JP3078824B2 - High frequency sputtering equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an apparatus for producing a thin film by sputtering.

<Prior Art> Conventionally, after distributing the output of a single oscillator to a system having a target number n by a distributor, this is amplified with high frequency power,
Although each target was driven by impedance matching, the frequency was as high as 13.56 MHz, and the wiring length to the target was long and short, so that the phase of the high-frequency power applied to each target was slightly shifted. Further, for example, as described in JP-A-60-29467, a phase correction circuit is provided in a power supply system while sharing a high-frequency oscillation circuit for each of a plurality of targets provided in the same chamber. There is disclosed an apparatus provided with a phase detection circuit for comparing the output frequency with the output frequency of another system and controlling the phase correction circuit based on the output of the phase detection circuit.

<Problems to be Solved by the Invention> When a plurality of targets are arranged in the same chamber, mutual interference occurs due to high frequency, and reproducibility during film formation is lacking. Therefore, it is necessary to make the phases of the targets the same, and it is necessary to avoid the influence on other circuits caused by disturbance due to, for example, abnormal discharge. The present invention solves such a problem.

<Means for Solving the Problems> A high-frequency sputtering apparatus according to the present invention includes an oscillator that oscillates a single oscillating signal, a distributor that divides the oscillating signal into n signals, and each of the distributors that are distributed by the distributor. N phase shifters for phase-shifting an oscillation signal, n high-frequency power supply circuits for outputting high-frequency power by each phase shifter output, and targets for driving n targets by the n high-frequency power supply circuits A drive circuit, and n number of phase shift control means for controlling a phase shift angle of the phase shifter by a deviation using the oscillation signal as a reference signal and the phase of the high-frequency power near the target as a feedback signal. .

<Operation> Since the n phase shift control means controls the phase shift angles of the phase shifters belonging to the system, the phases of the drive power sources of the n targets are different from the phase of the transmission signal of the transmitter. Always match. Since there is only one transmitter and is shared by n control systems, all n targets have the same phase.

<Example> A block diagram of an example of the present invention is shown in the drawings. Oscillator 1
Oscillates a 13.56 MHz sine wave. The oscillator 1 is connected to the divider 2, and the divider 2 divides the oscillation signal into n signals. The transmission signals distributed to n units are transferred by the phase shifters 3 of the respective systems. The phase shifter 3 changes the phase angle according to the magnitude of the output signal of the phase comparator 6. The high-frequency power supply circuit 4 includes a high-frequency power amplifier circuit and its DC power supply circuit, and outputs sine-wave power having the same frequency as the phase-shifted high-frequency signal. The output of this power supply circuit is applied to the target 7 via the impedance matching circuit 5. The phase detector 8 detects a high-frequency phase near the target and sends it to the phase comparator 6 as a feedback signal. The phase comparator 6 uses the output signal of the oscillator 1 as a reference signal,
A control signal is sent to the phase shifter 3 to make the deviation of the phase shift angle from the feedback signal zero. As a result, the drive power of each of the n targets is controlled to be in phase with the transmitter 1.

<Effects of the Invention> According to the present invention, since a feedback mechanism for controlling the target drive output of each system by the oscillation signal of a single oscillator is provided, the phase of each target is aligned with only one oscillator output. In addition, even if abnormal discharge, disturbance, or the like occurs in one of the targets, the failure of one circuit does not affect the phase of the other target, and the target is stabilized. Therefore, unexpected phenomena such as reduction of the effect due to the phase difference between the targets were eliminated, the reproducibility at the time of film formation was improved, and the quality was made uniform.

[Brief description of the drawings]

 The drawing is a block diagram of the device of the present invention. DESCRIPTION OF SYMBOLS 1 ... Oscillator 2 ... Divider 3 ... Phase shifter 4 ... High frequency power supply circuit 5 ... Impedance matching circuit 6 ... Phase comparator 7 ... Target 8 ... Phase detector

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) C23C 14/00-14/58 H01L 21/203 H01L 21/31

Claims (1)

(57) [Claims] An oscillator for oscillating a single oscillating signal, a distributor for distributing the oscillating signal into n units, and n phase shifters for phase-shifting each of the oscillating signals distributed by the distributor And n high-frequency power supply circuits for outputting high-frequency power supply by respective phase shifter outputs, a target drive circuit for driving n targets by the n high-frequency power supply circuits, and the oscillation signal as a reference signal, A high frequency sputtering apparatus comprising: n number of phase shift control means for controlling a phase shift angle of the phase shifter by a deviation using a phase shift of the high frequency power near the target as a feedback signal.