flow guide on the surface of the electric device body. However, these measures not only increase the cost but also make it difficult to uniformly spread the cooling medium over the entire surface of the electric device body.

An object of the present invention is to uniformly cool the entire surface of an electric device main body by floating a fine mist-like cooling medium in a tank.

[0007]

According to the present invention, there is provided, in accordance with the present invention, a tank containing an electric device main body together with an insulating gas, a sprayer for spraying a liquid cooling medium into the tank, A condenser for liquefying the cooling medium vaporized by the heat of the electric equipment body, a liquid reservoir arranged at the bottom of the tank for storing the liquefied cooling medium, and a pump interposed in the middle of the cooling medium accumulated in the liquid reservoir And a liquid feed pipe for guiding to the sprayer, and cooling the electric device body by the latent heat of evaporation of the cooling medium, wherein the sprayer atomizes the cooling medium by applying ultrasonic vibration to the cooling medium. A gas feed pipe for guiding the insulating gas in the tank to a sprayer by a gas blower interposed therebetween, and the sprayer is connected to the gas feed pipe from the gas feed pipe. By receiving a flow of insulating gas, injection direction of said atomized cooling medium is assumed to become controlled. In the above configuration, the cooling medium is a mixture of a plurality of media having different boiling points.

Further, according to the present invention, a tank accommodating an electric equipment main body together with an insulating gas, a sprayer for spraying a liquid cooling medium into the tank, and a liquefied cooling medium vaporized by heat of the electric equipment main body. A condenser that is disposed at the bottom of the tank and stores a liquefied cooling medium, and a liquid feed pipe that guides the cooling medium stored in the liquid reservoir to the sprayer by a pump interposed in the middle. The cooling device cools the electric device main body by the latent heat of evaporation, wherein the sprayer atomizes the cooling medium by applying ultrasonic vibration to the cooling medium, and the cooling medium has a plurality of media having different boiling points. And a mixture of In the above configuration, it is assumed that a plurality of sprayers are arranged. In the above configuration, it is assumed that a heat absorbing portion of the heat pipe is provided in the liquid reservoir in the tank, and the heat radiating portion of the heat pipe is disposed outside the tank.

[0009]

According to the structure of the present invention, the structure of the sprayer is configured to atomize the cooling medium by applying ultrasonic vibration to the cooling medium. For this reason, the cooling medium becomes mist having a fine particle diameter such that it floats in the tank, and fills the entire inside of the tank. Therefore, the entire surface of the electric device body is covered with the atomized cooling medium, and the electric device body is uniformly cooled. In addition to this configuration, a gas supply pipe that guides the insulating gas in the tank to the atomizer by the gas blower is provided.
The sprayer receives the flow of the insulating gas from the gas pipe to control the direction of spraying of the atomized cooling medium. The atomized cooling medium can be sprayed at a high density toward the part, and the temperature rise of the electric device main body becomes uniform. In the above configuration, the cooling medium is a mixture of a plurality of media having different boiling points. Thus, even if the temperature of the electric device main body rises sharply from the steady temperature due to overload, the medium having the higher boiling point starts to evaporate, and the latent heat of evaporation is taken from the electric device main body. Therefore, the required amount of the entire cooling medium can be reduced as compared with the case of a single-boiling cooling medium.

Further, according to the configuration of the present invention, the configuration of the atomizer is such that the cooling medium is atomized by applying ultrasonic vibration to the cooling medium. For this reason, the cooling medium becomes mist having a fine particle diameter such that it floats in the tank, and fills the entire inside of the tank. Therefore, the entire surface of the electric device body is covered with the atomized cooling medium, and the electric device body is uniformly cooled. In addition to this configuration, the cooling medium is a mixture of a plurality of media having different boiling points. This allows
Even if the temperature of the electric device main body rises sharply from the steady temperature due to overload, the medium with the higher boiling point starts to evaporate, and the latent heat is taken from the electric device main body. Therefore, the required amount of the entire cooling medium can be reduced as compared with the case of a single-boiling cooling medium. Further, in the above configuration, a plurality of sprayers are provided. Thereby, even if there are a plurality of portions where local overheating is severe, the atomized cooling medium can be sprayed from near each portion, and the temperature rise of the electric device main body becomes uniform. Further, in the above configuration, the heat absorbing portion of the heat pipe is provided in the liquid reservoir in the tank, and the heat radiating portion of the heat pipe is provided outside the tank. Thereby, the temperature of the cooling medium sprayed from the sprayer can be lowered in advance, and the cooling efficiency of the electric device main body is improved.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments and reference examples. FIG. 1 is a cross-sectional view illustrating a cooling structure of an electric device according to a reference example of the present invention. An electric device body 11 as a heating element is housed in a sealed tank 12, and an insulating gas 13 such as SF ₆ gas is sealed in the tank 12. On the side of the tank 12, a condenser communicating with the internal space of the tank 12
20 is provided, and a liquid reservoir 16 for storing the liquefied cooling medium 14 is disposed at the bottom of the tank 12. A sprayer 19 is arranged inside the tank 12, and the sprayer 19 has a liquid feed pipe 18.
And the gas supply pipe 22 are connected. Pump 17 for liquid supply pipe 18
A filter 21 for filtering the cooling medium 14 is interposed, and guides the cooling medium 14 in the direction of the arrow of the flow 14A. On the other hand, the gas feed pipe 22 is connected to the condenser 20 and has a gas blower.
23 and a flow controller 24 are interposed, and the insulating gas 13 flows
It is guided in the direction of the arrow.

A sprayer 19 atomizes the cooling medium 14 to form a tank 12
Spray into. The cooling medium 14 has a fine particle size fog 25
As a result, the inner space of the tank 12 is filled together with the insulating gas 13. The mist-like cooling medium 14 contacts the electrical equipment main body 11 and cools the electrical equipment main body 11 by removing latent heat of evaporation. The evaporated cooling medium 14 enters the condenser 20 as a stream 14B.
The cooling medium 14 cooled and liquefied by the condenser 20 flows into the stream 14
It becomes C and accumulates in reservoir 16.

The atomizer 19 is capable of forming a fine particle mist 25 by simultaneously spraying a stream 13A of the insulating gas 13 when atomizing the cooling medium 14. As will be described later, the fog 25 has a particle diameter of several hundred μm or less and stays in space for a long time. As in the case of the conventional sprayer 9 shown in FIG. 9, simply pressing the cooling medium against the nozzle with the pump pressure only makes the majority of the droplets fall immediately due to gravity. In order to make all the cooling medium 14 into fine mist 25, the help of gas flow is required. This is based on the same principle that a gas to be sprayed is required also in a nozzle of a gas burner that sprays a flame by atomizing a flammable liquid.
Since an insulating gas 13 for insulating the electric device body 11 is sealed in the tank 12 of FIG. 1, the insulating gas 13 can be used as a blowing gas.

FIG. 2 is a half-split perspective view showing the main part of the sprayer 19 shown in FIG. 1 and shows the internal structure of the sprayer 19 with the spray tip portion being split in half. The atomizer 19 is composed of a central nozzle 19A for ejecting a cooling medium flow 14A and an outer nozzle 19B surrounding the outer diameter side of the central nozzle 19A and ejecting an insulating gas flow 13A.The central nozzle 19A and the outer nozzle 19B Are provided, and are held at an angle such that the jetting fog 25A collides with each other.

The configuration shown in FIG. 2 is called a two-fluid nozzle and is generally commercially available. Once the atomized fog 25A collides with each other, a shear force is applied to each other, where ultrasonic vibrations are generated and finer fog 25 can be generated. With this configuration, the cooling medium has a particle size of several tens of μm.
The fog can be: It should be noted that a fine spray of 100 μm or less can be generated even with a sprayer composed of one set including the central nozzle 19A and the outer nozzle 19B. Next, fog characteristics will be described with reference to FIGS.

FIG. 3 is a characteristic diagram showing the relationship between the time required for a fluorocarbon (C ₈ F ₁₈ ) particle to fall by 3 m and the particle diameter. The fluorocarbon characteristic curve 26 has a certain width, but the smaller the particle size, the longer the falling time. In the case of a particle diameter of several μm or less, the particles do not fall for a long time and almost float in space. As described above, the atomization refers to a particle having a particle diameter of several hundreds μm or less. For example, when the particle diameter is 100 μm, the falling time is 10 seconds to 100 seconds, and the cooling medium is floating during that period. Will be. Particles having a particle diameter of 1000 μm or more are in the form of raindrops, and the falling time is 1 second or less. In the case of the configuration of the conventional atomizer 9 in FIG.
For this reason, no matter how much the pressing force of the pump 7 is increased, the atomization of the cooling medium is limited to at most about 1000 μm, and most of the droplets are raindrops having a particle diameter of several thousand μm or more. FIG.
It can be seen that the smaller the particle diameter of the cooling medium is, the longer the air stays in the fog, which is advantageous for filling the entire inside of the tank.

FIG. 4 shows the relationship between the distance of fluorocarbon (C ₈ F ₁₈ ) particles flowing in the direction of the wind when the particles fall 3 m in a wind of 2.5 m / sec and the particle diameter. FIG. 6 is a characteristic diagram. However, where the flow distance of the vertical axis is several tens of meters or more, a trajectory up to the middle of the time when the particles fall is obtained, and the characteristic curve 27 of the subsequent drop position fluorocarbon shows a curve having a certain width, The smaller the particle diameter, the longer the flow distance. Thousands of m for particle sizes below a few μm
It's more than that, almost floating in space. In the case of a fog having a particle diameter of 100 μm, the flowing distance ranges from 10 m to several hundred m. The distance over which raindrops having a particle diameter of 1000 μm or more are flown is about 1 m.

The conventional sprayer 9 shown in FIG. 9 is disposed directly above the main body 1 of the electric equipment in order to uniformly spray the main body 1 of the electric equipment, and almost all the fog floating in the space is generated. Absent. The atomizer 19 in the reference example of FIG. 1 can atomize the cooling medium 14 to several tens μm or less. The nebulizer 19 can fill the entire internal space of the tank 12 with the mist-like cooling medium without disposing the nebulizer 19 right above the electric device main body 11. Therefore, the entire surface of the electric device main body 11 can be covered with the cooling medium 14 including a complicated place inside. Even if there is a place where overheating occurs locally, the mist-like cooling medium 14 is constantly replenished, so that the liquid withering phenomenon due to evaporation can be prevented.

FIG. 5 is a cross-sectional view showing a cooling structure for electric equipment according to a different embodiment of the present invention. A flow controller 28 is interposed in the liquid sending pipe 18, and a sprayer 29 is provided at an end thereof. A lead wire 31 is drawn out of the tank 12 through the airtight terminal 30 from the sprayer 29, and is connected to an oscillator (not shown) (high-frequency power supply in an ultrasonic range). The gas feed pipe 22 is connected at its tip to the tank 12 via a gas blower 23. Other configurations are the same as those of FIG.

FIG. 6 is a sectional view showing the internal structure of the sprayer 29 shown in FIG. Hole 36A through which coolant flow 14A passes through the axis
Is supported by the housing 32 via cushions 35A and 35B. A disk-shaped vibrator 38 (for example, a piezoelectric element) is disposed in contact with the flange portion of the vibration nozzle 36. The vibrator 38 is held between the electrodes 39A and 39B. Further, the electrode 39B holds a cylindrical balancer 45, and the lead wire 31 and the ground wire 37 are connected to the electrodes 39A and 39B, respectively. The lead wire 31 is guided to an oscillator (not shown) via the through terminal 33, and the ground wire 37 is connected to a ground terminal 34 fixed to the housing 32.

In FIG. 6, the oscillator 38 is driven by an oscillator.
When a high frequency voltage is applied to the vibrator 38, the vibrator 38 generates ultrasonic vibration in the axial direction, and the vibrating nozzle 36 starts vibrating. Accordingly, the flow 14A of the cooling medium in the vibration nozzle 36 is vibrated, so that the cooling medium is sprayed out as fog 25 from the outlet end (left side in the figure) of the vibration nozzle 36. The balancer 45 is a weight for giving a stable ultrasonic vibration to the vibration nozzle 36.

The sprayer shown in FIG. 6 is what is called an ultrasonic nozzle and is generally commercially available. The mist 25 having a fine particle diameter can be generated without a gas flow. Further, the particle size can be adjusted by the frequency of the high frequency voltage, and the particle size of the fog 25 becomes smaller as the frequency becomes higher. With the sprayer having this configuration, the mist 25 having a particle diameter of several μm to several tens μm can be produced. Therefore, the entire surface of the electric device main body 11 can be covered with the cooling medium 14 including a complicated place inside. Even if there is a place where overheating occurs locally, the mist-like cooling medium 14 is constantly replenished, so that the liquid withering phenomenon due to evaporation can be prevented. In FIG. 5, the sprayer 29 is an ultrasonic nozzle, so that the sprayer 29 does not need to be disposed directly above the electric device main body 11 as in the conventional apparatus as in the reference example of FIG. Can be filled with a mist of cooling medium.

FIG. 7 is a sectional view showing a cooling structure of an electric device according to an embodiment of the present invention. Atomizer 42 is gas supply pipe 22
The structure receives the flow of the insulating gas 13 through the flow controller 40 from the flow path. Other configurations are the same as those in FIG.

The atomizer 42 has substantially the same configuration as the ultrasonic nozzle shown in FIG. 6, but an outer nozzle (not shown) is further added to the outer diameter side. The insulating gas 13 is jetted from the outer nozzle. In this case, the gas flow is for controlling the direction in which the fog 25 is ejected.
When extremely overheated parts are locally present in the electrical equipment main body, atomized cooling medium can be sprayed at a high density toward the overheated parts, and the temperature rise of the electrical equipment main body is made uniform. Can be.

FIG. 8 is a sectional view showing a cooling structure of an electric apparatus according to another embodiment of the present invention. Two sprayers 44A and 44B having the same configuration as in FIG. 2 are provided in the tank 12, and are connected to the branched ends of the liquid feed pipe 18 and the gas feed pipe 22, respectively. The sprayers 44A and 44B are all formed of a solid insulator such as a ceramic material. Further, of the gas feed pipe 22 and the liquid feed pipe 18 connected to the sprayers 44A and 44B, the portions 22A and 18A drawn into the tank 2 are also formed of an insulating pipe such as a ceramic material. In addition, heat pipe 43
The heat absorbing portion was disposed in the cooling medium 14, and the heat radiating portion was disposed outside the tank 12. Other configurations are the same as those in FIG.

Since the atomizers 44A and 44B and the gas supply pipes and liquid supply pipes connected to the atomizers 44A and 44B are formed of an insulator, the atomizers 44A and 44B are used.
A and 44B can be brought close to the high voltage portion of the electric device body 11. Therefore, for example, when there is a local overheating portion in the high voltage portion, the sprayers 44A and 44B can be brought close to the portion to spray high-density mist. Also two sprayers
Since 44A and 44B are provided, even if there are two local superheated portions, it is possible to effectively cool those portions by approaching them respectively. If there are two or more local heating sections, the number of sprayers may be further increased. In addition, the heat pipe 43 allows the cooling medium 14 before atomization to be performed.
Can be previously cooled. Thereby, the fog 25 having a low temperature can be generated, and the cooling efficiency of the electric device main body 11 can be increased. The reason is as follows. When the heat pipe 43 is not provided, the cooling medium 14
Circulates in the tank 12 and remains at a high temperature, so that only the evaporation latent heat is removed from the electric device body 11. By lowering the temperature of the cooling medium 14 from its boiling point as much as possible, the fog 25 can cool the electric device body 11 even while the temperature of the fog 25 rises to its boiling point.

In the embodiment of FIGS. 7 and 8 and the reference examples of FIGS. 1 and 5, the cooling medium 14 is a mixture of a plurality of media having different boiling points, for example, a medium having a boiling point of 100 ° C. and a medium having a boiling point of 130 ° C. A mixture with a medium. Further, it is assumed that the volume ratio of the medium to the total cooling medium is mixed such that the electric device body 11 has a steady temperature (for example, 90 ° C.) at the time of rated load. Therefore, at a steady temperature, the medium hardly evaporates. However, if the electrical equipment body 11 is overloaded and its temperature is going to rise above the steady temperature,
The medium starts to evaporate. At this time, the temperature of the electric equipment body 11 cannot be lowered to a steady temperature, but its boiling point is 1
Temperatures below 30 ° C. (eg, 120 ° C.) can be suppressed by removing latent heat of vaporization. Assuming an overload of the electric equipment main body 11, when trying to keep the temperature of the electric equipment main body 11 at 120 ° C. or less with only the medium, a large amount of medium is arranged in the tank 12 in advance so that the liquid does not run out, The amount of mist 25 sprayed from the atomizer also needs to be considerably increased. In other words, since the amount of the vaporized medium increases,
The liquefied medium must be replenished one after another. Therefore, it is necessary to enhance the liquefaction processing capacity of the condenser 20.
By having the higher boiling medium mixed, the required amount of total cooling medium required can be reduced.

Further, when the temperature of the electric equipment main body 11 rises from the steady temperature at the time of overload, the temperature distribution of the electric equipment main body 11 is extremely disturbed, and depending on the temperature distribution of the place where the local overheating occurs, two kinds of different boiling points are provided. In some cases, the medium alone leaves liquid withering. In this case, by mixing a medium having a higher boiling point than that of the medium, it is possible to prevent liquid dying with a smaller amount than in the case of a single-boiling-point cooling medium. Mixtures of media having different boiling points are hardly dissolved with each other, and in some liquids, specific gravity can be easily separated. In that case, in the embodiment of FIGS. 7 and 8 and the reference examples of FIGS. 1 and 5, a pipe stirrer (not shown) for mixing the cooling medium 14 in the middle of the liquid feed pipe 18 on the output side of the pump 17 is used. By providing a stirrer (not shown) in the liquid reservoir 16 while providing the interposition, the specific gravity separation of the cooling medium 14 can be prevented.

[0029]

According to the present invention, as described above, the structure of the atomizer is such that the cooling medium is atomized by applying ultrasonic vibration to the cooling medium. The entire surface of the electric device main body is covered with the atomized cooling medium, so that the electric device main body can be uniformly cooled. In addition to this configuration, a gas supply pipe that guides the insulating gas in the tank to the atomizer by the gas blower is provided. Therefore, the atomized cooling medium can be sprayed at high density toward the local superheated portion, and the temperature rise of the electric device main body becomes uniform. In the above configuration,
The cooling medium was a mixture of a plurality of media having different boiling points. As a result, even if the temperature of the electric device main body rises sharply from the steady temperature due to overload, the medium with the higher boiling point starts to evaporate. Therefore, the required amount of the entire cooling medium is smaller than that of the cooling medium having a single boiling point.

According to the structure of the present invention, the structure of the atomizer is such that the cooling medium is atomized by applying ultrasonic vibration to the cooling medium, and the cooling medium is mixed with a plurality of mediums having different boiling points. Body. For this reason, the entire surface of the electrical equipment body is covered with atomized cooling medium,
Electric equipment can be cooled uniformly,
Even if the temperature of the electric equipment body rises sharply from the steady temperature due to overload, the medium with the higher boiling point starts to evaporate, so that the required amount of the entire cooling medium is less than that of the single boiling point cooling medium. I'm done. Further, in the above configuration, a plurality of sprayers are provided. Thereby, even if there are a plurality of portions with severe local overheating, the atomized cooling medium can be sprayed from near each portion, and the temperature rise of the electric device main body becomes uniform. Further, in the above configuration, the heat absorbing portion of the heat pipe is provided in the liquid reservoir in the tank, and the heat radiating portion of the heat pipe is provided outside the tank. This allows
Since the temperature of the cooling medium sprayed from the sprayer can be lowered in advance, the cooling efficiency of the electric device main body is improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a cooling structure of an electric device according to a reference example of the present invention.

FIG. 2 is a half-split perspective view showing a main part configuration of the sprayer of FIG. 1;

FIG. 3 is a characteristic diagram showing the relationship between the time required for fluorocarbon particles to fall by 3 m and the particle diameter.

FIG. 4 is a characteristic diagram showing the relationship between the distance flown in the direction of the wind and the particle diameter when fluorocarbon particles fall 3 m in a wind of 2.5 m / sec.

FIG. 5 is a cross-sectional view showing a cooling structure of an electric device according to a different reference example of the present invention.

FIG. 6 is a sectional view showing the internal configuration of the sprayer in FIG.

FIG. 7 is a sectional view showing a cooling structure of an electric device according to an embodiment of the present invention.

FIG. 8 is a sectional view showing a cooling structure of an electric device according to another embodiment of the present invention.

FIG. 9 is a sectional view showing an example of a cooling structure of a conventional electric device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Electric apparatus main body 12 Tank 13 Insulating gas 14 Cooling medium 16 Liquid reservoir 17 Pump 18 Liquid feed pipe 19 Sprayer 29 Sprayer 42 Sprayer 44A Sprayer 44B Sprayer 20 Condenser 21 Filter 22 Gas feed pipe 23 Gas blower 24 Flow rate regulator 28 Flow rate controller 40 Flow controller 25 Fog 25A Fog 19A Outer nozzle 19B Central nozzle 26 Fluorocarbon characteristic curve 27 Fluorocarbon characteristic curve 30 Airtight terminal 31 Lead wire 32 Housing 33 Through terminal 34 Earth terminal 35A Cushion 35B Cushion 36 Vibration nozzle 37 Earth wire 38 Vibration Child 39A electrode 39B electrode 45 balancer 43 heat pipe

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-140119 (JP, A) JP-A-63-99512 (JP, A) JP-A-58-122710 (JP, A) 183514 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01F 27/00-27/42

Claims (5)

(57) [Claims] 1. A tank containing an electric equipment main body together with an insulating gas, a sprayer for spraying a liquid cooling medium into the tank, a condenser for liquefying the cooling medium vaporized by heat of the electric equipment main body, A liquid reservoir arranged at the bottom of the tank for storing a liquefied cooling medium, and a liquid feed pipe for guiding the cooling medium stored in the liquid reservoir to the sprayer by a pump interposed therebetween, and evaporating the cooling medium. In a device that cools the electric device main body by latent heat, the sprayer applies ultrasonic vibration to the cooling medium to atomize the cooling medium, and the insulating gas in the tank is atomized by a gas blower interposed on the way. A gas supply pipe for guiding is provided, and the atomizer receives the flow of the insulating gas from the gas supply pipe, whereby the atomized cooling medium is provided. Cooling structure of electric devices, wherein the ejection direction is controlled. 2. The cooling structure according to claim 1, wherein the cooling medium is a mixture of a plurality of media having different boiling points. 3. A tank containing an electric device main body together with an insulating gas, a sprayer for spraying a liquid cooling medium into the tank, a condenser for liquefying the cooling medium vaporized by heat of the electric device main body, A liquid reservoir arranged at the bottom of the tank for storing a liquefied cooling medium, and a liquid feed pipe for guiding the cooling medium stored in the liquid reservoir to the sprayer by a pump interposed therebetween, and evaporating the cooling medium. In the device for cooling the electric device main body by latent heat, the sprayer applies ultrasonic vibration to the cooling medium to atomize the cooling medium, and the cooling medium is a mixture of a plurality of media having different boiling points. A cooling structure for electrical equipment. 4. A cooling structure for electrical equipment according to claim 1, wherein a plurality of sprayers are arranged. 5. The liquid storage device according to claim 1, wherein a heat absorbing portion of the heat pipe is provided in the liquid reservoir in the tank, and the heat radiating portion of the heat pipe is disposed outside the tank. Cooling structure of electrical equipment.