JP3109082U - Volatile organic waste gas treatment equipment - Google Patents

Abstract

A volatile organic waste gas treatment apparatus is provided.
SOLUTION: An adsorption processing device 50, a first blower 71, a second blower 72, and a bypass connecting the air outlet of the first blower and the air outlet of the second blower disposed in front and rear of the adsorption processing device. A wind pipe 80, a special device 81 having an automatic parallel and open degree modification function, a smoke window, a controller 91, a rotation speed control unit 92, and a pressure sensor 93 are provided on the inlet side of the adsorption processing apparatus. The inlet static pressure value is detected and a signal is sent to the controller to determine the rotational speed of the blower, which then sends a signal to the rotational speed control unit to control the acceleration and deceleration of the second blower.
[Selection] Figure 2

Description

  The present invention relates to a volatile organic waste gas treatment apparatus applied to a kind of volatile organic waste gas treatment.

  In view of industrial safety and sanitation, volatile organic gases are considered to be harmful to humans, and certain standards and odor thresholds are prescribed by law for volatile organic gases at home and abroad. The environment to which the person is exposed must be below that value. Emissions of volatile organic gases for environmental protection are also stipulated by the law, which means that both semiconductor manufacturing and packaging are under legal regulations. The volatile organic gas is efficiently collected by the cooling method when the concentration is high. When the concentration is low and the air volume is large, the volatile organic gas is concentrated by a physical adsorption method, and the concentrated gas is stored in a small incinerator. It is economical to burn or recover by cooling. Examples of organic waste gas components generated by wafer manufacturers in the semiconductor industry include dimethyl sulfoxide, N-methyl pyrrolidone, 2-aminoethanol, and dithiol, which are always contained. There are compounds such as ethylene glycol (Dithioethylene Glycol), dimethyl sulfide (Dimethylsulfide), isopropyl alcohol (Isopropyl Alcohol), acetone (acetone), etc., and these volatile organic substances and odors are discharged after discharging at a special rotating ring adsorption concentration. It is most effective to burn and decompose poison gas at 732 degrees Celsius or higher in a combustion furnace or incinerator. At present, the volatile organic waste gas emission process by the method of adding the combustion concentration to the adsorption concentration process has already been widely adopted in the semiconductor manufacturing industry. The adsorption processing equipment is operated by a honeycomb-type rotating wheel type, a stacked-bed type dual tower type, a multi-tower type, or a fluidized bed type, and the rotating wheel type has a large air volume (the air volume is larger than 10,000 CMH). ) Most suitable for disposal.

  FIG. 1 shows a traditional volatile organic waste gas treatment system, in which volatile organic waste gas passes through an adsorption treatment side 51 of an adsorption type treatment facility of a rotary wheel type adsorption treatment facility 50 and is adsorbed and rotated. The airflow is adsorbed by the adsorbent applied to the airflow, and the airflow becomes a dry and clean airflow and is discharged from the smoke window 90. The rotating wheel continuously rotates at a slow speed, and when the rotating wheel rotates and enters the regeneration book river 52 of the adsorption processing facility 50, another air flow passes through the regeneration processing side 52 of the adsorption processing facility, Subsequently, the second heat exchanger 40 is heated to reach the regeneration temperature, and further passes through the regeneration processing side 52 of the adsorption processing facility, and the regeneration / desorption function is executed. At this time, the adsorbed volatile organic substance is Upon receiving heat, desorption succeeds and the air flows into the air stream, which is concentrated to a volatile organic air stream having a relatively high concentration. For example, the area on the regeneration processing side 52 of the adsorption processing facility is designed to be one-twelfth of the normal rotating wheel area, and the resulting concentration ratio is about 11 to 12 times. The obtained concentrated waste gas is further preheated through the first heat exchanger 30 and finally sent to the incinerator 10, where the organic gas portion is combusted mainly into water and carbon dioxide, and the air current is Further, after the heat is recovered through the heat exchangers 30 and 40, the heat is discharged from the smoke window 90 to the atmosphere. After the bypass wind pipe 80 is installed, waste gas always leaks from the bypass wind pipe into the smoke window 90 and is directly discharged to the atmosphere. Therefore, the concentration of waste gas measured at the exit of the smoke window 90 is Higher, the overall waste gas treatment efficiency will be lower, and in severe cases will not meet the standards of environmental protection regulations. The method of attaching the isolation windgate 82 in the bypass windpipe 80 and sealing it well with this isolation windgate 82 is that the leak of the windgate is too large in the actual situation. The wind direction of the part becomes a positive pressure, so that leakage is very likely to occur. If one wants to obtain an isolation windgate that does not leak completely, it is particularly expensive due to hermetic design, and it is difficult to maintain total hermeticity forever. In addition, the pressure loss of the adsorption rotating wheel or the adsorption processing equipment is considerably large, usually 50 to 75 mm-aq, and thus the in-machine static pressure of the entire waste gas treatment system is usually about 70 to 75 mm-aq, This makes the main blower's static pressure requirements considerably higher and consumes more energy, which is easily proved based on the performance curves of the blower under the same air flow requirements. In addition, since the demand for static pressure of waste gas treatment systems is high, it is easy to form a pressure change that is too large even when the system is shut down. This causes the overall waste gas exhaust air volume to become unstable and affect product quality. The manufacturer's production stops.

In order to improve the problem of the existing processing system, the present invention provides an adsorption type processing apparatus having a decoupled balanced wind tube, and improving the stability and safety of the system.
The present invention provides a kind of volatile organic waste gas treatment device, which includes an adsorption type treatment device, a first blower, a second blower, and an outlet of the first blower disposed in front of and behind the adsorption type treatment device. A bypass wind pipe connecting the air outlet of the second blower, an automatic parallel and special device with an opening degree changing function, a smoke window, a controller, a rotational speed control unit, a pressure sensor, and the pressure sensor It is provided on the inlet side of the apparatus to detect the inlet static pressure value, and sends a signal to the controller to determine the rotational speed of the blower. Subsequently, the controller sends a signal to the rotational speed control unit to accelerate the second blower. Control deceleration.

The invention of claim 1 is a volatile organic waste gas treatment apparatus,
Adsorption processing equipment;
A first blower and a second blower disposed in front of and behind the adsorption processing apparatus;
A bypass wind pipe connecting the outlet of the first blower and the outlet of the second blower;
A special device provided with an automatic parallel and opening degree changing function provided in the bypass wind pipe,
Smoke window,
A controller,
A rotational speed control unit;
A pressure sensor;
The pressure sensor is provided on the inlet side of the adsorption processing device to detect the inlet static pressure value, and sends a signal to the controller to determine the rotational speed of the blower, and then the controller rotates the signal. A volatile organic waste gas treatment apparatus is characterized in that the speed control unit is sent to control the speed of the second blower.
The volatile organic waste gas treatment apparatus according to claim 1, further comprising an incinerator, a blower, a first heat exchanger, and a second heat exchanger. Waste gas treatment equipment.
The volatile organic waste gas treatment apparatus according to claim 1 is characterized in that the length of the bypass wind pipe is not less than twice the inner diameter thereof. It is said.
The invention of claim 4 is a volatile organic waste gas treatment apparatus according to claim 1, wherein a special device having an automatic parallel and openness modification function is a modified check gate, and the modified check The volatile organic waste gas treatment apparatus is characterized in that the area of the wind gate is smaller than the cross-sectional area of the wind pipe.
The invention of claim 5 is the volatile organic waste gas treatment apparatus according to claim 1, wherein the special device having an automatic parallel and opening degree changing function is a resistance wind gate whose wind gate piece angle can be changed, and the resistance As a volatile organic waste gas treatment device, the wind gate is a modified butterfly check gate or square check wind gate, and the drive system employs automatic pressure difference balanced at both ends of the air flow. Yes.
The invention of claim 6 is characterized in that, in the volatile organic waste gas treatment device according to claim 1, the adsorption material of the adsorption treatment device is silicon rubber, a molecular screen, activated carbon, or a polymer. Volatile organic waste gas treatment equipment.
The volatile organic waste gas treatment apparatus according to claim 1 is characterized in that the adsorption type treatment apparatus is a rotary wheel type, a deposition bed or a fluidized bed. It is a gas processing device.
The invention of claim 8 is a volatile organic waste gas treatment apparatus according to claim 1, wherein the first blower is connected in parallel to one or more blowers. Yes.
The invention of claim 9 is a volatile organic waste gas treatment apparatus according to claim 1, characterized in that the rotation speed and air volume or pressure of the first blower and the second blower are controlled by an inverter. Waste gas treatment equipment.
The invention of claim 10 is the volatile organic waste gas treatment apparatus according to claim 1, comprising either the first heat exchanger or the second heat exchanger, or the first heat exchanger and the second heat exchanger. The apparatus is a volatile organic waste gas treatment apparatus characterized by including any heat exchanger.

  The present invention improves the disadvantage that the waste gas treatment efficiency is lowered due to leakage of the exhaust gas through the bypass wind pipe when the wind direction of the bypass wind pipe portion is positive. In addition, the static pressure of the blower is reduced, thereby increasing the wind pressure efficiency and reducing energy consumption. Also, in practice, the control method of this system is easy to control, has the advantages of high stability and high reliability, and the two blowers are not dependent on each other, and therefore due to failure or repair of the waste gas treatment system It has the advantages of reducing the influence on the process, easy control, reliable and economical.

  FIG. 2 is a display diagram of a preferred embodiment of the volatile organic waste gas treatment apparatus of the present invention. The incinerator 10, the blower 20, the first heat exchanger 30, the second heat exchanger 40, the rotating wheel type adsorption processing device 50 (for example, a deposition bed or a fluidized bed), a first blower 71, and a second blower 72. , Bypass wind pipe 80, special device 81 having automatic parallel and opening degree changing function, smoke window 90, controller 91, rotation speed control unit 92 (for example, inverter), pressure sensor 93, inlet windgate actuator 94 and inlet windgate 95 It has.

  The first blower 71 and the second blower 72 are respectively disposed in front and rear of the adsorption processing apparatus 50, and the rear outlet of the first blower 71 and the outlet of the second blower 72 are connected by a bypass wind pipe 80. In the bypass wind pipe 80, a special device 81 having an automatic parallel and opening degree modification function is attached (for example, a resistance wind gate capable of changing the angle of the wind gate piece, which is a modified butterfly-shaped check) The bypass wind pipe 80 has a length twice or more than its inner diameter, and the driving system is a self-balancing pressure difference at both ends of the air flow. Prevents similar cross-contamination due to unsteady turbulence caused by undeployment.

  The pressure sensor 93 is provided on the inlet side of the adsorption processing apparatus 50 and detects an inlet static pressure value. The controller 91 is connected to the pressure sensor 93 and receives a signal from the pressure sensor 93. First, the pressure sensor 93 detects the inlet static pressure value and sends a signal to the controller 91 to determine the rotational speed of the blower. Subsequently, the controller 91 further sends a signal to the rotational speed control unit 92 to control the speed of the second blower 72. Furthermore, the direction (forward direction or reverse direction) and the air flow rate of the bypass air flow in the bypass wind tube 80 are controlled by the inlet static pressure value of the pressure sensor 92.

  As shown in FIG. 2, the advantage of the present invention is that two sets of blowers are connected in series to reduce the drawbacks of rapid acceleration or leakage pressure when switching to a single blower, as well as special features with automatic parallel and openness modification functions. The decoupled balanced wind tube of the device has the property of allowing the static pressure and air volume of the two blowers to be operated independently. In addition, a special device with automatic parallel and openness modification function has been developed, and the present invention recovers its internal structure with a simple non-return windgate to generate the minimum openness, while accurate Pressure control maintains a slight positive pressure in the discharge short window to achieve the highest processing efficiency. By providing the resistance of the bypass wind pipe, the disadvantage of leakage pressure is eliminated. In addition, this special device with automatic parallel and opening degree modification function achieves a function to automatically open the blower almost fully and bypass smoothly when the bypass function is executed, bypassing the system without increasing the pressure difference of the system. Since the pressure difference between both ends of the tube is almost zero, the waste gas treatment efficiency of the system is maximized, and the control is easy, stable and reliable. At this time, the static pressure on the adsorption processing side 51 of the adsorption-type treatment bed is set to a slight positive pressure. Since the pressure difference between both ends of the bypass pipe cannot be set to zero pressure in practice, this system is controlled by a slight negative pressure or a slightly positive pressure operation. However, in actual operation, a slight negative pressure operation can generate a backflow, and it is preferable to use a slightly positive pressure in terms of pollution discharge efficiency. In this system, the bypass air pipe of the minimum air flow control device is called a decoupled balanced air pipe, and it is possible to perform a non-joining operation in which the first blower 71 and the second blower 72 are independently operated and no mutual pressure buffer is formed. is there. As a result, the static pressure of the first blower 71 undertakes a slight static pressure at the blower outlet that allows only about 5 to 15 mm-aq from the static pressure at the contamination source end, and the second blower 72 is connected to the waste gas system. By taking the difference between the required static pressure and the pressure of the decoupled wind pipe, this design enables independent operation without connecting the front and rear blowers when starting up the new system, making the air flow change extremely stable and unnecessary stop loss in the process. Can be reduced. In addition, each system can be easily and stably controlled, which is proved by a very small change in the first blower 71 outlet static pressure.

  The inlet static pressure value detected by the pressure sensor 92 is sent to the controller 90, and further a signal is transmitted to the rotational speed control unit 92 to control the speed of the second blower 72. The direction of the bypass air flow (forward direction or reverse direction) and the air flow rate are controlled.

It is a display figure of a traditional volatile organic waste gas treatment system. It is a display figure of the preferable Example of the volatile organic waste gas processing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Incinerator 20 Blower 30 1st heat exchanger 40 2nd heat exchanger 50 Rotary wheel type adsorption processing apparatus 51 Adsorption processing side 52 Regeneration processing side 60 Main blower 71 1st blower 72 2nd blower 80 Bypass wind pipe 81 Automatic parallel In addition, a special device 82 having an opening degree modification function Isolation wind gate 91 Controller 92 Rotational speed control unit 93 Pressure sensor 94 Entrance wind gate actuator 95 Entrance wind gate

Claims (10)

In volatile organic waste gas treatment equipment,
Adsorption processing equipment;
A first blower and a second blower disposed in front of and behind the adsorption processing apparatus;
A bypass wind pipe connecting the outlet of the first blower and the outlet of the second blower;
A special device provided with an automatic parallel and opening degree changing function provided in the bypass wind pipe,
Smoke window,
A controller,
A rotational speed control unit;
A pressure sensor;
The pressure sensor is provided on the inlet side of the adsorption processing device to detect the inlet static pressure value, and sends a signal to the controller to determine the rotational speed of the blower, and then the controller rotates the signal. A volatile organic waste gas treatment apparatus, wherein a speed control unit is sent to control the speed of the second blower.   The volatile organic waste gas treatment apparatus according to claim 1, further comprising an incinerator, a blower, a first heat exchanger, and a second heat exchanger.   2. The volatile organic waste gas treatment apparatus according to claim 1, wherein the length of the bypass wind pipe is at least twice its inner diameter.   The volatile organic waste gas treatment apparatus according to claim 1, wherein a special device having an automatic parallel and openness modification function is a modified check windgate, and the area of the modified check windgate is a wind pipe A volatile organic waste gas treatment apparatus characterized by having a smaller cross-sectional area.   2. The volatile organic waste gas treatment apparatus according to claim 1, wherein the special device having an automatic parallel and openness modification function is a resistance windgate capable of modifying the wind gate contact angle, and a butterfly shape in which the resistance windgate is modified. A volatile organic waste gas treatment apparatus, characterized in that it is a non-return windgate or a rectangular non-return windgate, and adopts an automatic pressure difference balanced drive at both ends of the airflow as its drive system.   2. The volatile organic waste gas treatment apparatus according to claim 1, wherein the adsorption material of the adsorption-type treatment apparatus is silicon rubber, molecular screen, activated carbon, or polymer polymer. .   2. The volatile organic waste gas treatment apparatus according to claim 1, wherein the adsorption-type treatment apparatus is a rotary wheel type, a deposition bed or a fluidized bed.   2. The volatile organic waste gas treatment apparatus according to claim 1, wherein the first blower is connected in parallel to one or more blowers.   The volatile organic waste gas treatment apparatus according to claim 1, wherein the rotation speed and the air volume or pressure of the first blower and the second blower are controlled by an inverter. 2. The volatile organic waste gas treatment apparatus according to claim 1, comprising either the first heat exchanger or the second heat exchanger, or comprising both the first heat exchanger and the second heat exchanger. A volatile organic waste gas treatment apparatus characterized by the above.

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