JP3020703B2 - Gas leak prediction and countermeasure support device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention predicts the amount of flammable or toxic production gas used in IC factories or the like when it leaks, and takes measures to prevent disasters and prevent damage from spreading. The present invention relates to a device that provides support for evacuation guidance and production stoppage.

[0002]

BACKGROUND ART Conventional gas leak alarm panel, as shown in FIG. 2, the indicator 2 ₁ - a signal of a gas leak sensor S ₁ to S _n
2n , the buzzer 4 sounds when the measured value reaches the amount of leaked gas preset in each indicator.

[0003]

However, the conventional gas leak warning panel has the following problems. (1) Until the amount of leaked gas reaches the alarm level, it cannot be grasped that the production gas is leaking, so there was no time to take measures. (2) The tendency of gas leakage during the process of reaching the alarm level could not be grasped. (3) To detect gas leakage early, the alarm level may be set to a low value. However, if the alarm level is lowered, an alarm will be issued even for a small amount of leakage such as when a gas cylinder is replaced, causing a malfunction. (4) Since the measurement range of the gas leak sensor and the indicator is narrow, the amount of leaked gas exceeding the measurement limit could not be grasped. (5) Since the function only informs that the alarm level has been reached, and does not have a function to support what measures should be taken, an alarm is generated at night or on holidays when there is no expert or responsible person. No measures were taken.

The present invention eliminates the above-mentioned problems, predicts in advance the time when the amount of leaked gas reaches the alarm level, the time when the amount of leaked gas exceeds the measurement limit, and the predicted amount of leaked gas, and furthermore, It is an object of the present invention to provide a support for taking measures to prevent occurrence and spread of damage, and a gas leak prediction and countermeasure support device for making a decision regarding evacuation guidance and production suspension.

[0005]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides an apparatus for predicting a gas leakage amount and supporting a countermeasure for the gas leakage sensor and an analog amount from the gas leakage sensor. and a measurement device periodically to measure, this
Predict the time when the amount of leaked gas reaches the alarm level, the time when the amount of leaked gas exceeds the measurement limit, and the estimated amount of leaked gas in advance based on the measurement data from the measurement equipment of a processing unit to estimate a measure of measures and evacuation and production stop for preventing said processing leakage amount of gas was estimated time and to reach a warning level by the device, the time and the predicted exceeds the amount leaked gas measurement limit Guidance output device that displays the amount of leaked gas and measures for the gas leak, and to infer the time when the leaked gas reaches the alarm level and the time when the leaked gas exceeds the measurement limit and the predicted leaked gas amount algorithms and measures and for disaster prevention and prevent damage from spreading, a storage device in which information for supporting measures evacuation or production stoppage is stored, the <br/> processor paired And an input device for exploring the measures in the form
Output the measurement data from the storage device,
The amount of leaked gas estimated by the
Time to reach or when the amount of leaked gas exceeds the measurement limit.
And predicted leaked gas volume and the prevention of disaster occurrence and damage spread
And measures for evacuation guidance and production stoppage
The device is checked by checking the output .

[0006]

According to the present invention, since the above-mentioned configuration is adopted, (1) the analog amount from the gas leak sensor is constantly measured,
It is possible to predict the arrival time of the alarm level and provide guidance for countermeasures. (2) Even if the analog amount from the gas leak sensor exceeds the measurement limit, the possibility of explosion or fire occurrence is determined by estimating the leakage value exceeding the measurement limit from the leak tendency up to that point, and taking countermeasures. Can provide support guidance. (3) If the monitoring staff cannot solve the problem even if they take measures according to the guidance functions of the measures (1) and (2), the processing equipment and the information for the measures to be supported by the monitoring staff are stored. Measures can be taken interactively with the storage device. (4) The performance of the device can be improved by providing the storage device storing information for countermeasure support with a function of newly adding / correcting information for support countermeasures.

[0007]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a schematic diagram of a gas leakage prediction and countermeasure support apparatus according to a first embodiment of the present invention.

In [0009] Figure, the sensor group 10 consisting of a gas leak sensor S ₁ to S _n, measuring device 20 for periodically measuring the analog quantity from the gas leak sensor, based on the measurement data from the measuring device 20, alarm A function for predicting the amount of leaked gas exceeding the level arrival time or the measurement limit, a processing device 30 for extracting information on measures and decision making according to the situation at that time, a guidance output device 50 for outputting a processing result from the processing device 30, And a storage device 40 storing information on measures and decision making, and an input device 60 for transmitting and receiving signals in an interactive manner with the processing device 30 in order to add and correct information in the storage device 40.

A process for predicting the time when the gas leak detection signal reaches the alarm level, which is one of the functions of the apparatus of the present invention, will be described with reference to FIGS.

[0011] signals detected from gas leakage sensor S ₁ to S _n is an analog quantity, is performed measured by the measuring device 20, the following processing is performed in the processor 30.

[0012] For ease of explanation, the analog quantity of one gas leak sensor S _1, it will be described warning level estimated arrival.

FIG. 3 shows the relationship between the measurement time x and the measurement data y.

An example using the least squares method will be described as a first example of alarm level arrival prediction. The least-squares method is for obtaining an approximate polynomial that matches as much as possible over the entire interval from discrete sample values. 3, thereby obtaining a curve as shown by a dotted line in FIG from the measurement data y ₁ ~y _n for measuring time x ₁ ~x _n.

The approximate polynomial y is assumed to be an m-th order polynomial as shown in equation (1).

[0016]

(Equation 1)

The formula that best matches all of the n data is the formula that minimizes the sum S of the squares of the error shown in formula (2).

That is, in order to find the coefficients C _{0 to} C _m of the approximate polynomial y, equation (3) is determined so that S in equation (2) is minimized.

[0019]

(Equation 2)

[0020]

(Equation 3)

By transforming equation (3), equation (4) is obtained.

[0022]

(Equation 4)

In the case of (3), when expressed in the form of a matrix, it is as follows.

[0024]

(Equation 5)

By solving the simultaneous linear equations of the matrix by the elimination method, C _{0 to} C ₃ are obtained. Approximate expression y from the values of C ₀ -C ₃ obtained is obtained. X
By substituting _{n + 1} , _{xn + 2} ,... _{xn + 1} , the amount of gas leakage after the current time _xn is predicted. The time when the predicted leaked gas amount reaches the alarm level can be predicted.

[0026] In FIG. 4, a curve indicated by the broken line in the leakage amount of gas predicted above, seek time x _{n + l} exceeding the alarm level. The time x _{n + 1} is the time l from the actual measurement time x _n
A time after, the curve of the predicted gas leakage amount at this time exceeds the alarm level.

Further, the estimation of the amount of gas leakage exceeding the measurement limit will be described.

In FIG. 5, there is a measurement limit of a sensor or a measuring device at a place beyond the alarm level. If the amount of gas leakage exceeds the alarm level and further increases, the measurement becomes impossible if the gas exceeds the measurement limit of the sensor or the measuring device. Therefore, based on the predicted gas leakage amount, the time at which the gas leakage amount exceeds the measurement limit of the sensor or the measuring device, and the trend of the gas leakage amount thereafter are predicted.

The time x _k exceeding the measurement limit is y = y
_k (measurement limit) is solved. Further, by substituting the time x _m into the approximate expression y, it is possible to predict the trend of the subsequent gas leakage amount.

Next, a description will be given of a second embodiment of the present invention in which numerical differentiation is used as alarm level arrival prediction.

Assuming that the signal values sampled at times x _i−1, x _i , x _{i + 1} are y _i−1, y _i , y _{i + 1} , 3
It can be approximated by a quadratic equation passing through the points.

[0032]

(Equation 6)

The prediction of the alarm level arrival and the estimation of the gas leakage exceeding the measurement limit are performed in the same manner as in the first embodiment.

Next, based on the above estimation result, the leakage gas
When the amount exceeds the alarm level at time x _{n + 1} after 1 minute, the support guidance process for countermeasures is performed as follows. The storage device 4 based on the above estimation result
From 0, the following information on gas leakage countermeasures is extracted.

(1) Types and characteristics of leaked gas (toxicity, flammability, flammability) (2) Leakage gas detection location and countermeasures The above (1), (2) and the amount of leaked gas are alarmed. The fact that the level is exceeded after 1 minute is output to the guidance output device 50. Furthermore predicted amount of gas leakage, as described above, if the time exceeds the measurement limit of the predetermined time, and outputs the value to Guy dance output device 50 graphically as shown in Figure 5 .

Next, even if countermeasures are taken in accordance with the above countermeasure support guidance, if the effects of the countermeasures are not sufficiently obtained, or the status of the related equipment or the like that cannot be obtained from the measuring device 20 (abnormal sound, abnormal heat generation) , Sewage, etc.) will be described when the observer can grasp. In this case, the monitor inquires the processing device 30 in an interactive manner from the input device 60, and the processing device 30 extracts information on the cause of the new equipment alarm based on the new information obtained from the storage device 40,
Make guesses about the query. Information on new gas leakage and information on countermeasures based on the estimation result are extracted from the storage device 40 and output to the guidance output device 50.

The obtained information includes, for example, the following information. (1) Items related to production gas supply cutoff judgment (Example) Depending on the location of the leaking gas supply line that is leaking and the degree of loss due to production stoppage of the cutoff system, it is possible to immediately stop it with its own judgment or with the permission of the supervisor Criteria for stopping, the order of stopping, and the contents of the broadcast to the production line (2) Items related to evacuation judgment of employees (Example) Evacuation range, evacuation order and evacuation route of employees engaged in the production line The information addition / modification processing will be described.

Addition of information related to gas leakage countermeasures and judgment decisions
The addition and correction are performed by the input device 60. The added / modified information is stored in the storage device 40. A confirmation can be made by operating the input device 60 to output the added / modified result to the guidance output device 50.

A third embodiment of the present invention will be described with reference to FIG.

In this embodiment, a device including the measuring device 20, the processing device 30, the storage device 40, the guidance output device 50, and the input device 60 of the first embodiment, the CRT 2, the alarm buzzer 4, This is combined with an alarm monitoring device for notifying the operating status of equipment such as the alarm lamp 6 and the generation of an alarm.

The alarm monitoring for notifying the sensor information b _{1 to} b _n and the alarm information a for gas leakage is performed by the output of the measuring device 20. As a result, the sensor status and the alarm are displayed, and the guidance output device 50 solves the gas leak alarm, the alarm level reaching prediction, the estimation of the gas leak amount exceeding the measurement limit, and the countermeasures, as in the first embodiment. Is displayed. 52 is CR
T and 54 are recording devices.

The drive of the processing device 30 may be started based on the alarm information.

The above-mentioned gas leak warning, the warning level reaching prediction, the estimation of the gas leak amount exceeding the measurement limit, and the guidance display of the countermeasure can be performed by the common display device 70. The display device 70 includes a mode switching device 72,
It comprises a display unit 74 such as a CRT, and includes sensor information b _{1 to} b _n and alarm information a from the measuring device 20, a gas leak alarm from the processing device 30, an alarm level reaching prediction, and a gas leak amount exceeding the measurement limit. Is switched by the mode switching device 72 and input to the display unit 74. In the first mode, the display section 74 displays the sensor information b _{1 to} b _n and the alarm information a.
Is displayed, and in the second mode, the gas leak warning, the warning level reaching prediction, and the estimation of the gas leak amount exceeding the measurement limit are displayed on the display unit 74 as guidance information.
In the mode of, the display section 74 displays sensor information b _{1 to} b _n and alarm information a, and provides guidance information including a gas leak alarm from the processing device 30, prediction of reaching an alarm level, and estimation of a gas leak amount exceeding the measurement limit. Are displayed at the same time. The control of the mode switching device 72 is performed by the input device 60. The input device 60 includes a keyboard 64 and an interface 62, and the selection of a key on the keyboard 64 is converted into a control signal by the interface 62.

Referring to FIG. 7, a fourth embodiment will be described.

This embodiment is an embodiment in which the signal of the sensor group 10 is converted into a digital signal in the measuring device 20.

The sensor group 10 is made of a sensor S ₁ to S _n, is input to the measuring device 20. Signals of the sensors S ₁ to S _n are input to the analog multiplexer 21 of the measuring device 20. Analog multiplexer 21 sends the order sample and hold circuit 22 a signal of the sensor S ₁ to S _n under the control of the control logic 25. Sample-and-hold circuit 22 is controlled by the control logic 25 a signal of the transmitted sensor S ₁ to S _n, and the sample-and-hold, further sent to the next analog-digital conversion circuit 23. The analog / digital conversion circuit 23 includes the analog sensors S ₁ to
Converts the signal S _n into a digital signal and sends to the interface circuit 24. The analog / digital conversion circuit 23 and the interface circuit 24 are controlled by the control logic 25.

The digital signal is transmitted to the processing device 30 via the interface 24, and operates in the same manner as in the first embodiment.

The measuring device 20 indicated by the one-dot chain line
It is suitable for a waveform that changes at a low speed, and can be configured as a module or an IC.

Referring to FIG. 8, a fifth embodiment will be described.

This embodiment is similar to the measuring device 2 of the fourth embodiment.
In the configuration of 0, by replacing the order of analog multiplexer 21 and the sample and hold circuit 22, the sample-and-hold circuit in each of the sensor S ₁ to S _n 22 _1, 22
_2, ... _22n and connect the sample and hold circuit 22
_1, 22 _2, ... 22 _n and analog multiplexer 2
1 and the interface circuit 24 controls the analog / digital conversion circuit 23. The digital signal is transmitted to the processing device 30 via the interface 24, and operates as in the first embodiment.

Referring to FIG. 9, a sixth embodiment will be described.

This embodiment is effective when a sensor or a measuring device is located at a remote point.

[0053] analog sensor S ₁ ~S _n is, the sample
Hold circuit 22 _{1, 22} 2 are connected to.. 22 _n, further analog-to-digital converter circuit 23 _{1, 23} 2, ... 2
_3n . Sample and hold circuit 22 _1, 22
_2, ... _22n and analog / digital conversion circuit 23
_{1, 23} 2, ··· _{23 n} are controlled by the control of the control logic 25. Analog / digital conversion circuit 23 _1, 23
_The signals converted into digital signals by _{2, n} are transmitted to the digital multiplexer 26 via a transmission path. The digital multiplexer 26 is transmitted to the processing device 30 via the interface circuit 24,
The operation is the same as in the first embodiment.

Referring to FIG. 10, a seventh embodiment will be described.

This embodiment is an embodiment in which measuring instruments are connected by a common bus.

Each of the sensors S _{1 to} S _n is provided with a local control 27 _1, 27 _2, ... 27 _n . These local controls 27 _1, 27 _2, ...
_27n are connected to the processing device 30 by a common bus.

Local control 27 _1, 27 _2, ...
_27n may be constantly measured, or any number may be constantly measured, and the other may be selectively measured as needed. Local control 27 _1, 27 _2,
... The input device 60 sets which measurement device of 27 _n is to be always measured and which measurement device is to be selectively measured.

Referring to FIG. 11, an eighth embodiment will be described.

This embodiment has a configuration in which the device of the present invention can be checked and trained.

The configuration of the eighth embodiment is different from the third embodiment of FIG. 6 in that a storage device 80 is provided instead of the sensor group 10, and an evaluation device 90 is provided between the processing device 30 and the guidance output device 50. Is provided.

The storage device 80 stores the output state that the sensor group 10 can take, a gas leak alarm in that state, an alarm level reaching prediction, an estimation of a gas leak amount exceeding the measurement limit, and guidance information on the countermeasures. Yes,
In accordance with the selection signal from the interface 62 of the input device 60, a combination of signals in a certain output state of the sensor group is output. The signal from the storage device 80 enables the device of the present invention to be checked and trained.

The check of the apparatus of the present invention is performed as follows.

As described above, the state signal of the setting state selected by the input device 60 from the storage device 80 is
And the same operation as described in the third embodiment is performed. By this operation, the gas leak warning, the warning level reaching prediction, the estimation of the gas leak amount exceeding the measurement limit, and the information of the countermeasure are input from the processing device 30 to the evaluation device 90 together with the guidance output device 50. In addition, the evaluation device 90 receives a gas leak alarm corresponding to the state of the sensor group from the storage device 80 via the interface 62 in response to the selection signal of the input device 60, a prediction of reaching the alarm level, and a gas leak exceeding the measurement limit. Guidance information on the estimation of the amount and the countermeasure is input. Evaluation device 90
Is based on the cause of the alarm obtained from the storage device 80 and the guidance information for solving the cause, the gas leak alarm from the processing device 30, the alarm level reaching prediction, and the estimation of the gas leak amount exceeding the measurement limit. Then, the guidance information of the countermeasures is evaluated to check the device, and the evaluation result is displayed on the guidance output device 50.

The training of the apparatus of the present invention is performed as follows.

In the same manner as the check of the device of the present invention, the sensor signal selected by the input device 60 from the storage device 80 is input to the measuring device 20, and the gas leak alarm, the alarm level arrival prediction and the The guidance output device 50 displays information on the estimation of the amount of gas leakage exceeding the measurement limit and the countermeasures. The trainee performs a countermeasure operation from the input device 60 according to the display on the guidance output device 50. The evaluation device 90 compares the operation of the trainee with the instruction information from the processing device 30, and displays the evaluation result and a new instruction on the guidance output device 50.

It should be noted that the present invention is not limited to the above-described embodiment, and various modifications are possible based on the gist of the present invention, and they are not excluded from the scope of the present invention.

[0067]

As described above, according to the present invention, the following effects can be obtained. (1) Disaster prevention measures can be taken in advance by estimating the alarm gas arrival time of the amount of leaked gas. (2) By estimating the amount of leaked gas exceeding the measurement limit, measures to prevent the spread of damage can be taken. (3) By providing guidance on gas leakage countermeasures, evacuation guidance, and decision making to stop production, it is possible to respond at the same level as skilled and responsible personnel. (4) Since knowledge can be added and modified, the capability of the system can be expanded.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a gas leakage prediction and countermeasure support device showing a first embodiment of the present invention.

FIG. 2 is a schematic view showing a conventional gas leak alarm panel.

FIG. 3 is a diagram showing a relationship between measurement time x and measurement data y.

FIG. 4 is a diagram showing a relationship among a measurement time x, measurement data y, and an alarm level.

FIG. 5 is a diagram showing a relationship among a measurement time x, measurement data y, an alarm level, and a measurement limit.

FIG. 6 is a schematic diagram of a gas leak prediction and countermeasure support device according to a third embodiment of the present invention.

FIG. 7 is a schematic view of a gas leakage prediction and countermeasure support device according to a fourth embodiment of the present invention.

FIG. 8 is a schematic diagram of a gas leakage prediction and countermeasure support device according to a fifth embodiment of the present invention.

FIG. 9 is a schematic diagram of a gas leakage prediction and countermeasure support device according to a sixth embodiment of the present invention.

FIG. 10 is a schematic diagram of a gas leakage prediction and countermeasure support device according to a seventh embodiment of the present invention.

FIG. 11 is a schematic view of a gas leakage prediction and countermeasure support device according to an eighth embodiment of the present invention.

[Explanation of symbols]

2 CRT 4 Alarm buzzer 6 Alarm lamp 10 Sensor group 20 Measuring device 21 Analog / Muxplexer 22 _{1 to} 22 _n Sample and hold circuit 23 Analog / Digital conversion circuit 24 Interface circuit 25 Control logic 26 Digital Muxplexer 27 _{1 to} 27 _n Local control 30 processor 40 memory 50 the guidance output unit 52 CRT 54 recording device 60 input device 62 interface 64 keyboard 70 display 72 mode switching device 74 display unit 80 storage device 90 evaluation device S ₁ to S _n sensor

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yuji Wakabayashi 8-21-1, Ginza, Chuo-ku, Tokyo Inside Takenaka Corporation Tokyo Main Store (72) Inventor Toshimichi Mihara 8-21, Ginza, Chuo-ku, Tokyo No. 1 Takenaka Corporation Tokyo Main Store (56) References JP-A-2-226500 (JP, A) JP-A-3-160201 (JP, A) JP-A-63-174104 (JP, A) JP Hei 2-157486 (JP, A) JP-A-64-29997 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G08B 17/00-21/24 G05B 13/00-13 / 04 G05B 21/00-21/02

Claims (2)

(57) [Claims] 1. An apparatus for predicting a gas leakage amount and supporting a countermeasure, comprising: (a) a gas leakage sensor; and (b) an analog amount from the gas leakage sensor is periodically measured.
A measuring device for measuring, based on the measurement data from the (c) the measuring device, the time and the amount of leakage gas reaches the warning level, in advance the time and the predicted leakage gas amount amount leakage gas exceeds measurement limit Predict,
(D) a processing device for estimating measures for preventing occurrence of a disaster or for spreading damage, measures for evacuation guidance and production stoppage, and (d) a time required for the amount of leaked gas estimated by the processing device to reach an alarm level, time and the predicted leakage amount of gas amount exceeds the measurement limit and the guidance output unit for displaying the countermeasure for that gas leakage, (e) time and the amount of leakage gas reaches the warning level, leakage
Measures and for algorithms and disaster prevention and prevent damage from spreading to the amount gas inferences time exceeding the measurement limit and the predicted leakage gas volume, information for supporting measures evacuation or production stoppage is stored and a is a storage device, (f) and an input device to probe measures in the processing apparatus and interactively, and output from the storage device (g) the measurement data, prior to
The amount of leaked gas estimated by the
Time to reach or when the amount of leaked gas exceeds the measurement limit.
And predicted leaked gas volume and the prevention of disaster occurrence and damage spread
And measures for evacuation guidance and production stoppage
A gas leakage prediction and countermeasure support device characterized in that the device is checked by inspecting the output . 2. The time when the measured data is output from the storage device, the time when the leaked gas amount estimated by the processing device reaches the alarm level, the time when the leaked gas amount exceeds the measurement limit, and the predicted leaked gas amount And measures for preventing the occurrence of disasters and the spread of damage, and measures for evacuation guidance and production stoppage, and comparing the output with the measures input from the input device, to conduct device training. 2. The gas leakage prediction and countermeasure support device according to claim 1, wherein: