JP3020898U - Optical alignment device - Google Patents

Abstract

(57) [Summary] [Object] To provide an optical alignment device capable of easily realizing appropriate contact between each terminal of the array and each pin of the inspection device in the inspection of the liquid crystal array. [Arrangement] In an optical alignment device in which pins that elastically descend from a jig frame are aligned with each terminal of a liquid crystal display array located below,
An equivalent mark that can be detected by transmitted light at at least two positions of the frame, through which a position corresponding to the alignment mark of the plate on which the terminals of the liquid crystal display array are arranged and its vicinity are penetrated or made transparent. And an optical device for determining whether or not the position of the alignment mark and the position of the equivalent mark coincide with each other on the upper part of the equivalent mark, whereby the position of both marks corresponds to the terminal. An optical alignment apparatus capable of substantially matching the positions of the pins, and further finely adjusting the positions of the pins to sufficiently match each other.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an optical alignment apparatus for inspecting an array for a liquid crystal display so as to abut a terminal of the array at an appropriate position while optically detecting a pin of a measurement system. .

[0002]

[Prior art]

 The optical alignment device is required to abut the pins in a one-to-one correspondence with each terminal from the liquid crystal array in order to make a measurement. ) Type, as shown in Fig. 1 (a), the tip of each needle-shaped pin 11 that extends obliquely and is bent at the lower end is moved forward and backward as shown in Fig. 1 (b). The positions are arranged so as to be sequentially shifted, and the terminals 21 and the tips of the pins 11 are adjusted to come into contact with each other.

In this method, the needle-type pin 11 is viewed from above, and adjustment is performed while confirming the position where the terminal and each pin 11 are completely abutted, but the actual width of the terminal is 40 to 60 μm. In addition, since the pitch of each terminal is 100 to 160 μm, a considerable skill is required and technically difficult to achieve accurate contact in such a system.

On the other hand, as shown in FIG. 2 (a), pores are provided in the frame of the jig 1, and the pin 11 is processed through an elastic spring, and as shown in FIG. 2 (b), In recent years, a method has been adopted in which pores are aligned and brought into contact with the terminals 21 of each liquid crystal array.

In the spring type method shown in FIGS. 2 (a) and 2 (b), unlike the needle type shown in FIGS. 1 (a) and 1 (b), each pin 11 protrudes from the frame of the jig 1. Therefore, it is not possible to directly visually check from above the frame whether or not the pin 11 and the terminal are in contact with each other. For this reason, in the spring type method, a method for confirming the contact relationship between each pin 11 and each terminal 21 has not been established.

As a system assumed at the present stage, a plate 2 (actually a glass plate in many cases) on which a liquid crystal array and its terminals as shown in FIG. 3 are arranged is used as an XYθ table 3 (vertical and horizontal directions). It is placed on a table whose rotation direction can be adjusted freely, and whether or not each pin 11 is in contact with the terminal is fine-adjusted while visually observing the image by the optical device 4 installed on the side, and the adjusted position is adjusted. The values are read through the optical device, and the X, Y, and θ values in the XYθ table 3 at that time are stored in the adjustment side of the XYθ table 3, and the pins 11 and The purpose is to achieve contact with the terminals.

However, in such a method, it is necessary to make an adjustment so as to make an accurate contact by visually observing the image from the beginning, but such an operation is extremely complicated.

[0008]

[Problems that the device needs to solve]

 The present invention overcomes the above-mentioned drawbacks of the prior art, and when a spring-type pin is used, the contact relationship between the liquid crystal array terminal and the detection device pin can be realized by a relatively simple operation. It is intended to provide an optical alignment device.

[0009]

[Means for Solving the Problems]

 In order to solve the above problems, the structure of the present invention is an optical alignment in which pins that are elastically descended from the jig frame are aligned with each terminal of the liquid crystal display array located below. In the device, at least at two positions of the frame, the position corresponding to the alignment mark of the plate on which the terminals of the liquid crystal display array are arranged and its vicinity are penetrated or made transparent, and the position is detected by the transmitted light. From an optical alignment device characterized in that a possible equivalent mark is provided, and an optical device for determining whether or not the position of the alignment mark and the equivalent mark coincide with each other is provided above the equivalent mark. Become.

[0010]

[Function of the invention]

 FIG. 4 shows a state of the device of the present invention, the plate 2 on which the liquid crystal array and its terminals located below the device, and the XYθ table 3 on which the device is mounted are placed.

As shown in FIG. 4, in the present invention, in the frame constituting the jig 1, it corresponds to the alignment mark 22 (usually provided two) on the plate 2 on which the liquid crystal array and its terminals are arranged. Or the vicinity thereof is made transparent, or at least two equivalent marks 12 which can be detected by light passing through the penetrating portion or the transparent portion are provided in the penetrating portion or the transparent portion. If the position of the equivalence mark 12 on the frame and the position of the alignment mark 22 are the same, the positions of the terminals of the liquid crystal array and the pins 11 of the inspection device have already substantially coincided with each other, and both are substantially the same. It is in abutting relationship.

The method of adjusting both marks so that they coincide with each other is as follows. (1) In the optical device 4 such as a camera provided above the equivalent mark, both the alignment mark 22 and the equivalent mark 12 are transmitted. Adjust the position of the normal XYθ table so that the amount of incident light is the maximum or minimum value, or

(2) First, in the optical device 4, after confirming the coordinate position of the equivalent mark 12 and erasing the equivalent mark 12, the plate 2 is placed on the XYθ table, and the alignment mark is set to the optical device 4. After adjusting so that the center position of the alignment mark 12 coincides with the coordinate position of the equivalent mark, it can be realized by adjusting the XYθ table.

To explain the process (1) in detail, the alignment mark 22 of the plate 2 is usually made of a metal vapor deposition film of chromium (Cr) or the like as shown in FIG. 5 (a). Normally, it has a cross shape. However, as shown in FIG. 5B, by forming the equivalent marks 12 in the shaded state of the same shape, when the positions of both cross shapes are matched, the metal deposition of the cross shape is performed. Since the amount of light transmitted and transmitted by the reflection of the film becomes the minimum value, it is possible to detect one value of the positions of both marks.

On the other hand, as shown in FIG. 5C, when the equivalent mark 12 is a minute circular hole, the amount of transmitted incident light due to reflection from the metal vapor deposition film incident through the equivalent mark 12 is Since the maximum value is obtained when both marks match, the matching of the positions of both marks can be detected by obtaining the position where the maximum value of the amount of incident light is obtained.

To explain the process of (2), when the frame of the jig 1 is provided with coordinate axes, the coordinate of the center position of the equivalent mark is inevitably confirmed by the optical device 4, and then the plate 2 is used. If the XYθ table is adjusted so that the center position of the alignment mark 22 in FIG. 2 matches the center position of the equivalent mark, the positions of both marks will match.

As described above, when the positions of both marks match by the method of (1) or (2), the position of each terminal on the plate and each pin 11 in the frame of the jig 1 is approximately. It almost agrees.

However, actually, the pin 11 and the terminal are not always in the best contact state only by matching the marks.

That is, actually, after the positions of both marks are matched, each pin 11 is actually brought into contact with each terminal 21, and the position shift amount is detected while observing both positions with a microscope. However, this is being corrected.

[0020]

First Embodiment In the first embodiment, a configuration is shown in which the light quantity of an optical meter for detecting the coincidence of the positions of both marks is photoelectrically converted and the electric output thereof is input to the computer 5.

As a result, in the process of (1), the computer 5 automatically detects the portion where the incident light amount has the maximum value or the minimum value based on the output by photoelectric conversion, and thereby accurately Not only is it possible to detect the position where both marks match, but in the process of (2) above, the center position of the equivalent mark is automatically learned and memorized, and the center position of the alignment mark after that is matched. Whether or not there is also can be automatically determined.

In addition to the above, when the marks are coincident with each other, when fine adjustment is performed by further observing with a microscope so that each pin 11 and each terminal 21 are in the most appropriate contact state, It is also possible to learn and memorize the amount of fine adjustment, and to efficiently control the pin to the correct position.

[0023]

Second Embodiment In the second embodiment, in the frame of the jig 1, the position corresponding to the alignment mark 22 of the plate on which the liquid crystal display array and its terminals are arranged and the vicinity thereof are penetrated, and A cylindrical container 6 as shown in FIG. 7 that can be fitted in the through hole is used.

That is, the tubular container 6 is provided with a brim 61 for supporting by the frame when fitted in the hole, and an equivalent mark as shown in FIG. 12 are provided.

By using such a cylindrical container 6, it is possible to simulate a position where each terminal and each pin 11 can be substantially brought into contact with various jigs 1 by one cylindrical container 6. Not only is this possible, but in the process of (2) above, this can be achieved by simply removing the tubular container 6 when the equivalence mark is once removed.

[0026]

[Effect of device]

 As described above, in the present invention, the position corresponding to the alignment mark and its vicinity can be penetrated through the frame of the jig on the inspection device side or can be detected as a transparent state through the transmitted light. With the relatively simple structure of providing marks, the contact position of each terminal and each pin can be roughly detected, and if necessary, the correct contact position can be adjusted thereafter. Since the present invention can be efficiently performed, the present invention is extremely significant in the inspection of liquid crystal alignment.

[Brief description of drawings]

1A and 1B are a side view and a top view showing an arrangement state of pins according to a conventional needle type.

2A and 2B are a side view and a top view showing a state of a pin according to a type in which a pin is elastically lowered from holes arranged in a conventional frame.

FIG. 3 is a side view showing a positional relationship between a jig, a liquid crystal array and a plate on which terminals of the liquid crystal array are arranged, and an XYθ table on which the plate is placed, when a pin of the type shown in FIG. 2 is used.

FIG. 4 is a side view showing a state where terminals and pins are aligned using the optical alignment device of the present invention.

5A, 5B, and 5C are top views showing the shape of a plate on which a liquid crystal display array having alignment marks is arranged and the equivalent marks corresponding to the alignment marks.

FIG. 6 is a side view showing a schematic configuration of the first embodiment.

FIG. 7 is a perspective view showing a state of a cylindrical container used in Example 2.

[Description of sign]

 1: Jig 10: Through or transparent part 11: Pin 111: Spring 12: Equivalent mark 2: Plate on which liquid crystal array and its terminals are arranged 21: Liquid crystal array terminal 22: Alignment mark 3: XYθ table 4: Optical Device 5: Computer 6: Cylindrical container 61: Tsuba

Claims (3)

[Scope of utility model registration request] 1. An optical alignment apparatus in which pins that elastically descend from a frame of a jig are aligned with respective terminals of a liquid crystal display array located below, in at least two positions of the frame, A position corresponding to the alignment mark of the plate on which the terminals of the liquid crystal display array are arranged and its vicinity are penetrated or made transparent, and an equivalent mark which can be detected by transmitted light is provided at the position, and the upper part of the equivalent mark. An optical alignment device, in which an optical device for determining whether or not the position of the alignment mark and the position of the equivalent mark coincide with each other is arranged. 2. The optical alignment device according to claim 1, wherein a computer is linked to the optical device. 3. The frame is fitted into a hole penetrating therethrough,
The optical alignment apparatus according to claim 1, wherein a cylindrical container having a collar at the top and an equivalent mark at the center of the bottom is used.