JP3088061U - Air filter with static pressure outlet and clean bench / clean booth or semiconductor manufacturing device using the air filter - Google Patents
Air filter with static pressure outlet and clean bench / clean booth or semiconductor manufacturing device using the air filterInfo
- Publication number
- JP3088061U JP3088061U JP2002000762U JP2002000762U JP3088061U JP 3088061 U JP3088061 U JP 3088061U JP 2002000762 U JP2002000762 U JP 2002000762U JP 2002000762 U JP2002000762 U JP 2002000762U JP 3088061 U JP3088061 U JP 3088061U
- Authority
- JP
- Japan
- Prior art keywords
- static pressure
- plate
- hollow portion
- air filter
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Abstract
(57)【要約】 （修正有）
【課題】エアフィルタの静圧が常時簡単に確認でき、送
風による脈流がなく安定した静圧測定ができるエアフィ
ルタおよび該エアフィルタを空気清浄手段として取付け
たクリーンベンチ・クリーンブースまたは半導体製造用
装置を提供する。
【解決手段】エアフィルタの濾材７の中央部に、静圧取
出孔および圧力測定孔９を穿設した中空部を備えたプレ
ート１１が該静圧取出孔を該濾材７の上流側よりやや突
出して装着固定される。前記プレート１１は、上流側の
両側板の端縁部近くに、気流とは直角方向に、静圧取出
孔を中空部に連通して穿設すると共に、下流側の端縁板
１３の中央に圧力測定孔９を前記中空部に連設される。
(57) [Summary] (with correction) [Problem] An air filter capable of easily checking the static pressure of an air filter at all times and performing stable static pressure measurement without a pulsating flow due to air blowing, and mounting the air filter as an air purifying means. Provide clean bench / clean booth or semiconductor manufacturing equipment. A plate (11) having a hollow portion having a static pressure extraction hole and a pressure measurement hole (9) in the center of a filter medium (7) of an air filter protrudes the static pressure extraction hole slightly from an upstream side of the filter medium (7). And fixed. The plate 11 is formed near the edges of the both side plates on the upstream side, in a direction perpendicular to the air flow, with a static pressure extraction hole communicating with the hollow portion, and at the center of the downstream side edge plate 13. A pressure measurement hole 9 is connected to the hollow portion.
Description
【０００１】[0001]
【考案の属する技術分野】本考案は、空気清浄用のエアフィルタにおいて、 静圧を専用の静圧取出孔で受けることにより、静圧を常時簡単に確認できると共 に、安定した静圧測定ができるエアフィルタおよび該エアフィルタを空気清浄手 段として取付けたクリーンベンチ・クリーンブースまたは半導体製造用装置に関 するものである。[Technical field to which the present invention pertains] The present invention relates to an air filter for air cleaning, in which static pressure can be easily and constantly checked by receiving static pressure through a dedicated static pressure outlet, and stable static pressure measurement can be performed. The present invention relates to an air filter which can be used for cleaning, a clean bench / clean booth having the air filter attached as an air cleaning means, or a semiconductor manufacturing apparatus.
【０００２】[0002]
【従来の技術】従来、エアフィルタには静圧を取り出すための専用の孔は備 えられておらず、他の目的により形成された孔から測定器を挿入して静圧を取り 出すものがあった。2. Description of the Related Art Conventionally, an air filter has not been provided with a dedicated hole for extracting a static pressure, but a device for inserting a measuring instrument through a hole formed for another purpose to extract a static pressure. there were.
【０００３】[0003]
【考案が解決しようとする課題】前記従来の静圧取出し手段では、エアフィ ルタの静圧を常時確認できず、静圧の測定に手間がかかるという課題があった。 また、前記従来の静圧取出し手段では、送風による脈流で静圧が変動するという 課題があった。そして、前記他の目的により形成された孔に測定器を挿入する場 合、前記送風による脈流で静圧が変動するのを防止するため、脈流防止器を取付 けなければならないという課題があった。The conventional static pressure extracting means has a problem that the static pressure of the air filter cannot be constantly checked, and it takes time to measure the static pressure. Further, the conventional static pressure extracting means has a problem that a static pressure fluctuates due to a pulsating flow caused by air blowing. When a measuring instrument is inserted into a hole formed for the other purpose, there is a problem that a pulsating flow arrester must be attached in order to prevent a static pressure from fluctuating due to a pulsating flow caused by the blast. there were.
【０００４】本考案は、前記従来の課題を解決すべくなされたもので、エア フィルタの静圧が常時確認できると共に、送風による脈流がなく安定した静圧の 測定ができる静圧取出孔付きエアフィルタおよび該エアフィルタを空気清浄手段 として取付けたクリーンベンチ・クリーンブースまたは半導体製造用装置を提供 しようとするものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and has a static pressure extracting hole which can constantly check the static pressure of the air filter and can measure the static pressure stably without a pulsating flow due to air blowing. An object of the present invention is to provide an air filter and a clean bench / clean booth or an apparatus for manufacturing a semiconductor in which the air filter is mounted as air cleaning means.
【０００５】[0005]
【課題を解決するための手段】本考案は、ケーシング内にひだ折りされた濾 材を装着固定して形成されたエアフィルタにおいて、前記濾材の中央部に、静圧 取出孔と圧力測定孔を穿設した中空部を備えたプレートが装着固定され、 前記プレートは、縦方向に中空部を備えて立方体筒状に形成され、上流側の両 側板の端縁部近くに、気流とは直角方向に、１個または複数個の静圧取出孔を前 記中空部に連通するように穿設すると共に、下流側の端縁板の中央に圧力測定孔 を前記中空部に連通するように穿設して形成され、 更に、前記プレートは、濾材の中央部において、前記静圧取出孔が、該濾材よ り上流側にやや突出するようにして、該プレートの上下面をケーシングを構成す る上・下部外枠に接着剤で密に固定すると共に、該プレートの両側板を濾材に接 着剤で密に固定するという手段、または、 ケーシング内にひだ折りされた濾材を装着固定して形成されたエアフィルタに おいて、前記濾材の中央部に、静圧取出孔と圧力測定孔を穿設した中空部を備え たプレートが装着固定され、 前記プレートは、縦方向に中空部を備えて立方体筒状に形成され、上流側の両 側板の端縁部近くに、気流とは直角方向に、１個または複数個の静圧取出孔を前 記中空部に連通するように穿設すると共に、下流側の端縁板の中央に圧力測定孔 を前記中空部に連通するように穿設して形成され、 更に、前記プレートは、濾材の中央部において、前記静圧取出孔が、該濾材よ り上流側にやや突出するようにして、該プレートの上下面をケーシングを構成す る上・下部外枠に接着剤で密に固定すると共に、該プレートの両側板を濾材に接 着剤で密に固定して静圧取出孔付きエアフィルタが形成され、且つ該静圧取出孔 付きエアフィルタを空気清浄手段としてクリーンベンチ・クリーンブースまたは 半導体製造用装置に使用するという手段、 を採用することにより、上記課題を解決した。SUMMARY OF THE INVENTION The present invention provides an air filter formed by mounting and fixing a folded filter medium in a casing, wherein a static pressure extracting hole and a pressure measuring hole are provided at the center of the filter medium. A plate provided with a perforated hollow portion is mounted and fixed, and the plate is formed in a cubic cylindrical shape with a hollow portion in the vertical direction, and near the edges of both side plates on the upstream side in a direction perpendicular to the airflow. In addition, one or more static pressure extraction holes are formed so as to communicate with the hollow portion, and a pressure measurement hole is formed at the center of the downstream edge plate so as to communicate with the hollow portion. Further, the plate is formed such that the upper and lower surfaces of the plate constitute a casing in such a manner that the static pressure extraction hole slightly protrudes upstream from the filter medium at a central portion of the filter medium.・ Attach tightly to the lower outer frame with adhesive and Means that the both side plates of the filter medium are tightly fixed to the filter medium with an adhesive, or an air filter formed by mounting and fixing the folded filter medium in a casing, the static pressure is applied to the center of the filter medium. A plate having a hollow portion with an extraction hole and a pressure measurement hole is mounted and fixed, and the plate is formed in a cubic cylindrical shape with a hollow portion in the vertical direction, near the edges of both upstream side plates. In addition, one or a plurality of static pressure extraction holes are formed in a direction perpendicular to the air flow so as to communicate with the hollow portion, and a pressure measurement hole is formed at the center of the downstream edge plate. The plate is formed so as to communicate with the plate. Further, the plate is formed such that the static pressure extraction hole slightly protrudes upstream from the filter medium at the center of the filter medium. Is fixed tightly to the upper and lower outer frames of the casing with adhesive. At the same time, an air filter with a static pressure extraction hole is formed by tightly fixing both side plates of the plate to a filter medium with an adhesive, and the clean bench / clean booth uses the air filter with the static pressure extraction hole as air cleaning means. Alternatively, the above problem was solved by adopting means for use in a semiconductor manufacturing apparatus.
【０００６】[0006]
【考案の実施の形態】本考案の実施の形態を図面に基づいて詳細に説明する 。図１は、本考案静圧取出孔付きエアフィルタの下流側から見た全体の斜視図、 図２は同上流側から見た全体の斜視図、図３はプレートの斜視図である。図に示 すように、上部外枠１、下部外枠２および両側部外枠３を接合固定して、上流側 と下流側にそれぞれ通気開口４・５を設けて形成されたケーシング６内にひだ折 りされた濾材７が装着固定されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an overall perspective view of the air filter with a static pressure outlet according to the present invention as viewed from the downstream side, FIG. 2 is an overall perspective view as viewed from the upstream side, and FIG. 3 is a perspective view of a plate. As shown in the figure, an upper outer frame 1, a lower outer frame 2, and both side outer frames 3 are joined and fixed, and a casing 6 formed by providing ventilation openings 4.5 on the upstream side and the downstream side, respectively. The folded filter media 7 is mounted and fixed.
【０００７】そして、前記濾材７の中央部において、上流側から下流側に亘 って仕切るようにして、静圧取出孔８と圧力測定孔９を穿設した中空部１０を備 えたプレート１１が上・下部外枠１・２に装着固定されている。[0007] At the center of the filter medium 7, a plate 11 having a hollow portion 10 having a static pressure outlet 8 and a pressure measuring hole 9 is provided so as to partition from the upstream side to the downstream side. It is fixed to the upper and lower outer frames 1 and 2.
【０００８】前記プレート１１は、縦方向に中空部１０を備えて立方体筒状 に形成され、上流側の両側板１２の端縁部近くに、気流とは直角方向に１個また は複数個（図２・図３においては２個）の静圧取出孔８を前記中空部１０に連通 するように穿設すると共に、下流側の端縁板１３の中央に圧力測定器の測定部材 を挿入する圧力測定孔９を前記中空部１０に連通するようにして穿設して形成さ れている。[0008] The plate 11 is formed in a cubic cylindrical shape having a hollow portion 10 in the longitudinal direction, and one or a plurality of (in the direction perpendicular to the air flow) near the edge of the both side plates 12 on the upstream side. 2 and 3, two static pressure outlet holes 8 are formed so as to communicate with the hollow portion 10 and a measuring member of a pressure measuring device is inserted into the center of the downstream edge plate 13. The pressure measurement hole 9 is formed so as to communicate with the hollow portion 10.
【０００９】前記構成より成るプレート１１は、濾材７の中央部において、 前記静圧取出孔８が、該濾材７より外方にやや突出するようにして、圧力の漏れ がないように上下面を上・下部外枠１・２に接着剤で密に接着固定すると共に、 両側板１２を濾材７に接着剤で密に接着固定して取付けられている。The plate 11 having the above-mentioned structure is arranged such that the static pressure outlet 8 protrudes slightly outward from the filter medium 7 at the center of the filter medium 7 so that the upper and lower surfaces thereof are free from pressure leakage. The upper and lower outer frames 1 and 2 are tightly bonded and fixed with an adhesive, and the both side plates 12 are tightly bonded and fixed to the filter medium 7 with an adhesive.
【００１０】本考案静圧取出孔付きエアフィルタを使用するときは、エアフ ィルタを通過する気流により発生する静圧を、気流とは直角方向に設けられた静 圧取出孔８で受けて、中空部１０内に導入する。そして、該中空部１０内に導入 された静圧は、前記中空部１０内に一旦導入されることによって、静圧の脈流が 抑制され、安定した圧力を圧力測定孔９で計測することができる。When the air filter with the static pressure extraction hole of the present invention is used, the static pressure generated by the air flow passing through the air filter is received by the static pressure extraction hole 8 provided in a direction perpendicular to the air flow, and the hollow is used. It is introduced into the unit 10. When the static pressure introduced into the hollow portion 10 is once introduced into the hollow portion 10, the pulsating flow of the static pressure is suppressed, and a stable pressure can be measured by the pressure measurement hole 9. it can.
【００１１】なお、気流とは直角に静圧取出孔８を複数個穿設することで、 複数個の圧力取出孔８で静圧を受けることにより静圧の平均値を測定できる。ま た、前記プレート１１の圧力測定孔９側に圧力計を保持し、チューブ配管するこ とにより常時静圧を確認することができるのである。The average value of the static pressure can be measured by forming a plurality of static pressure outlets 8 at right angles to the air flow and receiving a static pressure through the plurality of pressure outlets 8. Further, by holding a pressure gauge on the pressure measurement hole 9 side of the plate 11 and tubing the static pressure can be constantly checked.
【００１２】前記構成より成る静圧取出孔付きエアフィルタは、図示してい ないが、空気清浄手段として現在使用されているエアフィルタに代えて、クリー ンベンチ・クリーンブースまたは半導体製造用装置に使用することができる。Although not shown, the air filter with a static pressure outlet having the above structure is used in a clean bench / clean booth or a semiconductor manufacturing apparatus instead of the air filter currently used as an air cleaning means. be able to.
【００１３】[0013]
【考案の効果】本考案は上述のようであるから、エアフィルタの静圧を専用 の静圧取出孔で受けて、静圧が常時簡単に確認でき、送風による脈流がなく安定 した静圧測定ができる。然も、空気清浄手段として現在使用されているエアフィ ルタに代えて、クリーンベンチ・クリーンブースまたは半導体製造用装置に使用 することができるので、これらクリーンベンチ・クリーンブースまたは半導体製 造用装置の利便性を更に高めることができる。[Effects of the Invention] Since the present invention is as described above, the static pressure of the air filter is received by the dedicated static pressure outlet, and the static pressure can be easily checked at all times. Can measure. Of course, it can be used in a clean bench / clean booth or semiconductor manufacturing equipment instead of the air filter currently used as an air cleaning means. Properties can be further enhanced.
【図１】本考案静圧取出孔付きエアフィルタを下流側か
ら見た斜視図である。FIG. 1 is a perspective view of an air filter with a static pressure outlet according to the present invention viewed from a downstream side.
【図２】本考案静圧取出孔付きエアフィルタを上流側か
ら見た斜視図である。FIG. 2 is a perspective view of the air filter with a static pressure outlet according to the present invention as viewed from the upstream side.
【図３】本考案静圧取出孔付きエアフィルタに使用する
プレートの斜視図である。FIG. 3 is a perspective view of a plate used in the air filter with a static pressure outlet according to the present invention;
１ 上部外枠、 ２ 下部外枠、 ３ 側部外枠、 ４
・５ 通気開口、 ６ケーシング、 ７ 濾材、 ８
静圧取出孔、 ９ 圧力測定孔、 １０ 中空部、 １
１ プレート、 １２ 側板、 １３ 端縁板。1 upper outer frame, 2 lower outer frame, 3 side outer frame, 4
・ 5 vent opening, 6 casing, 7 filter media, 8
Static pressure outlet, 9 Pressure measuring hole, 10 Hollow, 1
1 plate, 12 side plates, 13 edge plates.
Claims (2)
固定して形成されたエアフィルタにおいて、前記濾材の
中央部に、静圧取出孔と圧力測定孔を穿設した中空部を
備えたプレートが装着固定され、 前記プレートは、縦方向に中空部を備えて立方体筒状に
形成され、上流側の両側板の端縁部近くに、気流とは直
角方向に、１個または複数個の静圧取出孔を前記中空部
に連通するように穿設すると共に、下流側の端縁板の中
央に圧力測定孔を前記中空部に連通するように穿設して
形成され、 更に、前記プレートは、濾材の中央部において、前記静
圧取出孔が、該濾材より上流側にやや突出するようにし
て、該プレートの上下面をケーシングを構成する上・下
部外枠に接着剤で密に固定すると共に、該プレートの両
側板を濾材に接着剤で密に固定して成る静圧取出孔付き
エアフィルタ。1. An air filter formed by mounting and fixing a folded filter material in a casing, wherein a plate having a hollow portion in which a static pressure extraction hole and a pressure measurement hole are formed in a center portion of the filter material. The plate is formed in a cubic cylindrical shape having a hollow portion in the vertical direction, and one or more static plates are provided in the direction perpendicular to the air flow near the edges of both side plates on the upstream side. A pressure extraction hole is formed so as to communicate with the hollow portion, and a pressure measurement hole is formed at the center of the downstream edge plate so as to communicate with the hollow portion. In the central portion of the filter medium, the upper and lower surfaces of the plate are tightly fixed to the upper and lower outer frames constituting the casing with an adhesive so that the static pressure extraction holes slightly protrude upstream of the filter medium. At the same time, close both sides of the plate to the filter medium with adhesive Constant and static pressure generating holes with air filters made by.
固定して形成されたエアフィルタにおいて、前記濾材の
中央部に、静圧取出孔と圧力測定孔を穿設した中空部を
備えたプレートが装着固定され、 前記プレートは、縦方向に中空部を備えて立方体筒状に
形成され、上流側の両側板の端縁部近くに、気流とは直
角方向に、１個または複数個の静圧取出孔を前記中空部
に連通するように穿設すると共に、下流側の端縁板の中
央に圧力測定孔を前記中空部に連通するように穿設して
形成され、 更に、前記プレートは、濾材の中央部において、前記静
圧取出孔が、該濾材より上流側にやや突出するようにし
て、該プレートの上下面をケーシングを構成する上・下
部外枠に接着剤で密に固定すると共に、該プレートの両
側板を濾材に接着剤で密に固定して静圧取出孔付きエア
フィルタが形成され、且つ該静圧取出孔付きエアフィル
タを空気清浄手段として使用したクリーンベンチ・クリ
ーンブースまたは半導体製造用装置。2. An air filter formed by mounting and fixing a folded filter material in a casing, wherein a plate having a hollow portion provided with a static pressure extraction hole and a pressure measurement hole in a center portion of the filter material. The plate is formed in a cubic cylindrical shape having a hollow portion in the vertical direction, and one or more static plates are provided in the direction perpendicular to the air flow near the edges of both side plates on the upstream side. A pressure extraction hole is formed so as to communicate with the hollow portion, and a pressure measurement hole is formed at the center of the downstream edge plate so as to communicate with the hollow portion. In the central portion of the filter medium, the upper and lower surfaces of the plate are tightly fixed to the upper and lower outer frames constituting the casing with an adhesive so that the static pressure extraction holes slightly protrude upstream of the filter medium. At the same time, close both sides of the plate to the filter medium with adhesive Constant and static pressure generating perforated air filter is formed, and the clean bench clean booth or a semiconductor manufacturing device using electrostatic pressure generating perforated air filter as an air cleaning unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002000762U JP3088061U (en) | 2002-02-19 | 2002-02-19 | Air filter with static pressure outlet and clean bench / clean booth or semiconductor manufacturing device using the air filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002000762U JP3088061U (en) | 2002-02-19 | 2002-02-19 | Air filter with static pressure outlet and clean bench / clean booth or semiconductor manufacturing device using the air filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3088061U true JP3088061U (en) | 2002-08-30 |
Family
ID=43239384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002000762U Expired - Lifetime JP3088061U (en) | 2002-02-19 | 2002-02-19 | Air filter with static pressure outlet and clean bench / clean booth or semiconductor manufacturing device using the air filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3088061U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11708986B1 (en) * | 2022-07-12 | 2023-07-25 | Intellytic Ventures Ltd | Smart IoT energy saving sound wave air filter system and use for air purifiers and a method of air filtration thereof |
-
2002
- 2002-02-19 JP JP2002000762U patent/JP3088061U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11708986B1 (en) * | 2022-07-12 | 2023-07-25 | Intellytic Ventures Ltd | Smart IoT energy saving sound wave air filter system and use for air purifiers and a method of air filtration thereof |
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