JP3038516B2 - Substrate for slider production - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slider provided with a magnetic head used in a magnetic disk drive, and a voice coil motor (VCM) for moving the slider to position the magnetic head with respect to the magnetic disk. The present invention relates to a slider manufacturing substrate suitable for manufacturing a slider having a second positioning means formed on a slider by using a piezoelectric material.

[0002]

2. Description of the Related Art In a magnetic disk drive, a member called a slider for supporting a magnetic head on a magnetic disk at a predetermined height (flying height) is used. Conventionally, a voice coil motor (VCM) is provided at the base of a support member that supports a slider as positioning means for positioning a magnetic head on a target track. In recent years, in order to meet the demand for higher recording density, many techniques have been proposed in which a second magnetic head positioning means is provided on a slider using a piezoelectric material in addition to the VCM.

As a technique for providing the slider with a second positioning means, for example, Japanese Patent Application Laid-Open No. 62-250570,
The ones disclosed in the respective publications of 61-199761 are known. Each of these positioning means is provided with an actuator composed of, for example, a piezoelectric element on a part of the slider. However, none of the publications mentions a method of forming a slider substrate in consideration of a process for mass-producing a magnetic head.

[0004]

When the second magnetic head positioning means is provided on the slider, the method of retrofitting the second positioning means on an ordinary slider requires a number of manufacturing steps.
In addition, the cost increases, and the yield decreases. In particular, in order to support a slider having a thin-film head as a magnetic head, it is necessary to develop a slider manufacturing method in consideration of the manufacturing process.

In the conventional manufacturing method, the thin film head is placed on a substrate surface having a thickness substantially equal to the length of the slider.
A magnetic head corresponding to a plurality of sliders is formed at a time by using a thin film forming process or the like. Thereafter, a block in which the sliders are arranged in a row is cut out from this substrate, and one slider is formed while undergoing necessary processing. Finished.

A first object of the present invention is to provide a slider manufacturing substrate suitable for manufacturing a slider provided with a so-called second positioning means, in which a conventional manufacturing method can be utilized and a slider is provided with a piezoelectric element. To provide.

It is a second object of the present invention to provide a magnetic disk slider which is provided with a second positioning means comprising a piezoelectric element and is easy to manufacture.

[0008]

To achieve the above first object, according to the Invention The first slider fabrication substrate of the present invention, as slider substrate for manufacturing a magnetic disk device, the layer of piezoelectric material and conductive Characterized in that a laminate in which layers of a conductive material are alternately laminated and a layer of a sliding material are alternately laminated.

A second slider manufacturing substrate of the present invention is a slider manufacturing substrate for a magnetic disk drive.
It is characterized by comprising a laminate in which layers of a piezoelectric material and layers of a conductive material are alternately laminated, and a layer of a sliding material formed on both sides of the laminate through a layer of an elastic material.

Further, the third slider manufacturing substrate of the present invention is a slider manufacturing substrate for a magnetic disk drive, wherein a laminated body in which piezoelectric material layers and conductive material layers are alternately stacked, and a sliding material. Are alternately laminated with a layer of an elastic material.

A second object of the present invention is that the laminated surface of the piezoelectric material layer and the conductive material layer is formed on any one of the first to third slider manufacturing substrates according to the present invention so that the sliding surface of the slider is equal to the sliding surface of the slider. This is achieved by a magnetic disk drive slider that is machined so as to be perpendicular and parallel to the sliding direction of the slider.

[0012]

In order to manufacture a slider used for a magnetic disk drive from each slider manufacturing substrate of the present invention, first, the laminated surface of the piezoelectric material layer and the conductive material layer is perpendicular to the slider sliding surface and Processing is performed so as to be parallel to the sliding direction (longitudinal direction) of the slider. By setting the direction of the lamination surface in this way, the laminate composed of the layer of the piezoelectric material and the layer of the conductive material serves as an actuator for displacing the magnetic head formed on the slider in the positioning direction (the width direction of the slider). It is possible to work. Also, it processed as a layer of sliding material constituting the running surface of the slider (rail surface), thereby increasing the sliding resistance of the slider.

Further, by using the second or third slider manufacturing substrate of the present invention, when the laminate composed of the piezoelectric material layer and the conductive material layer is deformed by acting as an actuator, The layer of the elastic material interposed between the layer and the layer of the sliding material absorbs the stress generated by the deformation, thereby preventing the bond between the laminate and the layer of the sliding material from being broken.

Further, each of the slider manufacturing substrates of the present invention has a suitably large area, and a magnetic head corresponding to a plurality of sliders at a time by using a thin film forming process or the like on the substrate surface. This is almost the same as the conventional thin-film head manufacturing process, and enables mass production and cost reduction of a magnetic head or a slider. Also, when a bulk type magnetic head, for example, a composite type head is incorporated, processing can be performed in block units in which the sliders are arranged in a row like a normal slider, and mass production and cost reduction can be achieved. Will be possible.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Before describing an embodiment of the present invention, an outline of a magnetic disk drive will be described. FIG. 9 shows a general magnetic disk drive. The magnetic disk drive includes a spindle 102 on which a plurality of disks 101 are mounted.
And a motor 103 for rotating this, a disk 101
A slider 104 provided with a magnetic head for recording / reproducing data on / from the disk 101;
It comprises a support member 105 for supporting the slider 104 and a voice coil motor (VCM) 106 as moving means for moving the support member 105.

Usually, the support member 105, that is, all the sliders 104 are simultaneously moved by the driving means 106 based on the position information reproduced from any one of the magnetic heads provided on the plurality of sliders 104. As a result, one magnetic head for recording / reproducing data is positioned at a target track (radial position of a disk on which data is recorded).

In the slider in which the layer of the piezoelectric material and the layer of the conductive material are laminated as in the present invention, the magnetic head provided on the slider is further displaced with respect to the support point at which the support member 105 supports the slider 104. Can be. The displacement direction is a direction for increasing or decreasing the amount of movement by the VCM. Therefore, a magnetic disk drive equipped with a slider as in the present invention has two positioning means of a VCM and a displacement means (actuator) comprising a layer of a piezoelectric material and a layer of a conductive material constituting the slider.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view showing a slider manufacturing substrate according to a first embodiment of the present invention, and FIG. 2 is a substrate according to the first embodiment, which is a piezoelectric material.
And conductive material are alternately laminated and sandwiched between sliding materials
FIG. 3 is a partial view showing an embodiment, and FIG.
A laminate in which materials and conductive materials are alternately laminated is sandwiched between dummy materials.
And FIG. 4 and FIG.
Processes the slider from the slider manufacturing substrate of the first embodiment.
FIG. 4 is a conceptual diagram showing a method for performing the operation.

[0019] The slider for producing substrate of the present invention, those massive shown as the substrate base material 8 of the cuboid 1, and the substrate 8a which is cut out from the substrate base material 8, a plate shape as shown as 8b Shall mean. First
Examples of the substrate base material 8 and the substrate 8a, 8b is formed by laminating a third material 9 on both sides of a laminate formed by laminating a piezoelectric material 2 and the conductive material 3 alternately as shown in FIG. 2 It indicates that it was done. Here, the third material 9 is used for the portion corresponding to the slider rail in consideration of the sliding resistance of the slider sliding surface.

The slider manufacturing substrate of the second embodiment is
Only a lamination form is slightly different from that of the first embodiment. As shown in FIG. 3 , a third material 9 is sandwiched between both surfaces of a laminate of a piezoelectric material 2 and a conductive material 3 with a dummy material 10 therebetween. It is a laminate. Here, the dummy material 10 is for absorbing the deformation of the piezoelectric material 2 and the conductive material 3 and preventing the joint between the third material 9 and the third material 9 from being broken.

The substrate 8a is cut in a direction perpendicular to the lamination surface, and the substrate 8b is cut in a direction parallel to the lamination surface. The thickness T8a of the substrate 8a adopts a processing method as shown in FIG. 4 and is preferably about the length of the slider. On the other hand, the thickness T8b of the substrate 8b is
In order to adopt a processing method as shown in FIG. 5, it is preferable that the width is about the width of the slider. Note that the substrates 8a and 8b do not necessarily need to be cut out from the substrate base material 8, and may be formed so that the thickness becomes T8a and T8b from the beginning. Further, the substrate surface α of the substrate 8a or the substrate surface β of the substrate 8b does not necessarily have to be square, but may be circular.

Here, the lamination method will be described. The lamination of the piezoelectric material 2, the conductive material 3, and the third material 9 is as follows.
A laminate of the piezoelectric material 2 and the conductive material 3 is formed, and a third
May be laminated, or the piezoelectric material 2, the conductive material 3, and the third material 9 may be laminated in an appropriate order, and the respective layers may be joined. The former simple method is, for example, bonding using an epoxy adhesive. As the latter,
There is a method of sintering each material. Next, a method of processing the slider from the slider manufacturing material of the first or second embodiment will be described.

FIG. 4 is a conceptual view of one method for processing a slider from a substrate 8a (cut out of the substrate base material 8 in a direction perpendicular to the lamination surface). On the plate surface α of the substrate 8a, a number of magnetic heads 4 corresponding to a plurality of sliders are aligned vertically and horizontally and formed by a thin film forming process. Next, the substrate 8a
Is cut out from the block 5 in a state where the sliders are arranged in a row. In the block 5, the slider rail surface 7 and the like are processed, and thereafter, the slider is cut into a single piece of the slider and finished as the slider 6. At this time, the slider rail surface 7 is formed in a portion where the third member 9 is provided.

FIG. 4 shows a slider in which a thin film head is provided as a magnetic head. However, a groove may be formed at a position where the thin film head is formed, and a composite type magnetic head may be incorporated.

FIG. 5 is a conceptual view of one method of processing a slider from a substrate 8b (cut out of the substrate base material 8 in a direction parallel to the lamination surface). On the plate surface β of the substrate 8b, a number of magnetic heads 4 corresponding to a plurality of sliders are vertically and horizontally aligned and formed using a thin film forming process. Here, in order for the magnetic head 4 to be able to displace the magnetic head in the direction of accessing the data track by the actuator formed on the slider, the magnetic head 4 must be a type of slider formed on the side surface of the slider. Even with this type of slider, a composite type magnetic head can be incorporated at the location where the thin film head is formed.

As described above, the substrates 8a and 8b are piezoelectric elements
Since the actuator includes the actuator consisting of
Do not change the processing process of the lida
In addition, a magnetic head and a slider can be manufactured.

The substrate of the first embodiment, since it has a sliding material to other piezoelectric materials and conductive materials are advantageous in terms of anti-sliding performance of the slider, further second embodiment Since the substrate has a sliding material and a dummy material in addition to the piezoelectric material and the conductive material, it is advantageous in that the joint between the actuator portion made of the piezoelectric material and the conductive material and the third material is prevented from being broken. It is.

FIG. 6 is a diagram showing an example of a slider completed as a component of a magnetic disk drive using the slider processed from the substrate 8a of the first embodiment. The slider rail is made of a third material 9 suitable for the slider material. In FIG. 6 , the slider body 6 is formed by laminating the piezoelectric material 2 and the conductive material 3, and the lamination surface is substantially perpendicular to the sliding surface 7 and the outflow end surface (right end surface in the figure) of the slider 6. The magnetic head 4 is formed on the outflow end face via an electrically insulating member 13 (for example, an aluminum oxide film). External electrodes 11 are provided on the upper surface of the slider 6.
a and 11b are provided. The external electrodes 11a and 11b are formed so as to be electrically short-circuited every other one so as to select different layers of the conductive material 3 from among the stacked conductive materials 3. Also, the external electrodes 11a, 11b
The conductive material 3 on the slider rail surface (sliding surface) portion is formed avoiding this portion so as not to be short-circuited, and a groove 12 is provided between the external electrode 11b and the outflow end surface. Groove 12
Is provided in the area of the conductive material 3 where the external electrodes 11a and 11b are short-circuited, and has a groove portion reaching the outflow end face while avoiding the magnetic head 4. The groove 12 is not necessarily a T-shape as shown in FIG. 6, for example, may be a groove 15 leading to the front of the slider rail portion opposite from one slider side as shown in FIG.

FIG . 7 is a view showing a slider of a component completed by using the substrate of the second embodiment.
A dummy material 10 is used between a slider rail portion made of a sliding material and a laminated portion 14 made of a piezoelectric material 2 and a conductive material 3. In the case of the component shown in FIG. 6 , a slider material conventionally used can be used for a portion corresponding to the sliding surface, and thus it is advantageous in terms of resistance to sliding with the disk. In addition, in the component shown in FIG. 7 , the dummy material 10 has an effect of absorbing the stress generated by the deformation of the laminated portion of the piezoelectric material 2 and the conductive material 3 and preventing the joint with the third material from being broken.

In the slider shown in FIGS. 6 to 8 , the laminated portion of the piezoelectric material 2 and the conductive material 3 at the portion where the external electrodes 11a and 11b are provided constitutes an actuator. That is, when a potential difference is applied between the external electrodes 11a and 11b,
An electric field corresponding to this potential difference is applied to each layer of the piezoelectric material 2, and the laminated portion of the piezoelectric material 2 and the conductive material 3 is deformed by the electrostriction effect. At this time, the groove 12 or the groove 15 prevents a potential difference from being applied between the adjacent conductive material 3 between the outflow end of the slider 6 and the external electrode 11b. Therefore, the magnetic head 4 formed of the thin film is not broken by the deformation of the laminated portion. In particular, the groove extending to the outflow end perpendicular to the external electrode 11b of the groove 12 is formed between the outflow end and the external electrode 11b.
The portion which does not deform between b has a function of preventing the deformation of the laminated portion from being hindered.

The deformation of the laminated portion composed of the piezoelectric material 2 and the conductive material 3 is achieved by the two magnetic heads 4 formed on the slider 6.
The magnetic head 4 is displaced with respect to the support point of the slider 6 by utilizing this change. That is, an actuator is formed.

[0032]

According to the present invention, the slider manufacturing substrate is formed by alternately laminating the piezoelectric material layer and the conductive material layer. A slider provided with means for positioning the magnetic head with the element, so-called second positioning means, can be easily manufactured. That is, this slider is manufactured by setting the laminated surface of the layer of the piezoelectric material and the layer of the conductive material so as to be perpendicular to the sliding surface of the slider and parallel to the sliding direction (longitudinal direction) of the slider. The magnetic head provided on the slider is positioned in the direction in which the laminated body composed of the piezoelectric material layer and the conductive material layer is positioned (in the width direction of the slider).
To act as an actuator for displacing the actuator . Also, it is possible to increase the sliding resistance of the slider because the layer of sliding material constituting the running surface of the slider (rail surface).

In the case where the second or third slider manufacturing substrate of the present invention is used, when the laminate is deformed by acting as an actuator, the layer of the elastic material absorbs the stress generated by the deformation, and Breakage of the bond between the laminate and the layer of the sliding material can be prevented.

Further, each of the slider manufacturing substrates according to the present invention has a suitably large area, and is equivalent to a plurality of sliders at once by using a conventional thin film forming process on the substrate surface. Therefore, it is possible to mass-produce and reduce the cost of a slider having a piezoelectric actuator, as compared with a conventional system in which a piezoelectric actuator is incorporated in each slider. Also, when a bulk type magnetic head, for example, a composite type head is incorporated, processing can be performed in block units in which the sliders are arranged in a row like a normal slider, and mass production and cost reduction can be achieved. Will be possible.

[Brief description of the drawings]

FIG. 1 is a view showing a slider manufacturing substrate according to a first embodiment of the present invention.

FIG. 2 shows a substrate according to the first embodiment, which includes a piezoelectric material and a conductive material .
It is a partial view showing the lamination form of a sliding material .

FIG. 3 shows a substrate according to a second embodiment, in which a piezoelectric material and a conductive material are used.
It is a partial view showing the lamination form of a sliding material and a dummy material .

FIG. 4 is a conceptual diagram showing one method of processing a slider from the substrates of the first and second embodiments.

FIG. 5 is a conceptual diagram showing one method of processing a slider from another substrate according to the first and second embodiments.

FIG. 6 is a diagram showing a slider (component) manufactured from the slider manufacturing substrate of the first embodiment.

FIG. 7 is a view showing a slider (component) manufactured from the slider manufacturing substrate of the second embodiment.

FIG. 8 is a diagram showing an example of groove processing in a slider (component).

FIG. 9 is a configuration diagram of a magnetic disk drive.

[Explanation of symbols]

 Reference Signs List 2 piezoelectric material 3 conductive material 4 magnetic head 5 slider block 6 slider 7 slider rail surface 8 base material substrate 8b, 8b substrate 9 third member 10 dummy material 11a, 11b external electrode 12 groove 13 insulating member 14 piezoelectric material and conductive Laminated part of conductive material 15 groove

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kimishi Takano 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo Inside Central Research Laboratory, Hitachi, Ltd. Company Moka Plant (72) Inventor Kazumi Noguchi 5200 Sankajiri, Kumagaya-shi, Saitama Hitachi Metals Co., Ltd. (72) Inventor Junichi Watanabe 5200 Sankajiri, Kumagaya-shi, Saitama Hitachi Metals, Ltd. Magnetic Materials Research Laboratory (56) References JP-A-4-17143 (JP, A) JP-A-63-157381 (JP, A) JP-A-62-250570 (JP, A) JP-A-3-245315 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G11B 21/21 101 G11B 21/10

Claims (4)

(57) [Claims] 1. A substrate for manufacturing a slider for a magnetic disk drive, wherein a laminated body in which layers of piezoelectric material and layers of conductive material are alternately laminated, and a layer of sliding material are alternately laminated. To manufacture sliders. 2. A substrate for manufacturing a slider for a magnetic disk drive, comprising a laminate in which piezoelectric material layers and conductive material layers are alternately laminated, and formed on both sides of the laminate with an elastic material layer interposed therebetween. A slider manufacturing substrate, comprising: a layer of a sliding material. 3. As a slider manufacturing substrate for a magnetic disk drive, a laminated body in which layers of piezoelectric material and layers of conductive material are alternately laminated, and a layer of sliding material are alternately arranged via an elastic material layer. A substrate for manufacturing a slider, wherein the substrate is laminated on the substrate. 4. from the slider fabrication substrate according to any one of claims 1 to 3, the sliding direction of the running surface perpendicular a and slider lamination surface of the layer of the layer and the conductive material of the slider of the piezoelectric material A slider for a magnetic disk drive, which is processed so as to be parallel.