JP3064363U - Nozzle device for vacuum pump - Google Patents

Abstract

(57) [Problem] To prevent a nozzle from being directed toward a discharge port of a compression space to reduce obstruction of air flow, prevent fine particles from blowing into a compression space, and reduce a possibility that a pump stops. A nozzle device includes a main body and a nozzle, and is installed at an exhaust end of a vacuum pump compression space. By using the difference in the nozzle ejection angle, do not face the exhaust port directly,
Prevents particulates from entering the compression space and achieves reduced particulate deposition.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a nozzle technology, and more particularly to a technology for reducing the deposition of fine particles in a vacuum pump while keeping the nozzle port from being directed toward an outlet of a compression space of a pump so that an air flow is not obstructed.

[0002]

[Prior art]

Vacuum systems are very widely used in semiconductor manufacturing facilities. For example, dry etching, ion implantation, and exposure (Litho)
All major manufacturing facilities such as graphy) use a vacuum system environment, and vacuum pumps in semiconductor factories require a high degree of durability. However, in the conventional manufacturing process, since the vacuum pump gas generated solid fine particles in the passage and affected the service life of the pump, there was a problem how to reduce the fine particle deposition in the vacuum pump passage. The nozzle device of the present invention uses a mechanical vacuum pump, and its operation principle is to achieve the vacuum effect by carrying, compressing and exhausting in the suction process of mechanical operation. As shown in FIGS. 1 and 2, the vacuum pump 1 is a mechanical root-type vacuum pump, including a rotor 12 rotating in a vacuum pump 11, and combining a rotor 12 and a cover 13 to intake air into the compression space 11. The end 14 and the exhaust end 15 are formed. The rotor 12 maintains the two rotor rotation speeds at 1: 1 by a regular gear drive, and the outer shape design of the two rotors 12 is also a 1: 1 gear design. The two rotors 12 keep a constant distance during the operation and bleed air from the compression space 11. The performance of the vacuum pump 1 is determined by controlling the precision of the gap between the rotors 12, and there is a risk that the vacuum pump gas will generate solid fine particles when passing through the passage in the manufacturing process, and solid fine particle deposition will stop the rotor. Therefore, the vacuum pump had to be equipped with a device to remove particles. Normally, a purge gas of nitrogen passing through the passage ejects fine particles, and the fine particles are discharged along with the pump airflow. However, in the nozzle device of the conventional vacuum pump, since the nozzle for ejecting the purge gas is directed to the exhaust port of the compression space, solid fine particles may easily blow into the compression space and the rotor may stop. In addition, when the nozzle was directed directly to the exhaust port, the gas flow was obstructed, adversely affecting the intake and exhaust efficiency, and fine particles were easily deposited near the exhaust port.

[0003]

[Problems to be solved by the invention]

 The main purpose of the present invention is to keep the nozzle from pointing toward the outlet of the compression space to reduce the obstruction of the air flow, prevent the fine particles from blowing into the compression space, and reduce the possibility of stopping the pump. . The next object of the present invention is to use a nozzle having a different ejection angle to smoothly discharge the airflow discharged from the compression space by the airflow generated by the nozzle.

[0004]

[Means for solving the invention]

 The nozzle device includes a main body and a nozzle, and is installed at an exhaust end of a vacuum pump compression space. The difference in nozzle ejection angle prevents direct correspondence with the exhaust port to prevent fine particles from entering the compression space and achieve a reduction in fine particle deposition.

[0005]

[Embodiment of the invention]

 As shown in FIG. 3, the nozzle device 2 of the present invention includes a nozzle body 21 and a nozzle 28, is fixedly installed on a cover 32, and directs the nozzle 28 toward the exhaust end 29 of the compression space 23. The upper portion of the nozzle 28 has a conical nozzle cone 22, and one or a plurality of nozzle holes 221 are provided on two side surfaces of the nozzle cone 22. These nozzle holes 221 are perpendicular to the two side surfaces of the nozzle cone 22, so that the gas ejected from the nozzle holes 221 does not directly go to the exhaust port 24, so that the air flow is obstructed and the fine particles blow into the compression space 23. prevent. In the embodiment of the present invention, a nozzle hole 221 is provided on the angled nozzle cone 22, and the nozzle hole 221 ejects gas from two sides of the nozzle cone 22, and the gas is formed in the compression space 23. Do not face the exhaust port 24 directly. The nozzle device 2 draws a purge gas from the conduit 25 into a straight hole 222 provided inside the nozzle, and introduces the gas into the gas passage 26 in the cover 32 from the nozzle hole 221. By this blowing, the solid fine particles are discharged together with the gas in a floating state, and an inner thread is provided at one end of the straight hole to connect with the conduit 25. Since the gas ejected from the nozzle hole 221 having an angle is not directly directed to the exhaust port 24, it is possible to reduce the phenomenon that the air flow is blocked and affects the intake / exhaust rate. Further, the rotor 27 is not stopped so as to prevent the fine particles from blowing into the compression space 23. Further, the nozzle 28 of the present invention is formed in a conical shape, an angle is formed by the conical point 281 of the nozzle hole 221, and the exhaust stream 3 forms the exhaust gas split stream 31 by the conical point 281 (see FIG. 5). The exhaust stream 3 is prevented from directly hitting the inner wall of the cover 32 to reduce the accumulation of fine particles. The gas flow 33 formed by the gas ejected from the nozzle holes 221 is guided to the exhaust branch 31 and is smoothly discharged from the two side surfaces of the exhaust end 29. The fine particles of the exhaust gas diverted stream 31 flow smoothly to the lower intake port and are finally discharged. As a result, it is possible to prevent the particles from being deposited inside the vacuum pump, and to extend the maintenance and inspection period of the vacuum pump. The magnitude of the angle of the nozzle cone 22 is determined by the angle formed by the exhaust gas diversion 31, and its range is from 15 to 60 degrees, with 30 degrees being most ideal.

As shown in FIGS. 3 and 4, the nozzle device 2 of the present invention is fixedly installed on the cover 32, and a mounting hole 34 is provided at an appropriate place of the nozzle body 21. At the position corresponding to the mounting hole 34, a mounting hole is also provided on the cover, and the nozzle device 2 is fixedly installed on the cover 32 with the mounting part 35 here.

[0007]

[Effect of the invention]

 The nozzle device 2 of the present invention utilizes the difference in the nozzle ejection angle to prevent directing to the exhaust port of the compression space and to prevent solid fine particles from blowing into the compression space. In addition, the nozzle jet stream prevents the exhaust stream from directly hitting the inner wall of the cover, and guides the exhaust stream to flow smoothly and be discharged. Therefore, a nozzle device in which the nozzle and the exhaust port of the compression space directly correspond to each other is so excellent that its functional effects are incomparable.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of the vacuum pump of the present invention.

FIG. 2 is a cross-sectional view of the vacuum pump of the present invention.

FIG. 3 is a perspective view of the nozzle device of the present invention.

FIG. 4 is a sectional view of the nozzle device of the present invention.

FIG. 5 is a cross-sectional view of the nozzle device showing an airflow state according to the present invention;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum pump 11 Compression space 12 Rotor 13 Cover 14 Intake end 15 Exhaust end 2 Nozzle device 21 Nozzle body 22 Nozzle cone 23 Compression space 24 Exhaust port 25 Duct 26 Passage 27 Rotor 28 Nozzle 29 Exhaust end 221 Nozzle hole 222 Straight hole 281 Conical point 3 Exhaust flow 31 Exhaust diversion 32 Cover 33 Airflow 34 Mounting hole 35 Mounting part

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Simplong Tae, Taiwan 22 Ryoan ▲ Kei ▼ Dormitory No. 22, Juheung-ri, Takehoku City, Shintake County Taiwan

Claims (14)

[Utility model registration claims] An upper portion of a nozzle has a conical nozzle cone, and a nozzle hole is provided on two side surfaces of the nozzle cone so that gas ejected from the nozzle hole does not directly go to an exhaust port of a compression space. A nozzle device for a vacuum pump, wherein a gas is simultaneously guided by an exhaust branch stream and smoothly discharged from two side surfaces of the exhaust end. 2. The nozzle device for a vacuum pump according to claim 1, wherein the nozzle including the main body is fixedly installed on the cover. 3. The nozzle device for a vacuum pump according to claim 1, wherein said nozzle cone forms an angle. 4. The nozzle device for a vacuum pump according to claim 1, wherein one or a plurality of nozzle holes are provided on two side surfaces of the nozzle cone. 5. The nozzle device for a vacuum pump according to claim 3, wherein a straight hole is formed inside the nozzle. 6. A nozzle device for a vacuum pump according to claim 3, wherein a cone point is provided at an upper portion of the nozzle cone portion. 7. A nozzle device for a vacuum pump according to claim 6, wherein said nozzle cone portion forms an equiangular shape around a cone point. 8. The nozzle device for a vacuum pump according to claim 4, wherein said nozzle hole is perpendicular to two side surfaces of the nozzle cone. 9. The nozzle device for a vacuum pump according to claim 5, wherein the straight hole and the nozzle hole communicate with each other. 10. The nozzle device for a vacuum pump according to claim 5, wherein one end of the straight hole is connected to the conduit to introduce gas. 11. An internal thread at one end of a straight hole is connected to a conduit.
A nozzle device for the vacuum pump according to the above. 12. The nozzle device for a vacuum pump according to claim 2, wherein a mounting hole is provided at an appropriate place of the main body, and the nozzle device is fixedly installed on the cover using mounting parts. 13. The nozzle device for a vacuum pump according to claim 3, wherein the angle of the nozzle cone is 15 degrees to 60 degrees. 14. The nozzle device for a vacuum pump according to claim 12, wherein the angle of the nozzle cone is set to 30 degrees, which is most excellent.