JP3041559B2 - Manufacturing method of electro-optical device - Google Patents

Manufacturing method of electro-optical device

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Publication number
JP3041559B2
JP3041559B2 JP5011209A JP1120993A JP3041559B2 JP 3041559 B2 JP3041559 B2 JP 3041559B2 JP 5011209 A JP5011209 A JP 5011209A JP 1120993 A JP1120993 A JP 1120993A JP 3041559 B2 JP3041559 B2 JP 3041559B2
Authority
JP
Japan
Prior art keywords
substrate
panel
manufacturing
electro
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5011209A
Other languages
Japanese (ja)
Other versions
JPH06222318A (en
Inventor
啓友 男庭
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP5011209A priority Critical patent/JP3041559B2/en
Publication of JPH06222318A publication Critical patent/JPH06222318A/en
Application granted granted Critical
Publication of JP3041559B2 publication Critical patent/JP3041559B2/en
Anticipated expiration legal-status Critical
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、電気光学装置、特に、
透明基板の平板に、接着剤等の層を介して、単純マトリ
クス方式やTFTやMIM等のアクティブマトリクス方
式を構造に用いた電子回路素子層を転写密着させた構造
を持った基板を、少なくとも一方に有する液晶等の電気
光学装置のパネル製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electro-optical device,
At least one substrate having a structure in which an electronic circuit element layer using a simple matrix method or an active matrix method such as a TFT or MIM for the structure is transferred and adhered to a flat plate of a transparent substrate via a layer of an adhesive or the like. The present invention relates to a method for manufacturing a panel of an electro-optical device such as a liquid crystal included in the present invention.

【0002】[0002]

【従来の技術】従来の電気光学装置の製造方法では、
の従来パネル圧着装置構造断面図に示すように、
電気光学素子の貼り合わせ工程(圧着工程)において
プレス板2を油圧6(または、機械的なねじ込み方法
等)で、100Kg/cm 2 から2t/cm 2 程度の強い
圧力で押圧し、パネル7をプレスして一対の互いに対向
する基板を貼り合わせてスぺーサー材によりセルギャッ
プ制御しながら、180℃以上の高熱を加えることによ
基板同士の接着を行っていた。
2. Description of the Related Art In a conventional method of manufacturing an electro-optical device , FIG.
As shown in structural cross-sectional view of a conventional panel crimping apparatus 4,
In the bonding process (compression bonding process) of the electro-optical element ,
The press plate 2 is pressurized with a hydraulic pressure 6 (or a mechanical screwing method or the like) to a strong pressure of about 100 kg / cm 2 to 2 t / cm 2.
Press with pressure, press panel 7 to oppose a pair
While controlling the cell gap by the spacer material bonded to the substrate, to be added to 180 ℃ or more of high fever
Ri had done the adhesion between the substrates.

【0003】図2に従来スペーサー散布工程の模式図
を示す。このように、従来のスペーサー散布方法によれ
ば、表示素子駆動用回路および配線部分3やその他の部
分に関係なく、気体混合、或いは液体混合されたスペー
サー5を基板8a全面にスプレー散布9を行っていた。
[0003] schematic diagram of a conventional spacer spraying steps in FIG. 2
Is shown. Thus, according to the conventional spacer dispersing method ,
If, regardless of the display element driving circuit and the wiring portion 3 and the other portion, the gas mixture, or a liquid mixed with space <br/> Sir 5 he had done spray spraying 9 to the substrate 8a entire surface.

【0004】[0004]

【発明が解決しようとする課題】従来の液晶等の電気光
学装置のパネル製造方法を用いると、主に、次項に挙げ
た不具合点が製造過程で発生し、この為、高品質表示
で、且つ、不良率の少ない製造が不可能であった。
When the conventional method for manufacturing a panel of an electro-optical device such as a liquid crystal is used, the following problems mainly occur in the manufacturing process. However, production with a low defect rate was impossible.

【0005】(1)基板8a上に設けられた表示素子駆
動用回路および配線部分3が構成されている薄膜が、図
5の本発明の製造工程図で示す製造工程、(M)圧着硬
化、(N)液晶封入を流動の工程中に基板から剥離す
る。 (2)基板8a上に設けられた表示素子駆動用回路およ
び配線部分3が構成されている薄膜が、図5の本発明の
製造工程図で示す製造工程、(L)両基板貼り合わせ、
(M)圧着硬化、(N)液晶封入の製造工程中、スペー
サーの押圧により凹凸に変形、或いは裂けて、電気回路
の素子が断線、或いは特性を変化させて、表示装置の表
示品質に悪影響を与える。
(1) A thin film forming a display element driving circuit and a wiring portion 3 provided on a substrate 8a is formed by a manufacturing process shown in a manufacturing process diagram of the present invention in FIG. (N) The liquid crystal encapsulation is separated from the substrate during the flow process. (2) The thin film forming the display element driving circuit and the wiring portion 3 provided on the substrate 8a is manufactured by the manufacturing process shown in the manufacturing process diagram of the present invention in FIG.
During the manufacturing process of (M) pressure bonding and curing, (N) liquid crystal encapsulation, the spacers are deformed or broken into irregularities by the pressing of the spacer, and the elements of the electric circuit are disconnected or the characteristics are changed, which adversely affects the display quality of the display device. give.

【0006】[0006]

【課題を解決しようとするための手段】上記課題を解決
する為に、本発明は、以下の工程において製造方法の変
更を行った。すなわち、圧着工程において、図3に示し
た断面構造の圧着装置を用い温度100℃程度、
圧力30Kg/cm2 で貼り合わせることとした。この
ように、低温かつ低押圧力により基板の接着を行うこと
が可能になった。
In order to solve the above-mentioned problems, the present invention has changed the manufacturing method in the following steps . That is, in the crimping step, as shown in FIG.
By using the crimping device cross-sectional structure, a temperature 100 ° C. approximately, press
Lamination was performed at a pressure of 30 kg / cm 2 . this
Bonding substrates at low temperature and low pressing force
Is now possible.

【0007】また、スペーサー散布工程において、本発
明のスペーサー散布工程を模式的に示す図1の通りに、
スペーサー散布基板8a上に表示素子駆動用回路および
配線部分3をマスクするマスク板4を配置することによ
、スペーサー散布しても表示部分10のみにしか散布
されない製造法を実現した
In the spacer spraying step , as shown in FIG. 1, which schematically shows the spacer spraying step of the present invention,
By disposing a display element driving circuit and a mask plate 4 for masking the wiring portion 3 on the spacer dispersion substrate 8a .
As a result , a manufacturing method in which only the display portion 10 is sprayed even when the spacers are sprayed is realized .

【0008】[0008]

【作用】スペーサー5が、表示素子駆動用回路および配
線部分3にかからない為に、押圧力によっても前記の回
路や配線が損傷することが無い。また、エアバック1に
より被圧着パネル7を押圧する為に、押圧力は、被圧着
パネル7の上面11のみならず、側面12にも掛かるの
で、押圧力は、被圧着パネル7の全体にわたって均等に
掛かる上、窒素等の不活性ガス注入圧力13を加減調整
することにより、押圧力の精細な調整が容易に行える
為、ギャップの制御が正確に行えるとともに、表示品質
のよい表示パネルを効率よく製造することが出来る。
Since the spacer does not cover the display element driving circuit and the wiring portion, the circuit and the wiring are not damaged by the pressing force. Further, in order to press the panel 7 to be pressed by the airbag 1, the pressing force is applied not only to the upper surface 11 of the panel 7 to be pressed, but also to the side surface 12. In addition, by adjusting the injection pressure 13 of the inert gas such as nitrogen, the fine adjustment of the pressing force can be easily performed, so that the gap can be accurately controlled, and the display panel having good display quality can be efficiently produced. Can be manufactured.

【0009】[0009]

【実施例】図5は、本発明を用いた液晶表示パネルの製
造工程の全体図である。以下、製造工程を図に従って説
明する。薄膜状の電気回路を形成した転写基板および対
向基板について、それぞれを(A)受け入れ洗浄工程、
(B)配向膜塗布前処理工程、(C)配向膜塗布工程、
(D)配向膜予備ベーク、(E)配向膜本ベーク、
(F)配向膜処理工程、(G)ラビング発生塵落とし洗
浄工程迄と、対向基板に対する(J)シール材印刷、
(K)コモン材印刷の工程は、従来の製造方法と同様で
ある。従って、内容の説明は省略する。
FIG. 5 is an overall view of a manufacturing process of a liquid crystal display panel using the present invention. Hereinafter, the manufacturing process will be described with reference to the drawings. For the transfer substrate and the counter substrate on which the thin-film electric circuit is formed, (A) receiving and cleaning steps,
(B) an alignment film application pretreatment step, (C) an alignment film application step,
(D) Preliminary baking of alignment film, (E) Main baking of alignment film,
(J) printing of a sealing material on the opposing substrate, until (F) an alignment film treatment step, and (G) a cleaning step for removing rubbing generated dust
(K) The common material printing process is the same as the conventional manufacturing method. Therefore, description of the content is omitted.

【0010】本発明の製造方法の特徴は、転写基板に対
する(I)スペーサー散布工程の前処理にあたる(H)
マスク処理工程と、(L)両基板の貼り合わせ工程に続
く、(M)圧着硬化工程である。以下、本発明につい
て、図1および図3に基づいて説明する。
A feature of the manufacturing method of the present invention is (H) the pretreatment of the transfer substrate with the spacer dispersing step.
This is a (M) pressure-bonding curing step following the mask processing step and (L) the step of bonding both substrates. Hereinafter, the present invention will be described with reference to FIGS.

【0011】図3に液晶表示パネルの圧着工程に用いる
圧着装置の模式的な断面図を示す。図3において、平板
14上に設置された被圧着パネル7は、不活性ガス注入
口16から流入したガスで膨らんだエアバック1によ
り、緩衝板紙15を介して押圧される。17は圧着押圧
力とその向きを、5はスペーサー、18はシール材を示
す。ここで、図4と共通な符号については説明を省略し
ている。
FIG . 3 is a schematic cross-sectional view of a crimping device used for a crimping step of a liquid crystal display panel . In FIG.
The crimped panel 7 set on 14 is filled with an inert gas.
The airbag 1 swelled by the gas flowing from the port 16
And is pressed through the buffer paperboard 15. Reference numeral 17 denotes a pressing pressure and its direction , 5 denotes a spacer, and 18 denotes a sealing material. Here, the description of the same reference numerals as in FIG. 4 is omitted.

【0012】平板14には、転写基板8aと基板8とを
その間にスペーサー5を介在させて間隔を制御された被
圧着パネル7を収納している。上記被圧着パネル7の上
部には、緩衝材として緩衝板紙15を載せ、その上にエ
アバック1が置かれている。エアバック1上には、図示
しないプレス平板が固定して配置されている。
The flat plate 14 accommodates the pressure-bonded panel 7 having a controlled distance between the transfer substrate 8a and the substrate 8 with the spacer 5 interposed therebetween. Above the crimped panel 7, a cushioning paperboard 15 is placed as a cushioning material, and the airbag 1 is placed thereon. A press plate (not shown) is fixedly arranged on the airbag 1.

【0013】エアバック1には、不活性ガス注入口16
が設けられ、ここより不活性ガスが注入される。この注
入圧力13により、エアバック1は膨張し、この膨張圧
力は緩衝板紙15を介して被圧着パネル7を上部11か
ら押圧するとともに、エアバック1の一部はその側面1
2に廻り込み、シール材18を側面12からも押圧す
る。
The air bag 1 has an inert gas inlet 16.
Is provided, from which an inert gas is injected. The airbag 1 is inflated by the injection pressure 13, and the inflation pressure presses the panel 7 to be pressed from the upper part 11 via the buffer paperboard 15, and a part of the airbag 1 is formed on the side surface 1.
2, the sealing material 18 is also pressed from the side surface 12.

【0014】これにより、被圧着パネル7は上部11だ
けではなく、側面12からも同条件の圧力を受けるの
で、圧力がパネルの全面にわたって均一に加えることが
出来る。その上に、注入圧力13を調節すれば両基板8
a、8間に掛かる圧力を精細に調節出来るので、所定の
ギャップ制御が正確に行える。
As a result, the pressure-bonded panel 7 receives pressure under the same conditions not only from the upper portion 11 but also from the side surface 12, so that the pressure can be applied uniformly over the entire surface of the panel. On top of that, if the injection pressure 13 is adjusted,
Since the pressure applied between a and 8 can be finely adjusted, a predetermined gap control can be accurately performed.

【0015】この時、押圧力17は30kg/cm2
と、加熱温度100℃とした。シール材18には低温
硬化型の樹脂を使用した。図1は、本発明のスペーサー
5の散布工程を模式的に示す図で、3は表示素子駆動用
回路および配線、10は表示部分、9はスぺーサーが気
体または液体に混合されたスプレー霧を示す。4はマス
ク板で、基板8aの表示部分10に対応する箇所に窓明
き部分20aが形成されており、ここがスペーサーの非
遮蔽部分である。
At this time, the pressing force 17 is 30 kg / cm 2
If, the heating temperature of 100 ° C.. The sealing member 18 using a low temperature curing resin. FIG. 1 is a view schematically showing a step of spraying a spacer 5 according to the present invention. 3 is a display element driving circuit and wiring, 10 is a display portion, 9 is a spray mist in which a spacer is mixed with a gas or liquid. Is shown. Reference numeral 4 denotes a mask plate having a window portion 20a formed at a position corresponding to the display portion 10 of the substrate 8a, which is a non-shielding portion of the spacer.

【0016】図1に示すように、表示素子駆動用回路お
よび配線部分3が形成された転写基板8aの上に、上記
マスク板4を載置しスプレー霧9を散布する。この操作
により、スペーサー5は表示部分10のみに均等に散布
される。その後、マスク6を除去し、シール材18を印
刷した対向基板8を載置し、圧着押圧工程に入る。
As shown in FIG . 1 , the mask plate 4 is placed on the transfer substrate 8a on which the display element driving circuit and the wiring portion 3 are formed, and spray mist 9 is sprayed. By this operation, the spacers 5 are evenly distributed only on the display portion 10. Thereafter, the mask 6 is removed, the opposing substrate 8 on which the sealing material 18 is printed is placed, and the process enters a pressing and pressing step.

【0017】[0017]

【発明の効果】この発明は、電気光学装置、特に、透明
基板8の平板に、接着剤等の層を介して、単純マトリク
ス方式やTFTやMIM等のアクティブマトリクス方式
を構造に用いた電子回路素子層を転写密着させた構造を
持った転写基板8aを、少なくとも一方に有する液晶等
の電気光学装置のパネル製造方法に関して電気光学装置
を製造する時、製造工程中、「マスク処理」「スペーサ
ー散布」「シール材内容物の変更」「圧着硬化」の工程
変更および追加、特に、図1の本発明パネル圧着装置構
造断面図に示す圧着装置を用いた圧着硬化は、エアーバ
ッグ1は風船と同様な形状となっている為に、パネル上
面11および側面12にも均等な押圧が付加出来る為、
原理的に面内が均等に圧着出来ることから、正確なギャ
ップ出しが出来る。
The present invention relates to an electro-optical device, in particular, an electronic circuit using a simple matrix system or an active matrix system such as a TFT or MIM on a flat plate of a transparent substrate 8 through a layer of an adhesive or the like. When manufacturing an electro-optical device with respect to a method for manufacturing a panel of an electro-optical device such as a liquid crystal having at least one transfer substrate 8a having a structure in which an element layer is transferred and adhered, during the manufacturing process, “mask processing”, “spraying of spacers” are performed. The process change and addition of "change of sealing material contents" and "pressure hardening", particularly, pressure hardening using the pressure bonding device shown in the sectional view of the panel pressure bonding device structure of the present invention in FIG. Because it has a uniform shape, even pressing can be applied to the panel upper surface 11 and the side surface 12,
In principle, since the in-plane pressure can be evenly compressed, an accurate gap can be set.

【0018】また、スペーサーは、表示素子駆動用回路
および配線部分3に掛かることは無い為、駆動部への悪
影響を避けることが出来る。この為、製造工程中の電気
回路素子やそれ以外の引き回し配線の電気特性変化及び
断線が著しく低減し、不良発生率が高く、量産製造が不
可能であった電気光学装置の量産製造を可能にした。
Further, since the spacer does not cover the display element driving circuit and the wiring portion 3, it is possible to avoid adverse effects on the driving section. This significantly reduces changes in electrical characteristics and disconnection of the electric circuit elements and other lead wiring during the manufacturing process, and enables high-volume production of electro-optical devices that were not mass-producible due to a high defect rate. did.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明によるスペーサー散布工程を模式的に示
図である。
FIG. 1 schematically shows a spacer spraying step according to the present invention.
It is to figure.

【図2】従来のスペーサー散布工程図を模式的に示す
である。
FIG. 2 is a view schematically showing a conventional spacer spraying process .

【図3】本発明のパネル圧着装置の構造断面図を示した
図である。
FIG. 3 is a sectional view showing the structure of the panel crimping apparatus of the present invention.

【図4】従来のパネル圧着装置構造断面を示した図であ
る。
FIG. 4 is a view showing a cross section of the structure of a conventional panel crimping apparatus .

【図5】本発明の製造工程図を示した図である。FIG. 5 is a view showing a manufacturing process diagram of the present invention.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G02F 1/13 101 G02F 1/1333 500 G02F 1/1339 500 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G02F 1/13 101 G02F 1/1333 500 G02F 1/1339 500

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 電極構造を有した第1の基板と、前記第
1の基板と対向する対向基板を貼り合せてなる電気光学
装置の製造方法において、シール材を介して前記第1の基板と前記対向基板を対向
させてパネルを形成する工程と、 気体が注入されて膨らんだエアバッグの膨張圧力により
前記パネルを加圧するとともに、前記シール材を加熱す
ることにより、前記膨張圧力に応じたギャップで前記パ
ネルを固着する工程と、 前記ギャップに液晶を封入する工程と、 を有することを特徴とする電気光学装置の製造方法。
1. A method for manufacturing an electro-optical device, comprising: bonding a first substrate having an electrode structure to a counter substrate facing the first substrate, wherein the first substrate is connected to the first substrate via a sealant. Opposite the opposing substrate
The process of forming the panel and the inflation pressure of the inflated airbag injected with gas
Pressing the panel and heating the sealing material
By doing so, the gap is adjusted according to the inflation pressure.
A method of manufacturing an electro-optical device , comprising: a step of fixing a tunnel; and a step of enclosing liquid crystal in the gap .
JP5011209A 1993-01-26 1993-01-26 Manufacturing method of electro-optical device Expired - Lifetime JP3041559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5011209A JP3041559B2 (en) 1993-01-26 1993-01-26 Manufacturing method of electro-optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5011209A JP3041559B2 (en) 1993-01-26 1993-01-26 Manufacturing method of electro-optical device

Publications (2)

Publication Number Publication Date
JPH06222318A JPH06222318A (en) 1994-08-12
JP3041559B2 true JP3041559B2 (en) 2000-05-15

Family

ID=11771617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5011209A Expired - Lifetime JP3041559B2 (en) 1993-01-26 1993-01-26 Manufacturing method of electro-optical device

Country Status (1)

Country Link
JP (1) JP3041559B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6465268B2 (en) 1997-05-22 2002-10-15 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing an electro-optical device
JP2012198544A (en) * 2012-04-16 2012-10-18 Semiconductor Energy Lab Co Ltd Display device

Also Published As

Publication number Publication date
JPH06222318A (en) 1994-08-12

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