JP3098606B2 - Heat vaporization introduction method - Google Patents

Heat vaporization introduction method

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Publication number
JP3098606B2
JP3098606B2 JP04041516A JP4151692A JP3098606B2 JP 3098606 B2 JP3098606 B2 JP 3098606B2 JP 04041516 A JP04041516 A JP 04041516A JP 4151692 A JP4151692 A JP 4151692A JP 3098606 B2 JP3098606 B2 JP 3098606B2
Authority
JP
Japan
Prior art keywords
sample
fine particles
carrier gas
chamber
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04041516A
Other languages
Japanese (ja)
Other versions
JPH05242852A (en
Inventor
克彦 川端
Original Assignee
横河アナリティカルシステムズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 横河アナリティカルシステムズ株式会社 filed Critical 横河アナリティカルシステムズ株式会社
Priority to JP04041516A priority Critical patent/JP3098606B2/en
Publication of JPH05242852A publication Critical patent/JPH05242852A/en
Application granted granted Critical
Publication of JP3098606B2 publication Critical patent/JP3098606B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、高周波誘導結合プラズ
マ分析計(以下、ICP−MSと称す)などの分析計を
用いて試料中の微量金属を測定するに際し該分析計に試
料を気化して導入する加熱気化導入方法に係わり、特
に、キャリアガス中に微粒子を混合することにより加熱
気化室で蒸発した高温の金属蒸気がICP−MSなどに
効率よく導入されるようにした加熱気化導入方法に関す
る。
BACKGROUND OF THE INVENTION The present invention relates to a method for measuring a trace metal in a sample using an analyzer such as a high frequency inductively coupled plasma analyzer (hereinafter referred to as ICP-MS). And, in particular, a method for introducing high-temperature metal vapor evaporated in a heating vaporization chamber by mixing fine particles in a carrier gas so as to be efficiently introduced into an ICP-MS or the like. About.

【0002】[0002]

【従来の技術】図2は加熱気化導入方法の従来例を説明
するための構成説明図である。この図において、加熱気
化室2の中にキュベット3が設けられており、該キュベ
ット3は図示しない加熱気化炉用電源に接続されてい
る。この電源をオンにすると、キュベット3に電流が流
れジュール熱によって発熱する。
2. Description of the Related Art FIG. 2 is a structural explanatory view for explaining a conventional example of a heating vaporization introducing method. In this figure, a cuvette 3 is provided in a heated vaporization chamber 2, and the cuvette 3 is connected to a power supply for a heated vaporization furnace (not shown). When this power supply is turned on, a current flows through the cuvette 3 and heat is generated by Joule heat.

【0003】キュベット3に供給される電流や印加電圧
を制御することにより、キュベット3の温度を任意に調
節できる。また、キュベット3の中央部には窪みが設け
られており、この窪みに試料が収容されるようになって
いる。一方、加熱気化室2内には、キャリアガス導入口
1から例えばアルゴンガスでなるキャリアガスが導入さ
れる。このようにして導入されたガスは、加熱気化室2
内を通り、その後、プラズマトーチの内室4aに導入さ
れる。このようなキャリアガスの流れは加熱気化室2か
らICP−MSなどの分析計に被測定成分を送る働きを
する。
The temperature of the cuvette 3 can be arbitrarily adjusted by controlling the current supplied to the cuvette 3 and the applied voltage. In addition, a depression is provided in the center of the cuvette 3 so that a sample is accommodated in the depression. On the other hand, a carrier gas made of, for example, argon gas is introduced into the heated vaporization chamber 2 from the carrier gas inlet 1. The gas thus introduced is supplied to the heating vaporization chamber 2
Then, it is introduced into the inner chamber 4a of the plasma torch. Such a flow of the carrier gas serves to send the component to be measured from the heated vaporization chamber 2 to an analyzer such as an ICP-MS.

【0004】[0004]

【発明が解決しようとする課題】然しながら、上記従来
例においては高温の金属蒸気が活性であり、該金属蒸気
が加熱気化室2の壁面や試料導入チューブ5の内壁に接
すると、これらの壁面や内壁に被測定元素が吸着するよ
うになる。この結果、加熱気化室2から接続チューブ5
を通ってプラズマトーチの内室4aに達する被測定元素
の量が減少し、ICP−MSなどの分析計で得られる被
測定元素の分析値も大きな誤差を含んだものとなり、究
極的に分析の感度低下を招いていた。
However, in the above-mentioned conventional example, high-temperature metal vapor is active, and when the metal vapor comes into contact with the wall surface of the heating vaporization chamber 2 or the inner wall of the sample introduction tube 5, these wall surfaces and The element to be measured is adsorbed on the inner wall. As a result, the connection tube 5
The amount of the element to be measured that reaches the inner chamber 4a of the plasma torch through the passage decreases, and the analysis value of the element to be measured obtained by an analyzer such as an ICP-MS includes a large error. The sensitivity was reduced.

【0005】また、加熱気化室2で気化した被測定元素
の量の多い時と少ない時でも、気化した被測定元素の挙
動に差が生ずると考えられ、その結果、被測定元素の多
少すなわち試料中の被測定元素濃度の相違によって測定
感度が変化し、その結果、分析値の直線性も悪化してい
た。本発明は、かかる従来例の欠点などに鑑みてなされ
たものであり、その課題は、加熱気化室の壁面や接続チ
ューブの内壁に被測定元素が吸着する量を減らし、IC
P−MSなどの分析計で極微量の金属元素をも正確に分
析できるようにした加熱気化導入方法を提供することに
ある。
Further, it is considered that a difference occurs in the behavior of the vaporized element to be measured even when the amount of the element to be vaporized in the heating vaporization chamber 2 is large or small. The measurement sensitivity was changed due to the difference in the concentration of the element to be measured, and as a result, the linearity of the analysis value was also deteriorated. The present invention has been made in view of the above-described drawbacks of the conventional example, and has as its object to reduce the amount of the element to be measured adsorbed on the wall surface of the heating vaporization chamber and the inner wall of the connection tube, and to reduce the amount of IC.
It is an object of the present invention to provide a method for introducing heat vaporization, which enables a trace amount of metal element to be accurately analyzed by an analyzer such as a P-MS.

【0006】[0006]

【課題を解決するための手段】本発明は、ICP−MS
などの分析計を用いて試料中の微量金属を測定するに際
し該分析計に試料を気化して導入する加熱気化導入方法
において、微粒子発生室でキャリアガスに微粒子を拡散
・混合し、微粒子を含んだキャリアガスを加熱気化室に
導き、加熱気化室内で試料が蒸発して生成した微量の高
温金属蒸気が微粒子と接触し、微粒子が核となって凝縮
若しくは反応して不活性な粒子となり、不活性粒子がキ
ャリアガスにより接続チューブを通って分析計に搬送さ
れるように構成することにより前記課題を解決したもの
である。
SUMMARY OF THE INVENTION The present invention provides an ICP-MS
In a heating vaporization introduction method of vaporizing and introducing a sample into a sample when measuring a trace metal in a sample using an analyzer such as the above, the fine particles are diffused and mixed into a carrier gas in a particle generation chamber, and the fine particles are contained. The carrier gas is introduced into the heated vaporization chamber, and a small amount of high-temperature metal vapor generated by evaporation of the sample in the heated vaporization chamber comes into contact with the fine particles, and the fine particles become nuclei and condense or react to become inert particles. This problem has been solved by a configuration in which the active particles are transported by a carrier gas to the analyzer through the connection tube.

【0007】[0007]

【作用】本発明は、次のように作用する。即ち、加熱気
化室内のキュベットには予め試料が搭載されており、加
熱気化室用電源をオンにすると、キュベットに電流が流
れてジュール熱により発熱する。このため、キュベット
に搭載されている試料は加熱されて蒸発する。このよう
にして試料が蒸発して生成した微量の高温金属蒸気は、
加熱気化室内に導入された微粒子と接触し、該微粒子が
核となって凝縮したり反応したりして不活性な粒子とな
る。不活性となった微量の金属は、キャリアガスによ
り、加熱気化室から接続チューブを通ってプラズマトー
チの内室に搬送され、ICP−MSなどの分析計によっ
て分析される。
The present invention operates as follows. That is, a sample is previously mounted on the cuvette in the heating vaporization chamber, and when the power supply for the heating vaporization chamber is turned on, a current flows through the cuvette and heat is generated by Joule heat. For this reason, the sample mounted on the cuvette is heated and evaporates. A small amount of high-temperature metal vapor generated by evaporation of the sample in this way
The fine particles come into contact with the fine particles introduced into the heating and vaporizing chamber, and the fine particles serve as nuclei to condense or react to become inert particles. The trace amount of inactivated metal is transported from the heated vaporization chamber to the inner chamber of the plasma torch through the connection tube by the carrier gas, and analyzed by an analyzer such as ICP-MS.

【0008】[0008]

【実施例】以下、本発明について図面を参照して詳しく
説明する。図1は本発明実施例を説明するための図であ
り、図中、図2と同一記号は同一意味をもたせて使用し
ここでの重複説明は省略する。また、6は加熱気化室2
とは別個に設けられた微粒子発生室、7は微粒子発生室
6の微粒子投入口を覆う微粒子投入蓋、8は微粒子発生
室6で発生した例えばカーボンブラックやポリイミドの
ような内径1μm以下の微粒子を取り出す取出口、9は
キャリアガスを微粒子発生室6内に導くキャピラリーチ
ューブである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a view for explaining an embodiment of the present invention. In the figure, the same symbols as those in FIG. 2 are used with the same meanings, and duplicate explanations are omitted. 6 is a heating vaporization chamber 2
A particle generation chamber 7 is provided separately from the particle generation chamber 7, a particle insertion lid that covers the particle injection port of the particle generation chamber 6, and 8 has a particle diameter of 1 μm or less, such as carbon black or polyimide, generated in the particle generation chamber 6. The take-out port 9 is a capillary tube for guiding the carrier gas into the particle generation chamber 6.

【0009】図1で示すような本発明の実施例におい
て、最初、微粒子投入蓋7を開け所定量の微粒子を微粒
子発生室6内に入れ、その後、微粒子投入蓋7を閉じ
る。次に、キャピラリーチューブ9を介しキャリアガス
導入口1から例えば700ml/min.の流量でキャ
リアガスを微粒子発生室6内に供給し、該微粒子発生室
内の微粒子を分散させる。このようにして微粒子発生室
6内で分散した微粒子は、キャリアガスに拡散・混合
し、その後、取出口8から加熱気化室2に導かれる。
In the embodiment of the present invention as shown in FIG. 1, first, a fine particle input lid 7 is opened, a predetermined amount of fine particles are put into the fine particle generation chamber 6, and then the fine particle input lid 7 is closed. Next, for example, 700 ml / min. From the carrier gas inlet 1 through the capillary tube 9. The carrier gas is supplied into the fine particle generation chamber 6 at a flow rate of?, And the fine particles in the fine particle generation chamber are dispersed. The fine particles dispersed in the fine particle generation chamber 6 in this manner are diffused and mixed with the carrier gas, and then guided to the heated vaporization chamber 2 from the outlet 8.

【0010】一方、加熱気化室2内のキュベット3には
予め試料が搭載されており、図示しない加熱気化室用電
源がオンになると、キュベット3に電流が流れてジュー
ル熱により発熱する。このため、キュベット3に搭載さ
れている試料は加熱されて蒸発する。
On the other hand, a sample is previously mounted on the cuvette 3 in the heating and vaporizing chamber 2, and when a power supply for the heating and vaporizing chamber (not shown) is turned on, a current flows through the cuvette 3 and heat is generated by Joule heat. For this reason, the sample mounted on the cuvette 3 is heated and evaporates.

【0011】このようにして試料が蒸発して生成した微
量の高温金属蒸気は、上述のようにして加熱気化室2内
に導入された微粒子と接触し、該微粒子が核となって凝
縮したり反応したりして不活性な粒子となる。このよう
にして不活性となった微量の金属は、キャリアガスによ
り、加熱気化室2から接続チューブ5を通ってプラズマ
トーチの内室4aに搬送され、ICP−MSなどの分析
計によって分析される。 尚、本発明は上述の実施例に
限定されることなく種々の変形が可能である。
The small amount of high-temperature metal vapor generated by evaporating the sample in this way comes into contact with the fine particles introduced into the heating and vaporizing chamber 2 as described above, and the fine particles become nuclei and condense. It reacts and becomes inert particles. The trace amount of metal that has become inactive in this way is transported by the carrier gas from the heated vaporization chamber 2 to the inner chamber 4a of the plasma torch through the connection tube 5, and analyzed by an analyzer such as an ICP-MS. . The present invention can be variously modified without being limited to the above-described embodiment.

【0012】[0012]

【発明の効果】以上詳しく説明したような本発明によれ
ば、ICP−MSなどの分析計を用いて試料中の微量金
属を測定するに際し該分析計に試料を気化して導入する
加熱気化導入方法において、キャリアガスに微粒子を拡
散・混合し該微粒子が核となって加熱気化室内の微量高
温金属蒸気が凝縮若しくは反応して不活性な粒子となる
ようにするため、高温の金属蒸気が加熱気化室の壁面や
接続チューブの内面への吸着を低減できる利点がある。
According to the present invention as described in detail above, when a trace metal in a sample is measured using an analyzer such as an ICP-MS, heat vaporization is introduced by vaporizing the sample into the analyzer. In the method, fine particles are diffused and mixed into a carrier gas, and the fine particles serve as nuclei to condense or react with a minute amount of high-temperature metal vapor in a heating vaporization chamber to form inert particles. There is an advantage that adsorption to the wall surface of the vaporization chamber and the inner surface of the connection tube can be reduced.

【0013】従って、本発明によれば、加熱気化室の壁
面や接続チューブの内壁に被測定元素が吸着する量を減
らし、ICP−MSなどの分析計で極微量の金属元素を
も正確に分析できる加熱気化導入方法が実現する。
Therefore, according to the present invention, the amount of the element to be measured adsorbed on the wall surface of the heating vaporization chamber or the inner wall of the connection tube is reduced, and even a trace amount of metal element can be accurately analyzed by an analyzer such as ICP-MS. A possible heating vaporization introduction method is realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明実施例の構成説明図である。FIG. 1 is an explanatory diagram of a configuration of an embodiment of the present invention.

【図2】従来例の構成説明図である。FIG. 2 is a diagram illustrating the configuration of a conventional example.

【符号の説明】[Explanation of symbols]

1 キャリアガス導入口 2 加熱気化室 3 キュベット 4 プラズマトーチ 5 試料導入チューブ 6 微粒子発生室 7 微粒子投入蓋 8 取出口 9 キャピラリーチューブ DESCRIPTION OF SYMBOLS 1 Carrier gas inlet 2 Heated vaporization chamber 3 Cuvette 4 Plasma torch 5 Sample introduction tube 6 Particle generation chamber 7 Particle input lid 8 Outlet 9 Capillary tube

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】高周波誘導結合プラズマ分析計などの分析
計を用いて試料中の微量金属を測定するに際し該分析計
に試料を気化して導入する加熱気化導入方法において、
微粒子発生室でキャリアガスに微粒子を拡散・混合し、
該微粒子を含んだキャリアガスを加熱気化室に導き、該
加熱気化室内で試料が蒸発して生成した微量の高温金属
蒸気が前記微粒子と接触し、該微粒子が核となって凝縮
若しくは反応して不活性な粒子となり、該不活性粒子が
前記キャリアガスにより接続チューブを通って前記分析
計に搬送されることを特徴とする加熱気化導入方法。
1. A heating vaporization introducing method for vaporizing and introducing a sample into a sample when measuring a trace metal in the sample using an analyzer such as a high frequency inductively coupled plasma analyzer,
The fine particles are diffused and mixed with the carrier gas in the fine particle generation chamber,
The carrier gas containing the fine particles is guided to a heated vaporization chamber, and a small amount of high-temperature metal vapor generated by evaporating a sample in the heated vaporization chamber comes into contact with the fine particles, and the fine particles become nuclei and condense or react. A method for introducing heat and vaporization, wherein inert particles are formed, and the inert particles are conveyed to the analyzer through a connection tube by the carrier gas.
JP04041516A 1992-02-27 1992-02-27 Heat vaporization introduction method Expired - Fee Related JP3098606B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04041516A JP3098606B2 (en) 1992-02-27 1992-02-27 Heat vaporization introduction method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04041516A JP3098606B2 (en) 1992-02-27 1992-02-27 Heat vaporization introduction method

Publications (2)

Publication Number Publication Date
JPH05242852A JPH05242852A (en) 1993-09-21
JP3098606B2 true JP3098606B2 (en) 2000-10-16

Family

ID=12610543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04041516A Expired - Fee Related JP3098606B2 (en) 1992-02-27 1992-02-27 Heat vaporization introduction method

Country Status (1)

Country Link
JP (1) JP3098606B2 (en)

Also Published As

Publication number Publication date
JPH05242852A (en) 1993-09-21

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