JP3034718B2 - Optical displacement detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical displacement detecting device for detecting a displacement of an object in a non-contact manner, and more particularly to an optical position detecting type optical displacement detecting device using, for example, an optical position detecting element as a light receiving element. Things.

[0002]

2. Description of the Related Art In recent years, in order to detect the rotation angle of an object with high durability and reliability, the rotation angle of the object is detected while electrically contacting the object using a variable resistor. Instead of an angle detector, radiate from the measured object,
Alternatively, a non-contact type in which light reflected and transmitted by an object to be measured is received by an optical position detecting element having a resistive layer and the rotation angle of the object to be measured is detected in accordance with the light receiving position of the optical position detecting element. An optical displacement detection device is used. As such an optical displacement detecting device, for example, those shown in FIGS. 12, 13 and 14 have been proposed. 12 and 13 are a configuration diagram and a sectional view showing an optical position detecting element of a conventional optical displacement detecting device disclosed in Japanese Patent Application Laid-Open No. 61-246620, and FIG.
FIG. 14B is a configuration diagram of an optical system of a conventional optical displacement detection device disclosed in JP-A-124821, and FIG.
FIG. 2 is a top view of the optical system of the conventional optical displacement detection device shown in FIG.

First, referring to FIG.
A conventional optical displacement detection device disclosed in Japanese Patent No. 6620 will be described. In the drawing, reference numeral 1 denotes a rotating shaft connected to a rotating object (not shown) as a measured object, 2 denotes a rotating slit plate which is inserted through and attached to the rotating shaft 1, and rotates with the rotating shaft 1 as a rotating shaft, 2a
Is a helical slit formed in a spiral shape on the rotary slit plate 2, the radius of which changes according to the rotation of the rotary slit plate 2, 3 is a light source, 4 is within the optical axis of the light source 3, and fixed slit plate disposed parallel to each other and the slit plate 2, 4a are formed fixed slits so as to intersect with the helical slit 2a formed in the stationary slit plate 4 twice rolling slit plate 2, 5 denotes a light source 3 Is received from the helical slit 2a of the rotary slit plate 2 and the fixed slit 4a of the fixed slit plate 4 so that the light receiving axis is arranged in the radial direction of the rotary slit plate 2. The detected light position detecting elements 6, 6 and 8 are detection electrodes for outputting a detection current of the light position detecting element 5, and 7 is for supplying a bias voltage from a power supply circuit (not shown) to the light position detecting element 5. Bias is a voltage application electrode.

Next, the configuration of the detection circuit 8A will be described. 9 is connected to the detection electrode of the light position detection element 5;
The input terminal to which the detection current I1 from the optical position detection element 5 is supplied. This input terminal 9 is connected to the inverting input terminal (-) of the operational amplifier circuit 13 via the resistor R1 of the current / voltage conversion circuit 12. At the same time, it is connected to one end of the resistor R3 of the adder circuit 14 via the resistors R1 and R2. The inverting input terminal (-) of the operational amplifier circuit 13 of the current / voltage conversion circuit 12 is connected to its output terminal via a resistor R2, and the non-inverting input terminal (+) of the operational amplifier circuit 13 is grounded. I have. Reference numeral 10 denotes a bias / voltage application electrode of the light position detection element 5 which is connected to the bias / voltage application electrode of the light position detection element 5.
This is an input terminal for setting a ground potential.
That is, the current / voltage conversion circuit 12 converts the detection current I1 from the optical position detection element 5 into the voltage V1.

[0005] The other end of the resistor R3 of the adder circuit 14 is connected to one end of a resistor R6 of a comparison and integration circuit 16 via a resistor R5, and to the inverting input terminal (-) of the operational amplifier circuit 15. The inverting input terminal (-) is connected to the output terminal via a resistor R5.
Is connected to the output terminal of the operational amplifier circuit 20 of the current-voltage conversion circuit 19 described later, and the non-inverting input terminal (+) of the operational amplifier circuit 15 is grounded. The other end of the resistor R6 of the comparison and integration circuit 16 is connected to an input terminal of a light emitting circuit 24 to be described later via a capacitor C1 and to an inverting input terminal (-) of an operation amplification circuit 17, and this operation amplification circuit The non-inverting input terminal (+) of 17 is grounded via the reference power supply 18. That is, the comparison and integration circuit 16 compares the voltage supplied to the inverting input terminal (-) with the voltage supplied to the non-inverting input terminal (+), and controls the light emitting circuit 24 based on the result. The light emitting circuit 24 drives the light source 3 via the control terminal 25.

Reference numeral 11 denotes a detecting electrode 8 of the light position detecting element 5.
And an input terminal to which a detection current I2 from the optical position detection element 5 is supplied. This input terminal 11 is an inverting input terminal (−) of the operational amplifier circuit 20 via the resistor R7 of the current / voltage conversion circuit 12. ) And connected to one end of a resistor R9 of the amplifier circuit 21 via the resistors R7 and R8. The operational amplifier circuit 20 of the current / voltage conversion circuit 19
Is connected to its output terminal via a resistor R8, and the non-inverting input terminal (+) of the operational amplifier circuit 20 is grounded. That is, the current / voltage conversion circuit 19 converts the detection current I2 from the optical position detection element 5 into the voltage V2.

[0007] The other end of the resistor R9 of the amplifying circuit 21 is connected to the resistor R10 output terminal 23 for displacement detection output V _theta via the inverting input terminal of the operational amplifier 22 - is connected to the () The non-inverting input terminal (+) of the operational amplifier circuit 15 is grounded. Next, the configuration of the light position detecting element 5 shown in FIG. 12 will be described in more detail with reference to FIG. As shown in this figure, the light position detecting element 5 has a photoelectric conversion layer 5a sandwiched between a transparent resistance layer 5b and a bias voltage application electrode 7, and detection electrodes 6 are provided at both ends of the transparent resistance layer 5b.
And 8 are provided. Also,
From these detection electrodes 6 and 8, leads 5c and 5
d is connected, the lead 5e is connected to the bias voltage applying electrode 10, and a predetermined bias voltage (here, a case of grounding is supplied) via the output terminal 10 of the detection circuit 8 shown in FIG. .

Next, the operation will be described. Light emitting circuit 24
When the light is emitted from the light source 3 in the direction of the rotary slit plate 2 by the driving of the light source, the emitted light is projected to the projection range on the rotary slit plate 2, and the rotary slit plate 2
The light passing through the intersection of the spiral slit 2a and the fixed slit 4a of the fixed slit plate 4 is only the light position detecting element 5.
Incident on the light receiving surface of. When the light beam enters the light receiving surface of the light position detecting element 5, the incident light beam passes through the transparent resistance layer 5b, is photoelectrically converted by the photoelectric conversion layer 5a, and its detection currents I1 and I1 are detected.
2 flows through the transparent resistance layer 5b toward the detection electrodes 6 and 8 at both ends thereof. At this time, since the magnitudes of the detection currents I and I2 differ depending on the distances to the detection electrodes 6 and 8,
The light receiving position X from the detection electrode 6 is determined by the detection currents I1 and I2.
Can be expressed as follows.

X = L × I2 / (I1 + I2) (1)

In the above equation (1), L is the light receiving length of the light position detecting element 5. Therefore, in the detection circuit 8A of FIG. 12, the detection currents I1 and I2 are converted into voltages V1 and V2 by the current / voltage conversion circuits 12 and 19, respectively, and the addition circuit 14 obtains an addition output (V1 + V2). (V1 + V2) becomes a predetermined value by controlling the light emission intensity of the light source 3 via the light emitting circuit 24 by the comparing and integrating circuit 16 and applying the voltage V2 corresponding to one current I2 to the amplifying circuit 21.
In by outputting over a predetermined gain corresponds to the light receiving position X of the light position detecting element 5, to obtain a rotation angle output V _theta corresponding to the rotation angle of the rotary slit plate 2 theta. That is,
When the rotary slit plate 2 rotates together with the rotary shaft 1, the crossing range of the spiral slit 2a of the rotary slit plate 2 and the fixed slit 4a of the fixed slit plate 4 sequentially moves in the radial direction of the rotary slit plate 2, and the light position detecting element The light receiving position on the moving slit 5 moves in the radial direction of the rotating slit plate 2 and changes according to the rotation angle of the rotating slit plate 2.
The light receiving position is determined by detecting electrodes 6 and 8 of light position detecting element 5.
The detection circuit 8 shown in FIG.
By detecting at A, the rotation angle of the rotating shaft 1 can be detected. Therefore, the rotation angle of the object to be measured to which the rotation shaft 1 is connected can be detected.

Next, referring to FIG.
A conventional optical displacement detection device disclosed in Japanese Patent No. 4821 will be described. In FIG. 14, portions corresponding to those in FIGS. 12 and 13 are denoted by the same reference numerals, and detailed description thereof will be omitted. In the drawing, reference numeral 30 denotes a case having a cylindrical shape as shown in FIG. 14A, 31 denotes a rotating bearing for supporting the rotating shaft 1, and 32 denotes a case 9
And an annular element support board 33 attached to the inside of the case 3 and on the side of the rotating bearing 31 of the case 3. An element support board 33 is provided inside the case 30 and on an annular element support board 32 attached to the inside of the case 30. An annular light position detecting element attached similarly to the substrate 32. 34 is attached to the hole of the case 30 so that the light emission direction is directed to the inside of the case 30 so that the rotation axis 1 and the optical axis coincide with each other.
Is a rotating slit member for causing light from the light to enter the light position detecting element 33. The rotating slit member 34 is formed of a light transmitting body 34a having a light reflecting layer 34d formed therein.
The light transmitting body 34a includes a light source side slit 34b and a light source side slit 3b for allowing light from the light source 3 to pass therethrough.
4b to reflect the light incident from the first reflection surface 34b
c, a second reflecting surface 34e for reflecting the light reflected on the first reflecting surface 34c, and a light receiving side slit 34f for allowing the light reflected on the second reflecting surface 34e to enter the light position detecting element 33. Have been.

Next, the operation will be described. When light is emitted from the light source 3, a part of the emitted light enters the light transmitting body 34a from the light source side slit 34b of the rotary slit member 34. This light is reflected by the first reflecting surface 34 formed inside the light transmitting body 34a as shown by the solid arrow in FIG. 14A.
c, the light is reflected by the light reflecting layer 34d, passes through the light transmitting body 34a, reaches the second reflecting surface 34e, and is reflected by the second reflecting surface 34e.
e, reflected by the light reflecting layer, and further transmitted through the light transmitting body 34a, and then the light position detecting element 33
Incident on the light receiving surface of. In this case, the rotating slit member 34
The light projection range (spot) 35 on the light position detection element 33 changes with the rotation of the light position detection element 33.
The rotation angle of the rotating shaft 1 is determined by detecting the above light receiving position by detecting the output current ratio of the output current from the output terminals 6 and 8 connected to the detection electrodes of the light position detection element 33 by a detection system (not shown). Can be detected. Therefore, the rotation angle of the object to be measured to which the rotation shaft 1 is connected can be detected.

[0013]

Since the conventional optical displacement detecting device is configured as described above, the optical displacement detecting device described with reference to FIGS.
Since the change in the rotation angle is detected on a one-to-one basis with respect to the change in the slit position at the light receiving position in the radial direction of the optical position detecting element 5, the spiral slit 2a and the fixed slit 4a
In order to improve the detection accuracy without reducing the size, the detection distance has to be extended in the radial direction, the diameter of the device becomes large, and a predetermined spot diameter is obtained from the light source 3 through a slit. Therefore, it is necessary to increase the light emission amount of the light source 3, and there is a problem that the life of the light source 3 is shortened accordingly.

In the optical displacement detecting device described with reference to FIG. 14, the diameter of the spot on the light receiving surface of the light position detecting element 33 is determined by the presence of obliquely transmitted light transmitted through the light receiving side slit 34f. Since the diameter of the light projection range (spot) 35 shown in 14b is larger than the diameter of the light receiving side slit 34f, the light receiving length of the light position detecting element 33 cannot be effectively used, and the detection angle range is narrow. In addition, it is not suitable for measurement when the detection angle range is close to 2π, and the light source 3 is arranged coaxially with the rotating shaft 1, so that a dual-axis configuration cannot be adopted. .

The present invention has been made in order to solve such a problem, and it is possible to detect the displacement of the object to be measured with high accuracy regardless of the size of the angle detection range, and to easily realize biaxial conversion. It is an object of the present invention to obtain an optical displacement detection device which is small in size and can extend the life of the light source.

[0016]

According to a first aspect of the present invention, there is provided an optical displacement detecting device which is attached to or a part of an object to be measured, and which is attached to the rotating shaft and integrally rotates. And a rotating plate whose side peripheral portion is an optical diffusion surface,
A light source for irradiating the optical diffusion surface of the rotary plate with light; a condensing optical system for condensing light reflected from the optical diffusion surface of the rotary plate; and a light condensing optical system disposed substantially at a condensing position. The rotating plate is formed such that the distance between the condensing optical system and the light reflecting position of the side peripheral portion differs according to the rotation angle of the rotating shaft, The displacement of the object to be measured is detected based on the light incident position on the detection element based on the principle of triangulation .

According to a second aspect of the present invention, there is provided an optical displacement detecting device which is attached to or a part of a body to be measured, and which is attached to the rotating shaft and rotates integrally therewith. A rotating plate having an optical diffusing surface, a light source that irradiates the optical diffusing surface of the rotating plate with light, and a condensing optical system that collects light reflected from the optical diffusing surface of the rotating plate,
A light position detecting element disposed substantially at a light condensing position of the light condensing optical system, wherein the rotating plate is arranged such that a distance between the light condensing optical system and the light reflection position of the side peripheral portion is a rotation angle of the rotating shaft. The relationship between the rotation angle of the rotation shaft and the radius of the rotation plate is determined according to the rotation angle of the measured object, and based on the light incident position on the light position detection element. In addition, the displacement of the object to be measured is detected.

According to a third aspect of the present invention, there is provided an optical displacement detecting device, wherein the reciprocating shaft is attached to or is a part of the object to be measured, and the reciprocating shaft is attached to the reciprocating shaft so as to move integrally therewith. A reciprocating plate having an optical diffusing surface, a light source for irradiating the optical diffusing surface of the reciprocating plate with light, and a condensing optical system for condensing light reflected from the optical diffusing surface of the reciprocating plate,
A light position detecting element arranged at a substantially light condensing position of the light condensing optical system, wherein a distance between the light condensing optical system and the light reflection position of the side portion is determined by a stroke of the reciprocating shaft. It is formed differently, and detects the displacement of the object to be measured based on the principle of triangulation based on the light incident position on the light position detecting element.

According to a fourth aspect of the present invention, there is provided an optical displacement detecting device, wherein the reciprocating shaft is attached to or is a part of the object to be measured, and the reciprocating shaft is attached to the reciprocating shaft so as to move integrally therewith. A reciprocating plate having an optical diffusing surface, a light source for irradiating the optical diffusing surface of the reciprocating plate with light, and a condensing optical system for condensing light reflected from the optical diffusing surface of the reciprocating plate,
A light position detecting element arranged at a substantially light condensing position of the light condensing optical system, wherein a distance between the light condensing optical system and the light reflection position of the side portion is determined by a stroke of the reciprocating shaft. The relationship between the stroke displacement of the reciprocating shaft and the side of the reciprocating plate is determined in accordance with the stroke of the object to be measured, and based on the light incident position on the light position detecting element, The displacement of the object to be measured is detected.

[0020]

According to the first aspect of the present invention, the light incident position on the light position detecting element arranged at a substantially condensing position of the condensing optical system for condensing the reflected light from the optical diffusion surface of the rotary plate is determined by: The rotation angle of the measured object is detected based on the principle of triangulation . This ensures that can accurately detect the rotation angle regardless of the magnitude of the angle detection range, easy both axes configuration and compact, the light source can be obtained a device lifetime.

According to the second aspect of the present invention, the relationship between the rotation angle of the rotating shaft and the radius of the rotating plate is determined based on the principle of triangulation to obtain a linear output according to the rotation angle of the object to be measured. The radius change of the rotating plate is determined so as to be able to be performed. This allows
It is possible to accurately detect the rotation angle regardless of the size of the angle detection range, and to obtain a device that is easy to configure with two axes, is small, inexpensive, and has a long light source life.

According to the third aspect of the present invention, the reflected light from the optically diffusing surface of the reciprocating plate formed so that the distance from the reciprocating center of the reciprocating plate to the side portion varies depending on the stroke of the reciprocating shaft. The light is condensed by a system, and the stroke displacement of the object to be measured is detected based on the principle of triangulation based on the light incident position on a light position detecting element arranged at a substantially light condensing position of the light condensing optical system. Thus, it is possible to accurately detect the stroke displacement regardless of the size of the stroke detection range, and it is possible to obtain a device that is easy to configure with two axes, is small, and has a long light source life.

According to the fourth aspect of the invention, the relationship between the stroke displacement of the reciprocating shaft and the side of the reciprocating plate is determined based on the principle of triangulation by linear output according to the stroke of the object to be measured. The side change of the reciprocating plate is determined so as to obtain. Accordingly, it is possible to accurately detect the stroke displacement regardless of the size of the stroke detection range, and to obtain a device in which the two-axis configuration is easy, small, inexpensive, and the light source has a long life.

[0024]

【Example】

Embodiment 1 FIG. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing an optical system of an optical displacement detection device according to one embodiment of the present invention.
4 are denoted by the same reference numerals, and detailed description thereof is omitted. In the figure, a rotating bearing 31 is attached to both ends of a case 30 and the two rotating bearings 31
And a double shaft configuration. Reference numeral 40 denotes a rotary plate whose outer peripheral surface (side peripheral portion) has an optical diffusion surface.
0 is fixed to the rotating shaft 1 so as to rotate in conjunction with the rotating shaft 1.

Reference numeral 41 denotes an element supporting substrate; 42, an aperture member;
Reference numeral 3 denotes a collimator lens, reference numeral 44 denotes a support member, and reference numeral 45 denotes a condenser lens for condensing light reflected from the optical diffusion surface of the rotary plate 40 on the optical position detection element 5. As shown in FIG. A light source 3 such as an LED is attached to the element support substrate 45 so that the light emission direction is the direction of the rotation axis 1, and the diaphragm member 42 is attached to the optical axis with the light source 3. The collimator lens 43 is supported by the support member 42 and the support member 44 is fixed.
Is fitted to the outer peripheral surface of the light position detecting element 5 and is fixed, and the condenser lens 45 is supported by the support member 44. Regardless of the size of the rotation angle detection range, the rotation angle of the object to be measured can be detected with high accuracy, and the optical system can be formed compactly on one side in the case 30. In addition, the size of the device can be reduced.

Here, the cost can be reduced if the collimator lens 43 and the condenser lens 45 are made of a plastic molded product made of an optical plastic such as polymethyl methacrylate (PMMA) or polycarbonate (PC). . Next, the operation will be described. In FIG. 1B, the light emitted from the light source 3 passes through the collimator lens 43 and the diaphragm 42, becomes a parallel light beam having a predetermined diameter, enters the outer peripheral surface of the rotating plate 40, and is reflected by the optical diffusion surface on this outer peripheral surface. You. The reflected light is focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Here, when the rotating shaft 1 rotates, the focused spot light moves on the light position detecting element 5. Therefore, the light incident position of the light position detecting element 5 is the rotating plate 40, that is,
The rotation angle becomes equal to the rotation angle of the rotation shaft 1, and detection currents I1 and I2 are obtained from the detection electrodes of the optical position detection element 5 in the same manner as in the conventional device described with reference to FIGS. If I2 is detected by a detection circuit similar to that of the conventional device, a rotation angle _Vθ corresponding to the light incident position X can be obtained.

This example is based on the principle of triangulation and, by increasing the rate of change of the distance between the reflecting surface and the light receiving section, the entire light receiving surface can be effectively detected. And the maximum detection angle range can be set to approximately 2π, and even a small-diameter light-receiving surface light-detecting element can be detected with high accuracy, so that the device can be made small and small. , A double shaft configuration. In addition, since the light source 3 directly irradiates the light source diffusion surface without interposing a slit, the light emission amount can be reduced accordingly and the life can be extended.

Embodiment 2 FIG. In the above embodiment, the light source 3
From the case 30 is radiated to the optical diffusion surface of the rotary plate 40 via the aperture member 42 and the collimator lens 43. However, as shown in FIG.
Alternatively, a prism 47 having a 45-degree reflecting surface with respect to the optical diffusion surface of the rotating plate 40 may be supported and fixed. In this case, the light from the light source 3 transmitted through the collimator lens 43 and the aperture member 42 is deflected by 90 degrees by the prism 47,
The polarized light of the rotating plate 40 is irradiated with the deflected light, and the light reflected by the optical diffusing surface of the rotating plate 40 is again deflected by 90 degrees by the prism 47, and the deflected light is condensed by the condenser lens 45.
As a result, the light is incident on the light receiving surface of the light position detecting element 5. Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended. Further, if a reflecting mirror is formed by depositing a metal such as Al on the reflecting surface, the reflectance can be improved.

Embodiment 3 FIG. Further, as shown in FIG. 2B, a planar reflecting mirror 48 at an angle of 45 degrees with respect to the optical diffusion surface of the rotating plate 40 may be supported and fixed to the case 30. In this case, the light from the light source 3 that has passed through the collimator lens 43 and the aperture member 42 is deflected by 90 degrees by the plane reflector 48, and the deflected light is applied to the optical diffusion surface of the rotating plate 40, and the optical diffusion of the rotating plate 40 is performed. The light reflected by the surface is again deflected by 90 degrees by the plane reflector 48, and the deflected light is incident on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended.

Embodiment 4 FIG. Further, as shown in FIG. 2C, a mirror surface 30a at an angle of 45 degrees with respect to the optical diffusion surface of the rotating plate 40 may be formed on the surface of the case 30 by plating, vapor deposition, or the like. In this case, the light from the light source 3 that has passed through the collimator lens 43 and the aperture member 42 is deflected by 90 degrees at the mirror surface 30 a, and the deflected light is applied to the optical diffusion surface of the rotating plate 40. The reflected light is again deflected to 90 degrees by the mirror surface 30a,
The deflected light is incident on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended.

Embodiment 5 FIG. In the above embodiment, the light source 3
From the case 30 is radiated to the optical diffusion surface of the rotary plate 40 via the aperture member 42 and the collimator lens 43, but as shown in FIG.
Alternatively, a trapezoidal prism 49 having two reflection surfaces forming a narrow angle of 90 degrees with the optical diffusion surface of the rotating plate 40 may be supported and fixed. In this case, the light from the light source 3 transmitted through the collimator lens 43 and the aperture member 42 is deflected twice 90 degrees, that is, 180 degrees by the trapezoidal prism 49, and the deflected light is applied to the optical diffusion surface of the rotating plate 40. ,
The light reflected by the optical diffusion surface of the rotating plate 40 is again deflected by 90 degrees by the trapezoidal prism 49 twice, that is, deflected by 180 degrees, and the deflected light is condensed on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Incident.

In this case, similarly to the above, the detection can be performed with high accuracy even if the detection angle range is narrow, and the maximum detection angle range can be set to approximately 2π. Since the detection can be performed, the device can be reduced in size to a small diameter, and can be configured to have a double-axis configuration, so that the life of the light source can be extended. Further, if a reflecting mirror is formed by depositing a metal such as Al on the reflecting surface, the reflectance can be improved.

Embodiment 6 FIG. Further, as shown in FIG. 3B, two plane reflecting mirrors 50 and 51 forming a narrow angle of 90 degrees with respect to the optical diffusion surface of the rotating plate 40 may be supported and fixed to the case 30. In this case, the light from the light source 3 that has passed through the collimator lens 43 and the aperture member 42 is sequentially deflected by 90 degrees each by a total of 180 degrees by the plane reflecting mirrors 51 and 50, and the deflected light is applied to the optical diffusion surface of the rotating plate 40. The light reflected by the optical diffusion surface of the rotary plate 40 is deflected by 90 degrees each in the plane reflecting mirrors 50 and 51 sequentially for a total of 180 degrees, and the deflected light is incident on the light receiving surface of the light position detecting element 5 by the condenser lens 45. . Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended.

Embodiment 7 FIG. Further, as shown in FIG. 3C, two mirror surfaces 30a and 30b forming a narrow angle of 90 degrees with respect to the optical diffusion surface of the rotating plate 40 may be formed on the surface of the case 30 by plating, vapor deposition, or the like. . In this case, the light from the light source 3 that has passed through the collimator lens 43 and the aperture member 42 is sequentially deflected by 90 degrees each on the mirror surfaces 30b and 30a for a total of 180 degrees, and the optical diffusion surface of the rotary plate 40 is irradiated with the deflected light. Board 40
The light reflected by the optical diffusing surface is deflected by 90 degrees for each of the mirror surfaces 30a and 30b sequentially for a total of 180 degrees, and the deflected light is incident on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended.

Embodiment 8 FIG. FIG. 4 is a schematic structural view showing a configuration of an optical system of an optical displacement detection device according to still another embodiment of the present invention. 4, parts corresponding to those in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof will be omitted. In this example, the inner peripheral portion 53a of the rotating plate 53 is an optical diffusion surface. In this case, the collimator lens 43
The light from the light source 3 that has passed through the aperture member 42 is
3, is reflected by the optical diffusion surface formed on the inner peripheral portion 53a,
The light reflected by the optical diffusion surface is transmitted to the condenser lens 45.
As a result, the light is incident on the light receiving surface of the light position detecting element 5.

In this case, similarly to the above, detection can be performed with high accuracy even if the detection angle range is narrow, and the maximum detection angle range can be set to approximately 2π. Since the detection can be performed, the device can be reduced in size to a small diameter, and can be configured to have a double-axis configuration, so that the life of the light source can be extended. Further, according to this configuration, the light emitting means including the light source 3 and the light receiving means including the light position detecting element 5 are arranged near the rotating shaft 1, so that
The diameter of the device can be reduced. Note that, in this example, as in the above-described Examples 2 to 7, the optical diameter is 90 degrees,
An 80 degree deflection means can be used.

Embodiment 9 FIG. FIG. 5 is a schematic structural view showing a configuration of an optical system of an optical displacement detection device according to still another embodiment of the present invention. In FIG. 5, portions corresponding to those in FIGS. 1 to 4 are denoted by the same reference numerals, and detailed description thereof will be omitted. In this example, the radius of the inner peripheral portion 54a and the outer peripheral portion 54b of the rotating plate 54 is changed according to the rotation angle, and further, an optical diffusion surface is formed on the surface of the inner peripheral portion 54a and the outer peripheral portion 54b, respectively. A unit including the light source 3, the light position detecting element 5, the collimator lens 43, the supporting members 42 and 44, and the condenser lens 45 is provided one by one inside and outside the rotating plate 53.

In this case, light from the light source 3 transmitted through the collimator lens 43 and the diaphragm member 42 is reflected by the optical diffusion surface formed on the inner peripheral portion 54a of the rotating plate 54, and the light reflected by the optical diffusion surface is The light is incident on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Similarly, light from the light source 3 transmitted through the collimator lens 43 and the diaphragm member 42 is reflected by an optical diffusion surface formed on the outer peripheral portion 54a of the rotating plate 54, and the light reflected by the optical diffusion surface is reflected by the condenser lens 45. The light is incident on the light receiving surface of the position detecting element 5. In the case of such a configuration, the inner peripheral portion 54a
If the radius change rates of the outer peripheral portion 54b and the outer peripheral portion 54b are different from each other or different from each other, different detection signals can be obtained, and there is an advantage that the detection signals can be detected more accurately by comparing the two detection signals. Also in this case, similarly to the above, even if the detection angle range is narrow, detection can be performed with high accuracy, the maximum detection angle range can be set to approximately 2π, and even a light-position detection element having a light receiving surface with a smaller diameter can be detected with high accuracy. In addition, the device can be reduced in size to a small diameter, and can be configured as a double shaft, so that the life of the light source can be extended.
Further, according to this configuration, since the light emitting means including the light source 3 and the light receiving means including the light position detecting element 5 are arranged near the rotating shaft 1, the diameter of the apparatus can be further reduced. Note that, in this example as well, the deflecting means having an optical diameter of 90 degrees and 180 degrees can be used as in the above-described second to seventh embodiments.

Further, by using an optical system, two light position detecting elements 5 can be used for one light source 3. In this example, as another method, the rotating plate 5
4 can also be superposed. In addition, irregularities are provided on one of the inner peripheral surface and the outer peripheral surface so that a pulse-like output can be obtained, and the relative displacement can be detected by counting the number of pulses, and the other surface is the same as described above. Thus, the radius can be changed according to the angle, and accurate detection can be performed based on the signals obtained from the two detection units. This method can be applied to a case where two rotating plates 54 are stacked.

Embodiment 10 FIG. FIG. 6 is a principle diagram showing the relationship between the rotation angle θ of the rotary plate 40 and the radius r of an optical displacement detection device according to still another embodiment of the present invention. In FIG.
Parts corresponding to those in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof will be omitted. According to the principle of triangulation, FIG.
In the case shown in the following, the following equation is established.

H / B = f / X (2)

Accordingly, the spot X moving on the light position detecting element 5 can be expressed as follows.

X = Bf / h = Bf / (L−r) (3)

That is, it is shown in relation to the radius r. Next, the relationship between the radius r and the rotation angle θ can be expressed as follows.

1 / (L−r) = aθ + b (4)

R = L−1 / (aθ + b) (5)

Using the above equation (5), the radius r of the rotating plate 40 is determined. As a result, the relationship between the output Vθ and the rotation angle θ becomes linear as shown in FIG. 6B, and the rotation angle can be accurately detected.

Embodiment 11 FIG. FIG. 7 is a schematic structural view showing a configuration of an optical system of an optical displacement detection device according to still another embodiment of the present invention. 7, parts corresponding to those in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof will be omitted. In the drawing, reference numeral 60 denotes a reciprocating bearing. The reciprocating bearing 60 is attached to both ends of the case 30 as shown in FIG. The two reciprocating bearings 60 support a reciprocating shaft 61 that reciprocates with respect to the case 30 to form a double shaft configuration. Reference numeral 62 denotes a reciprocating plate whose outer edge portion has an optical diffusion surface,
The reciprocating plate 62 is fixed to the reciprocating shaft 61,
Reciprocate with respect to the case 60 in conjunction with. That is, the optical displacement detection device shown in this example has a structure for detecting stroke displacement.

41 is an element supporting substrate, 42 is a diaphragm member,
43 is a collimator lens, 44 is a supporting member, and 45 is a condenser lens for condensing the light reflected from the optical diffusion surface of the reciprocating plate 62 on the light position detecting element 5, and as shown in FIG. The light source 3 such as an LED is attached to the element support substrate 45 so that the light emission direction is in the direction of the reciprocating axis 1. The collimator lens 43 is supported by the supporting member 42 so as to be fitted to the outer peripheral surface of the light source 3 so that the axes are aligned.
4 is fitted to the outer peripheral surface of the light position detecting element 5 and fixed.
The condenser lens 45 is supported by the support member 44.

Here, if the collimator lens 43 and the condenser lens 45 are made of a plastic molded product made of an optical plastic such as polymethyl methacrylate (PMMA) or polycarbonate (PC), the cost can be reduced. Next, the operation will be described. In FIG. 7, the light emitted from the light source 3 passes through the collimator lens 43 and the diaphragm 42, becomes a parallel light beam having a predetermined diameter, enters the outer edge of the reciprocating plate 62, and is reflected by the optical diffusion surface of the outer edge. Is done. The reflected light is focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. When the reciprocating shaft 61 reciprocates, the reciprocating plate 62 similarly reciprocates as shown by a two-dot chain line in FIG. 7A, whereby the spot light focused on the light position detecting element 5 moves on the light position detecting element 5. I do. Accordingly, the light incident position of the light position detecting element 5 becomes equal to the stroke displacement of the reciprocating plate 62, that is, the reciprocating plate 62, and the light incident position of the light position detecting element 5 is similar to the conventional device described with reference to FIGS. detection currents I1 and I2 from the detection electrode obtained, it is possible to obtain a stroke V _Z corresponding to the light incident position X by detecting for example the detection currents I1 and I2 in the detection circuit as in the conventional device.

This example is based on the principle of triangulation and, by increasing the rate of change of the distance between the reflecting surface and the light receiving portion, can effectively detect the end of the light receiving surface. Can be detected with high accuracy even if the distance is small, and when the photoelectric conversion layer of the light position detecting element 5 is made of amorphous silicon, the maximum stroke range can be widened. Further, since the light position detecting element having a light receiving surface with a small diameter can be detected with high accuracy, the device can be made small with a small diameter, a double-axis configuration can be used, and the life of the light source can be extended. Further, the configuration for performing the 90-degree and 180-degree deflection described in the second to seventh embodiments can be applied.

Embodiment 12 FIG. In the eleventh embodiment, the outer side portion of the reciprocating plate 62 is an optical diffusion surface. However, as shown in FIG. 8, a reciprocating plate 63 having an inner side portion as an optical diffusing surface may be used.
In this case, as shown in the figure, the light emitted from the light source 3 passes through the collimator lens 43 and the diaphragm 42 to become a parallel light beam having a predetermined diameter, and is incident on the inner side of the reciprocating plate 63. Is reflected by the optical diffusion surface of The reflected light is focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Here, when the reciprocating shaft 61 reciprocates, the reciprocating plate 63 also reciprocates, whereby the light position detecting element 5
The spot light focused above moves on the light position detecting element 5. Therefore, the light incident position of the light position detection element 5 is
3, that is, equal to the stroke displacement of the reciprocating plate 63, and the detection currents I1 and I from the detection electrode of the optical position detection element 5 are the same as in the conventional device described with reference to FIGS.
2 can be obtained. For example, if the detection currents I1 and I2 are detected by a detection circuit similar to that of the conventional device, a stroke VZ corresponding to the light incident position X can be obtained.

In this example, as in the eleventh embodiment, the principle of triangulation is used, and by increasing the rate of change in the distance between the reflecting surface and the light receiving portion, the end to end of the light receiving surface can be effectively used. Since the detection can be performed, the detection can be accurately performed even if the detection stroke range is narrow, and the maximum stroke range can be expanded when the photoelectric conversion layer of the optical position detection element 5 is made of amorphous silicon. Further, since the light position detecting element having a light receiving surface with a small diameter can be detected with high accuracy, the device can be made small with a small diameter, a double-axis configuration can be used, and the life of the light source can be extended. Further, the configuration for performing the 90-degree and 180-degree deflection described in the second to seventh embodiments can be applied.

Embodiment 13 FIG. In Embodiment 11, the outer side portion of the reciprocating plate 62 is an optical diffusion surface. However, as shown in FIG. 9, a reciprocating plate 64 having both the inner side portion and the outer side portion as an optical diffusing surface is used. The light source 3, the light position detecting element 5, and the support members 42 and 4 shown in FIG.
4. The collimator lens 43 and the condenser lens 45 may be arranged vertically. In this case, as shown in the figure, the light emitted from the light source 3 passes through the collimator lens 43 and the diaphragm 42, becomes a parallel light beam having a predetermined diameter, and is incident on the inner side of the reciprocating plate 64. Is reflected by the optical diffusion surface of The reflected light is focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Here, when the reciprocating shaft 61 reciprocates, the reciprocating plate 64 reciprocates similarly, whereby the spot light focused on the light position detecting element 5 moves on the light position detecting element 5.

On the other hand, the light emitted from the light source 3 is transmitted through the collimator lens 43 and the stop 42, becomes a parallel light beam having a predetermined diameter, and is incident on the outer side of the reciprocating plate 64. Is reflected by The reflected light is focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Here, when the reciprocating shaft 61 reciprocates, the reciprocating plate 64 reciprocates similarly, whereby the spot light focused on the light position detecting element 5 moves on the light position detecting element 5. Accordingly, the light incident position of the light position detecting element 5 becomes equal to the stroke displacement of the reciprocating plate 64, that is, the reciprocating plate 64, and FIG.
2 to 14, detection currents I1 and I2 are obtained from the detection electrodes of the light position detecting element 5 in the same manner as in the conventional device described with reference to FIGS. 2 to 14. For example, the detection currents I1 and I2 are detected by a detection circuit similar to the conventional device. Then, a stroboscope corresponding to the light incident position X
Work V _Z can be obtained.

The outer side portion and the inner side portion change the distance from the reciprocating shaft 61 in accordance with the stroke, respectively, so that the outer side portion and the inner side portion have different rates of change in distance or cause deviation. In this case, since different detection signals can be obtained, there is an advantage that the detection signals can be detected more accurately by comparing the two detection signals. Also in this example, similarly to the eleventh embodiment, based on the principle of triangulation, by increasing the rate of change in the distance between the reflection surface and the light receiving unit, the end to end of the light receiving surface can be effectively detected. In addition, even if the detection stroke range is narrow, the detection can be performed with high accuracy, and when the photoelectric conversion layer of the optical position detection element 5 is made of amorphous silicon, the maximum stroke range can be expanded.

Further, since it is possible to accurately detect even a light-position detecting element having a small-diameter light-receiving surface, the device can be made small-sized and small-sized, and it can be configured as a biaxial structure, thereby extending the life of the light source. be able to. Further, the configuration for performing the 90-degree and 180-degree deflection described in the second to seventh embodiments can be applied. Also, by using an optical system, two light position detecting elements 5 can be provided for one light source 3.
Can also be used.

Embodiment 14 FIG. In Embodiment 11, the reciprocating plate 6
The outer peripheral portion of the two reciprocating plates 65 has an optical diffusion surface as shown in FIG.
The light from the light source 3 is reflected by the optically diffusing surfaces of the two reciprocating plates 65a and 65b, and the light is incident on the two light position detecting elements 5 by the two condenser lenses 45. You may do it. In this case, as shown in the drawing, the light emitted from the light source 3 becomes a parallel light beam having a predetermined diameter and is incident on each of the outer sides of the reciprocating plates 65a and 65b. Is done. The reflected lights are respectively focused on the light receiving surface of the light position detecting element 5 by the condenser lens 45. Here, when the reciprocating shaft 61 reciprocates, the reciprocating plate 6
5a and 65b reciprocate similarly, whereby the spot light focused on the light position detecting element 5 moves on the light position detecting element 5, respectively.

Therefore, the light incident position of the light position detecting element 5 becomes equal to each stroke displacement of the reciprocating plates 65a and 65b, that is, the reciprocating plates 65a and 65b.
4, the detection currents I1 and I2 are obtained from the detection electrodes of the light position detecting element 5 in the same manner as in the conventional apparatus described with reference to FIG. 4. For example, if the detection currents I1 and I2 are detected by the same detection circuit as in the conventional apparatus, light Stroke V _Z corresponding to incident position X
Can be obtained. In this case, even a light-position detecting element having a small-diameter light-receiving surface can be detected with high accuracy, so that the device can be made small-sized and small-sized, and it can have a biaxial structure, thereby extending the life of the light source. it can. Further, the configuration for performing the 90-degree and 180-degree deflection described in the second to seventh embodiments can be applied. Further, when two reciprocating plates 65a and 65b are used, one of the reciprocating plates 65a and 65b may be provided with irregularities so as to obtain a pulse-like output. In this case, the relative displacement can be detected by counting the number of pulses, and the other one can be obtained from the two detectors if the distance from the reciprocating shaft 61 is changed according to the stroke as described above. Highly accurate detection can be performed based on the signal. Also,
This is possible even if one reciprocating plate 65 using the inner side and the outer side is used.

Embodiment 15 FIG. FIG. 11 is a principle diagram showing the relationship between the stroke of the reciprocating plate 62 and the distance y between the reciprocating shaft 61 of the optical displacement detecting device according to still another embodiment of the present invention.
11, parts corresponding to those in FIGS. 1 to 10 are denoted by the same reference numerals, and detailed description thereof will be omitted. According to the principle of triangulation, the following equation holds in the case shown in FIG. 11A.

H / B = f / X (6)

Accordingly, the spot X moving on the light position detecting element 5 can be expressed as follows.

X = Bf / h = Bf / (K−y) (7)

That is, it is shown in relation to the distance y. Next, the relationship between the distance y and the stroke Z can be expressed as follows.

1 / (K−y) = aZ + b (8)

From the above equation (8), the distance y can be expressed as follows.

Y = K−1 / (aZ + b) (9)

Using the above equation (9), the distance y of the reciprocating plate 62 from the reciprocating shaft 61 is determined. The output V
The relationship between Z and the stroke displacement Z is linear as shown in FIG. 11B, and the stroke can be detected with high accuracy.

Embodiment 16 FIG. In the above embodiment, the light source 3
And the light position detection element 5 are separately mounted on the element support substrate 45 by soldering or the like. However, the light source 3 and the light position detection element 5 may be formed simultaneously on a support substrate such as glass. Good, and the element support substrate 45
The light source 3 and the light position detecting element 5 may be formed by treating a part of the surface of the light source 3. Further, it is needless to say that the optical system including the collimator, the condenser, and the deflecting unit can be configured by combining various lenses, reflecting mirrors, prisms, and the like other than those illustrated.

[0070]

As described above, according to the first aspect of the present invention, the rotating shaft attached to or being a part of the object to be measured, the rotating shaft attached to the rotating shaft, and integrally rotating to form A rotating plate whose portion is an optical diffusion surface, a light source that irradiates light to the optical diffusion surface of the rotating plate, and a light-collecting optical system that collects light reflected from the optical diffusion surface of the rotating plate, A light position detecting element disposed substantially at a light condensing position of the light condensing optical system, wherein the rotating plate is arranged such that a distance between the light condensing optical system and the light reflection position of the side peripheral portion is a rotation angle of the rotating shaft. Is formed differently depending on the light incident position on the light position detecting element .
Since the displacement of the object to be measured is detected based on the principle of triangulation, the rotation angle can be accurately detected regardless of the size of the angle detection range.
There is an effect that a device which is small and has a long light source life can be obtained.

As described above, according to the second aspect of the present invention, the rotating shaft attached to or being a part of the measured object, the rotating shaft attached to the rotating shaft and integrally rotating, and A rotating plate having an optical diffusing surface, a light source for irradiating the optical diffusing surface of the rotating plate with light, a condensing optical system for condensing light reflected from the optical diffusing surface of the rotating plate, A light position detecting element disposed at a substantially light condensing position of the light condensing optical system, wherein the distance between the light condensing optical system and the light reflection position of the side peripheral portion is equal to the rotation angle of the rotation axis. The relationship between the rotation angle of the rotation shaft and the radius of the rotation plate is determined according to the rotation angle of the object to be measured, and based on the light incident position on the light position detection element. since so as to detect a displacement of the object to be measured, regardless of the magnitude of the angle detection range Every well can detect the rotation angle, easy both axis configuration, and a small, inexpensive, yet there is an effect that the light source can be obtained a device lifetime.

As described above, according to the third aspect of the present invention, the reciprocating shaft attached to or being a part of the object to be measured, and the reciprocating shaft attached to the reciprocating shaft and integrally moved to form a side portion. A reciprocating plate having an optical diffusing surface, a light source for irradiating the optical diffusing surface of the reciprocating plate with light, and a condensing optical system for condensing light reflected from the optical diffusing surface of the reciprocating plate, A light position detecting element disposed at a substantially condensing position of the condensing optical system, wherein the reciprocating plate has a distance between the condensing optical system and the light reflecting position of the side portion depending on a stroke of the reciprocating shaft. Light incident position on the light position detecting element
Thus, since the displacement of the object to be measured is detected based on the principle of triangulation, the stroke displacement can be accurately detected regardless of the size of the stroke detection range. In addition, there is an effect that a device having a long light source can be obtained.

As described above, according to the fourth aspect of the present invention, the reciprocating shaft attached to or a part of the object to be measured, the reciprocating shaft attached to the reciprocating shaft and integrally moving, A reciprocating plate having an optical diffusing surface, a light source for irradiating the optical diffusing surface of the reciprocating plate with light, and a condensing optical system for condensing light reflected from the optical diffusing surface of the reciprocating plate, A light position detecting element disposed at a substantially condensing position of the condensing optical system, wherein the reciprocating plate has a distance between the condensing optical system and the light reflecting position of the side portion depending on a stroke of the reciprocating shaft. The relationship between the stroke displacement of the reciprocating shaft and the side of the reciprocating plate is determined in accordance with the stroke of the object to be measured, and the relationship between the stroke of the object to be measured and the light incident position on the light position detecting element is determined. Since the displacement of the measuring object is detected, the stroke detection range It can accurately detect the stroke displacement regardless, both axes configuration easier, and a small, inexpensive, yet light source there is an effect that it is possible to obtain a device of long lifetime.

[Brief description of the drawings]

FIG. 1 is a schematic structural diagram of an optical system showing an embodiment of an optical displacement detection device according to the present invention.

FIG. 2 is a schematic structural view of an optical system showing another embodiment of the optical displacement detection device according to the present invention.

FIG. 3 is a schematic structural view of an optical system showing still another embodiment of the optical displacement detection device according to the present invention.

FIG. 4 is a schematic structural diagram of an optical system showing still another embodiment of the optical displacement detection device according to the present invention.

FIG. 5 is a schematic structural view of an optical system showing still another embodiment of the optical displacement detection device according to the present invention.

FIG. 6 is a principle diagram showing a relationship between a rotation angle and a radius of a rotating plate of the optical displacement detection device according to the present invention.

FIG. 7 is a schematic structural diagram showing a configuration of an optical system of still another embodiment of the optical displacement detection device according to the present invention.

FIG. 8 is a schematic structural diagram showing a configuration of an optical system of still another embodiment of the optical displacement detection device according to the present invention.

FIG. 9 is a schematic structural diagram showing a configuration of an optical system of still another embodiment of the optical displacement detection device according to the present invention.

FIG. 10 is a schematic structural diagram showing a configuration of an optical system of still another embodiment of the optical displacement detection device according to the present invention.

FIG. 11 is a principle diagram showing a relationship between a stroke of a reciprocating plate and a distance between a reciprocating shaft in still another embodiment of the optical displacement detecting device according to the present invention.

FIG. 12 is a configuration diagram showing a conventional optical displacement detection device.

FIG. 13 is a sectional view showing a light position detecting element of a conventional optical displacement detecting device.

FIG. 14 is a configuration diagram and a top view of another conventional optical rotation angle detection device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Rotation axis 3 Light source 5 Optical position detection element 43 Collimator lens 45 Condenser lens 40, 53, 54 Rotating plate 61 Reciprocating shaft 62, 64, 65a and 65b Reciprocating plate

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-62-66120 (JP, A) JP-A-61-68505 (JP, A) JP-A-63-157017 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) G01B 11/00-11/30 102 G01D 5/26-5/38

Claims (4)

(57) [Claims] A rotating shaft attached to or being a part of an object to be measured, a rotating plate attached to the rotating shaft and rotating integrally and having an optical diffusion surface on a side peripheral portion; and a rotating plate. A light source for irradiating the optical diffusion surface with light; a condensing optical system for condensing light reflected from the optical diffusion surface of the rotary plate; and light arranged substantially at a condensing position of the condensing optical system. A position detecting element, wherein the rotating plate is formed such that a distance between the light-collecting optical system and the light reflection position of the side peripheral portion is different according to a rotation angle of the rotating shaft. Depending on the light incident position of
An optical displacement detection device wherein the displacement of the object to be measured is detected based on the principle of triangulation . 2. A rotating shaft attached to or being a part of the object to be measured, a rotating plate attached to the rotating shaft and integrally rotating and having a side peripheral portion as an optical diffusion surface, and a rotating plate. A light source for irradiating the optical diffusion surface with light; a condensing optical system for condensing light reflected from the optical diffusion surface of the rotary plate; and light arranged substantially at a condensing position of the condensing optical system. A position detecting element, wherein the rotating plate is formed such that the distance between the light-collecting optical system and the light reflection position of the side peripheral portion is different according to the rotating angle of the rotating shaft, and the rotating angle of the rotating shaft is And the relationship between the radius of the rotating plate and the rotation angle of the object to be measured is determined, and the displacement of the object to be measured is detected based on the light incident position on the optical position detecting element. Characteristic optical displacement detection device. 3. A reciprocating shaft which is attached to or a part of an object to be measured, a reciprocating plate which is attached to the reciprocating shaft and moves integrally and has an optical diffusion surface on a side portion, and a reciprocating plate. A light source for irradiating the optical diffusion surface with light; a condensing optical system for condensing light reflected from the optical diffusion surface of the reciprocating plate; and light arranged substantially at a condensing position of the condensing optical system. A position detecting element, wherein the reciprocating plate is formed such that a distance between the light-collecting optical system and the light reflection position of the side portion is different depending on a stroke of the reciprocating shaft; Depending on position
An optical displacement detecting device for detecting the displacement of the object to be measured based on the principle of triangulation . 4. A reciprocating shaft attached to or a part of an object to be measured, a reciprocating plate attached to the reciprocating shaft and moving integrally and having an optical diffusion surface on a side, and a reciprocating plate. A light source for irradiating the optical diffusion surface with light; a condensing optical system for condensing light reflected from the optical diffusion surface of the reciprocating plate; and light arranged substantially at a condensing position of the condensing optical system. A position detecting element, wherein the reciprocating plate is formed such that a distance between the light-collecting optical system and the light reflection position of the side portion is different depending on a stroke of the reciprocating shaft. The relationship between the sides of the plate is determined according to the stroke of the object to be measured, and the displacement of the object to be measured is detected based on the light incident position on the optical position detecting element. Optical displacement detection device.