JP3050011B2 - Limit current type oxygen sensor - Google Patents

Limit current type oxygen sensor

Info

Publication number
JP3050011B2
JP3050011B2 JP5226961A JP22696193A JP3050011B2 JP 3050011 B2 JP3050011 B2 JP 3050011B2 JP 5226961 A JP5226961 A JP 5226961A JP 22696193 A JP22696193 A JP 22696193A JP 3050011 B2 JP3050011 B2 JP 3050011B2
Authority
JP
Japan
Prior art keywords
solid electrolyte
cathode electrode
glass spiral
spiral spacer
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5226961A
Other languages
Japanese (ja)
Other versions
JPH0783876A (en
Inventor
武彦 重岡
邦弘 鶴田
和久 森上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP5226961A priority Critical patent/JP3050011B2/en
Publication of JPH0783876A publication Critical patent/JPH0783876A/en
Application granted granted Critical
Publication of JP3050011B2 publication Critical patent/JP3050011B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は酸素濃度を検出する限界
電流式酸素センサーに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a limiting current type oxygen sensor for detecting oxygen concentration.

【0002】[0002]

【従来の技術】従来の限界電流式の酸素センサーは、図
4、図5に示すように、酸素イオン伝導性の固体電解質
板14の両面にカソード電極15およびアノード電極1
6を配設し、前記固体電解質板14上のカソード電極1
5面側には、カソード電極15より間隔をあけて囲み始
端から終端までお互いに間隔を保つように螺旋状の硝子
螺旋型スペーサ17を配設している。また前記硝子螺旋
型スペーサ17を挟み固体電解質板14の相対向する位
置にはシール板18が配設してあり、前記シール板18
の硝子螺旋型スペーサ17反対面には一対のリード線膜
の加熱ヒータ19が配設してある。この様にして前記固
体電解質板14と硝子螺旋型スペーサ17そしてシール
板18を積層して囲まれる酸素拡散通路20と電極空間
21とが形成されている。
2. Description of the Related Art As shown in FIGS. 4 and 5, a conventional limiting current type oxygen sensor has a cathode electrode 15 and an anode electrode 1 on both sides of an oxygen ion conductive solid electrolyte plate 14. As shown in FIG.
6 and the cathode electrode 1 on the solid electrolyte plate 14
On the fifth surface side, spiral glass spiral spacers 17 are arranged so as to be spaced from the cathode electrode 15 and to be spaced from the start end to the end. A seal plate 18 is provided at a position opposite to the solid electrolyte plate 14 with the glass spiral spacer 17 interposed therebetween.
On the opposite surface of the glass spiral spacer 17, a pair of lead wire film heaters 19 are provided. In this manner, an oxygen diffusion passage 20 and an electrode space 21 which are formed by laminating the solid electrolyte plate 14, the glass spiral spacer 17, and the seal plate 18 are formed.

【0003】上記した構成で固体電解質板14の両面の
カソード電極15およびアノード電極16間に電圧22
を印加して電流を流すと、カソード電極15、アノード
電極16で発生する酸素の注入、放出の電気化学反応が
起こる。この酸素の注入、放出の過程で酸素の供給を制
限することにより、図6に示すように電圧電流特性に飽
和電流特性が現れ、その大きさは雰囲気中の酸素濃度に
ほぼ比例する。限界電流式の酸素センサーはこの特性を
利用し、電極空間21への酸素供給を酸素拡散通路21
によって行い、この段階で拡散速度を律速することによ
り供給酸素濃度に比例した限界電流を得るものである。
In the above configuration, a voltage 22 is applied between the cathode electrode 15 and the anode electrode 16 on both surfaces of the solid electrolyte plate 14.
Is applied, and an electric current flows, an electrochemical reaction of injecting and releasing oxygen generated at the cathode electrode 15 and the anode electrode 16 occurs. By limiting the supply of oxygen during the process of injecting and releasing oxygen, a saturation current characteristic appears in the voltage-current characteristic as shown in FIG. 6, and its magnitude is almost proportional to the oxygen concentration in the atmosphere. The limiting current type oxygen sensor utilizes this characteristic to supply oxygen to the electrode space 21 through the oxygen diffusion passage 21.
By limiting the diffusion rate at this stage, a limit current proportional to the supplied oxygen concentration is obtained.

【0004】この限界電流式酸素センサーは安定性に優
れているが、内部抵抗が大きいため、高温に加熱して動
作させなければならないという欠点を有する。このた
め、この種の酸素センサーは酸素センサー部近傍に加熱
ヒータ19を取付け、所定の電圧23を印加して、自己
加熱して使用する。
Although this limiting current type oxygen sensor is excellent in stability, it has a drawback that it must be operated by heating to a high temperature because of its large internal resistance. For this reason, this type of oxygen sensor has a heater 19 mounted in the vicinity of the oxygen sensor portion, applies a predetermined voltage 23, and self-heats before use.

【0005】また、限界電流式酸素センサーは、センサ
ーの構成自体が酸素拡散速度を律速することにより供給
酸素濃度に比例した限界電流を得るものであるから、そ
の大きさも大変精密でかつ小さい形状になっており、ま
た、加熱ヒータ19もそれに合わせて密接して配設する
ため、大変小さい面積で加熱するようになっている。
In addition, the limiting current type oxygen sensor obtains a limiting current proportional to the supplied oxygen concentration by controlling the oxygen diffusion rate by itself, so that the size of the sensor is very precise and small. In addition, the heater 19 is also arranged in close contact with it, so that it is heated with a very small area.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記従
来の限界電流式の酸素センサーは、固体電解質板14の
両面にカソード電極15およびアノード電極16を別々
に印刷し焼成した後、更にその固体電解質板14に硝子
螺旋型スペーサ17を印刷焼成したものを、加熱ヒータ
19を印刷焼成したシール板18と貼り合わせ再び焼成
する工程を経て構成する。つまり、固体電解質板14に
カソード電極15印刷焼成、アノード電極16印刷焼
成、硝子螺旋型スペーサ17印刷、シール板18に加熱
ヒータ19を印刷焼成、そしてそれぞれ部分組立された
固体電解質板14とシール板18を貼り合わせ焼成の各
工程が別々に構成されるため、その各構成要素の位置が
ずれやすくまた、そのため、カソード電極15を硝子螺
旋型スペーサ17にぎりぎり近づけるとこれらが部分的
に重合してその面積が変化し出力がばらつく。そこで有
効面積が変化しないようにするため印刷ずれなどを生じ
ても硝子螺旋型スペーサ17にカソード電極15がかか
らないよう両者間を十分広くとるとカソード電極15の
面積を大きくとれない問題があった。
However, in the conventional limiting current type oxygen sensor, the cathode electrode 15 and the anode electrode 16 are separately printed on both surfaces of the solid electrolyte plate 14 and fired, and then the solid electrolyte plate is further cooled. 14 is formed by printing and firing a glass spiral spacer 17 on a seal plate 18 printed and fired by a heater 19 and then firing again. That is, the cathode electrode 15 is printed and baked on the solid electrolyte plate 14, the anode electrode 16 is printed and baked, the glass spiral spacer 17 is printed, the heater 19 is printed and baked on the seal plate 18, and the partially assembled solid electrolyte plate 14 and seal plate Since the respective steps of bonding and baking 18 are separately configured, the positions of the respective components are easily shifted, and therefore, when the cathode electrode 15 is brought very close to the glass spiral spacer 17, they partially polymerize. The area changes and the output varies. In order to prevent the effective area from changing, there is a problem that the area of the cathode electrode 15 cannot be increased if the space between the glass spiral spacer 17 and the cathode electrode 15 is made sufficiently large so that the cathode electrode 15 does not cover the glass spiral spacer 17 even if printing misalignment occurs.

【0007】したがって、酸素の注入、放出量に比例、
すなわちカソード電極15の面積や固体電解質板14の
活性化温度に比例する酸素センサーの限界電流はばらつ
き精度が悪いという課題があった。そしてそのばらつき
を小さくすべく加熱ヒータ19の温度を高めに設定する
と、高温のために寿命が短くなるという課題があった。
Therefore, in proportion to the amount of oxygen injected and released,
That is, there is a problem that the accuracy of variation of the limit current of the oxygen sensor, which is proportional to the area of the cathode electrode 15 and the activation temperature of the solid electrolyte plate 14, is poor. If the temperature of the heater 19 is set higher to reduce the variation, there is a problem that the service life is shortened due to the high temperature.

【0008】本発明は上記課題を解決するもので、製造
時の印刷ずれなどのばらつきを吸収して、精度が高く、
かつ寿命の長い酸素センサーを提供することを目的とし
たものである。
The present invention solves the above-mentioned problems, and absorbs variations such as printing misregistration at the time of manufacturing, thereby achieving high accuracy.
Another object is to provide an oxygen sensor having a long life.

【0009】[0009]

【課題を解決するための手段】本発明は上記の目的を達
成するため、アノードおよびカソード電極膜を両面に形
成した酸素イオン伝導性の固体電解質板と、前記固体電
解質板上の電極膜のカソード面側に位置しカソードを囲
み始端から終端までお互いに間隔を保つように螺旋状に
配設した硝子螺旋状型スペーサと、前記硝子螺旋型スペ
ーサを挟み固体電解質板の相対向する位置に配設したシ
ール板と、前記シール板の硝子螺旋型スペーサ反対面に
一対のリード線膜を形成した加熱ヒータと、前記固体電
解質板と硝子螺旋型スペーサそしてシール板を積層して
囲まれる酸素拡散通路と、その中央のカソード電極膜上
の電極膜空間とを備え、前記カソード電極の膜外周縁は
硝子螺旋型スペーサ幅のほぼ中央に位置させてその全周
が硝子螺旋型スペーサに重合するように構成してある。
In order to achieve the above object, the present invention provides an oxygen ion conductive solid electrolyte plate having anode and cathode electrode films formed on both sides, and a cathode of the electrode film on the solid electrolyte plate. A glass spiral type spacer which is positioned on the surface side and surrounds the cathode and is spirally disposed so as to keep an interval from a start end to an end, and disposed at opposing positions of a solid electrolyte plate with the glass spiral type spacer interposed therebetween. A sealing plate, a heater in which a pair of lead wire films are formed on the surface opposite to the glass helical spacer of the seal plate, and an oxygen diffusion path surrounded by stacking and surrounding the solid electrolyte plate, the glass helical spacer and the sealing plate. An electrode film space on the cathode electrode film at the center thereof, wherein the outer peripheral edge of the film of the cathode electrode is located substantially at the center of the width of the glass spiral spacer, and the entire periphery thereof is a glass spiral space. It is arranged to polymerize service.

【0010】[0010]

【作用】本発明は上記の構成によって、その電極膜の全
周が硝子螺旋型スペーサの内縁に重合しているので、製
造時の印刷ずれなどによって固体電解質体に印刷したカ
ソードおよびアノード電極が硝子螺旋型スペーサとの位
置が、硝子螺旋型スペーサ幅の半分までずれても重合面
積が変わるだけで有効電極面積はかわらず、またそれ以
上ずれても硝子螺旋型スペーサの範囲であれば電極膜空
間内の有効面積が減少した分が酸素拡散通路にできるた
め酸素の注入、放出量はほぼ相殺され、限界電流は安定
して得られるようになり、精度が向上する。
According to the present invention, the cathode and anode electrodes printed on the solid electrolyte body due to printing misregistration during the manufacturing process, etc., because the entire periphery of the electrode film is polymerized on the inner edge of the glass spiral spacer by the above configuration. Even if the position of the spiral spacer is shifted up to half the width of the glass spiral spacer, the effective electrode area is not changed just by changing the overlapping area. Since the effective area of the inside is reduced to form an oxygen diffusion passage, the amount of injected and released oxygen is almost cancelled, the limiting current can be obtained stably, and the accuracy is improved.

【0011】また、カソードおよびアノード電極の有効
面積は硝子螺旋型スペーサに隠されない部分つまり電極
膜空間いっぱいににすることができるので、その分高い
限界電流が得られ、精度が一段と向上するとともに温度
を高めに設定する必要もないので寿命も向上する。
In addition, the effective area of the cathode and anode electrodes can be made to be a portion not hidden by the glass spiral spacer, that is, the entire electrode film space, so that a higher limit current can be obtained and the accuracy can be further improved and the temperature can be improved. It is not necessary to set a higher value, so that the life is improved.

【0012】[0012]

【実施例】以下本発明の実施例を図1〜図3を参照して
説明する。図1、図2において1は白金材料で形成され
たアノード電極2およびカソード電極3を両面に配設し
た酸素イオン伝導性の10mm角の大きさの固体電解質
板で、ZrO2・Y23(Y23 8mol%添加)で
形成されている。4は前記固体電解質板1上のカソード
電極3面側に位置しカソードを囲み始端から終端までお
互いに間隔を保つように螺旋状に配設した硝子螺旋状型
スペーサで、その全周内縁は該スペーサ幅0.5mmの
ほぼ中央にカソード電極3の外周が位置するよう重合さ
せてある。5は前記硝子螺旋型スペーサ4を挟み固体電
解質板1の相対向する位置に配設したフォルステライト
製の10mm角のシール板で、そのシール板5の硝子螺
旋型スペーサ反対面には一対のリード線膜の白金性の加
熱ヒータ6が形成してある。7は前記固体電解質板1と
硝子螺旋型スペーサ4そしてシール板5とで囲まれて形
成される酸素拡散通路で、その中央のカソード電極3上
には電極空間8が形成される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 2, reference numeral 1 denotes an oxygen ion conductive solid electrolyte plate having a size of 10 mm square and having an anode electrode 2 and a cathode electrode 3 formed of a platinum material on both surfaces, and ZrO 2 · Y 2 O 3 (Addition of 8 mol% of Y 2 O 3 ). Reference numeral 4 denotes a glass spiral type spacer which is located on the surface of the cathode electrode 3 on the solid electrolyte plate 1 and surrounds the cathode and is spirally arranged from the start end to the end so as to be spaced apart from each other. Polymerization is performed so that the outer periphery of the cathode electrode 3 is located substantially at the center of the spacer width of 0.5 mm. Numeral 5 is a forsterite 10 mm square sealing plate disposed at opposing positions of the solid electrolyte plate 1 with the glass spiral spacer 4 interposed therebetween. A pair of leads is provided on the sealing plate 5 opposite to the glass spiral spacer. A platinum film heating heater 6 is formed. Reference numeral 7 denotes an oxygen diffusion passage formed by the solid electrolyte plate 1, the glass spiral spacer 4, and the seal plate 5, and an electrode space 8 is formed on the central cathode electrode 3.

【0013】図3は上記酸素センサーを制御する制御ブ
ロックを示し、9は両面のカソード電極3およびアノー
ド電極2間に電圧を印加するとともにその間に流れる電
流に応じた信号を出力するセンサー制御部である。10
は加熱ヒータ6の温度を任意に設定できるようになって
いるヒータ制御部である。11は前記センサー制御部9
とヒータ制御部10に信号を送る制御出力部で、センサ
ー制御部9からの信号を酸素濃度値に変換し、センサー
表示制御部12に出力し、センサー表示制御部12は前
記出力値をセンサー表示部13で表示させるように構成
してある。
FIG. 3 shows a control block for controlling the oxygen sensor. Reference numeral 9 denotes a sensor control unit which applies a voltage between the cathode electrode 3 and the anode electrode 2 on both surfaces and outputs a signal corresponding to a current flowing therebetween. is there. 10
Is a heater control unit which can set the temperature of the heater 6 arbitrarily. 11 is the sensor control unit 9
And a control output unit that sends a signal to the heater control unit 10. The control output unit converts the signal from the sensor control unit 9 into an oxygen concentration value, and outputs the oxygen concentration value to the sensor display control unit 12. The sensor display control unit 12 displays the output value on the sensor display. It is configured to be displayed by the unit 13.

【0014】上記した構成において、制御出力部11よ
り酸素濃度測定開始の信号がセンサー制御部9およびヒ
ータ制御部10に出力されると、センサー制御部9およ
びヒータ制御部10よりアノード電極2とカソード電極
3間および加熱ヒータ6に定格電圧が印加される。加熱
ヒータ6は自己加熱して固体電解質板1を高温に保持し
て固体電解質板1を活性化し、このとき固体電解質板1
の両面のカソード電極3およびアノード電極2間に電圧
を印加すると、カソード電極3、アノード電極2で発生
する酸素の注入、放出の電気化学反応が起こる。この酸
素の注入、放出の過程で電極空間8への酸素の供給が硝
子螺旋型スペーサ4で形成される酸素拡散通路7によっ
て制限されることにより、電圧電流特性に飽和電流特性
が現れ、その大きさは雰囲気中の酸素濃度に比例する。
In the above configuration, when a signal for starting the oxygen concentration measurement is output from the control output unit 11 to the sensor control unit 9 and the heater control unit 10, the sensor control unit 9 and the heater control unit 10 output the anode 2 and the cathode 2. A rated voltage is applied between the electrodes 3 and to the heater 6. The heater 6 self-heats and maintains the solid electrolyte plate 1 at a high temperature to activate the solid electrolyte plate 1.
When a voltage is applied between the cathode electrode 3 and the anode electrode 2 on both sides of the substrate, an electrochemical reaction occurs in which oxygen generated and discharged from the cathode electrode 3 and the anode electrode 2 is generated. In the process of injecting and releasing oxygen, the supply of oxygen to the electrode space 8 is restricted by the oxygen diffusion path 7 formed by the glass spiral spacer 4, so that the saturation current characteristic appears in the voltage-current characteristic, The degree is proportional to the oxygen concentration in the atmosphere.

【0015】センサー制御部9はこの得られた限界電流
に応じた信号を制御出力部11に送り、制御出力部11
は酸素濃度値に変換して、センサー表示制御部12に出
力し、センサー表示部13で表示させる。
The sensor control unit 9 sends a signal corresponding to the obtained limit current to the control output unit 11, and the control output unit 11
Is converted into an oxygen concentration value, output to the sensor display control unit 12, and displayed on the sensor display unit 13.

【0016】ここで、この酸素センサーも従来と同様固
体電解質板1にカソード電極3印刷焼成、アノード電極
2印刷焼成、硝子螺旋型スペーサ4印刷、シール板5に
加熱ヒータ6印刷焼成、そしてそれぞれ部分組立された
固体電解質板1とシール板5を貼り合わせ焼成の各工程
が別々に構成され、その各構成要素の位置はずれやすい
が、カソード電極3は硝子螺旋型スペーサ4の内側の環
の幅0.5mmのほぼ中央に位置するように構成されて
いるので、製造時の印刷ずれなどによって固体電解質板
1に印刷したカソード電極3およびアノード電極2と硝
子螺旋型スペーサ4との位置が多少ずれても、その重合
面積が変化するだけで電極の有効電極面積はかわらず、
またそれ以上ずれても硝子螺旋型スペーサ4の範囲0.
5mm以内であれば電極膜空間内の有効面積が減少した
分が酸素拡散通路にできるため酸素の注入、放出量はほ
ぼ相殺され、限界電流は安定して得られるようになる。
Here, as in the conventional case, this oxygen sensor is also printed and baked on the solid electrolyte plate 1 on the cathode electrode 3, printed on the anode electrode 2, printed on the glass spiral spacer 4, printed on the sealing plate 5 and printed on the heater 6. The assembled solid electrolyte plate 1 and the seal plate 5 are bonded and fired so that the respective steps of baking are separately formed, and the positions of the respective components are easily shifted. However, the cathode electrode 3 has a ring width of 0 inside the glass spiral spacer 4. .5 mm, the positions of the cathode electrode 3 and the anode electrode 2 printed on the solid electrolyte plate 1 and the glass spiral spacer 4 are slightly shifted due to printing misalignment during manufacturing. Also, the effective electrode area of the electrode does not change just by changing the polymerization area,
In addition, even if the distance is further shifted, the range of the glass spiral spacer 4 is set to 0.
If it is within 5 mm, the amount of reduced effective area in the electrode film space can be used as an oxygen diffusion path, so that the amount of injected and released oxygen is almost offset, and the limiting current can be obtained stably.

【0017】また、カソード電極3およびアノード電極
2の有効面積は硝子螺旋型スペーサ4に隠されない部分
つまり電極空間8いっぱいにすることができるので、カ
ソード電極2が硝子螺旋型スペーサ4にかからないよう
にした場合に比べカソード電極4の面積も大きくでき本
実施例の場合従来の約1.5倍も面積が大きくでき、そ
の分高い限界電流が得られ、精度やばらつきそして寿命
に対して有利になる。
Further, the effective area of the cathode electrode 3 and the anode electrode 2 can be a portion that is not hidden by the glass spiral spacer 4, that is, the entire electrode space 8, so that the cathode electrode 2 does not cover the glass spiral spacer 4. In this embodiment, the area of the cathode electrode 4 can be increased by about 1.5 times as compared with the conventional case, so that a higher limit current can be obtained, which is advantageous for accuracy, variation and life. .

【0018】[0018]

【発明の効果】以上説明したように本発明の酸素センサ
ーは、製造時の印刷ずれなどのばらつきがあっても、こ
れを吸収して限界電流の安定した精度の高いものとする
ことができるとともに、ヒータ温度も高めに設定する必
要がないので寿命も向上する事ができる。
As described above, the oxygen sensor of the present invention can stabilize the limit current and have high accuracy by absorbing the unevenness such as printing deviation at the time of manufacturing. Since the heater temperature does not need to be set higher, the life can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例における酸素センサーの一部
欠裁斜視図
FIG. 1 is a partially cutaway perspective view of an oxygen sensor according to an embodiment of the present invention.

【図2】同酸素センサーの構成図FIG. 2 is a configuration diagram of the oxygen sensor.

【図3】同酸素センサーを制御する制御部のブロック図FIG. 3 is a block diagram of a control unit that controls the oxygen sensor.

【図4】従来の酸素センサーの一例を示す一部欠裁斜視
FIG. 4 is a partially cutaway perspective view showing an example of a conventional oxygen sensor.

【図5】同酸素センサーの動作原理図FIG. 5 is a diagram showing the operation principle of the oxygen sensor.

【図6】同センサーの代表特性図FIG. 6 is a representative characteristic diagram of the sensor.

【符号の説明】[Explanation of symbols]

1 個体電解質板 2 アノード電極 3 カソード電極 4 硝子螺旋型スペーサ 5 シール板 6 加熱ヒータ 7 酸素拡散通路 8 電極空間 DESCRIPTION OF SYMBOLS 1 Solid electrolyte plate 2 Anode electrode 3 Cathode electrode 4 Glass spiral spacer 5 Seal plate 6 Heater 7 Oxygen diffusion passage 8 Electrode space

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−265158(JP,A) 特開 昭63−154958(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01N 27/41 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-62-265158 (JP, A) JP-A-63-154958 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01N 27/41

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 アノード電極およびカソード電極を両面
に形成した酸素イオン伝導性の固体電解質板と、前記固
体電解質板上のカソード電極面側に位置しカソード電極
を囲み始端から終端までお互いに間隔を保つように螺旋
状に配設した硝子螺旋型スペーサと、前記硝子螺旋型ス
ペーサを挟み固体電解質板の相対向する位置に配設した
シール板と、前記シール板の硝子螺旋型スペーサ反対面
に一対のリード線膜を形成した加熱ヒータと、前記固体
電解質板と硝子螺旋型スペーサそしてシール板を積層し
て囲まれる酸素拡散通路と、その中央のカソード電極上
の電極空間とを備え、前記カソード電極の膜外周縁は硝
子螺旋型スペーサ幅のほぼ中央に位置させてその全周が
硝子螺旋型スペーサに重合するようにした限界電流式酸
素センサー。
1. An oxygen ion conductive solid electrolyte plate having an anode electrode and a cathode electrode formed on both sides thereof, and a space between the start and end which surrounds the cathode electrode and is located on the cathode electrode surface side of the solid electrolyte plate. A glass spiral spacer arranged in a spiral so as to maintain, a seal plate disposed at a position opposite to the solid electrolyte plate with the glass spiral spacer interposed therebetween, and a pair on a surface of the seal plate opposite to the glass spiral spacer. A heater formed with a lead wire film, an oxygen diffusion path surrounded by stacking the solid electrolyte plate, the glass spiral spacer, and the seal plate, and an electrode space above the central cathode electrode, The limiting current type oxygen sensor in which the outer peripheral edge of the film is positioned substantially at the center of the width of the glass spiral spacer so that the entire periphery thereof overlaps with the glass spiral spacer.
JP5226961A 1993-09-13 1993-09-13 Limit current type oxygen sensor Expired - Lifetime JP3050011B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5226961A JP3050011B2 (en) 1993-09-13 1993-09-13 Limit current type oxygen sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5226961A JP3050011B2 (en) 1993-09-13 1993-09-13 Limit current type oxygen sensor

Publications (2)

Publication Number Publication Date
JPH0783876A JPH0783876A (en) 1995-03-31
JP3050011B2 true JP3050011B2 (en) 2000-06-05

Family

ID=16853339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5226961A Expired - Lifetime JP3050011B2 (en) 1993-09-13 1993-09-13 Limit current type oxygen sensor

Country Status (1)

Country Link
JP (1) JP3050011B2 (en)

Also Published As

Publication number Publication date
JPH0783876A (en) 1995-03-31

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