JP3094489B2 - INK JET PRINT HEAD, INK JET PRINT APPARATUS USING THE SAME, AND METHOD OF MANUFACTURING INK JET PRINT HEAD - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a print head mainly used for an ink jet printer.

[0002]

2. Description of the Related Art Conventionally, as disclosed in Japanese Patent Application Laid-Open No. 63-252750 or European Patent 376606, an ink jet print head having a structure in which a number of flow paths capable of pressurizing ink are arranged in parallel. Has been invented.

The prior art described above is an excellent technique in that an ink jet print head having a relatively simple structure and high density nozzles can be realized, but a flow path composed of a large number of grooves is formed at a high density. Practically, there are a number of problems in manufacturing, since it is necessary to carry out electrical wiring from the groove. According to the conventional technique, as described in the above specification, since the flow path is opened toward one side and the other is closed, the cutting when forming the pressurized chamber needs to be performed halfway through the material.

[0004] As shown in FIG.
Since the dicing disk 902 needs to be stopped in the middle of 01, a dicing disk 902 having a diameter much smaller than that of a general one must be used, and the manufacturing cost of the dicing disk 902 increases.
A special flange jig had to be used for attaching the dicing disk 902 to the machine.

In the cutting process, a dicing disk 9 is used.
Since the outer periphery of No. 02 was short, the abrasion of the dicing disk 902 was severe and the dimensions of the workpiece were not stable. Furthermore, since the outer circumference of the dicing disk 902 is short, the temperature rise of the dicing disk 902 and the cutting portion causes polarization breakdown and dimensional change of the piezoelectric material. there were. Also,
The dicing disk 902 is moved upward (9
It was also necessary to perform an operation to escape in the 03 direction).

Further, in the prior art, as shown in FIG.
In addition to the conductive layer 909 on the inner wall of the groove 01a, it is necessary to pattern the conductive layer 909a for wiring on the surface outside the groove 901a in order to perform electric wiring from each groove 901a. Therefore, the pattern 909 is formed from the inner wall of the groove 901a.
Accuracy at the time of adjusting to 1a and accuracy of the pattern itself are required, and there is a problem in productivity.

[0007] As described above, the problems of the prior art in the formation of grooves and electrical wiring have become factors that greatly decrease productivity as the nozzle density of the ink jet print head increases and as the number of nozzles increases. .

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of various problems in putting such an ink jet print head into practical use, and an object of the present invention is to make production easier by facilitating production. An object of the present invention is to realize an inexpensive inkjet printhead by improving the speed, improving the production yield, and reducing the production cost, and at the same time, to manufacture an inkjet printhead with high density and multiple elements.

[0009]

That is, in order to solve the above problems, an ink jet print head according to the present invention has a plurality of flow paths, a piezoelectric material forming a side wall of the flow path, and an inner wall of the flow path. An electric field is applied to the piezoelectric material by a conductive layer connected to an external electric circuit, comprising a conductive layer, a nozzle connected to an end of the flow path, and an ink supply path connecting the plurality of flow paths to each other. In an ink-jet printhead that ejects ink droplets from the nozzles by pressurizing ink in the flow path by shearing deformation of the side wall of the flow path, the shape of the flow path is cross-sectional from one end to the other end It has a shape that penetrates linearly without changing the shape, one end of the flow path is connected to the nozzle, the other end is closed with a sealing material, and a part of the conductive layer formed on the inner wall of the flow path Outside the sealing material Characterized by connecting an external electric circuit by prolonging the. Further, in such an ink jet print head, a portion sandwiched between at least adjacent flow paths is made of a piezoelectric material, and a conductive layer is formed on at least a part of a side wall of the flow path.
Further, in the ink jet print head, a part of the conductive layer formed on the inner wall of the flow path is exposed, and a connection wire is crimped, soldered, or wire-bonded to the conductive layer, and connected to an external electric circuit. Also,
In an inkjet printing apparatus using such an inkjet print head, the inkjet print head and the external circuit are mounted on a base substrate. In the ink jet printing apparatus, the external circuit is a driver IC. Further, the inkjet print head of the present invention, a plurality of flow paths, a piezoelectric material forming a side wall of the flow path,
A conductive layer formed on the inner wall of the flow path, a nozzle connected to an end of the flow path, and an ink supply path connecting the plurality of flow paths to each other, and a conductive layer connected to an external electric circuit By applying an electric field to the piezoelectric material by shearing and deforming the side wall of the flow path, the ink in the flow path is pressurized and the ink droplets are ejected from the nozzles. A conductive sealing material that has a shape penetrating linearly without changing the cross-sectional shape up to the other end, one end of the flow path is connected to the nozzle, and the other end is electrically connected to the conductive layer. And the sealing material is connected to an external electric circuit. Further, in the method of manufacturing an ink jet print head according to the present invention, a plurality of grooves penetrating linearly from one end to the other end without changing the cross-sectional shape are formed on at least one surface of the first main body member. And fixing the second main body member on the surface of the first main body member on which the plurality of grooves are formed, so that the plurality of first main body members penetrate linearly without changing the cross-sectional shape from one end to the other end. A step of forming a main body member having a flow path, a step of forming a conductive layer on at least the entire inner wall of the flow path of the main body member, closing one of the inner walls of the main body member with a sealing member, and a nozzle member on the other side. Forming an ink supply path connecting the plurality of flow paths to each other by removing a part of the main body member, and performing electric wiring to each of the conductive layers on the inner wall of the flow path. . Further, in the method for manufacturing an ink jet print head, a conductive layer is formed on the entire inner wall of the flow path by connecting a plating processing liquid circulation flow path to the flow path and circulating the plating processing liquid through the flow path. I do. Further, in the method of manufacturing an ink jet print head according to the present invention, a plurality of grooves penetrating linearly from one end to the other end without changing the cross-sectional shape are formed on at least one surface of the first main body member. Forming a conductive layer on at least the surface of the first main body member where the groove is formed and on the inner wall of the groove, removing the conductive layer on a portion other than the inner wall of the groove, and forming the groove of the first main body member Forming a main body member having a plurality of flow paths linearly penetrating from one end to the other end by changing the cross-sectional shape from one end to the other end by fixing the second main body member on the set surface; One of the plurality of flow paths is closed with a sealing member, the other is fixed with a nozzle member, and a part of the main body member is removed to form an ink supply path connecting the plurality of flow paths to each other. That of the conductive layer on the inner wall Characterized by a step of the electrical wiring in Les. Further, in the method for manufacturing an ink jet print head, after coating the resist layer on the entire surface of the first main body member, or at least one surface, a plurality of grooves are formed on the surface coated with the resist layer, and further on the entire surface, or After forming a conductive layer on at least the inner wall of the groove and the surface coated with the resist layer, the conductive layer other than the inner wall of the groove is removed by removing the resist layer. Further, in the method of manufacturing an ink jet print head, a groove is formed in the first main body member, and further, a conductive layer is formed on the entire surface, or at least on an inner wall and an upper surface of the groove, and then the groove of the first main body member is formed. It is characterized in that the conductive layer other than the inner wall of the groove is removed by lapping the surface. After forming a conductive layer on the inner wall of the flow path, only one end of the flow path is immersed in a plating solution and subjected to electroplating or electroless plating to thereby form a conductive layer at one end of the flow path. It is characterized in that the layer is thickened or one end of the flow path is sealed. Also,
In such a method for manufacturing an ink jet print head, after forming a conductive layer on the inner wall of the flow path, or by thickening the conductive layer at one end of the flow path by solder plating only one end of the flow path, Alternatively, one end of the flow path is sealed. Further, in the method for manufacturing an ink jet print head, after forming a plurality of flow paths having a conductive layer on the inner wall in a main body member having a width in the nozzle row direction which is twice or more that of the ink jet print head to be manufactured, It is characterized in that two or more main body members are manufactured by cutting the main body member in a direction along the flow path. In the method for manufacturing an ink jet print head, after forming a plurality of flow paths having a conductive layer on an inner wall in a main body member having a length in a flow direction twice or more that of an ink jet print head to be manufactured. The method is characterized in that two or more main body members are manufactured by cutting the main body member in a direction crossing the flow path.

[0010]

1 to 10 show an ink jet print head manufactured as an embodiment according to the present invention and a method of manufacturing the same.
This will be described below.

FIG. 1A is a perspective view of an eight-element ink jet print head manufactured as an embodiment of the present invention.
FIG. 1B shows a longitudinal cross section of the one element.
(C) shows a CC cross section of FIG. 1 (b).

Inside the main body member 101, ten flow paths 102 penetrating in a straight line from one end to the other end without changing the cross-sectional shape are formed in parallel with each other, and one of the openings is formed with one opening. A nozzle member 105 having a nozzle hole 105a corresponding to each flow path is fixed to the other opening closed by the sealing member 103. Multiple channels 1
Numerals 02 are mutually connected by an ink supply path 106, and the ink 112 is supplied and filled from an ink supply port 107 attached to an upper portion of the main body member.

The inner wall of the flow path 102 is covered with a conductive layer 110, and one end thereof is used as a terminal conductive layer 110a for an external electric circuit by a solder 104 to form a film-like wiring 1a.
08. The ink 112 filled in the flow channel 102 is discharged as an ink droplet from the nozzle hole 105 a of the nozzle member 105 by deforming the wall surface of the flow channel 102.

In this embodiment, as shown in FIG.
02 is closed by a sealing material 103 and solder 104. This is because only the solder 104
Since the solder 104 may be corroded by the ink 112 in the ink supply line
This is because the sealing is performed by injecting the solder from the solder 104 when the durability is not required for a long time.

The means for deforming the wall surface of the flow path 102 will be described with reference to FIG. The arrows in the figure indicate the polarization direction of the piezoelectric material. FIG. 2 (a) shows a cross section similar to FIG. 1 (c), but in the present embodiment, the main body member 101 is composed of three parts, and the lower part from the center of the flow path to the lower wall member. 101a, an upper portion of a wall between adjacent flow paths is an upper wall member 101b, and an upper portion thereof is a lid member 101c. Here, the lower wall member 101a is made of a piezoelectric material polarized upward in the figure, and the upper wall member 101b is made of a piezoelectric material polarized downward in the figure. The inner wall surface of each flow path 102
The conductive layer 110 is formed.

As shown in FIG. 2B, the flow path 10 of interest
2 inner wall conductive layer 110 and flow paths 102L, 10
By applying a drive voltage 111 between each inner wall conductive layer 110L and 110R of the 2R, the flow path 102
A horizontal electric field acts on the piezoelectric material between the adjacent flow paths 102L and 102R. From the properties of a general piezoelectric material, the wall between the flow path 102 and the adjacent flow path is as shown in FIG.
And the volume of the flow path 102 is enlarged.

As shown in FIG. 2C, by applying the drive voltage 111 in the opposite direction to that of FIG. 2B,
The volume of the channel 102 decreases. By using these means to rapidly reduce the volume of the flow path,
Ink can be ejected from a.

Similarly, by controlling the voltage applied to the conductive layer 110 formed on the inner wall of the ten flow paths, the eight flow paths 1 connected to the nozzle hole 105a are controlled.
02 can be varied to function as an 8-nozzle inkjet printhead.

In this embodiment, lead zirconate titanate, which is a piezoelectric material which is relatively inexpensive, has a large electromechanical coupling coefficient and is easy to cut, is used as a material for the main body member 101. Any material can be used as long as the volume of the flow path 102 can be changed by an electric field acting on the portion sandwiched between the two. Further, in the present embodiment, the piezoelectric material in which the polarization direction is changed at the upper and lower portions of the channel and the portion sandwiched between the channels is used,
Even if one of the upper and lower parts is made of a material having no piezoelectricity, the volume of the flow path 102 can be changed, and ink can be ejected similarly.

A method of manufacturing a main body member 101 having a plurality of flow paths 102 whose inner walls are covered with a conductive layer 110 will be described with reference to FIG.

First, as shown in FIG. 3A, the lower wall member 101a and the upper wall member 101b are joined. In the present example, the surfaces of the lead zirconate titanate plates polarized in the thickness direction having a thickness of 1 mm and a thickness of 0.2 mm, respectively, were polished and bonded together.

Next, as shown in FIG. 3B, ten grooves 102a are cut and formed using a dicing disk rotating at a high speed. In this embodiment, ten through grooves having a depth of about 0.4 mm were formed.

According to the present invention, since the flow path 102 is straight, the dicing disk 905 used here is the same as that shown in FIG.
As shown by the dicing disk center locus 906, the member 904a to be machined is cut linearly without stopping or changing the direction in the middle.

Next, as shown in FIG. 3C, the lid member 101 is placed on the main body members 101a and 101b in which the grooves 102a are formed.
The main body member 101 having a plurality of flow channels 102 penetrating is formed by adhering c.

Next, as shown in FIG. 3D, the ink supply path 106 is cut from the upper part of the main body member 101 by milling or the like so that ink can be supplied to all the flow paths 102.

Next, the nozzle member 105 of the main body member 101
And the other end face is polished or cut, the inside of the flow path at one end is solder-plated, one end of the flow path 102 is closed with a sealing member 103 such as resin, and the other end is To the ink supply path 10
6, an ink supply port 107 formed of resin or the like is joined, and a film-shaped wiring 108 is
Connect. (FIG. 1 (b) is obtained from the above).

In this embodiment, since lead zirconate titanate is used as the piezoelectric material for the main body member, the portion between the ink supply path 106 and the nozzle member 5 is kept at a polarization breaking temperature of 200 ° C. or more during the manufacturing process. In order to prevent this, solder having a low melting point was used, and soldering of the film-like wiring 108 was performed by short-time local heating using an infrared beam.

As described above, according to the present invention, the processing of a groove, which is one of the processes requiring the longest time in manufacturing and requiring high accuracy, can be performed extremely easily as compared with the prior art. There is also an attempt to irradiate light energy such as laser to perform grooving in addition to the method of using cutting for grooving as in this embodiment, but in practice it is possible to obtain a stable grooving shape by laser processing. It is difficult, and cutting by a dicing disk used in this embodiment (FIG. 12) is suitable.

In this embodiment, as a means for forming the conductive layer 110 on the inner wall of the flow path 102, about 1 μm of nickel and about 0.2 μm of gold are formed by electroless plating using an apparatus having a structure shown in FIG. Formed on the inner wall.

The cross section of the flow path has a short side of about 0.1 mm.
Since the long side is a rectangle having a length of about 0.4 mm and a length of about 20 mm, the plating solution does not sufficiently act on the inside of the flow channel only by immersing the main body member 101 in a normal electroless plating solution. Therefore, as shown in FIG. 4, the plating solution was forcibly circulated through the plurality of flow paths 102 to uniformly perform plating treatment only inside the flow paths, whereby a favorable conductive layer 110 could be obtained.

In this electroless plating step, the plating solution 201
If the speed is too slow, pinholes etc. will occur due to bubbles generated on the plating surface, and a uniform plating surface will not be obtained,
If the speed of the plating solution 201 is too high, the formation of the plating layer is hindered, and the plating speed is rather reduced.
It was important to keep the circulation rate of 1 at an optimum value. By using such a method, the conductive layer 110 can be easily formed only on the inner wall of the flow path without using a selective conductive layer forming means such as masking or etching.

A method of manufacturing the main body member 101 having a plurality of flow paths 102 whose inner walls are covered with the conductive layer 110 will be described with reference to FIG. 5 according to another embodiment of the present invention.

As shown in FIG. 5A, the lower wall member 10
A resist layer 301 is coated on the entire upper surface of the member to which the upper wall member 101b is fixed.

Next, as shown in FIG. 5B, a groove 102a is formed using the above-mentioned dicing disk.

Next, as shown in FIG.
A conductive layer 110 is formed on the entire upper surface of the member including the inner wall by sputtering.

Further, as shown in FIG. 5D, the resist layer 301 is peeled off to remove the conductive layer other than the groove 102a. By doing so, the conductive layer 110 can be formed only on the inner wall of the groove 102a without using a selective film forming means such as photolithography.

Next, as shown in FIG.
By fixing 1c, the main body member 101 having the flow path 102 whose inner wall is covered on three sides by the conductive layer 110 can be formed.

In this embodiment, after the resist layer 301 is applied, the groove 102a is formed, the conductive layer 110 is formed on the entire surface, and finally the conductive layer 110 other than the inner wall of the groove 102a is peeled off. Remove and groove 1
The conductive layer 110 was formed only on the inner wall portion 02a, but the groove 102a was formed without applying the resist layer 301, and the conductive layer 110 was formed on the entire surface including the inner wall of the groove 102a.
The conductive layer 110 can be formed only on the inner wall of the groove 102a by polishing the surface of the member by lapping and removing the conductive layer 110 other than the inner wall of the groove 102a.

In this embodiment, sputtering is used to form the conductive layer 110. In particular, when the depth of the groove 102a is deeper than in this embodiment, the groove 102a is formed by sputtering.
In some cases, the conductive layer 110 may not be formed with a sufficient thickness behind the side surface of the conductive layer 110. Therefore, the conductive layer 110 may be formed using an evaporation method.

As shown in FIG. 6 (a), the sealing plating of the flow path 102 with solder is performed as shown in FIG.
This is performed by dipping the end of the main body member 101 on which the conductive layer 110 is formed. However, when the cross sectional area of the hole of the flow path 102 is small, the solder may not enter the hole. In such a case, as shown in FIG. 6B, it is preferable to deposit a metal on the conductive layer 110 at the end of the flow path 102 by electroplating, and to perform plating and sealing. By sealing and covering the surface with gold, the plated portion 404 can seal the flow path 102 and form the conductive layer 11.
The two functions of conduction with the external electric circuit of 0 can be realized for a long time.

In the first embodiment, the connection with the external electric circuit is established by connecting the terminal portion conductive layer 1 on the end face of the sealing portion of the conductive layer 110.
10a, but according to the invention shown in FIG.
As shown in the embodiment, one end of the flow path 102 is conductively sealed by plating or the like, and cut into the form shown in FIGS. 7A and 7B to form the terminal part conductive layer 502. It may be used as a connection terminal with an external electric circuit (FIG. 3C).

FIG. 8 shows a third embodiment according to the present invention. One end of the flow channel 102 is conductively sealed by plating or the like, cut into a shape shown in FIG. 8B by a dicing disk, or the like, and then, as shown in FIG.
8 can be inserted into the cut portion 601 and pressed into contact with the terminal portion conductive layer 602 by the stopper 603 to connect to an external electric circuit. By doing so, a reliable connection can be obtained without soldering at the time of connection,
Reconnection of wiring is also possible.

FIG. 9 shows a line head manufactured as a fourth embodiment according to the present invention. Since the number of elements of the line head is significantly increased, the head main body and the driver IC 704 are fixed on a base plate 701 on which a printed wiring 705 is formed, and wiring is performed by wire bonding. In the present embodiment, one end of the main body member 101 is cut with a dicing disk or the like while leaving the lower surface of the flow path inner wall,
A sealing material 702 is filled from the outside to seal one of the flow paths, and the terminal portion conductive layer 110a, which is the end of the conductive layer 110, and the terminal of the driver IC 704 are connected by a bonding wire 703. The driver IC 704 includes a film wiring 707
A voltage corresponding to the drive voltage 111 shown in FIG. 2 is generated at terminals connected to the plurality of flow path inner wall conductive layers 110 in response to a power supply and an input signal externally supplied through the power supply. The driver IC 704 decodes the coded input signal and drives each element. Therefore, by wiring the print head body and the driver IC 704 on the base plate 701, the number of wirings of the film wiring 707 is greatly reduced and the wiring is reduced. The pitch can be widened, and connection reliability is improved. After the wire bonding, the bonding wire is covered with a sealing material 708 and fixed.

FIG. 10 shows a method of mass-producing the main body member 101. According to the present invention, a flow path penetrated without changing the cross-sectional shape is used, and a conductive layer for connection to an external circuit is not formed other than the conductive layer on the inner wall of the flow path. A large body member block 801 having a flow path formed therein is prepared, and a large number of body members can be manufactured by cutting at a cut surface indicated by 802 and 803 in FIG. According to the present invention, the manufacturing method as described above becomes possible, and the production cost can be greatly reduced by performing the processing of the groove and the formation of the conductive layer which make many of the production steps collectively.

The cross-sectional shape and length of the flow path according to the present invention, and the dimensions and materials of each part are variously determined by the element density and repetition frequency, applied voltage, ink, material, etc. of the ink jet print head to be manufactured. It goes without saying that it is not necessarily the same as that employed in the above embodiment.

The ink-jet print head according to the present invention is used for recording information such as characters and pictures on a recording medium such as paper using ink. Can also be used for discharging selected droplets.

[0047]

According to the ink jet print head of the present invention, a plurality of flow paths, a piezoelectric material forming a side wall of the flow path, a conductive layer formed on an inner wall of the flow path, and an end of the flow path are connected. A nozzle, and an ink supply path connecting the plurality of flow paths to each other, and an electric field is applied to the piezoelectric material by a conductive layer connected to an external electric circuit to shear-deform the side walls of the flow path, thereby forming the inside of the flow path In an ink jet print head that ejects ink droplets from the nozzles by pressurizing the ink, the shape of the flow path has a shape penetrating linearly from one end to the other without changing the cross-sectional shape. , One end of the flow path is connected to the nozzle, and the other end is closed by a sealing material, and a part of the conductive layer formed on the inner wall of the flow path is extended outward from the sealing material so that the outside is formed. Connect to electrical circuit As a result, since an electric conductive layer other than the conductive layer formed on the inner wall of the flow path is not used, in addition to the conductive layer on the inner wall of the flow path, the outside There is no need to align the conductive layer on the inner wall of the flow path with the conductive layer for wiring, for example, by patterning a conductive layer for wiring on the surface of the substrate, thereby forming an ink jet print head with excellent precision in a simple process. It has the effect of being able to. Further, the inkjet print head of the present invention, a plurality of flow paths, a piezoelectric material forming a side wall of the flow path, a conductive layer formed on the inner wall of the flow path, a nozzle connected to the end of the flow path, An ink supply path connecting the plurality of flow paths to each other, and applying an electric field to the piezoelectric material by a conductive layer connected to an external electric circuit to shear-deform the side walls of the flow path, thereby forming ink in the flow path. In an ink jet print head that discharges ink droplets from nozzles by applying pressure, the shape of the flow path is formed in a shape that penetrates straight from one end to the other end without changing the cross-sectional shape. One end is connected to the nozzle, and the other end is closed with a conductive sealing material that is electrically connected to the conductive layer.By connecting the sealing material to an external electric circuit, as in the related art, Conductive layer on inner wall of flow channel In addition, it is necessary to align the conductive layer on the inner wall of the flow path with the conductive layer for the wiring, for example, by patterning a conductive layer for the wiring on a surface outside the flow path in order to perform electric wiring from each flow path. In other words, since the sealing material is bonded to the external electric circuit, there is an effect that an ink jet print head having excellent accuracy can be rationally formed by a simple process.

[Brief description of the drawings]

1A and 1B are views showing an embodiment according to the present invention, wherein FIG. 1A is a perspective view, and FIGS. 1B and 1C are sectional views.

FIG. 2 is a cross-sectional view illustrating the principle of ink ejection according to an embodiment of the present invention.

FIG. 3 is a view showing an embodiment of a method of manufacturing an ink jet print head according to the present invention, and is a perspective view showing a material form in each step.

FIG. 4 is a view showing an embodiment of a method of manufacturing an ink jet print head according to the present invention, and is a view showing a plating means for an inner wall of a flow path.

FIG. 5 is a cross-sectional view illustrating an embodiment of a method of manufacturing an ink-jet printhead according to the present invention, showing a conductive layer forming means on an inner wall of a groove.

FIG. 6 is a view showing an embodiment of a method of manufacturing an ink jet print head according to the present invention, and is a view showing a means for plating a conductive layer at an end of a flow path.

FIGS. 7A and 7B show a second embodiment according to the present invention, wherein FIG.
3 is a perspective view of the main body member from the rear, (b) is a cross-sectional view of the main body member, and (c) is a cross-sectional view of the embodiment.

FIG. 8 is a diagram showing a third embodiment according to the present invention;
3 is a perspective view of the main body member from the rear, (b) is a cross-sectional view of the main body member, and (c) is a cross-sectional view of the embodiment.

FIG. 9 is a diagram showing a fourth embodiment according to the present invention, wherein (a)
Is a perspective view from the rear, and (b) is a sectional view.

FIG. 10 is a perspective view of a main body member block illustrating an embodiment of the method of manufacturing an ink jet print head according to the present invention.

11A and 11B are diagrams showing an embodiment of a method for manufacturing an ink jet print head according to the related art, wherein FIG. 11A is a perspective view of a groove forming means, and FIG.

FIG. 12 is a sectional view showing a groove forming means according to the present invention.

FIG. 13 is a diagram showing an embodiment according to the prior art, in which (a)
(B) is a sectional view, and (c) is a perspective view.

[Explanation of symbols]

101 body member 101a lower wall member 101b upper wall member 101c lid member 102 flow path 102a ... Groove 103 ... Sealing member 104 ... Solder 105 ... Nozzle member 106 ... Ink supply path 107 ... Ink supply port 108 ... Film wiring 109 ... Adhesive 110 ... Conductive layer 110a ... Terminal part conductive Layer 111 Drive voltage 112 Ink 201 Plating liquid 201a Plating liquid (supply unit) 201b Plating solution (plating part) 201c ... Plating solution (liquid soda part) 202 ... Liquid soda 203 ... Plating solution circulation path 204 ... Plating solution circulation pump 301 ... Resist layer 401 ... Solder 401a ... ..Solder (plating part) 402 ... Soldering soda 403 ... Plating solution 404 ... Plating part 405 ... Electroplating power supply 406・ ・ ・ ・ ・ ・ Plating soda 501 ・ ・ ・ ・ ・ ・ Notch 502 ・ ・ ・ ・ ・ ・ Terminal conductive layer 601 ・ ・ ・ ・ ・ ・ Notch groove 602 ・ ・ ・ ・ ・ ・ Terminal Partial conductive layer 603 Stopper 701 Base plate 702 Sealant 703 Bonding wire 704 · Driver IC 705 ····· Printed wiring 706 ····· Connect Terminal 707: Film wiring 708: Sealing material 801: Body member block 802: Cut surface in longitudinal direction 803: ···· Width section 904a ··· Lower body member of this embodiment 904b ··· Lower body member (second portion) of this embodiment 904c ··· Lower part of the main body member of the embodiment (third portion) 905: Dicing disk of the present embodiment 906: Center locus of dicing disk of the present embodiment

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B41J 2/045 B41J 2/055 B41J 2/135-2/16

Claims (15)

(57) [Claims] A plurality of flow paths; a piezoelectric material forming a side wall of the flow path; a conductive layer formed on an inner wall of the flow path; a nozzle connected to an end of the flow path; An ink supply path connecting the flow paths to each other, and applying an electric field to the piezoelectric material by the conductive layer connected to an external electric circuit to cause the side wall of the flow path to be shear-deformed , thereby forming an inside of the flow path. In an ink jet print head that ejects ink droplets from the nozzles by pressurizing the ink, the shape of the flow path is linearly penetrated from one end to the other without changing the cross-sectional shape. and to one end of the channel is connected to the nozzle, the other end is closed by a sealing member, a portion of the flow path wherein the conductive layer formed on the inner wall of the
An ink jet print head, wherein the ink jet print head is connected to the external electric circuit by extending outward from a sealing material . 2. A portion of at least a portion of the flow channel sandwiched between adjacent flow channels is made of a piezoelectric material, and at least a portion of the side wall of the flow channel is formed.
2. The ink jet print head according to claim 1 , wherein a conductive layer is formed in a part . 3. The method according to claim 1, wherein a part of the conductive layer formed on the inner wall of the flow path is exposed, and a connection wire is crimped or soldered or wire-bonded to the exposed part and connected to an external electric circuit. An inkjet printhead as described. 4. The ink jet print head,
The external circuit is mounted on a base substrate.
Using the ink jet print head of claim 3
Inkjet printing equipment. 5. The external circuit is a driver IC.
The ink-jet pudding according to claim 4, wherein
Device. 6. A plurality of flow paths and a pressure forming a side wall of the flow path.
An electrically conductive material, a conductive layer formed on the inner wall of the flow path,
The nozzle connected to the end of the flow path and the plurality of flow paths are alternately connected.
And an ink supply path connected to the
An electric field is applied to the piezoelectric material by the conductive layer connected to the path.
The flow is applied by shearing the side wall of the flow path.
By applying pressure to the ink in the path,
Inkjet print head ejected from the printer
Then, the shape of the flow path is a shape penetrating linearly without changing the cross-sectional shape from one end to the other end , one end of the flow path is connected to the nozzle, the other end is the Conductive
Closed with a conductive encapsulant that is electrically connected to the layer
It is, characterized in that the sealing material is connected to the external electric circuit
Inkjet print head. 7. a) forming at least one surface of the first body member with a plurality of grooves penetrating linearly from one end to the other end without changing the cross-sectional shape; By fixing the second main body member on the surface of the first main body member on which the plurality of grooves are formed, a plurality of flows penetrating linearly from one end to the other end without changing the cross-sectional shape. Forming a main body member having a passage; c) forming a conductive layer on at least the entire inner wall of the flow path of the main body member; d) closing one of the inner walls of the main body member with a sealing member;
A nozzle member is fixed to the other side, and a part of the main body member is removed to form an ink supply path connecting the plurality of flow paths to each other, and electrical wiring is performed on each of the conductive layers on the inner wall of the flow path. And a method for manufacturing an ink jet print head. 8. A conductive layer is formed on the entire inner wall of the flow path by connecting a plating processing liquid circulation flow path to the flow path and circulating a plating processing liquid through the flow path. A method for manufacturing the inkjet print head according to the above. 9. a) forming at least one surface of the first main body member with a plurality of grooves penetrating linearly from one end to the other end without changing the cross-sectional shape; Forming a conductive layer on at least the surface of the first main body member where the groove is formed and the inner wall of the groove; c) removing the conductive layer other than the inner wall of the groove; d) the first main body A second part is formed on the grooved surface of the member.
A) forming a main body member having a plurality of flow paths that penetrate linearly without changing the cross-sectional shape from one end to the other end by fixing the main body member; One of the flow paths is closed with a sealing member, a nozzle member is fixed to the other, and a part of the main body member is removed to form an ink supply path connecting a plurality of the flow paths to each other. Providing electrical wiring to each of the conductive layers on the inner wall of the road. 10. The entire surface of the first main body member, or
After coating the resist layer on at least one surface, the plurality of grooves were formed on the surface coated with the resist layer, and further, a conductive layer was formed on the entire surface, or on at least the surface coated with the inner wall of the groove and the resist layer. The method according to claim 9, wherein the conductive layer other than the inner wall of the groove is removed by peeling the resist layer. 11. The groove formed in the first main body member, and further, a conductive layer is formed on the entire surface, or at least on the inner wall and upper surface of the groove, and then the surface of the first main body member where the groove is formed is removed. 10. The method according to claim 9, wherein the conductive layer other than the inner wall of the groove is removed by lapping. 12. After forming a conductive layer on the inner wall of the flow channel, only one end of the flow channel is immersed in a plating solution to perform electroplating or electroless plating. Thicken the conductive layer at one end of the road,
10. The method according to claim 7, wherein one end of the flow path is sealed. 13. After forming a conductive layer on the inner wall of the flow path, only one end of the flow path is plated with solder to increase the thickness of the conductive layer at one end of the flow path. The method according to claim 7, wherein one end of the flow path is sealed. 14. After forming a plurality of flow paths having a conductive layer on an inner wall in a main body member having a width in a nozzle row direction twice or more that of an ink jet print head to be manufactured,
10. The method according to claim 7, wherein the main body member is cut in a direction along a flow path to manufacture two or more main body members. 15. After forming a plurality of flow paths having a conductive layer on an inner wall in a main body member having a flow path length twice or more that of an ink jet print head to be manufactured, the main body member is allowed to flow. 2 by cutting across the road
8. The method according to claim 7, wherein at least one main body member is manufactured.
10. A method for manufacturing an ink jet print head according to claim 9.