JP3054550B2 - Wire saw equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example, semiconductor materials,
The present invention relates to a wire saw device for cutting a brittle material such as a magnetic material and a ceramic with a wire.

[0002]

2. Description of the Related Art Generally, in a wire saw of this type, a cutting wire paid out from a payout reel is
After being supported by a plurality of support rollers of the cutting mechanism at a predetermined pitch, the support roller is taken up on a take-up reel. A tension applying mechanism is provided between each of the reels for feeding and winding and the support roller, and a predetermined tension is applied to a wire between the support rollers. Then, while the slurry containing abrasive grains is supplied to the wire between the support rollers, the work is pressed against the wire, and the work is cut by the lapping action.

In this wire saw device, the tension applied to the wire by the tension applying mechanism is also transmitted to the pay-out reel and the take-up reel. Therefore, especially on the take-up reel side, the take-up reel may be damaged. That is, since the wire is wound on the take-up reel with high tension, the subsequent portion of the wire is wedge-shaped and continuously bites between the wires already wound on the take-up reel. Then, the inner surface of the flange at both ends of the reel is strongly pressed by the biting force, and the flange portion is broken.

In order to prevent this, it is conceivable to increase the strength of the flange portion by increasing the thickness of the flange portion. However, in this case, the mass of the reel increases, and the inertia of the reel increases. Becomes large, and an obstacle occurs when the rotation speed of the reel is adjusted according to the reel diameter. When the winding of the wire on the winding reel is completed, the winding reel is used as a reel on the payout side. In this case, when the wedge-shaped wire is fed from the reel, the biting state is instantaneously released, which causes a large fluctuation in the tension of the wire and adversely affects the cutting operation.

To cope with the above-mentioned problem, a conventional technique has been disclosed, for example, in Japanese Patent Publication No. Hei 4-26978, in which a wire is repeatedly moved between a main roller and a sub-roller at a position between a cutting mechanism and a take-up reel. A configuration that can be wound has been proposed. In this configuration, the transmission of tension between the cutting mechanism and the take-up reel is interrupted by winding the wire around the main and secondary rollers a plurality of times, so to speak, the edge of the tension is cut off, and the take-up reel is cut. The tension of the wire transmitted to the side is reduced.

[0006]

However, in the conventional wire saw device, a driving motor for rotating the rollers, in addition to the main roller and the sub-roller,
A control device for adjusting the number of rotations of the drive motor for adjusting the tension is required, and there is a problem that the configuration of the tension reducing mechanism is complicated.

Further, in this conventional cutting apparatus, since both rollers cut the edge of the tension between the take-up reel and the cutting mechanism, the high tension of the wire in the cutting mechanism is directly applied to both rollers. Is done. Therefore, both rollers had a defect of being worn out early. In particular, since the main roller is rotated by the drive motor, there is also a problem that slippage easily occurs between the main roller and the wire, resulting in severe wear.

The present invention has been made by paying attention to such problems existing in the prior art. It is an object of the present invention to provide a wire saw device capable of simplifying the configuration of a tension reducing mechanism and preventing the roller of the tension reducing mechanism from being worn out at an early stage. Another object of the present invention is to provide a wire saw device that can improve workability such as wire winding by supporting a roller in a cantilever manner and can contribute to simplification of the device.

[0009]

In order to achieve the above object, according to the first aspect of the present invention, there is provided a wire traveling mechanism for traveling a cutting wire, and a wire traveling mechanism arranged in a traveling area of the wire, wherein A cutting mechanism having a plurality of main rollers formed with a plurality of grooves for supporting at a pitch, a winding reel on which a wire passing through the cutting mechanism is wound, and a winding reel and the cutting mechanism. A wire tension applying mechanism for applying a predetermined tension to the wire positioned in the cutting mechanism, and a wire tension applying mechanism disposed between the wire tension applying mechanism and the take-up reel; In a wire saw device provided with a wire tension reducing mechanism for reducing a tension of a wire to be taken, the tension reducing mechanism includes a guide roller for guiding the wire, and the guide roller. In contrast, a rotary shaft for imparting a fast speed of the rotating force than the running speed of the wire was composed of a interposed a slip clutch between the rotary shaft and the guide rollers.

According to the second aspect of the present invention, the slip clutch includes a magnet provided on one of the rotating shaft side and the guide roller side, and a magnetic body provided on the other side facing the magnet.

According to the third aspect of the present invention, a slight gap is provided between the magnet and the magnetic body. In the invention according to claim 4, the magnet is a permanent magnet.

In the invention according to claim 5, the magnets are a pair of magnets arranged so as to sandwich the magnetic material, and a yoke is provided between the two magnets. In claim 6, both ends of the plurality of main rollers of the cutting mechanism are rotatably supported by the first and second bearings, respectively, and the first bearing is supported by the fixed portion. The second bearing body is supported on a fixed portion via a detachable support plate, and the periphery of the other end side of the main roller group is opened by removing the support plate from the second bearing body and the fixed portion. At the same time, each main roller is supported in a cantilever manner at one end.

According to a seventh aspect, each second bearing body of the plurality of main rollers is integrally connected to one mounting plate,
This mounting plate is mounted on the support plate.

[0014]

According to the first aspect of the present invention, the work is pressed against the wire between the main rollers of the cutting mechanism while the wire is running from the pay-out reel to the take-up reel, thereby cutting the work. At this time, a rotational force at a speed higher than the traveling speed of the wire is applied to the guide roller, and the guide roller is rotated in the traveling direction via the slip clutch.

According to the second aspect of the present invention, the slip clutch transmits rotation with a predetermined transmission torque by the magnetic force between the magnet and the magnetic body. According to the invention of claim 3, contact between the magnet and the magnetic body can be avoided.

According to the fourth aspect of the present invention, there is no need for a movable part for transmitting rotation. According to the fifth aspect of the present invention, a magnetic circuit for transmitting rotation is effectively formed. In the invention according to claim 6, by removing the support plate, in a state where each main roller is held at a predetermined position,
Work such as winding of a wire around the main roller can be easily performed through the opening at the other end of the main roller group.

According to the seventh aspect of the invention, even in the cantilever state where the support plate is removed, the positional relationship between the rollers can be accurately maintained by the mounting plate. Further, when assembling and removing the support plate, the work is easy.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a wire saw device embodying the present invention will be described below with reference to the drawings. (Overall Configuration of Wire Saw Device) As shown in FIGS. 2 and 3, a base 1 is installed on a floor surface, and first to third mechanism frames 2, 3, and 4 are erected on the upper surface thereof. I have. The cutting mechanism 5 is mounted on the first mechanism frame 2 and includes a pair of drive groove rollers 7 and a groove roller 8 as a pair of main rollers for supporting the cutting wire 6 made of a steel wire many times at a predetermined pitch. ing. The work support mechanism 9 is supported by the second mechanism frame 3 so as to be movable in the vertical direction, and a plurality of works 10 are detachably mounted below the work support mechanism 9.

Then, while the wire 6 travels in one direction between the two groove rollers 7 and 8 of the cutting mechanism 5, the work supporting mechanism 9 supporting the work 10 is lowered toward the cutting mechanism 5. At this time, the groove rollers 7, 8
A slurry containing abrasive grains is supplied onto the intervening wire 6, and the work 10 is pressed against the wire 6 from above, and the work 10 is cut into many thin pieces by a lapping action.

The reel mechanism 11 includes the third mechanism frame 4
It has a payout reel 12 for feeding out the wire 6 and a take-up reel 13 for winding up the wire 6. The wire traverse mechanism 14 is mounted on the third mechanism frame 3 adjacent to the reel mechanism 11,
It guides the feeding of the wire 6 from the feeding reel 12 and the winding of the wire 6 to the winding reel 13.

By the rotation of the two reels 12, 13, the wire 6 is fed out from the payout reel 12 to the cutting mechanism 5 through various guide rollers to be described later. It is wound up. When the wire 6 on the pay-out reel 12 is wound on the take-up reel 13 via the cutting mechanism 5 by a set amount, the rotation directions of the two reels 12 and 13 are switched,
The feeding function and the winding function of the reels 12 and 13 are reversed.

The wire tension applying mechanism 15 is mounted on the second mechanism frame 3 so as to be located between the reel mechanism 11 and the cutting mechanism 5. Multiple guide rollers 1
6, 17 are located between the tension applying mechanism 15 and the cutting mechanism 5 so as to be located in the reciprocating path of the wire 6, respectively.
It is rotatably supported on the outer surface of the second mechanism frame 3. Then, the tension applying mechanism 15 applies a predetermined tension to the wire 6 between the groove rollers 7 and 8 via the guide rollers 16 and 17.

The wire tension reducing mechanism 18 is located between the take-up reel 13 and the tension applying mechanism 15.
A pair of guide rollers 19 and 20 are provided on the second mechanism frame 3 for guiding the wire 6. The tension reducing mechanism 18 controls the tension applying mechanism 1.
The tension of the wire 6 from 5 to the take-up reel 13 is reduced.

A control device 21 constituting a control means is disposed in the vicinity of the rear of the base 1, and a control panel 22 provided with various operation keys, display lamps and the like is mounted on a front surface thereof. The detection mechanism 23 is provided in association with the reel mechanism 11 and various guide rollers including the guide rollers 16, 17, 19, and 20. When the wire 6 is grounded or when the outer circumferential groove of the roller is worn, the detection mechanism 23 detects the state,
It is displayed on the control panel 22 of the control device 21.

Next, the detailed structure of each mechanism described above will be described in order. (Reel mechanism 11) As shown in FIGS. 4, 6, and 8,
A pair of motors 31 capable of changing the rotation direction and the rotation speed,
Reference numeral 32 is mounted on the third mechanism frame 4, and motor shafts 31a and 32a are protruded from the upper surface thereof. The rotating shaft 33 made of a conductive metal material such as iron is used for the motors 31 and 32.
To support the frame 4 via a plurality of bearings 34.
Are rotatably supported in the upper end thereof and have a large diameter portion 33 at their upper end.
a is integrally formed. The coupling 35 is mounted between the motor shafts 31 a and 32 a so as to connect the motor shafts 31 a and 32 a to the respective rotation shafts 33.

The feeding reel 12 and the take-up reel 1
Numeral 3 is formed of a conductive metal material such as iron, and is fixed to the large-diameter portion 33a by screws 37 while being positioned on the large-diameter portion 33a of each rotating shaft 33 by the drive pin 36. Spacers 38 and 39 made of an insulating material such as a synthetic resin are interposed between the bearing 34 and the frame 4 and between the large-diameter portion 33a and the frame 4, respectively, and electrically connect the rotating shaft 33 to the frame 4. Insulated. Further, the coupling 35 is also formed of an insulating material,
The rotating shaft 33 is electrically insulated from the motor shafts 31a and 32a.

During the operation of the cutting device, the motors 31 and 32 are rotated while the rotation direction and the rotation speed are controlled by the control device 21. And the motor 31,
The feed reel 12 and the take-up reel 13 are shown in FIG.
When the wire 6 is rotated clockwise, the wire 6 is paid out from the pay-out reel 12 and the take-up reel 13
It is wound up. On the other hand, when the motors 31 and 32 are rotated in the counterclockwise direction in the figure, the feeding and winding functions of the reels 12 and 13 are reversed, and the running direction of the wire 6 is reversed. .

Also, both reels 3 are calculated by an arithmetic program.
When the wire 6 on the pay-out reel 12 is paid out by a set amount, the rotation directions of the reels 31 and 32 are reversed. Further, the rotation speeds of the motors 31 and 32 are controlled in accordance with changes in the winding diameters of the reels 12 and 13 so that the wire 6 runs between the reels 12 and 13 at the same speed. (Detection mechanism 23) As shown in FIGS.
Are disposed in contact with the lower bearings 34 of the rotary shafts 33, respectively. The first detection circuit 42 is connected between both terminals 41, and a power supply 43 is connected in the detection circuit 42. An indicator lamp 44 is arranged on the control panel 22. Normally, the power supply 43 of the first detection circuit 42
Thus, a detection current is supplied to the wire 6 via the rotating shaft 33 and the reels 12 and 13. In this state, wire 6
Is in contact with the fuselage for some reason, the detected current becomes weak, and based on this, the control device 21
Is turned on, and the ground fault state of the wire 6 is displayed.

The guide rollers 16, 17, 19, 20
Are formed of an insulating material such as a synthetic resin, and a groove is formed on an outer peripheral surface thereof for guiding the wire 6. Each guide roller 16, 17, 19,
The 20 support shafts 45 are formed of a conductive metal material such as iron, and are supported in an insulated state with respect to the frame. The contact piece 45a is protruded from each support shaft 45. The second detection circuit 46 is connected between each support shaft 45 and the first detection circuit 42. A number of display lamps 47 are arranged on the control panel 22 corresponding to the respective guide rollers.

When the outer peripheral groove of one guide roller is worn and the wire 6 comes into contact with the contact piece 45a of the support shaft 45, the display lamp 47 of the corresponding second detection circuit 46
Lights up, and the wear state of the roller is displayed. Also,
When one guide roller has been used for a predetermined time after replacement with a new one, a counter (not shown) in the control device 21 integrates the number of rotations of the guide roller and the CPU.
The display lamp 47 is turned on based on the integration of the internal clock, and the roller replacement time is displayed. (Traverse mechanism 14) As shown in FIGS. 6 to 8, a pair of mounting plates 51 are erected at a predetermined interval on the third mechanism frame 4, and a pair of upper and lower rotating members are provided between the two mounting plates 51. Shafts 52 and 53 are rotatably supported. A pair of motors 54, 55 whose rotation direction and rotation speed can be changed are mounted on the outer surface of the rear mounting plate 51, and their motor shafts are connected to the rotation shafts 52, 53 via a coupling 56, respectively.

A pair of upper drive sprockets 57 are fixed to the upper rotary shaft 52 at a predetermined interval. The pair of lower driven sprockets 58 are connected to the upper driving sprocket 5.
7, a chain 60 is hung between the driven sprocket 58 and the driving sprocket 57 so as to be rotatably supported on the lower rotary shaft 53 via a bearing 59.

A pair of lower drive sprockets 61 are fixed to the lower rotary shaft 53 at a predetermined interval. The pair of upper driven sprockets 62 are lower driving sprockets 6.
Corresponding to 1, a rotatable support is provided on the upper rotary shaft 52 via a bearing 63, and a chain 64 is mounted between each driven sprocket 62 and the driving sprocket 61, respectively.

A pair of moving bodies 65 and 66 are supported in the middle of each pair of chains 60 and 64, and
By the rotation of 0 and 64, the reels 12 and 13 are reciprocated in the longitudinal direction along the outer peripheral surfaces of the supply reel 12 and the take-up reel 13. The horizontal guide roller 67 is provided for each moving body 6.
5, 66 are rotatably supported around the vertical axis, and regulate the wire 6 fed from the pay-out reel 12 and the wire 6 wound on the take-up reel 13 to travel in a substantially horizontal direction. The vertical guide roller 68 is rotatably supported on the side surface of each of the moving bodies 65 and 66 around a horizontal axis, and regulates the wire 6 to travel in the vertical direction.

The pair of touch rollers 69, 70 are rotatably supported by the moving bodies 65, 66 so as to be arranged adjacent to each other with a predetermined minute gap in the vertical direction. The wire 6 is inserted into the gap between the wires. Encoders 71 and 72 as sensors are connected to the rotation shafts of the touch rollers 69 and 70,
A detection signal is output when the components 9, 70 are rotated by the contact with the wire 6. A large number of fins 73 are radially protruded from the shaft ends of the touch rollers 69 and 70, respectively. When the touch rollers 69 and 70 are rotated by contact with the wire 6, they generate air resistance to generate the touch rollers 69 and 70. To the braking force. Thereby, when the wire 6 separates from the touch rollers 69, 70, the touch rollers 69, 70
70 is stopped immediately.

The traverse mechanism 1 configured as described above
4, the motors 54, 55 are operated during operation of the apparatus.
Is the wire 6 on the pay-out reel 12 and the take-up reel 13.
And the wire 6 is rotated at an appropriate speed according to the running speed of the wire 6.

Then, the upper rotating shaft 52 is rotated by the upper motor 54, and the rear moving body 65 is vertically reciprocated via the sprockets 57 and 58 and the chain 60. Thus, the wire 6 is fed while being traversed in the longitudinal direction from the feeding reel 12. Also,
The lower rotating shaft 53 is rotated by the lower motor 55, and the front moving body 66 is vertically reciprocated via the sprockets 61 and 62 and the chain 64. As a result, the wire 6 is wound while being traversed on the winding roller 13 in the longitudinal direction.

When the wire 6 is fed or wound while being traversed in this way, if the traverse speed is high or low, the wire 6 comes into contact with the touch roller 69 or 70, and the touch roller 6
One of 9, 70 is rotated. That is, when the traverse speed by the traverse mechanism 14 is high, the moving body 6
Touch roller 6 located on the rear side in the movement direction of 5, 66
When one of the rollers 9 and 70 is rotated and the traverse speed is low, the other touch roller 69 or 70 located on the front side in the moving direction is rotated.

When the touch rollers 69 and 70 are rotated as described above, detection signals are output from the encoders 71 and 72 to the control device 21. Then, based on the detection signal, the control device 21 controls the rotation speeds of the motors 54 and 55, changes the moving speeds of the moving bodies 65 and 66, and corrects the traverse speed of the wire 6. That is, when the detection signal is output from the encoder 71 or 72 attached to the touch roller on the front side in the moving direction of the moving bodies 65 and 66, the traverse speed is reduced. On the other hand, when the detection signal is output from the encoder 71 or 72 attached to the touch roller on the rear side in the moving direction of the moving bodies 65 and 66, the traverse speed is increased.

When the wire 6 separates from the touch rollers 69 and 70, the touch rollers 69 and 70 are immediately stopped by the braking force of the fins 73. Further, since the fins 73 perform the braking of the touch rollers 69 and 70 in this way, when the touch rollers 69 and 70 are activated, a resistance against the activation hardly acts. For this reason, the touch rollers 69, 70 rotate and stop immediately in response to the contact and separation of the wire 6. Therefore, the traverse motion can be accurately performed according to the state of the wire 6, the unwinding from the unwinding reel 12 can be performed without difficulty, and the winding of the wire around the winding reel 13 can be accurately performed. it can.

The technical ideas other than the claims which can be understood from the embodiment of the wire traverse mechanism 14 described above will be described together with their effects. (1) A pay-out reel for feeding out a cutting wire and a take-up reel for taking up a wire, and a reel disposed opposite to each of the reels for feeding the wire from the pay-out reel and a wire to the take-up reel. A traverse mechanism of a wire that guides the take-up of the moving body, the traverse mechanism is a moving body that is reciprocated in the longitudinal direction along the outer periphery of the pay-out reel and the take-up reel, and is close to both sides in the traverse direction across the wire A pair of touch rollers rotatably supported on a moving body so as to be positioned, a sensor connected to each touch roller, and outputting a detection signal when the touch roller is rotated by contact with a wire; and each sensor And control means for changing the moving speed of the moving body when a detection signal is output from the wire saw device.

With this configuration, an accurate traverse speed can be set according to the actual feeding state and winding state of the wire. (Tension applying mechanism 15) As shown in FIGS. 9 to 11, the pair of housings 81 are arranged at predetermined intervals on the same axis of the second mechanism frame 3. A pair of rotating shafts 8
2 and 83 are rotatably supported in the respective housings 81 via bearings 84. Rotation arms 85 and 8 are provided at their ends.
6 is fixed. The support shaft 87 is provided with each of the rotating arms 85, 8
A guide roller 88 is rotatably and removably supported on these support shafts 87.

The weight 89 is supported on the rotating arms 85 and 86 movably in the longitudinal direction by engaging the engaging grooves 89a on the rear surface with the rotating arms 85 and 86. The thumbscrew 90 is screwed to each weight 89, and by tightening the thumbscrew 90, the weight 89 can be fixed at a predetermined position on the rotating arms 85 and 86.

Encoders 91 and 92 as sensors are connected to the rotating shafts 82 and 83, respectively.
The detection signal is output in accordance with the amount of rotation of the motor 6. Then, the control device 21 calculates the traveling speed of the wire 6 based on the detection signals from the encoders 91 and 92, and sets the initial traverse speed and the like in the traverse mechanism 14. That is, in the initial stage of the traveling of the wire 6, since the slack of the wire 6 is absorbed, the rotating arms 85, 86 are rotated in the direction opposite to the direction in which the weight 89 acts on the load.

The plunger 93 is provided with each of the rotating arms 85,
86 is movably attached to the proximal end. The engagement holes 94 are formed at the front surface of the second mechanism frame 3 and at the distal end of the regulating plate 95 so as to be able to engage with each plunger 93. When the wire 6 is hung on the guide roller 88 or the origin positions of the rotating arms 85 and 86 are set in the preparation work for cutting, the plunger 93 is engaged with the engaging hole 94 to rotate the rotating arm 8.
5, 86 can be locked at the origin position.

The tension applying mechanism 15 configured as described above
In FIG. 9, a rotating force is applied to the rotating arms 85 and 86 in the counterclockwise direction in FIG. 9 by the weight 89 during operation of the apparatus, and a predetermined tension is applied to the wire 6 wound on the guide roller 88. I have. Thus, the wire 6 between the two groove rollers 7 and 8 in the cutting mechanism 5 is always kept in a tension state.

When it is necessary to change the tension applied to the wire 6, each weight 89 is moved in the longitudinal direction along the rotating arms 85 and 86 with the thumb screw 90 loosened. After that, it is fixed at an arbitrary position by tightening the thumb screw 90. That is, if the weight 89 is moved to the distal ends of the rotating arms 85 and 86, the tension of the wire 6 can be increased. If the weight 89 is moved to the proximal ends of the rotating arms 85 and 86, The tension of the wire 6 can be reduced.

Next, the wire tension applying mechanism 15 described above is used.
The technical ideas other than the claims that can be grasped from the embodiment are described together with their effects. (1) A feeding mechanism for feeding a cutting wire, a winding reel for winding the wire, a cutting mechanism including a plurality of groove rollers for supporting the wire at a predetermined pitch, a feeding reel, and winding. A wire saw device provided between the take-up reel and the cutting mechanism and having a wire tension applying mechanism for applying a predetermined tension to the wire wound between the groove rollers, wherein the tension applying mechanism has a horizontal axis. A pivot arm rotatably supported around, a guide roller supported at the tip of the pivot arm for guiding the wire, and a weight movably mounted on the pivot arm in the longitudinal direction. Wire saw mechanism composed of

With this configuration, the tension applied to the wire can be easily changed by moving the weight in the longitudinal direction of the rotating arm and fixing the weight at an appropriate position. (Tension reduction mechanism 18) As shown in FIGS. 1, 3, and 12 to 14, the drive shaft 101 is rotatably supported by the second mechanism frame 3 via a bearing 102, and a pulley 103 is provided at a rear end thereof. Has been fixed. And this drive shaft 1
01 is rotated by the motor 153 of the cutting mechanism 5 described later via the belt 104 and the pulley 103.

The first rotary shaft 105 is rotatably supported by the frame 3 via a bearing 106 so as to be positioned on the same axis as the drive shaft 101 in front of the drive shaft 101, and is driven via a coupling 107. It is connected to the shaft 101. The second rotating shaft 108 is rotatably supported by the frame 3 via a bearing 109 so as to extend parallel to the first rotating shaft 105 on the side of the first rotating shaft 105. The driving pulley 110 is fixed to one end of the first rotating shaft 105, and a driven pulley 111 is fixed to the other end of the second rotating shaft 108 so as to correspond to the driving pulley 110.

The guide pulley 112 is connected to the driven pulley 111
Near the support shaft 113 and the bearing 11
4 so as to be rotatable. Rotating lever 11
5 is rotatably attached to the frame 3 by a support pin 116, and a tension pulley 117 is rotatably supported at its tip. The belt 118 is connected to each pulley 11
0, 111, 112, and 117 in order, and the first rotating shaft 105 and the second rotating shaft 10
8 are rotated in the same direction in FIG. A pair of screws 11
Numeral 9 is screwed into the frame 3 through a long hole 115a of the rotating lever 115, and the rotating lever 115 is fixed at a predetermined rotating position so that the degree of tension of the belt 118 can be adjusted.

A pair of guide rollers 120 are relatively rotatably and removably attached to the ends of the rotary shafts 105 and 108, and a slip clutch 121 is provided between the guide rollers 120 and the rotary shafts 105 and 108. It is interposed.

As shown in FIG. 14, each slip clutch 12
1 is a sleeve 12 fixed to the rotating shafts 105 and 108
2 and a drive disk 123 made of a magnetic material protruding from the outer periphery of the sleeve 122. further,
The sliding clutch 121 has a bearing 1 on the outer periphery of the sleeve 122.
A driven member 125 made of a magnetic material rotatably supported via a pair of drive disks 123 and a pair of disks fixed in the driven member 125 so as to face both sides of the drive disk 123 with a predetermined gap therebetween. And a permanent magnet 126. The driven body 125 forms a yoke located between the two permanent magnets 126, and the permanent magnet 126, the drive disk 123, and the driven body 125 form a magnetic circuit.

The guide roller 120 is detachably fixed to the front surface of the driven body 125 via a mounting disk 128 by a plurality of screws 127. When the first rotating shaft 105 and the second rotating shaft 108 are rotated, the guide roller 120 is driven to rotate in the same direction via the slip clutch 121 having a predetermined transmission torque based on the magnetic force of the permanent magnet 126. . At this time, when a rotation torque equal to or greater than the transmission torque acts on each guide roller 120, slippage occurs in the slip clutch 121 in the rotation direction.

The tension reducing mechanism 18 configured as described above
, The motor 153 of the cutting mechanism 5 during operation of the apparatus.
Accordingly, both rotating shafts 105 and 108 are rotated in the traveling direction of the wire 6 at a speed higher than the rotational speed for traveling the wire 6 via the transmission configuration including the drive shaft 101 and the belt 118. For this reason, the rotational force of both rotating shafts 105 and 108 is applied to both guide rollers 120 via the slip clutch 121, and tension is applied to the wire 6 on the upstream side of both guide rollers 120, and The tension of the wire 6 on the downstream side of the roller 120 is reduced.

At this time, a tension is applied to the wire 6 by the weight 89 between the two guide rollers 120 and on the upstream and downstream sides of the cutting mechanism 5. Therefore,
The rotating shaft 1 is attached to the guide roller 120 on the take-up reel 13 side.
A rotation torque acts in a direction opposite to the rotation direction of the 05. Therefore, the slip occurs in the slip clutch 121, and the guide roller 120 is rotated at the same peripheral speed as the traveling speed of the wire 6, and does not affect the traveling speed of the wire 6. The slip clutch 121 is always given a rotation speed higher than the rotation speeds of the two guide rollers 120. For this reason, tension is applied to both guide rollers 120 in the rotation direction. Therefore, the tension on the exit side of the wire 6 of both guide rollers 120 is reduced.

For example, as shown in FIG. 1, when the weight 89 of the tension applying mechanism 15 has a load of 5 kg, the wire 6 on the cutting mechanism 5 side is smaller than the weight 89 on the take-up reel 13 side. And a 2.5 kg tension acts on the wire 6 on the tension reducing mechanism 18 side with respect to the weight 89.
kg tension acts.

Then, the tension of the wire 6 on the downstream side of the take-up reel 13 is reduced by absorbing the torque accompanying the sliding rotation of the guide roller 120. The reel 1
The rotation speed higher than the traveling speed of the wire 6 is also applied to the guide roller 120 on the second side, and the reel 1
A tension equal to or greater than the tension of the weight 89 acts on the wire 6 upstream from 2, and the tension acts on the payout reel 12. However, in this case, the tension acts only on the axis of the reel of the wire 6 already wound on the pay-out reel 12, and there is no problem such as reel breakage.

As described above, the tension of the wire 6 transmitted from the tension applying mechanism 15 to the take-up reel 13 can be reduced. Thereby, on the winding side of the wire 6, it is possible to prevent the winding reel 13 from being crushed by the high tension reaction of the wire 6. In addition, the configuration for that purpose includes the rotation shafts 105 and 108 and the guide roller 120.
The configuration is extremely simple because only a slip clutch is provided between the two.

Further, in the tension reducing mechanism 18 of this embodiment, it is not necessary to cut the edge between the wire 6 and the cutting mechanism, so that the wire 6 need only be supported without being wound around the guide roller 120. Therefore, the guide roller 12
No slippage occurs between the outer circumferential groove of the wire 0 and the wire 6, and it is also possible to prevent the guide roller 120 from being worn out early.

In addition, in this embodiment, the slip clutch 121 is a driven member 1 comprising a permanent magnet 126 and a magnetic material.
25, there is no movable part or electric wiring for power transmission, the configuration is simple, and there is no possibility of failure. Moreover, a gap is formed between the permanent magnet 126 and the driven body 125, so that they do not rub against each other, and there is no problem of deterioration in durability due to wear.
Further, since the yoke 125 is provided between the pair of permanent magnets 126, a magnetic circuit is efficiently formed, and power transmission can be reliably performed even if the magnetic force of the permanent magnets 126 is weak.

The tension reducing mechanism is not limited to the above embodiment, but may be embodied in the following manner. (1) The guide roller 120 on the feeding side is configured to be rotated in the direction opposite to the wire running direction. With this configuration, the wire tension acting on the payout reel 12 can be reduced. (2) The driven bodies 125 are paired, and the permanent magnets 126 are disposed between the driven bodies 125. (3) Another type of clutch such as a fluid clutch or a friction clutch is used as the slip clutch.

Slip clutch ... A slip clutch in this specification refers to a clutch that connects a driving side and a driven side with a predetermined transmission torque, and that slippage occurs between the driving side and the driven side. (Cutting Mechanism 5) As shown in FIGS. 2, 3, and 15 to 20, a pair of first bearing bodies 131 are disposed on the first mechanism frame 2 at a predetermined interval. Each of the first bearing members 131 includes an outer cylinder 132, a bearing cylinder 133 fixed in the outer cylinder 132, and a plurality of bearings 13 in the bearing cylinder 133.
And a first rotation shaft 135 rotatably supported through the first rotation shaft 135. Further, a tapered connecting projection 135a is formed at the outer end of the first rotating shaft 135.

A pair of support legs 136 are connected to the first bearing 1
The support plates 137 are erected on the base 1 in correspondence with the bases 31 and are detachably attached to the upper surfaces thereof by a plurality of screws 138. The mounting plate 139 is detachably attached between the upper ends of the support plates 137 by a plurality of screws 140, and a pair of second bearing bodies 141 are provided at both ends. Each second bearing body 141 includes a bearing cylinder 142 and a second rotating shaft 144 rotatably supported in the bearing cylinder 142 via a plurality of bearings 143. The inner end of the second rotation shaft 144 has a tapered connecting projection 144.
a is formed.

A pair of connecting shafts 149 are connected to the respective groove rollers 7,
8 are provided at both ends of the inner cylinder 145, and tapered connecting concave portions 149a are formed at the end surfaces thereof.
Then, these connecting recesses 149a are connected to the rotating shafts 135, 1
The groove rollers 7 and 8 are held between the rotation shafts 135 and 144 by engaging with the 44 connection protrusions 135a and 144a. The tightening bolt 150 is attached to each second rotating shaft 14.
4 is screwed into the first rotating shaft 135 through the inside of the groove rollers 7 and 8, and the groove rollers 7 and 8 are detachably fixed between the two rotating shafts 135 and 144 by tightening the bolt 150.

A pair of temporary placing stands 151 are provided on the first bearing 1
31 are provided between the outer cylinders 132 and between the upper ends of the support plates 137, respectively. The upper ends of the support cylinders 137 are substantially V-shaped support grooves corresponding to the connection shafts 149 at both ends of the groove rollers 7, 8. 152 are formed. When the bolts 150 are removed and the second bearing body 141 is integrally removed with the mounting plate 139 to replace the groove rollers 7, 8, the groove rollers 7, 8 are supported on the temporary placing table 151. Groove 1
52 can be temporarily placed.

When the wire is wound, the second bearing 141 and the mounting plate 139 are connected from the other ends of the groove rollers 7 and 8.
By removing the screws 140 and 138 without removing them, both support plates 137 can be removed from the support legs 136 and the mounting plate 139. Accordingly, the other ends of the groove rollers 7, 8 are opened around the mechanism frame, so that the wire can be easily wound.

When it is necessary to newly wind the wire 6 between the groove rollers 7 and 8 at the time of cutting the wire 6 or the like, the screws 138 are loosened and the support plates 137 are attached to the support legs 1.
36 Remove from above. As a result, the leading ends of the groove rollers 7, 8 are largely opened, and the work of winding the wire around the groove rollers 7, 8 can be easily performed without any trouble.

The motor 153 is mounted on the rear surface of the frame 2 so as to correspond to the groove roller 7, and its motor shaft is connected to the first rotary shaft 135 of the drive groove roller 7 via a coupling 154 also serving as a drive pulley. Have been. The driven pulley 155 is slidably attached to the first rotating shaft 135 of the groove roller 8 via a pair of tapered roller bearings 156, and a belt 157 is mounted between the driven pulley 155 and the driving pulley 154. .

The adjusting nut 158 constituting the adjusting means corresponds to the tapered roller bearing 156, and corresponds to the first rotating shaft 135.
Is screwed into the base screw portion 159 of the base member. By rotating the adjusting nut 158, the biased state of the tapered roller bearing 156 is changed, and the first rotating shaft 135 is rotated.
, The transmission driving force of the driven pulley 155 and the degree of sliding rotation can be adjusted.

Therefore, both the groove rollers 7, 8 can be rotated synchronously with a small rotating torque when the wire is hooked before cutting. However, even if the wear state of the outer circumferential groove 148 is different between the two groove rollers 7 and 8 during cutting, and a slight rotation speed difference occurs between the groove rollers 7 and 8 when the wire 6 runs, Rotational speed difference is driven pulley 15
5 and the first rotary shaft 135, the tapered roller bearing 156
Absorbed by slipping. Therefore, each groove roller 7, 8
The wire 6 does not travel along the outer circumferential grooves 148 of the groove rollers 7 and 8 while sliding due to the difference in rotational speed between the rollers, and the outer circumferential grooves 148 of the groove rollers 7 and 8 may abnormally wear early. Can be prevented.

Similarly, the outer circumferential groove 148 of each of the groove rollers 7, 8
It is possible to cope with the case where the abrasion state of the roller changes relatively with use or the outer cylinder 146 of one of the groove rollers 7 and 8 is replaced with a new one to have a different groove diameter. The oil circulation passage 160 is connected to the first rotating shaft 13 of each of the first bearing bodies 131.
5 and the bearing cylinder 133. Then, cooling oil is circulated from an oil supply source (not shown) to the bearing 134 in the first bearing body 131 through the oil circulation passage 160, and the bearing 134 is lubricated.

The air supply passage 161 is connected to the first bearing 1
31 and the inner cylinder 145 of each of the groove rollers 7 and 8, and the second rotary shaft 144 of the second bearing body 141. The air supply passage 161 is connected to the outer end of the first rotating shaft 135 and the bearing cylinder 1.
33 and a gap 163 between both ends of the second rotary shaft 144 and the bearing cylinder 142.
Then, an air supply source (not shown) is supplied from the air supply passage 161.
The air supplied to the inside is blown outward from these gaps 162 and 163 to prevent the slurry from entering the bearings 134 and 143 in the bearings 131 and 141.

In this embodiment, as shown in FIGS. 19 and 20, a lid plate 164 for closing the end surface of the outer cylinder 132 of each first bearing body 131 is fitted and fixed to the coupling 154 side. Have been. An oil supply hole 1 connected to the oil circulation passage 160 is provided on the outer end surface thereof.
An oil supply plate 165 having an air supply hole 166a connected to the air supply passage 161 is mounted on the oil supply plate 165 having a rotation stop state. The oil supply plate 165 and the air supply plate 166 are connected to each other by bolts 170.
At the outer periphery of the first rotating shaft 135.
1 are fitted. The two supply plates 165 and 166 are rotatably supported on the first rotating shaft 135 via rotating bearings 167, and the rotating bearings 167 always keep the gap S1 constant. The oil circulation passage 1
60 and the oil supply hole 165a, and the air supply passage 161 and the air supply hole 166a are connected via a gap S1.

A plurality of engaged portions 165b are formed on the surface of the oil supply plate 165 facing the cover plate 164, and a plurality of engaging members such as bolts fixed to the cover plate 164 are formed on the engaged portions 165b. The engagement portion of the joining member 164a is engaged so that the oil supply plate 165 is supported relative to the lid plate 164 such that some movement is allowed in any direction. And
The oil supply plate 165 is provided between the lid plate 164 and the end face of the oil supply plate 165 and between the inner fitting protrusion 165c.
A gap S2 is formed to allow the movement of.

When a large pulling force of the wire 6 wound between the main rollers 7 and 8 acts on the first rotating shaft 135, the first rotating shaft 135 bends with the bearings 134 at both ends as fulcrums and is close to the coupling 154. On the end side from the bearing 134 on the side, bending in the same direction as the pulling direction of the wire 6 occurs. As described above, even when each of the first rotation shafts 135 is bent, the oil supply plate 165 and the air supply plate 1
66 is followed in the bending direction by the bearing 167 while maintaining a uniform gap S1 on the outer periphery of the first rotating shaft 135. Therefore, the oil supply plate 165 and the air supply plate 1
66 does not come into contact with the first rotating shaft 135 at all, even when the first rotating shaft 135 is stopped or during rotation, so that burn-in due to contact can be prevented. Therefore,
The gap S1 can be formed as small as possible, thereby preventing oil leakage and foreign matter intrusion from the gap S1. In addition, in the gap between the end portions of the two supply plates 165 and 166, when the first rotation shaft 135 rotates, the gap S1 is small and the dynamic pressure effect is large. The supply plates 165 and 166 and the first rotary shaft 1
Contact with 35 is reliably prevented.

The technical ideas other than the claims which can be understood from the embodiment of the cutting mechanism 5 will be described together with their effects. (1) In a wire saw device including a feeding reel for feeding out a cutting wire, a winding reel for winding the wire, and a cutting mechanism including a pair of main rollers for supporting the wire at a predetermined pitch. The cutting mechanism has a first bearing body fixed on a frame and supporting a rotating shaft connectable to a base end of each main roller, and a detachable mounting on the frame, and a distal end of each main roller. A second bearing body that supports a rotating shaft that can be connected to the first bearing body and a rotating shaft of the first bearing body that passes through the main roller from the rotating shaft of the second bearing body in a state where each main roller is connected between the two rotating shafts. A wire saw device comprising: a screwed fastening bolt; and a temporary placing table disposed on a frame so as to support both ends from below when replacing each main roller.

According to this structure, when the outer circumferential groove of the main roller is worn and it is necessary to replace the main roller with a new main roller, the second bearing body is removed from the frame and the main roller is temporarily placed on the base. In a state where the main roller is temporarily placed, the replacement operation of the main roller can be easily performed.

(2) a feeding reel for feeding the cutting wire and a winding reel for winding the wire;
In a wire saw device including a cutting mechanism including a plurality of main rollers for supporting a wire at a predetermined pitch, the cutting mechanism includes a motor connected to a rotation shaft of one main roller, A drive pulley fixed to the rotating shaft, a driven pulley slidably mounted on the rotating shaft of the remaining main roller via a tapered roller bearing, and adjusting means for adjusting a sliding rotation rate of each driven pulley, A wire saw device comprising: a belt mounted between each pulley.

With this configuration, the wear state of the outer peripheral groove varies among the plurality of main rollers, and
Even when a difference in rotation speed occurs between the main rollers when the wire runs, the difference in rotation speed is absorbed by the slip between the driven pulley and the rotation shaft. Therefore, the wire does not travel while sliding along the outer peripheral groove of the main roller due to the difference in rotational speed between the main rollers, and it is possible to prevent early wear of the outer peripheral groove of the main roller.
In addition, the configuration for this is simple, because a tapered roller bearing for supporting the roller is used and no dedicated parts are provided.

(3) a feeding reel for feeding the cutting wire and a winding reel for winding the wire;
In a wire saw device including a cutting mechanism having a pair of main rollers for supporting a wire at a predetermined pitch, the cutting mechanism is provided with a bearing body that supports a rotating shaft connectable to an end of the main roller. An oil supply plate having an oil supply hole for supplying oil to a bearing in the bearing body is attached to an outer end surface of the bearing body so that the oil supply plate is allowed to move slightly with respect to the bearing body. The wire saw device has a rotary shaft supported by a rotary shaft via a bearing so that a predetermined gap is formed between the rotary shaft and the outer peripheral surface of the rotary shaft.

With this configuration, even when a large pulling force of the wire acts on the rotating shaft to cause the rotating shaft to bend, the oil supply plate does not contact the rotating shaft.
Seizure due to contact can be prevented. Therefore, the gap between the rotating shaft and the oil supply plate can be made as small as possible, and oil leakage and foreign matter intrusion from the gap can be prevented.

[0082]

The present invention has the following effects because it is configured as described above. According to the first aspect, the configuration of the tension reducing mechanism can be simplified, and the risk of the rollers of the tension reducing mechanism being worn out early can be prevented. According to the second and fourth aspects, there is no need for a movable part or electric wiring for power transmission, the configuration is simple, and there is no possibility of failure.

According to the third aspect, a gap is formed between the permanent magnet and the magnetic body, so that they do not rub against each other, and there is no problem of deterioration in durability due to wear. Claim 5
In addition, since the yoke is provided between the pair of permanent magnets, the magnetic circuit is efficiently formed, and power transmission can be reliably performed even if the magnetic force of the permanent magnets is weak.

According to the sixth aspect, the work such as winding of the wire around the main roller can be easily performed. In the seventh aspect, even in the cantilever state where the support plate is removed, the positional relationship between the rollers can be accurately maintained by the mounting plate. In addition, the work of assembling and removing the support plate can be easily performed.

[Brief description of the drawings]

FIG. 1 is an exploded explanatory view showing an embodiment of a wire saw device embodying the present invention, and particularly showing an outline of a wire tension reducing mechanism thereof.

FIG. 2 is a front view showing the entire configuration of the wire saw device.

FIG. 3 is a plan view of the wire saw device.

FIG. 4 is a partially cutaway side view showing, in an enlarged manner, a wire feeding and winding mechanism in the wire saw device of FIG. 2;

FIG. 5 is an electric circuit diagram of a wire cutting and roller wear detecting mechanism provided in connection with the wire feeding and winding mechanism.

FIG. 6 is a partially cutaway front view showing the wire traverse mechanism in the wire saw device of FIG. 2 in an enlarged manner.

FIG. 7 is a sectional side view of a main part of the traverse mechanism.

FIG. 8 is a partial plan view of the traverse mechanism.

FIG. 9 is an enlarged partial front view showing a wire tension applying mechanism in the wire saw device of FIG. 2;

FIG. 10 is a partially enlarged sectional view taken along line XX of FIG. 9;

11 is a partially enlarged cross-sectional view taken along line XI-XI in FIG. 9;

FIG. 12 is an enlarged partial cross-sectional view showing a wire tension reducing mechanism in the wire saw device of FIG. 3;

13 is a partial sectional view taken along line XIII-XIII in FIG.

FIG. 14 is a cross-sectional view of the wire tension reducing mechanism of FIG.
FIG. 3 is an enlarged partial cross-sectional view illustrating an internal structure of a tension reducing roller.

FIG. 15 is an enlarged partial side sectional view showing a base end side of a cutting mechanism in the wire saw device of FIG. 2;

FIG. 16 is a partial side sectional view showing a distal end side of the cutting mechanism of FIG. 15;

FIG. 17 is a partial sectional view taken along line XVII-XVII in FIG. 16;

FIG. 18 is a plan view of a principal part showing a cross section of a part of the cutting mechanism.

FIG. 19 is an enlarged sectional view showing the vicinity of an end of a first rotation shaft.

FIG. 20 is an enlarged sectional view showing a part of FIG. 19;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Base, 5 ... Cutting mechanism, 6 ... Cutting wire, 7 ... Driving groove roller as a main roller, 8 ... Groove roller as a main roller, 9 ... Wire support and slurry supply mechanism, 1
0: Work as a member to be cut, 11: Wire feeding and winding mechanism, 12: Feeding reel, 13: Winding reel, 14: Wire traversing mechanism, 15: Wire tension applying mechanism, 18: Wire tension Reduction mechanism, 19: guide roller, 20: guide roller, 21: control device as control means, 23: wire cutting and roller wear detection mechanism, 101: drive shaft, 105: first rotating shaft, 108: second rotating shaft , 120: guide roller, 121: slip clutch.

────────────────────────────────────────────────── ─── Continuation of the front page (72) Nobuyuki Nakamura, Inventor 168-1 Umegashima, Fukuno-cho, Higashi-Tonami-gun, Toyama Prefecture (56) References JP-A-2-232156 (JP, A) JP-A-4- 135158 (JP, A) JP-A-4-135157 (JP, A) JP-A-3-154768 (JP, A) JP-A-61-100364 (JP, A) JP-A-5-68609 (JP, U) 63-97047 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) B24B 27/06 B28D 5/04

Claims (7)

(57) [Claims] 1. A wire running mechanism for running a cutting wire, and a plurality of main rollers disposed in a running area of the wire and formed with a plurality of grooves for supporting the wire at a predetermined pitch. A cutting mechanism, a take-up reel on which a wire passing through the cutting mechanism is wound, and a winding reel arranged between the take-up reel and the cutting mechanism for applying a predetermined tension to the wire positioned in the cutting mechanism. A wire saw device comprising: a wire tension applying mechanism; and a wire tension reducing mechanism disposed between the wire tension applying mechanism and the take-up reel, for reducing the tension of the wire wound on the take-up reel. In the above, the tension reducing mechanism comprises: a guide roller for guiding a wire; and a rotating shaft for applying a rotational force to the guide roller at a speed higher than a traveling speed of the wire. Wire saw apparatus composed of a interposed a slip clutch between the rotary shaft and the guide rollers. 2. The wire saw device according to claim 1, wherein the slip clutch includes a magnet provided on one of the rotating shaft side and the guide roller side, and a magnetic body provided on the other side facing the magnet. 3. The wire saw device according to claim 2, wherein a slight gap is provided between the magnet and the magnetic body. 4. The magnet according to claim 2, wherein the magnet is a permanent magnet.
The wire saw device according to item 1. 5. The wire saw device according to claim 2, wherein the magnet is a pair of magnets arranged so as to sandwich the magnetic body, and a yoke is provided between the two magnets. 6. A plurality of main rollers of the cutting mechanism are rotatably supported at both ends by first and second bearings, respectively, and the first bearing is supported by a fixed portion and a second bearing. Of the main roller group is opened by removing the support plate from the second bearing member and the fixed portion, thereby supporting the other end of the main roller group. The wire saw device according to any one of claims 1 to 5, wherein each main roller is supported in a cantilever shape at one end. 7. The wire saw device according to claim 6, wherein each second bearing body of the plurality of main rollers is integrally connected to one mounting plate, and the mounting plate is mounted on the support plate.