JP3090466B2 - Vacuum generation unit - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a vacuum generating unit that supplies a negative pressure to a working device such as a suction pad.

[Prior Art] Conventionally, a vacuum generating unit has been used as a power source for a suction pad or a vacuum pack. This type of vacuum generating unit generally includes an ejector or a vacuum pump for generating a negative pressure, a vacuum port communicating with working equipment such as a suction pad, and a pressure fluid for supplying the ejector or the vacuum port to the vacuum port. A valve mechanism for shutting off or shutting off the air, and a filter for removing dirt from the air sucked from the suction pad.

The operation of the vacuum generating unit according to the related art configured as described above will be described.

The vacuum generating unit is used alone or in a plural number connected by a manifold. When the vacuum generating unit is used alone, the pressure fluid is sent from the pressure fluid supply source to the valve mechanism by a plurality of ports provided in the valve mechanism.

On the other hand, when a plurality of vacuum generating units are connected to the manifold and used, a pressure fluid is sent from the pressure fluid supply source to the valve mechanism via a passage provided in the manifold.

When the work is suctioned and conveyed using the suction pad, the work is performed as follows. First, when sucking air from a suction pad to suck a work, a pressure fluid is supplied to an ejector through a valve mechanism to generate a negative pressure, or
Turn on the vacuum pump. The air sucked from the suction pad is sucked into the vacuum generating unit from the vacuum port, dust and oil, etc. of the sucked air are removed by the filter unit, and passes through the passage inside the vacuum generating unit to the outside. Is discharged.

At this time, a signal for controlling suction conveyance of the suction pad is generated by detecting a negative pressure.

When releasing the negative pressure state of the suction pad, the pressure fluid is directly sent from the valve mechanism to the suction pad, so-called vacuum breaking is performed, and the negative pressure state of the suction pad is released.

[Problems to be Solved by the Invention] However, in the above-described conventional technology, when a plurality of vacuum generating units are arranged by a manifold,
There are problems as described below.

A pressure fluid, for example, compressed air, is supplied to all of the vacuum generating units from the manifold. At this time, when one vacuum generating unit attempts to work using another pressure fluid, for example, nitrogen, using the port of the valve mechanism,
The vacuum generating unit must be removed from the manifold. This is based on the reason that when the vacuum generating unit using nitrogen is mounted on the manifold, the compressed air and nitrogen may be mixed and the predetermined purpose cannot be achieved.

When a single pressure fluid, for example, compressed air is used in one vacuum generating unit, the fluid circuit inside the valve mechanism is changed to supply the vacuum generating unit from one passage of the manifold. Then, it is more efficient to branch into the respective passages. However, manufacturing the valve mechanism having the most efficient fluid circuit according to the type of the pressure fluid to be used is disadvantageous in that the manufacturing cost as an individual vacuum generating unit is extremely high because the structure is diverse. .

The present invention solves this type of problem and, when the vacuum generating units are connected by a manifold, does not remove a specific vacuum generating unit that uses a different pressure fluid from the manifold. ,
It is an object of the present invention to provide a vacuum generation unit that can use various types of pressure fluids individually for each vacuum generation unit and that can be changed to the most efficient fluid circuit according to the type of the pressure fluid.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides a vacuum generating unit for holding or transporting articles by connecting work equipment such as a suction pad to a vacuum port. , A plurality of vacuum generating units connected in series to supply or exhaust fluid in common, and at least a solenoid valve, a valve mechanism, a filter, and a detector, and a pressure fluid supply passage, a pressure fluid discharge A plurality of block bodies in which a plurality of passages such as passages are defined, interposed between the valve mechanism and the manifold;
Flow path changing means for selectively changing the flow paths of the plurality of passages, wherein the flow path changing means is provided with a plurality of communication paths for selectively communicating the plurality of chambers formed on the surface. And a plurality of second plates that selectively block communication between the passage on the valve mechanism section side and the passage on the manifold side, wherein the first plate is selected from a plurality of types. And the second plate is combined to change the flow path.

[Operation] In the above-described vacuum generating unit according to the present invention, any one of the plurality of passages defined inside is selectively changed in flow path by a plate and the flow passage is cut off. It can be easily changed to the most efficient fluid circuit simply by replacing the fluid circuit.

Embodiment A preferred embodiment of the vacuum generating unit according to the present invention will be described below in detail with reference to the accompanying drawings.

1 and 2, reference numeral 10 denotes a vacuum generating unit according to the present embodiment.

The vacuum generating unit 10 basically includes a solenoid valve section 12, a valve mechanism section 14, a function plate 16a, and a shut-off plate 18.
a, a manifold 20, an ejector 22, a detection unit 24, a filter unit 26, and a vacuum port unit 28.

The valve mechanism 14 made of a rectangular body has an electromagnetic valve
A screw 12 is mounted, and one side surface of the function plate 16a contacts the valve mechanism 14. In the valve mechanism 14, an air supply port 30, a pilot valve supply port 32, a vacuum breaking port 34, and a pilot valve exhaust port 36 are further defined from below. A screw hole is formed near the pilot valve supply port 32 and the vacuum breaking port 34,
A valve body 38 substantially constituting a flow control valve is screwed into the screw hole. Inside the valve mechanism 14, a two-port two-position air supply valve 40 whose axial direction extends in a direction perpendicular to the drawing,
A vacuum release valve 42 is provided, and the air supply valve 40, the vacuum release valve
A passage is provided for interconnecting the port 42, the ports 30 to 36, the solenoid valve portion 12, and the function plate 16a.

Check valves 43 and 45 are provided on a passage communicating with the air supply valve 40 and the vacuum break valve 42 from the pilot valve supply port 32 and a pilot valve supply passage 72 of the manifold 20 described later.
(See FIG. 5). The check valve 43,
Numeral 45 keeps the supply pressure when the supply is stopped due to an accident in the compressor, piping, or the like, and prevents malfunction of the electromagnetic valve section 12 functioning as a pilot valve. That is, it is to prevent the work from dropping or the like and increase the safety.

The electromagnetic valve section 12 provided above the valve mechanism section 14 is provided with an air supply valve 40 and a vacuum release valve constituting the valve mechanism section 14.
It has a first solenoid valve 44, a second solenoid valve 46, and a third solenoid valve 48, each of which is a 5-port 2-position valve for performing on / off operation of 42.

The plate-shaped function plate 16a has one side surface in contact with the valve mechanism section 14 and the other side surface in contact with the shut-off plate 18a. FIGS. 3A to 3C show the function plate 16.
3A shows a front view (a valve mechanism section 14 side), a longitudinal sectional view, and a rear view (a manifold 20 side) of FIG. Here, the function plate 16a will be described in more detail with reference to FIGS.

The plate-like function plate 16a is roughly divided into seven spaces on both sides by packings 50a and 50b, and six spaces among them, that is, the first chamber 52, the second
It comprises a room 54, a third room 56, a fourth room 58, a fifth room 60 and a sixth room 62. The packings 50a and 50b prevent the fluid from flowing between the respective spaces and also prevent the fluid from leaking from the gap between the function plate 16a and other members. A check valve 63 formed integrally with the packing 50b is provided on the shut-off plate side of the first chamber 52. In the present embodiment, the third chamber 56, the fourth chamber 58, and the fifth chamber 60 are partially missing the packing 50a that separates the respective chambers, and the third chamber 56 to the fifth chamber 60 (See FIG. 3a).

The plate-shaped blocking plate 18a has one side surface in contact with the function plate 16a and the other side surface in contact with the manifold 20. Here, referring to FIG.
a will be described.

The shut-off plate 18a has a first hole 64 for communicating the air supply valve 40 with the ejector 22, a second hole 65 for communicating the vacuum break valve 42 with a vacuum port 98 described later, and a manifold described later.
The third hole 66 connects the air supply passage 70 of the 20 to the air supply valve 40, the fourth hole 67 connects the pilot valve exhaust passage 76 of the manifold 20 to the pilot valve, and feeds from the valve mechanism 14 to the manifold 20. Six fifth holes 68 are formed for threaded studs to be formed. A packing is mounted on the surface of the manifold 20 so that fluid flowing through the six passages 70 to 80 of the manifold 20 does not leak.

The manifold 20 formed of a rectangular body has one side surface in contact with the blocking plate 18a and the other side surface in contact with the ejector 22. Inside the manifold 20, an air supply passage 70, a pilot valve supply passage 7
2, a vacuum breaking passage 74 and a pilot valve exhaust passage 76 are formed, while the air supply valve 40 extends along the direction of extension of the drawing sheet.
And a passage 80 communicating the vacuum break valve 42 and the vacuum port 98.

The side surface of the manifold 20 is disposed such that one side of the ejector 22 is in contact with the manifold 20. The ejector
22 is a rectangular body, inside which a nozzle part of a predetermined diameter
It has a diffuser section 84 connected to the nozzle section 82 and the diffuser section 84 communicates with a vacuum generating section 86. The diffuser section 84 communicates with a pilot valve exhaust passage 76 of the manifold 20, and a silencer 88 is mounted in the middle thereof.

On the other side surface of the ejector 22, a detection unit 24 and a vacuum port unit 28 are mounted. The detection unit 24 has a box shape, and a vacuum switch 90 is provided therein.
This vacuum switch 90 is preferably formed of a semiconductor pressure sensor, and detects a negative pressure generated in the vacuum generating section 86 through a passage 92 communicating with a vacuum port 98 described later to control the negative pressure of the suction pad. Emits a signal to

In addition, for a substrate inside the detection unit 24, for example, a flexible substrate, a microcomputer or a one-chip microcomputer is used to obtain an output signal of an electronic pressure sensor, and to set pressure, adjust, alarm, on / off, It is equipped with hysteresis, mode switching, failure prediction function of the internal state monitor of the vacuum generating unit, etc., and can control including the operation status of the entire vacuum generating unit. Further, it is also possible to perform predictive control of the adsorption state using fuzzy logic.
In addition, a digital display device such as a liquid crystal (LCD) and a light emitting diode (LED), not shown, for the above functions is provided.

The vacuum port 28 has a rectangular shape, a check valve 94 formed of a flexible member from one side of the ejector 22, a passage 96 communicating with the filter 26, and a vacuum port 98 provided on the other side. And defines a passage 92 extending from the vacuum port 98 to the detection unit 24. A filter 99 is provided on the passage 92 and the detector 24 side.

The filter unit 26 is adjacent to the detection unit 24 and is fixed to the detection unit 24 and the vacuum port unit 28. The filter section 26 closes the filter body 102 with a transparent lid member 100. Inside the filter section 26, a filter body 102 is disposed, and the filter section 26 is provided with a knob 106 having a stud 104 having a screw groove formed at a distal end thereof.
It is stuck to. Therefore, the filter main body 102 can be replaced by screwing the knob 106.

Next, the operation of the vacuum generating unit configured as described above will be described with reference to FIG. 1, FIG. 3 to FIG.

In the present embodiment, first, the supplied pressure fluid is limited to one type. Therefore, if the pressure fluid is, for example, compressed air, the compressed air is supplied from the air supply passage 70 of the manifold 20 and exhausted from the pilot valve exhaust passage 76 of the manifold 20. Accordingly, the ports 30 to 36 of the valve mechanism 14 are also closed by the screws (see FIG. 5). In this state, when the work is suctioned and conveyed by the suction pad,
First, a compressed air supply source such as a compressor (not shown) is energized, and the compressed air is supplied to the air supply passage 70 of the manifold 20, and is supplied to the third chamber 56 of the function plate 16a through the third hole 66 of the shut-off plate 18a. Reach The function plate 16a communicates from the third chamber 56 to the fifth chamber 60 because the packing 50a is partially missing (see FIG. 3a). Therefore, the compressed air reaches the fourth chamber 58 from the third chamber 56 of the function plate 16a, and when the first solenoid valve 44 is energized, the compressed air opens the air supply valve 40. Then, the check valve 63 is opened (see broken lines in FIGS. 1 and 3b), and the compressed air supply source and the ejector 22 are turned off.
And compressed air is supplied to the ejector 22 (see FIG. 5).

In this way, the diffuser section is moved from the nozzle section 82 of the ejector 22 to the diffuser section.
When the compressed air flows through 84, a negative pressure is generated in the vacuum generating section 86 (see FIG. 1), and the air from the suction pad is sucked. That is, the check valve 94 is opened as shown by the broken line by the negative pressure, and the air on the vacuum port 98 side passes through the filter unit 26 for removing dust, the passage 96, and the vacuum generating unit 86,
The suction is performed by the diffuser unit 84.

At this time, the vacuum switch 90 of the detection unit 24 is connected to the vacuum port 98 by the passage 92 communicating from the vacuum port 98 to the detection unit 24.
, And the suction signal is controlled by the output signal.

On the other hand, the air sucked from the vacuum port 98 and the compressed air ejected by the nozzle portion 82 are mixed with the diffuser portion.
The air is discharged from the pilot valve exhaust passage 76 of the manifold 20 to the outside via a silencer 88 for removing the dirt from the air.

When the negative pressure applied to the suction pad is released, the second solenoid valve 46 is energized, and the compressed air displaces the air supply valve 40 from the third chamber 56 of the function plate 16a through the fourth chamber 58. At this time, the check valve 63 of the first chamber 52 is closed, and the exhaust of another vacuum generating unit flows from the pilot valve exhaust passage 76 of the manifold 20 through the ejector 22 toward the air supply valve 40. That is, since the exhausted air is supplied through the filter of the other vacuum generating unit, the air supply valve 40 is not contaminated, and
Prevent its performance degradation. On the other hand, the compressed air
The third hole 66 of the shutoff plate 18a extends from the air supply passage 70 of
Flows into the third chamber 56 of the function plate 16a through the third chamber 56 and reaches the fourth chamber 58 from the third chamber 56 of the function plate.
42 is opened (see FIG. 5). Since the compressed air supply source communicates from the third chamber 56 to the fifth chamber 60 of the function plate 16a, the compressed air supply source directly communicates with the vacuum port 98 via the vacuum break valve 42 and the passage 80 from the fifth chamber 60 for suction. The negative pressure of the pad is released.

In this way, by inserting the function plate 16a into the vacuum generating unit 10, the fluid circuit can be changed without changing the internal structure of the valve mechanism 14. Further, since the blocking plate 18a is inserted, the compressed air does not flow into the passage of the unused manifold 20. This is because, in the present embodiment, the pilot valve supply passage 72 and the vacuum breaking passage 74 of the manifold 20 and the valve mechanism 14 are shut off by the shut-off plate 18a. For this reason, when the same pressure fluid is used, it is effective because a single supply side can be used.

Next, a second embodiment will be described. In this case, the same components as those of the first embodiment are denoted by the same reference numerals, and the detailed description thereof will be omitted. In this embodiment, the function plate 16b and the blocking plate 1
Only 8b differs from the first embodiment.

In this embodiment, dry air or nitrogen is used to avoid contamination of the work, that is, to release the negative pressure.
At this time, compressed air is supplied to the pilot valve and the ejector 22. Here, the compressed air is supplied only to the air supply passage 70 of the manifold 20, and the nitrogen or dry air is supplied to the vacuum breaking passage 74 of the manifold 20. Each port 30 to 36 of the valve mechanism 14 is closed with a screw.

In the function plate 16b, a part of the packing 108a is missing, and the third chamber 56 and the fourth chamber 58 communicate with each other (FIG. 6a).
reference).

The shut-off plate 18b is provided with a sixth hole 110 which connects the vacuum break passage 74 of the manifold 20 and the vacuum break valve 42 in addition to the first hole 64 to the fifth hole 68 in FIG. reference).

When operating this vacuum generating unit, the compressed air supply source is first energized, and the compressed air flows into the air supply passage 70 of the manifold 20, and the function plate 16b
From the third chamber 56 to the fourth chamber 58. Therefore, the first solenoid valve
When the compressed air is supplied to the air supply valve 44,
Open 40. Therefore, the check valve 63 is opened, the compressed air supply source communicates with the ejector 22, and a negative pressure is generated to suck the air from the suction pad (see FIG. 8).

When the negative pressure applied to the suction pad is released, the second solenoid valve 46 is energized, and compressed air flows from the air supply passage 70 of the manifold 20 through the third hole 66 of the shut-off plate 18b. Compressed air flows into the function plate 16b from the third chamber 56 through the fourth chamber 58, and closes the air supply valve 40. On the other hand, the compressed air
When the solenoid valve 48 is energized, the vacuum breaking valve 42 is opened (see FIG. 8). Therefore, dry air or nitrogen flows from the vacuum breaking passage 74 of the manifold 20 to the shut-off plate 18.
6th hole 110 of b, 5th chamber 6 of function plate 16b
Through 0, directly communicate with the vacuum port 98 via the passage 80,
Release the negative pressure of the suction pad.

 This embodiment also provides the same effects as the first embodiment.

Next, a third embodiment will be described. In the present embodiment, a point that a vacuum pump is used instead of the ejector 22, the function plate 16c and the shut-off plate 18b
Is different from the first embodiment.

In this embodiment, when a vacuum pump is used, that is, the vacuum pump is connected to the air supply passage 70 of the manifold 20, and the compressed air is released to the negative pressure release of the suction pad and the pilot valve. Used. Here, the supply of the compressed air is performed using only the vacuum breaking passage 74 of the manifold 20, and the ports 30 to 36 of the valve mechanism 14 are closed with screws.

As shown in FIG. 9A, the function plate 16c has a part of the packing 112a missing, and the fourth chamber 58 and the fifth chamber 60 are omitted.
Are in communication. Also, since the flow direction of the fluid in the passage 78 is opposite to that in the first embodiment, the check valve shown in FIGS. 3B and 6C and FIGS. 6B and 6C is not provided.

Therefore, the compressed air flowing from the vacuum breaking passage 74 of the manifold 20 is transferred from the fifth chamber 60 of the function plate 16c to the fourth chamber 58 through the sixth hole 110 of the shut-off plate 18b.
The compressed air opens the air supply valve 40 when the first solenoid valve 44 is energized. Therefore, the vacuum pump and the vacuum port 98 communicate with each other through the third hole 66 of the shut-off plate 18b and the third chamber 56 of the function plate 16c, and air is sucked from the vacuum port 98 into the vacuum pump (FIG. 10). reference). Thus, the air of the suction pad is sucked.

On the other hand, when releasing the negative pressure applied to the suction pad, the second solenoid valve 46 is energized to close the air supply valve 40,
The compressed air flows from the vacuum breaking passage 74 of the manifold 20 to the sixth hole 110 of the shut-off plate 18b and the function plate 16
c into the fifth chamber 60 and the fifth
From the chamber 60 to the fourth chamber 58, the third solenoid valve 48 is energized to open the vacuum break valve 42 (see FIG. 10). Therefore, the source of compressed air is supplied from the vacuum break passage 74 to the sixth hole 110 of the shut-off plate 18b, the function plate 16c.
And directly communicates with the vacuum port 98 through the passage 80 to release the negative pressure of the suction pad.

 This embodiment also provides the same effects as the first embodiment.

Further, a fourth embodiment will be described. This embodiment is different from the first embodiment in the configuration of the blocking plate 18c.

This embodiment is used when one vacuum generating unit 10 is operated with a pressure fluid different from the pressure fluid flowing through the manifold 20 while being connected to the manifold. Here, the supply of the pressure fluid is performed by the air supply port 30 of the valve mechanism 14.
The pilot valve supply port 32 and the vacuum breaking port 34 of the valve mechanism 14 are closed with screws.

The blocking plate 18c has only the first hole 64 and the second hole 65 (see FIG. 11). Therefore, the air supply passage 70, the pilot valve supply passage 72, the vacuum breaking passage 74, and the pilot valve exhaust passage 76 of the manifold 20 are connected to the vacuum generating unit.
It is shut off from the valve mechanism 14 of FIG. 10 (see FIG. 12). When the work is suctioned and conveyed by the suction pad in such a state, the pressure fluid is supplied from the air supply port 30 of the valve mechanism 14, and reaches the third chamber 56 of the function plate 16a (FIGS. 3 and 12). See figure). The pressure fluid reaches the fourth chamber 58 from the third chamber 56 of the function plate 16a, and when the first solenoid valve 44 is energized, the pressure fluid opens the air supply valve 40. Therefore, the branched pressure fluid reaches the ejector 22 from the air supply valve 40 and generates a negative pressure.

On the other hand, when releasing the negative pressure applied to the suction pad, the second solenoid valve 46 is energized to close the air supply valve 40, and the pressurized fluid flows from the air supply port 30 of the valve mechanism 14 to the second of the function plate 16a. It flows into the third chamber 56 and reaches the fourth chamber 58 from the third chamber 56 of the function plate 16a. Third solenoid valve 4
By energizing 8, the vacuum break valve 42 is opened (see FIG. 12). Therefore, the pressure fluid is supplied to the air supply port
From 30 reaches the third chamber 56 of the function plate 16c,
A vacuum port is directed from the third chamber 56 to the fifth chamber 60 of the function plate 16c through the vacuum break valve 42 and the passage 80.
Communicates directly with 98 to release the suction pad negative pressure.

In this embodiment, the pressure fluid reaches the shut-off plate 18c by the hole of the function plate 16a, but does not leak due to the packing 50b of the function plate 16a (see FIG. 3c).

In this embodiment, the same effects as those of the first embodiment can be obtained, and the vacuum generating unit 10 does not have to be removed from the manifold 20 one by one.

The present invention provides various function plates as described above.
It is also possible to use a combination of 16a to 16c and the blocking plates 18a to 18c, or to use the blocking plates 18a, 18b, and 18c alone, or to remove the manifold 20 from the function plate 16a, 16b, and 16c alone to generate a vacuum. It is also possible to use

The plurality of types of the function plates 16a to 16c each function as a first plate, and the plurality of types of the blocking plates 18a
18c function as a second plate.

[Effects of the Invention] As described above, the vacuum generating unit according to the present invention has the following effects and advantages.

That is, by using the function plate and the shut-off plate, it is possible to change to the most efficient fluid circuit according to the type of the pressure fluid to be used without changing the structure inside the valve mechanism. The plate has a low manufacturing cost due to a change in the structure of the valve mechanism, and does not take up much space, so even if a variety of plates are prepared, the burden on the user side will not increase significantly.

In addition, since two plates are used, there is an effect that a combination of the two plates can be used with a smaller number of types than a plate in which all the functions are incorporated.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a first embodiment of a vacuum generating unit according to the present invention, FIG. 2 is a perspective view of a first embodiment of a vacuum generating unit according to the present invention, and FIG. Fig. 3b is a front view of the function plate of the first embodiment of the vacuum generating unit according to the invention on the valve mechanism side, and Fig. 3b is a cross-sectional view of the function plate of the first embodiment of the vacuum generating unit according to the present invention taken along line AA. Fig. 3c is a rear view of the function plate of the vacuum generating unit according to the first embodiment of the present invention on the manifold side, and Fig. 4 is a perspective view of a shut-off plate of the first embodiment of the vacuum generating unit according to the present invention. FIG. 5 is an explanatory view of a fluid circuit of a first embodiment of a vacuum generating unit according to the present invention. FIG. 6A is a valve mechanism of a function plate of a second embodiment of the vacuum generating unit according to the present invention. Fig. 6b is a side front view, FIG. 6C is a sectional view taken along line BB of the function plate of the second embodiment of the vacuum generating unit according to the present invention. FIG. 6C is a rear view of the function plate of the second embodiment of the vacuum generating unit according to the present invention on the manifold side. FIG. 7 is a perspective view of a shut-off plate of a second embodiment of the vacuum generating unit according to the present invention. FIG. 8 is an explanatory diagram of a fluid circuit of a second embodiment of the vacuum generating unit of the present invention. FIG. 9A is a front view of a function plate of a vacuum generating unit according to a third embodiment of the present invention on the valve mechanism side, and FIG. 9B is C- of the function plate of the vacuum generating unit according to the third embodiment of the present invention. 9c is a rear view of the function plate of the third embodiment of the vacuum generating unit according to the present invention on the manifold side, and FIG. 10 is a third embodiment of the vacuum generating unit according to the present invention. FIG. 11 is a perspective view of a shut-off plate of a fourth embodiment of the vacuum generating unit according to the present invention, and FIG. 12 is a fluid diagram of a fourth embodiment of the vacuum generating unit according to the present invention. FIG. 4 is a circuit diagram. 10 Vacuum generation unit 12 Solenoid valve unit 14 Valve mechanism unit 16a to 16c Function plate 18a to 18c Shutoff plate 20 Manifold 22 Ejector 24 Detection unit 26 Filter Part 28: Vacuum port

──────────────────────────────────────────────────続 き Continued on the front page (56) References JP-A-63-154900 (JP, A) JP-A-61-51500 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) F04F 5/20 F04F 5/44

Claims (3)

(57) [Claims] 1. A vacuum generating unit for holding or transporting articles by connecting working equipment such as a suction pad to a vacuum port, wherein a plurality of vacuum generating units are connected in series to supply a common fluid. Or a manifold that performs exhaust, at least, a plurality of block bodies including a plurality of passages such as a pressure fluid supply passage and a pressure fluid discharge passage including a solenoid valve unit, a valve mechanism unit, a filter unit and a detection unit, Flow path changing means interposed between the valve mechanism section and the manifold, and selectively changing the flow paths of the plurality of paths, comprising: a plurality of flow path changing means formed on a surface. A plurality of first plates provided with communication passages for selectively communicating the first and second chambers, and a plurality of second plates for selectively blocking communication between the valve mechanism side passage and the manifold side passage. And
The first plate and the second plate selected from a plurality of types;
A unit for generating a vacuum, wherein a flow path is changed in combination with a plate. 2. The vacuum generating unit according to claim 1, wherein the first plate comprises a function plate,
The function plate has a plurality of chambers respectively defined on both front and back surfaces and divided by a sealing member, a through hole for communicating the front chamber and the corresponding rear chamber with each other, and one side adjacent on the surface. A vacuum generating unit, characterized in that a communication path for communicating the one chamber with the other chamber is provided by cutting out a part of a seal member for separating the chamber from the other chamber. 3. The vacuum generating unit according to claim 1, wherein the second plate comprises a plate-shaped shut-off plate, and the shut-off plate has a corresponding passage on the valve mechanism side and a corresponding passage on the manifold side. A single or a plurality of holes, each of which communicates with a vacuum.