JP3055437U - Conductive rollers in plating equipment - Google Patents

Abstract

(57) Abstract: Provided is a conductive roller in a plating apparatus that maintains good conductivity even during rotation. A roll tube having an opening at one end to form a storage space therein, a first fixing means provided at a pivotal connection portion joining one end to the other end of the roll tube, and a drive gear at one end. A roll tube member including a driving means pivotally connected to the first fixing means at the other end, and a power connection end at one end, and a bearing means provided at the other end to allow the opening of the roll pipe to be opened. A conductive roller shaft which is inserted into the roll tube and further pivotally contacts the pivot portion of the first fixing means, and a conductive filler filled between an outer peripheral wall of the conductive roller shaft and an inner peripheral wall of the roll tube. Material, and a shaft sealing member that is attached between the opening of the roll tube and the conductive roller shaft and acts as a sealant and a bearing. Driven by the drive means, the conductive material provides an excellent conductive effect It is configured so that:

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a conductive roller in a plating apparatus, and more particularly to a conductive roller in a plating apparatus that maintains good conductivity even during rotation.

[0002]

[Prior art]

 As the conventional electroplating technique, the immersion electroplating method is best known in the industry. As shown in FIG. 4, the immersion electroplating method is intended to cover the substrate 11 to be plated and the plating coating. The metal 12 to be treated is simultaneously placed in an electrolytic cell 13 containing an electrolyte 14, the metal 12 is used as an anode 15, and the base material 11 is used as a cathode 16. Metal atoms are precipitated on the surface of the base material 11 by the discharge, and the lost metal ions in the electrolytic solution 14 are supplemented by the metal 12 on the other anode. In this type of electroplating method, the base material 11 (for example, an electric circuit board) must be immersed in the electrolytic cell 13 or pulled up, and after a certain period of time, the anode metal must be changed. It requires considerable manpower, the manufacturing process is complicated, and the cost is high.

In order to remedy the drawbacks of the immersion electroplating, manufacturers of electric circuit boards have recently adopted a horizontal continuous electroplating method. As shown in FIG. The base material 21 (electric circuit board) is introduced into the electrolytic cell 23 containing the electrolytic solution 24 by one set of the cathode conductive roller 20, and a set of the anode plate 22 and one set provided in the electrolytic cell 23 are provided. By the rotation of the guide roller set 25, the base material 21 is gently moved during plating.

In this type of horizontal electroplating method, the quality of electroplating is maintained depending on whether or not the cathode conductive roller can maintain a constant cathode voltage throughout. However, when the cathode conductive roller rotates, the quality of electroplating is maintained. The cathode voltage often fluctuates. Therefore, the quality of the product is directly affected by the design of the cathode roller.

[0005]

[Problems to be solved by the invention]

 It is an object of the present invention to provide a conductive roller that maintains good conductivity even during rotation.

[0006]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention provides a conductive roll tube having an opening at one end to form a storage space therein, and a pivotal joint at one end joined to the other end of the conductive roll tube. A roll tube member comprising: a first fixing means; and a driving means having one end provided with a driving gear and the other end pivotally connected to the first fixing means; one end of which is a power connection end; A conductive roller shaft provided with bearing means at the other end to penetrate the conductive roll pipe through an opening of the conductive roll pipe, and the bearing means is further pivotally connected to a pivot portion of the first fixing means; A conductive material filled between the outer peripheral wall of the conductive roller shaft and the inner peripheral wall of the roll tube; and a shaft seal attached between the opening of the conductive roll tube and the conductive roller shaft to act as a sealing material and a bearing. And a member, wherein the conductive roller shaft is fixed immovably. Then, the conductive roll tube is driven and rotated by driving means, and the conductive material is configured to provide an excellent conductive effect.

A second fixed member in which the shaft sealing member is fitted to the outer peripheral surface of the conductive roller shaft and one end is joined to the conductive roll tube, and the other end is provided with an annular enlarged portion on the inner peripheral wall. Means, a bush, which is fitted on the outer peripheral surface of the conductive roller shaft and one end of which is fitted inside the annular enlarged portion of the second fixing means, and a bush of the conductive roller shaft, the bush, and the second fixing means. A shaft sleeve fitted on the outer peripheral surface, or the shaft sealing member further has one end fitted on the outer peripheral surface of the shaft sleeve and the other end fitted on the outer peripheral surface of the conductive roller shaft. Either a protective sleeve is provided, or the conductive material is made of a granular, powdery, or liquid good conductor such as gold, silver, copper, or graphite, and in particular, a spherical shape in the case of a granular shape. Is more preferable.

In the present invention configured as described above, when the driving gear of the driving means is driven and rotated, the first fixing means is rotated in conjunction with the first fixing means, so that both ends of the roll tube are the first fixing means and Since the conductive roll tube and the second fixing means are simultaneously rotated because they are in firm contact with the second fixing means, the cathode voltage of the conductive roller shaft is transmitted to the conductive roll tube via the conductive material. Together with this, the conductive roll tube can be formed into a good rotating cathode conductor.

[0009]

[Embodiment of the invention]

 Hereinafter, the present invention will be specifically described based on an embodiment, but the present invention is not limited to this example. First, the case where the conductive roller of the present invention is used in a horizontal continuous electroplating system will be described. As shown in FIG. 1, a horizontal continuous electroplating system comprises a set of conductive rollers 3 serving as a cathode, and a substrate 4 to be plated (in this embodiment, an electric circuit board) is placed in an electrolytic cell 6 containing an electrolytic solution 5. The anode 4 is also used as a cathode, and the electrolytic bath 6 is further provided with an anode ejection tube 7 and a plurality of roller sets 8 connected to a plurality of power supply anodes. Electrolyte containing metal ions charged to + can be ejected from the tube wall hole, and each roller set 8 is formed by a plurality of upper rollers 81 and one lower roller 82. Can be stably transferred at a constant speed. When the base material 4 passes through the through hole of the electrolytic cell 6, the upper roller 81 of the roller set 8 slides down by its own weight and closes the through hole of the electrolytic cell 6, and the electrolytic solution in the electrolytic cell 6 5 does not leak out, and the splash of the electrolyte 5 does not splash to the conductive roller 3 outside the electrolytic bath 6, and prevents the metal ions in the electrolyte 5 from being deposited on the surface of the conductive roller 3. As a result, adverse effects on the plating reaction can be avoided.

As shown in FIGS. 2 and 3, the conductive roller 3 of the present invention generally includes a roll tube member 30, a conductive roller shaft 40, a conductive material 50, and a shaft sealing member 60. The roll tube member 30 has an opening 311, one end of which has a storage space formed therein, and one end provided in the pivotal connection portion 321 to be inside the other end of the conductive roll tube 31. A first fixing means 32 to be joined, a driving gear 331 at one end, driven and rotated by an external driver (not shown), and a conductive medium accommodating chamber 332 at the other end. And a driving means 33 pivotally connected to the driving means.

One end of the conductive roller shaft 40 is a power supply connection end 41 connected to a cathode of a power supply, and a bearing means 42 is provided at the other end, and the conductive roller shaft 40 is electrically conductive through the opening 311 of the conductive roll tube 31. In addition to being inserted through the roll tube 31, the bearing means 42 is further pivotally connected to the pivot 321 of the first fixing means 32. In this embodiment, the conductive roller shaft 40 is made of brass.

The conductive material 50 is filled between the outer peripheral wall of the conductive roller shaft 40 and the inner peripheral wall of the conductive roll tube 31, and in a relatively preferred embodiment of the present embodiment, the conductive material 50 is granular. It is formed of a powdery or liquid good conductor (for example, gold, silver, copper, or graphite), and among them, a spherical shape is most preferable in the case of a granular shape. The shaft sealing member 60 is attached between the opening 311 of the conductive roll tube 31 and the conductive roller shaft 40, acts as a seal material and a bearing, and has a second fixing means 61, a bush 62, and a shaft sleeve. A second fixing means 61 is fitted on the outer peripheral surface of the conductive roller shaft 40, and has a protruding ring 611 joined to the conductive roll tube 31 at one end thereof. At the same time, an annular enlarged portion 612 is provided on the inner peripheral wall at the other end. The bush 62 is in contact with the outer peripheral surface of the conductive roller shaft 40, and has one end internally fitted in the annular enlarged portion 612 of the second fixing means 61. The shaft sleeve 63 is fitted on the outer peripheral wall of the conductive roller shaft 40, the bush 62 and the second fixing means 61. The protective sleeve 64 has one end fitted to the outer peripheral surface of the shaft sleeve 63 and the other end fitted to the outer peripheral surface of the conductive roller shaft 40.

As shown in FIG. 2, when assembling a relatively preferred embodiment of the present invention, first, one end of the first fixing means 32 provided with the pivotal contact 321 is connected to the conductive roll tube 31. One end of the first fixing means 32 is welded to one end, and the other end of the first fixing means 32 is fitted and fixed in the conductive medium accommodating chamber 332 of the driving means 33 to complete the assembly of the roll pipe member 30. Next, one end of the conductive roller shaft 40 provided with the bearing means 42 is inserted into the conductive roll pipe 31 through the opening 311 of the conductive roll pipe 31, and the bearing means 42 is further connected to the first fixing means 32. The conductive material 50 is filled between the inner peripheral wall of the conductive roll tube 31 and the outer peripheral wall of the conductive roller shaft 40 at this time. Proceed with assembly. That is, the second fixing means 61 is fitted around the power supply connection end 41 and the raised ring 611 of the second fixing means 61 is joined to the opening 311 of the conductive roll tube 31 by welding. The bush 62 is tightly fitted to the conductive roller shaft 40 from the power supply connection end 41 of the conductive roller shaft 40 to fit into the annular enlarged portion 612 of the second fixing means 61. From the power supply connection end 41 of the conductive roller shaft 40 to the second fixing means 61, the bush 62 and the outer peripheral wall of the conductive roller shaft 40 tightly, and then the protective sleeve 64 is attached to the conductive roller shaft 40. From the power connection end 41 of the shaft sleeve 63 to the outer peripheral wall at one end.

After assembling as described above, the operation principle of the present invention will now be described. That is, when the driving gear 331 of the driving means 33 is rotated by being driven by an external driver (not shown), the first fixing means 32 is rotated in conjunction therewith, and Since both ends are welded to the first fixing means 32 and the second fixing means 61, respectively, the conductive roll tube 31 and the second fixing means 61 also rotate simultaneously, and the cathode of the conductive roller shaft 40 is turned off. Combined with the fact that the voltage has already been transmitted to the roll tube 31 via the conductive material 50, the conductive roll tube 31 can be formed into a good rotating cathode conductor. Further, the second fixing means 61, the bush 62, and the shaft sleeve 63 have a mere ordinary fitting relationship. However, since the bush 62, the shaft sleeve 63, and the conductive roller shaft 40 are tightly fitted to each other, The bush 62 and the shaft sleeve 63 are immovably fixed to the conductive roller shaft 40 and do not rotate along with the second fixing means 61, and the conductive roller shaft 40 is interlocked even when the conductive roll tube 31 rotates. Does not rotate.

[0015]

[Effects of the Invention] As described above, the conductive roller in the plating apparatus of the present invention is filled with a conductive material of a good conductor between the roll tube and the conductive roller shaft. An excellent conductive effect can be maintained between the electric roller shaft and the electric roller shaft, and there is no influence of the relative rotation between the roll tube and the conductive roller shaft.

[Brief description of the drawings]

FIG. 1 is a side view showing horizontal electroplating related to the present invention.

FIG. 2 is an exploded view of a conductive roller in the plating apparatus of the present invention.

FIG. 3 is a view showing how the conductive roller is assembled.

FIG. 4 is a side view of conventional immersion electroplating.

FIG. 5 is a side view of a conventional horizontal electroplating.

[Explanation of symbols]

 Reference Signs List 30 roll pipe member 31 roll pipe 311 opening 32 first fixing means 321 pivotal contact part 33 driving means 331 drive gear 40 conductive roller shaft 41 power supply connection end 42 bearing means 50 conductive material 60 shaft sealing member 61 second fixing means 612 Annular expanded part 62 Bush 63 Shaft sleeve 64 Protection sleeve

Claims (10)

[Utility model registration claims] 1. A conductive roll tube having an opening at one end to form a storage space therein, a first fixing means provided at a pivotal connection portion joining one end to the other end of the conductive roll tube, and A roll tube member including a drive unit having one end provided with a drive gear and the other end pivotally connected to the first fixing unit; and a power connection end at one end, and a bearing unit at the other end. A conductive roller shaft which is provided and penetrates through the conductive roll tube through an opening of the conductive roll tube, and further has the bearing means pivotally connected to a pivot portion of the first fixing means; A conductive material filled between the outer peripheral wall and the inner circumferential wall of the roll tube; and a shaft sealing member that is attached between the opening of the conductive roll tube and the conductive roller shaft and acts as a seal material and a bearing. The conductive roller shaft is fixed immovably, and the conductive roll is fixed. Conductive roller in the plating apparatus but is rotated to the drive means, to provide excellent conductivity effects conductor material. A second shaft sealing member fitted to an outer peripheral surface of the conductive roller shaft, one end of which is joined to the conductive roll tube, and an annular enlarged portion provided on an inner peripheral wall of the other end. Fixing means;
A bush whose one end is fitted into the outer circumferential surface of the conductive roller shaft and one end of which is internally fitted in the annular enlarged portion of the second fixing means; and a bush whose outer end surface is fitted in the conductive roller shaft, the bush and the second fixing means. The conductive roller in the plating apparatus according to claim 1, comprising a shaft sleeve. 3. The shaft sealing member according to claim 2, further comprising a protective sleeve having one end fitted to the outer peripheral surface of the shaft sleeve and the other end fitted to the outer peripheral surface of the conductive roller shaft. Conductive roller in plating equipment. 4. The conductive material according to claim 1, wherein said conductive material has a granular shape.
A conductive roller in the plating apparatus according to 1. 5. The conductive roller according to claim 1, wherein the conductive material has a spherical shape. 6. The method according to claim 1, wherein the conductive material is in a powder form.
A conductive roller in the plating apparatus according to 1. 7. The method according to claim 1, wherein the conductive material is in a liquid state.
A conductive roller in the plating apparatus according to 1. 8. A conductive roller in a plating apparatus according to claim 4, wherein said conductive material is formed of one of gold, silver and copper. 9. A conductive roller in a plating apparatus according to claim 6, wherein said conductive material is formed of graphite. 10. The conductive roller according to claim 7, wherein the conductive material is formed of mercury.