JP3105655B2 - Clean room air conditioning system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioning system for a clean room, and more particularly to an air conditioning system for a clean room in which a semiconductor manufacturing apparatus is installed.

[0002]

2. Description of the Related Art A conventional clean room air conditioning system includes a semiconductor manufacturing apparatus that emits hot air into a room to remove heat generated during operation, a filter that blows purified cold air into the room, and a hot air in the room. There is an air conditioner that takes out the air mixed with the cool air from the room, cools the air, and sends it to the clean room again. The hot air emitted from the semiconductor manufacturing apparatus installed in the clean room is mixed with the cold air blown out from the filter in the room to become hot air, thereby maintaining the temperature and humidity of the clean room.

[0003] The amount of cold air blown out of the filter is determined by the equipment load in the clean room and the number of circulations for maintaining cleanliness. When the equipment load is large, the amount of cold air is increased and mixed with warm air to set. Maintain the specified temperature and humidity. This mixed and constant temperature indoor air is cooled by an air conditioner,
That is, the refrigerant is indirectly cooled by the refrigerant and is sent again to the room.

[0004]

In this conventional clean room air-conditioning system, hot air and cold air are mixed in the clean room. Cold air that is equal to or greater than the amount of heat required is required. The amount of heat that can be obtained by cold air is determined by the temperature difference before and after mixing with warm air as one factor. Due to the characteristics of a clean room, the temperature is blown as cold air at around 14 ° C, and as hot air at around 25 ° C. Therefore, the temperature difference becomes constant, and it is not possible to obtain a larger amount of heat. Further, in order to constantly circulate an air volume equal to or larger than the air volume required to maintain cleanliness, there is a problem that equipment investment and operation cost increase.

[0005]

SUMMARY OF THE INVENTION The air conditioning system for a clean room according to the present invention comprises an upper part in which supply air is introduced, and a heat source.
Inhalation of indoor air in the room where the body is installed and indoor air below the floor
The air that has been sucked in is exhausted as return air.
A clean room with a lower part that goes out, and between the upper part and the room
Supply air introduced into the upper part of the
And a filter for blowing into the room
Provided above the corresponding heating element,
A suction port for sucking warm air blown upward from the
Air sucked in from and return air exhausted from below
Receives the combined air and exhausts the supply air.
An air conditioner is provided . ADVANTAGE OF THE INVENTION According to this invention, there exists an effect | action which reduces the amount of warm air discharged | emitted indoors by directly returning the waste heat warm air which is a large part of an indoor air conditioning load to an air conditioner.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing an air conditioning system according to an embodiment of the present invention when a semiconductor measurement tester is installed in a clean room. The supply air 8 cooled to a predetermined temperature and humidity by the air conditioner 7 is blown into the room from the HEPA filter 3 as clean air 4 through a duct. The clean air 4 performs heat exchange with lighting, people, buildings, and other facilities other than the tester 1 by convection, and as a result, the temperature and relative temperature of the indoor air 1 reach predetermined standard values.

Next, a part of the room air 1 is sucked into the tester 2 and heat exchange is further performed inside the tester 2.
It is blown upward as warm air of 35% RH or less and is sucked into the suction port 5. On the other hand, the remaining room air 1 is sucked under the floor, becomes return air 6, and tries to return to the air conditioner 7. Here, the return air 6 and the air from the suction port 5 join immediately before the inlet of the air conditioner 7, and the return air 6 and 28%
The air becomes about H and enters the air conditioner 7, is cooled by the refrigerant, and becomes the supply air 8 again to the HEPA filter 3.

In this embodiment, if the total load in the room is 5
When the circulating air volume Q when the cold air blowing temperature from the 0000 kcal / H, HEPA filter is 14 ° C. and the return air is 25 ° C. and 28 ° C., when the return air is 25 ° C., Q = 50000 ÷ ｛1.
2 × 0.24 (25-14)｝ = 15785 m ³ / H Return air 28 ° C. Q = 50000５０1.
2 × 0.24 (28−14)｝ = 12400 m ³ / H. However, the density of air is 1.2 kg / m ³ and the specific heat is 0.24 kcal / kg · K.

According to the present embodiment, the suction at the plurality of suction ports 5 eliminates the stagnation of the indoor heat and increases the temperature at the junction with the return air 6. As a result, the required blowing air volume can be reduced as indicated by the calculated air volume, and the operating cost can be reduced accordingly.

[0010]

As described above, according to the present invention, the return air temperature can be increased by dividing the waste heat route from the heating element serving as the air conditioning load into one space in the clean room. The required amount of blown air can be reduced, the amount of heat to be obtained per unit airflow can be increased with a small amount of cool air without deviating from the management standard value of temperature and humidity, and the amount of circulating air can be minimized. In addition, the operating cost can be reduced accordingly.

[Brief description of the drawings]

FIG. 1 is a sectional view showing one embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 1 indoor air 2 tester 3 HEPA filter 4 clean air 5 suction port 6 return air 7 air conditioner 8 supply air

Claims (1)

(57) [Claims] 1. Upper part where supply air is introduced, heat generation
The room where the body is installed, and the indoor air in the room below the floor
The sucked indoor air is used as return air.
A clean room having a lower part for discharging
The sub-supply provided between the room and introduced into the upper part
For blowing rye air into the room as clean air
Corresponding to the filter and the heating element provided in the room
And is blown upward from the heating element.
And a suction port for sucking the heated air
Air and the return air discharged from the lower part
Receives the combined air and discharges the supply air.
An air conditioning system for a clean room, comprising an air conditioner.