JP3019443B2 - Brittle plate cutting equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for cutting a brittle plate-like object, for example, a sheet glass, a liquid crystal plate, an IC substrate, and the like.

[0002]

2. Description of the Related Art Semiconductor sensors, solar cell chips, ICs, and the like are formed as a large number of chips on a single thin substrate and then individually cut into products. For this reason, a quick and accurate cutting means is required. These substrates are plate-shaped brittle materials, and as a cutting method, conventionally,
There are general methods such as a thermal cutting method using a laser beam and a cutting method using a diamond cutter. However, all of these general methods have to be cut one by one along the cutting line of the plate, so that cutting is extremely time-consuming and inefficient. In the method using a cutter, since a kerf is applied and a bending moment is applied by hand to break the cutting line, undulation of the cutting line, roughness of the cut surface, and a so-called tongue (lip) remain, and furthermore, cutting is performed. There is a problem that the chip itself is broken due to local stress applied to the line. Chips and noise during cutter cutting can be a problem.

[0003] Further, it is difficult to cut a thick plate such as a sheet glass having a thickness of 15 mm or more, for example.

Therefore, in recent years, a method utilizing the brittleness of a plate for cutting a brittle plate (hereinafter, referred to as a brittle plate cutting method) has been proposed (Transactions of the Japan Society of Mechanical Engineers, Vol. C, Vol. 55, No. 51).
No. 3 (1989-5)). In a brittle plate, the tensile strength σ ′ is significantly smaller than the compressive strength σ ″. Therefore, theoretically, a tensile force is applied to the cross section of the plate while applying a bending moment to both sides of the cross section to be cut. Brittle sheet cutting generally applies some stress to the entire sheet material and concentrates it on the intended cut surface in the form of the above bending moments and tensile forces. This is a very efficient method that allows the entire cutting line to be cut at the same time and is therefore suitable for cutting one brittle plate into a plurality of cells at the same time. This method does not have any drawbacks due to the general cutting method.Specifically, if a cutting groove is formed in the cutting line, the cutting will be significantly affected and the cutting will be accurate and easy. Put a groove, in which pressing by sandwiching a large material elastic modulus than the brittle plate.

Another method for cutting a brittle plate by sandwiching the brittle plate between two flat plates is disclosed in JP-A -58-139119,
It is disclosed in JP-A-58-139120 . In this example, the brittle plate is bent by a press together with the two flat plates sandwiching the brittle plate, or bent by the dynamic pressure of compressed air.

[0006] JP-A-64-69534 and JP-A-1-190412 disclose that a projection or a pillow material corresponding to a cut groove of a brittle plate is provided with an elastic film on a surface opposite to the cut groove. A method of contacting and pressing the whole is disclosed.

However, the above-mentioned document (Transactions of the Japan Society of Mechanical Engineers (C
The brittle plate cutting method described in Vol. 55, No. 513 (1989-5)) is a method in which a brittle plate such as a glass plate is sandwiched between two plates such as an acrylic plate having a smaller Young's modulus than the brittle plate and pressed by a press. Yes, it cannot be used to cut cells that are easily broken.

[0008] JP-A-58 over 139,119, JP
In the method disclosed in Japanese Unexamined Patent Publication No. 58-139120 , if the brittle plate has a uniform thickness and the kerfs are equally spaced, the stress is evenly distributed throughout the plate and the plate is cut evenly. If the distribution of the kerf line of the brittle plate is non-uniform and therefore the distribution of the elastic modulus of the plate is non-uniform, it is difficult to apply a uniform stress to the whole brittle plate. Therefore, in a substrate or the like in which chips of different shapes are combined, only a part of the cutting line is cut, the cutting line undulates, or a perpendicularity of the cut surface cannot be obtained. Chip breakage may also occur. Further, when the cell to be cut has irregularities, it cannot be pressed between two flat plates. Therefore, in this method, the shape and distribution of the cutting line and the type of chip are limited in order to obtain a high-precision cutting.

The methods disclosed in JP-A-64-69534 and JP-A-1-190412 avoid a part of the brittle plate from being curved, and some of the above problems have been solved. Has not been improved.

[0010] As described above, it is not easy to rupture according to a predetermined cut surface with high accuracy by the conventional cutting method. The cause is largely due to uneven bending moment and uneven tensile force. If the bending moment and the tensile force are not uniform, a stress distribution different from that of the cutting line occurs. The causes of the non-uniformity of the bending moment are mainly that in the conventional example in which the entire brittle plate is curved, the interval between the kerfs is not uniform, and the projection through the elastic body by a pressing device such as a flat press without bending the brittle plate. In the example of pressing the kerf, a region where pressure is insufficient and a region where pressure is excessive due to uneven thickness of the elastic body are generated. In such a case, the tensile force along the cutting line also becomes uneven. Further, in the latter case, it is difficult to generate a bending moment in a portion having a small protrusion interval.

In any case, it is a necessary condition that the thickness of the elastic film is made uniform and that the press table for pressing the elastic film uniformly compresses the elastic film. It is difficult to manufacture a high-precision, and it is not possible to reduce the cost.
That is, there is a serious problem that the cutting is not performed along the cutting line and the yield of the cutting process is low. In the conventional example, when a sheet glass having a thickness of, for example, about 1 mm is cut due to such uneven pressure applied to the elastic film, the cutting line having a width of about 100 μm fluctuates around a predetermined cutting line.

Therefore, in order to realize a highly accurate cutting of a brittle plate, a uniform pressure is applied to the brittle plate without being affected by the spacing / shape of the cutting lines or protrusions or the surface shape of the brittle plate. Therefore, it is necessary to generate a uniform bending moment on both sides of the cut surface and generate a uniform tensile force on the cut surface.

[0013]

SUMMARY OF THE INVENTION The present invention overcomes the above-mentioned drawbacks while maintaining the advantages of the conventionally known brittle cutting method, and further provides a brittle plate of any shape and any elastic modulus distribution, and any shape. Brittle plate cutting equipment that can achieve high cutting accuracy and yield even for cutting lines
The purpose is to provide a device.

[0014]

DISCLOSURE OF THE INVENTION Brittle plate cutting according to the present invention
In order to achieve this purpose , the device is provided with a scribe machine along the cutting line with a super-hard chip, diamond chip, etc. on a brittle plate, and protrudes on the opposite side without the kerf to each kerf. Alternatively, a pillow material is arranged , and a uniform pressure is applied to each part of the brittle plate by static fluid pressure (hereinafter, simply referred to as static pressure) from the kerf side.

The brittle plate cutting apparatus applies a uniform pressure to each part of the brittle plate, which is not affected by the shape of the brittle plate, by applying a static pressure to the kerf side of the brittle plate.

[0016]

According to the brittle plate cutting device of the present invention, since the static pressure of the fluid is applied to the brittle plate from the side of the kerf, a uniform opposite direction is formed on both sides of the projection ridge line regardless of the projection shape and the interval between the projection ridge lines. A bending moment is generated , which becomes a tensile stress at the predetermined cutting plane, and enables extremely accurate cutting.

Further, the brittle plate cutting device, and with projections jig ridge has a scheduled cutting line having the same shape of the brittle plate, and the base with a recess for accommodating the tool, the fluid pressurizing the static pressure Since the pressure output member is provided, a kerf is provided along the predetermined cutting line on the surface of the brittle plate opposite to the protrusion, and the protrusion has a brittle shape so that its planar shape and the protrusion ridge shape overlap. If the brittle plate is brought into contact with the plate and a static pressure is applied to the brittle plate from the side having the kerfs , the brittle plate can be easily cut as described above.
Can be.

In particular, a static pressure output having a side wall on which the static pressure output body is held by a holding body, a bottom of an elastic body integrally formed with the side wall, and an elastic seal edge integrally formed on the upper side of the side wall. Since a watertight space can be formed when the cover of the static pressure output body is covered, a static pressure can be easily output from the bottom of the static pressure output body.

In this case, the bottom of the static pressure output body is pressed against the brittle plate with which the protruding jig abuts, so that the shape and the interval of the cutting line of the brittle plate are different. The required bending moments can be generated on both sides of the intended cutting plane without being affected, so that a high-precision cutting can be performed.

[0020]

EXAMPLES Referring to the accompanying drawings brittle plate switching of the present invention
An embodiment of the cutting device will be described. FIG. 1 shows an embodiment of the present invention.
It is a mimetic diagram showing the concept of cutting a brittle plate using a certain brittle plate cutting device . A jig (16) having a protrusion (16A) having substantially the same shape as the cutting line of the brittle plate and an elastic film (30) to be placed on the jig are prepared. The projections may be made in a mold according to the cutting line of the brittle plate to be cut, but a V-shaped groove having the same shape as the cutting line is carved on the upper surface of the jig (16).
This can be easily achieved by placing a stainless steel rod having a circular cross section in the groove. In the cross section of the projection, it is necessary that a portion in contact with the elastic film is convexly curved.

Next, the brittle plate (20) provided with the kerf (20A) along the cutting line with a scriber having a carbide tip having a tip angle of, for example, 125 degrees with the kerf facing upward, and The shape of the cut groove (20A) and the projection (16
The elastic film (3) is set so that the shape of the ridge line of (A) matches.
0) Place on top.

Finally, the elastic film (14) is also provided on the side having the kerfs.
And apply the static pressure of the fluid from above the kerf.

When pressurized in this manner, the static pressure generates a bending moment as shown by arrow A between the projections on the brittle plate, while generating a compressive force in the cross section connecting the cut groove and the projection. This compressive force causes the elastic film in the portion in contact with the protrusion to be stretched, and as a result, a tensile force shown by arrow B is applied to the brittle plate. When the elastic film is arranged on the upper surface of the cut brittle plate, the same tensile force is generated at both ends of the cut groove. Thus, opposite bending moments and tensile forces are applied to both sides of the cross section of the plate connecting the projection and the kerf, and when these exceed the elastic limit of the brittle plate, the plate breaks.

FIG . 2 shows the cutting of a brittle plate having irregularities on the surface .
The concept when doing In other words, it shows that this method of applying a static pressure can be applied even when unequal pressure is applied to an uneven portion to break a cut piece or a special press is required in the conventional press working. Figure in this figure
1 to those having the same functions as are given the same symbols as FIG.

Next, referring to FIG. 3 , a static pressure pressing device including a lid (112), a static pressure output body (114), a holder (113), and a base (115), and a jig with projection (116) ) And the elastic film (130) of the present invention will be described in detail. In addition, a fluid is injected into the static pressure pressurization device by an external fluid pump. By this fluid injection, the bottom (114B) of the static pressure output body is placed under the brittle plate 12 thereunder.
The static pressure is increased to zero.

The brittle plate (120) provided with a kerf (120A) along the cutting line is made of an elastic film (130A, 130A).
B) For example, sandwiched between polyethylene films and placed on a jig (116). This jig has a protrusion (1) having a ridge line having substantially the same shape as the shape of the cut groove (or cutting line) of the brittle plate.
16A), and are placed so that the shape of the ridge line of the brittle plate matches the shape of the ridge. The entire jig (116) on which the brittle plate is placed is placed on the bottom (115C) of the upward recess (115B) of the base (115). The depth of the recess is formed such that the upper surface 115A of the opening is substantially flush with the upper surface of the brittle plate (or the upper surface of the elastic film (130B) when there is an elastic film (130B)) in the recess.

On the upper surface (115A) of the base (115), a static pressure output body (114) for outputting the pressure of a static fluid (hereinafter referred to as static pressure) is mounted. This static pressure output body is made of an elastic material such as rubber, and has a hollow cylindrical shape with a bottom that opens upward as a whole, and has a side wall (114B) and a bottom (114).
C) is integrally molded. This static pressure output body has irregularities (114D) on the outer surface of the side wall, and the irregularities
The holder (113) placed on the upper surface (115A) of the stand (115) is fixed in the bore by fitting into the unevenness (113D) on the inner surface of the bore.

A seal (114A) protruding outside the bore of the holding body (113) is provided on the upper side wall of the static pressure output body (114), and the lid (112) is mounted on the seal (114A). When placed, the lid (112) and the static pressure output body (1)
14), a substantially cylindrical watertight space (hereinafter, referred to as a pressurized fluid space) is formed. In order to prevent the lid from withstanding the pressure in the pressurized fluid space and prevent the fluid from leaking from the seal (114A), the lid (112) is attached to the holder (113) and the base (115). Screwed,
Alternatively, it is pressed by the presses (111A, 111B) together with the table (115) and the holder (113).

The bottom of the static pressure output member (114) forms a substantially flat elastic film before pressing, and is flush with the lower surface of the holder (113), that is, the upper surface (115A) of the base (115). Is placed on the brittle plate together with the holder (113),
When fluid is introduced into the pressurized fluid space by a fluid pump (not shown), the resilient bottom (114C) applies the required static pressure to the brittle plate surface for cutting.

The bottom of the present static pressure output member is deformed and adheres to the shape of the brittle plate. Therefore, the elastic film (130B) placed on the brittle plate as shown in FIGS . 1 and 2 may be omitted.

When the elastic bottom is placed on the brittle plate together with the holder (113), the center of the bottom is its own weight, and the center is the lowest. Is spread to the periphery, so that unlike the conventional technology in which the elastic film is spread, even when the brittle plate has a flat surface, good adhesion to the brittle plate can be obtained.

The pressurized fluid space passes through a fluid injection passage (112B) and a fluid inlet (112A) in the side wall of the lid (112).
Through the passage and by means of a fluid which is gradually injected via this path, at all points in the pressurized space and thus at the bottom (1
An arbitrary static pressure is realized everywhere in 14C). It should be noted that as a feature of the static pressure, even if the bottom (114C) is deformed to any shape according to the surface shape of the brittle plate, a constant pressure perpendicular to the surface of the brittle plate is generated at all positions of the bottom. Therefore, it should be noted that, regardless of the surface shape of the brittle plate, a uniform tensile force is provided on both sides of the kerf and a uniform bending moment and tensile force are provided on both sides of the pillow.

The fluid suitable for this purpose may be a liquid or a gas. However, the fluid used in the development stage of the present invention is mainly liquid (water).
It is. The method of injecting / discharging the liquid and the pump are techniques well known to those skilled in the art, and will not be described further here.

For comparison with the prior art, cutting data when cutting the sheet glass using the present apparatus is shown below. Projection: SUS round bar (diameter 2 mm). Elastic membrane: polyethylene film (0.1 mm thick) Brittle plate: sheet glass (Corning 7059, 1.1 mm thick) Hydraulic pressure: about 50 kg / cm2 Cutting accuracy: fluctuation width of cutting line ≤ 10 microns Mirror condition

The result As can be seen from the fluctuation of the actual cutting line in the cutting by the device <br/> of the present invention (swell) very
In addition, the cutting surface is small , the smoothness of the cut surface is good, and brittle plate cutting with high accuracy is realized.

Although the embodiment of the cutting device of the present invention has been described above, the cutting device of the present invention is not limited to this. For example, those skilled in the art can easily change the design of the elastic static pressure output body, the holding body that holds the static pressure output body, the shape of the lid, and the like within the scope of the present invention.

It is apparent that the elastic film placed between the projection and the brittle plate can be variously changed according to the elastic modulus of the target brittle plate, or that they can be combined.

[0038]

When the brittle plate cutting device of the present invention is used,
As described above, the lower elastic film is placed on a jig having projections corresponding to the respective cutting lines of the brittle plate to be cut, and the respective cut grooves and the corresponding projections provided on the cutting lines are vertically overlapped. As described above, the brittle plate is placed so that the side of the brittle plate without the kerf comes to the projection side, and the upper elastic film is placed on the surface of the brittle plate on the kerf side. Since pressure is applied from above, uniform pressure can be applied to the brittle plate without being affected by the spacing and shape of the cutting lines or protrusions and the surface shape of the brittle plate, and therefore, the cut surface is cut to the intended cut surface Stress can be concentrated, and even a brittle plate having a complicated cutting line or a complicated surface shape can be cut along a cutting line with high accuracy and excellent cutting surface smoothness.

Further, the brittle cutting device of the present invention comprises a jig having a projection corresponding to each cutting line of the brittle plate to be cut, and the brittle plate placed on the jig sandwiched between two elastic films. A pressurizing device for pressurizing between the jig and the jig, so that the kerf of the brittle plate provided on the cutting line coincides with the corresponding protrusion, and the side without the kerf is a protrusion. Since it has a static pressure output body that is placed on the jig so as to come to the side and pressurizes the upper surface of the brittle plate with static pressure, as described above,
Cutting can be easily realized.

Further, the above-mentioned static pressure output body comprises a base having a recess for accommodating the jig with a projection, and a static pressure output comprising side walls, a bottom and an upper edge of a side wall of an integrally molded elastic body. Body, a holding body for holding the static pressure output body on the brittle plate, and a watertight lid of the static pressure output body, so that a watertight space can be easily formed inside the static pressure output body. So you can
By injecting a fluid from a fluid passage that communicates with this space from the side, a static pressure applied to the upper surface of the brittle plate can be realized. Therefore, an efficient and high-precision cutting device can be obtained without being affected by the surface shape of the brittle plate, the shape of the cutting line, the distance between the pillows or the projections, and the like.

The cutting apparatus according to the present invention has an additional advantage that the well-known Pascal principle for static pressure can be used. According to Pascal 's principle, when the pressure required for the static pressure output body is P, the output pressure of the fluid pump may be P. This is important in the case of cutting large brittle plates. The reason is that a very large device is required to press a large brittle plate with a press, but the device of the present invention can easily obtain the required pressure.

[Brief description of the drawings]

FIG. 1 is a schematic view illustrating the concept of a brittle cutting method according to the present invention.

FIG. 2 is a diagram showing an example in which the cutting method of the present invention is applied to a brittle plate having irregularities on the surface.

FIG. 3 is a view showing a brittle plate cutting device of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 brittle plate cutting device 14, 30, 114, 130 elastic film 16, 116 jig with projection 20, 120 brittle plate 112 lid 113 holding body 114 static pressure output body 115 units

Claims (1)

(57) [Claims] 1. A projection having a kerf on at least one surface and contacting a brittle plate sandwiched between elastic films .
Kino includes a jig, and the jig abutting been surface opposite static pressure device for providing a static pressure of fluid in該脆resistance plate on the surface of, cutting the brittle plate by the static pressure an apparatus, wherein the jig, ridge shape of the protrusions are those having the same shape of該切Ri grooves of該脆resistance plate, the static pressure system, accommodates a jig with said projection A static pressure output body having a side wall, a bottom of an elastic body integrally formed with the side wall, and an elastic seal integrally formed on an upper portion of the side wall; and a side wall of the static pressure output body. When it is engaged with the outer surface of the static pressure output body side wall and is fixed to the upper surface of the base, the lower end of the static pressure output body side wall is positioned on the base and the static pressure A holder for holding the hydrostatic output body such that an output body bottom is located on the recess of the base; A lid with a fluid injection passage fixed to an upper edge of a body seal, the lid forming a watertight space for storing a pressurized fluid between the lid and the static pressure output body when fixed to the upper edge of the seal. When a pressurized fluid is injected from the fluid injection path into the watertight space, the static pressure output body bottom is configured to pressurize the static pressure of the fluid on the upper surface of the brittle plate disposed in the recess. A brittle plate cutting device characterized by the above-mentioned.