JP3019378B2 - Bonding agent for electrical bonding of ceramics - Google Patents

Bonding agent for electrical bonding of ceramics

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Publication number
JP3019378B2
JP3019378B2 JP2213068A JP21306890A JP3019378B2 JP 3019378 B2 JP3019378 B2 JP 3019378B2 JP 2213068 A JP2213068 A JP 2213068A JP 21306890 A JP21306890 A JP 21306890A JP 3019378 B2 JP3019378 B2 JP 3019378B2
Authority
JP
Japan
Prior art keywords
bonding
bonding agent
ceramics
scf
agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2213068A
Other languages
Japanese (ja)
Other versions
JPH0497959A (en
Inventor
真志 沼野
博史 高井
夏美 三宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2213068A priority Critical patent/JP3019378B2/en
Priority to EP91911194A priority patent/EP0486706B1/en
Priority to PCT/JP1991/000796 priority patent/WO1991019689A1/en
Priority to US07/834,258 priority patent/US5352385A/en
Priority to DE69130104T priority patent/DE69130104T2/en
Publication of JPH0497959A publication Critical patent/JPH0497959A/en
Application granted granted Critical
Publication of JP3019378B2 publication Critical patent/JP3019378B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は、電気接合方法に用いるセラミックスの電気
接合用接合剤に関するものである。
The present invention relates to a bonding agent for electrical bonding of ceramics used in an electrical bonding method.

<従来技術> セラミックスは、金属に比べて高温強度、耐熱衝撃
性、耐摩耗性等に優れているので、ガスタービン、自動
車エンジン、熱交換器等への応用開発が進められてい
る。
<Prior Art> Ceramics are superior to metals in high-temperature strength, thermal shock resistance, abrasion resistance, and the like, and are being applied to gas turbines, automobile engines, heat exchangers, and the like.

上記各種用途に、セラミックスを利用して、その機能
を十分に発揮させるためには、製造工程でこれらセラミ
ックス相互を接合させることが必要となってくる。
In order to fully utilize the functions of ceramics for the various uses described above, it is necessary to join these ceramics together in the manufacturing process.

そこで、接合強度を高める接合剤が種々提案されてい
る。例えば、特開昭62−65986号に示されるように、特
に接合部のみを加熱して接合するために、A2O3,SiO2
のガラス成分を主成分として、CaF2,NaF等のフッ化物に
金属酸化物、希土類酸化物等を配合した導電性を有する
接合剤が用いられている。接合に際しては、この接合剤
を横切る方向に電流を流し、そのときに生じるジュール
熱により、セラミックス同士の接合を行っている 上記の導電性成分を含む接合剤については、まだ開発
段階中のものが多く、被接合体セラミックスの材質への
適合性の確認、また接合後の高温強度、安定性、再現性
等を増大させるための開発が続けられている。
Therefore, various bonding agents for increasing the bonding strength have been proposed. For example, as shown in JP-A-62-65986, for joining particularly by heating only the joint, A 2 O 3, SiO 2
An electrically conductive bonding agent is used which contains a glass component as a main component and a metal oxide, a rare earth oxide or the like mixed with a fluoride such as CaF 2 or NaF. At the time of joining, an electric current is passed in the direction crossing this joining agent, and the ceramics are joined by the Joule heat generated at that time. In many cases, development for confirming the compatibility of the ceramics to be joined to the material and increasing the high-temperature strength, stability, reproducibility and the like after the joining are continued.

ところで、導電性成分の中でも、特にCaF2,NaFを含む
接合剤は、接合層の再現性及び安定性面で良い結果が得
られていることがわかっている。
By the way, among the conductive components, it is known that a bonding agent containing CaF 2 and NaF in particular has obtained good results in terms of the reproducibility and stability of the bonding layer.

<発明が解決しようとする問題点> しかしながら、従来の接合剤を用いて接合した場合、
接合剤中に含まれるCa,Na元素が接合層に残留するため
に、接合体の各種特性を低下させる原因となっている。
例えば接合強度について述べると、接合層中のCa2+また
はNa+は高温下で接合層の粘性を下げるために、高温で
の接合強度を低下させる。例えばSi3N4セラミックス接
合体の場合、1000℃を越えると著しく強度が低下する。
<Problems to be solved by the invention> However, when joining is performed using a conventional joining agent,
Since the Ca and Na elements contained in the bonding agent remain in the bonding layer, they cause various properties of the bonded body to deteriorate.
For example, regarding the bonding strength, Ca 2+ or Na + in the bonding layer lowers the bonding strength at a high temperature to lower the viscosity of the bonding layer at a high temperature. For example, in the case of a Si 3 N 4 ceramics joined body, if the temperature exceeds 1000 ° C., the strength is significantly reduced.

<問題点を解決するための手段> 本発明者は、このような現状において、従来技術の欠
点を改善し、セラミックス成形体を高温部材として用い
る際に、必要な高温強度を維持するセラミックスの接合
技術の開発を目的として研究を行い、この目的に好適な
電気接合用接合剤を見出すに至った。
<Means for Solving the Problems> Under such circumstances, the present inventor has sought to improve the disadvantages of the prior art and to join ceramics that maintain necessary high-temperature strength when using a ceramic molded body as a high-temperature member. Research was conducted for the purpose of developing technology, and a bonding agent for electric bonding suitable for this purpose was found.

すなわち、本発明は、ScF3を主成分とするか、または
ScF3と、A2O3及びSiO2の少なくとも一種とを主成分
とする電気接合用接合剤を特徴とするものである。
That is, the present invention comprises ScF 3 as a main component, or
It is characterized by a bonding agent for electric bonding mainly comprising ScF 3 and at least one of A 2 O 3 and SiO 2 .

以下、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.

本発明の接合剤の配合比は、ScF3が15wt%以上で、A
2O3及びSiO2の少なくとも一種を残余とする。このよ
うに限定した理由は、逆にScF3が15wt%以下になると、
接合剤の抵抗値が高くなり、通電できなくなる。たとえ
通電できたとしても、ここで生じるジュール熱の発生が
均一でなくなるために、部分的に未溶融部が生じ、良好
な接合体が得られない。
Compounding ratio of the bonding agent of the present invention, in ScF 3 is 15 wt% or more, A
At least one of 2 O 3 and SiO 2 is the remainder. The reason for this limitation is that when ScF 3 becomes 15 wt% or less,
The resistance value of the bonding agent becomes high, and it becomes impossible to supply electricity. Even if electricity can be supplied, the generation of Joule heat generated here is not uniform, so that an unmelted portion is partially generated, and a good bonded body cannot be obtained.

ところで、ぬれ性の成分であるA2O3及びSiO2の少
なくとも一種があれば、接合時に被接合体セラミックス
とのぬれ性が向上するために、より良好な接合体が得ら
れる。
By the way, if there is at least one of A 2 O 3 and SiO 2 , which are wettability components, the wettability with the ceramic to be bonded at the time of bonding is improved, so that a better bonded body can be obtained.

しかし、ScF3を略100wt%にした場合にも良好な接合
体が得られる。その理由としては、例えばSi3N4セラミ
ックスを接合する場合、接合時に母材の酸化反応により
生成するSiO2及び母材焼結助剤成分が接合剤中に入り、
ぬれ性の成分として作用する。
However, a good bonded body can be obtained even when ScF 3 is set to approximately 100 wt%. The reason is, for example, when joining Si 3 N 4 ceramics, SiO 2 and a base material sintering aid component generated by an oxidation reaction of the base material at the time of joining enter the bonding agent,
Acts as a wetting component.

本発明の接合剤は、ScF3,A2O3,SiO2の各粉末を所定
の配合比にした後、例えばアセトン、トルエン等の有機
溶剤と均一に混練し、ペースト状にする。接合剤の厚さ
は、接合剤の組成、通電加熱条件、部材の形成等に応じ
て適宜決定されるが、接合面積cm2当り0.01〜0.1g程
度、より好ましくは0.05〜0.1g程度となるようにすれば
よい。
The bonding agent of the present invention is obtained by mixing each powder of ScF 3 , A 2 O 3 , and SiO 2 at a predetermined mixing ratio, and then uniformly kneading the powder with an organic solvent such as acetone or toluene to form a paste. The thickness of the bonding agent is determined as appropriate according to the composition of the bonding agent, the conditions for applying electric current and heating, the formation of the member, etc., but it is about 0.01 to 0.1 g, more preferably about 0.05 to 0.1 g per cm 2 of the bonding area. What should I do?

接合に際しては、本発明の接合剤に拘らず、比較的熱
衝撃性の劣るセラミックスまたはワーク形状によって
は、加熱・冷却時に生じる熱衝撃により損傷する虞があ
る。この場合には、予熱加熱時に加熱源を制御し、通電
時に電力を制御して、徐々に加熱及び徐々に冷却するこ
とが望ましい。
At the time of joining, irrespective of the bonding agent of the present invention, depending on the shape of the ceramic or the work having relatively poor thermal shock, there is a possibility that the ceramic or work may be damaged by thermal shock generated during heating and cooling. In this case, it is desirable to control the heating source at the time of preheating heating, control the electric power at the time of energization, and gradually heat and gradually cool.

<作用> 本発明の接合剤を用いることにより、接合強度、特に
高温強度が向上する理由は、以下の如く推定される。
<Function> The reason why the bonding strength of the bonding agent of the present invention is improved, particularly the high-temperature strength, is presumed as follows.

本発明の接合剤の有効成分であるScF3中のSc元素と従
来の接合剤の有効成分であるCaF2中のCa元素は、共に接
合層ガラス中においてはSc3+,Ca2+で存在し、これらは
接合層中のSi−O網目構造を切り、その網目の中に入っ
て存在する網目修飾イオンと呼ばれるものである。
The Sc element in ScF 3 which is the active ingredient of the bonding agent of the present invention and the Ca element in CaF 2 which is the active ingredient of the conventional bonding agent are both present as Sc 3+ and Ca 2+ in the bonding layer glass. However, these are so-called network modifying ions which cut the Si-O network structure in the bonding layer and exist in the network.

それらと酸素との単結合強度ε(酸化物をMxOyとした
場合、金属原子Mと酸素原子Oとが作るM−O短結合強
度)は(1)式より求められ、Sc−O結合は網目修飾酸
化物中の最大値を示す60Kcal/molであるのに対して、Ca
−O結合は32Kcal/mol程度しかなく、Sc3+の方がOとの
結合力が強いことがわかる。
The single bond strength ε between them and oxygen (when the oxide is MxOy, the MO short bond strength formed by the metal atom M and the oxygen atom O) is obtained from the equation (1). While the maximum value in the modified oxide is 60 Kcal / mol, Ca
The -O bond is only about 32 Kcal / mol, indicating that Sc 3+ has a stronger binding force with O.

ε=ED/n(Kcal/mol) …(1) ここで、EDは1molの酸化物(MxOy)を完全にばらばら
にするのに必要な解離エネルギー(Kcal)、nはM原子
の酸素配位数である。
ε = E D / n (Kcal / mol) (1) where E D is the dissociation energy (Kcal) required to completely separate 1 mol of oxide (MxOy), and n is the oxygen of M atom The coordination number.

さらに、化合物の融点はその化合物の格子エネルギー
と関連しており、この格子エネルギーULは(2)式に示
すように、イオン半径(カチオン−アニオン間距離)と
関係づけられる。
Furthermore, the melting point of the compound is associated with the lattice energy of the compound, the lattice energy U L, as shown in equation (2), the ionic radius - is related to the (cationic anionic distance).

ただし、Aはマーデルング定数、Zi,Zjはカチオン及
びアニオンの価数、eは電荷、aはカチオン−アニオン
間距離、NAはアボガドロ数、ρはイオン反発係数であ
る。
However, A is Maderungu constant, Zi, Zj is the valence of the cation and anion, e is the charge, a is the cation - anion distance, N A is Avogadro's number, [rho is the ion coefficient of restitution.

この式より、構成イオンのイオン半径が小さい程、格
子エネルギーは大きくなることになり、高融点を持つこ
とが予想される。Sc3+のイオン半径が0.68Åであり、Ca
2+が1.00Åであるので、Sc3+の化合物の方が高融点であ
ると思われる。実際、ScF3の融点は1515℃であり、CaF2
は1360℃であるので、このことが裏付けされている。
From this equation, it is expected that the smaller the ionic radius of the constituent ions, the larger the lattice energy and the higher the melting point. Sc 3+ has an ionic radius of 0.68Å and Ca
Since 2+ is 1.00 °, the Sc 3+ compound seems to have a higher melting point. In fact, the melting point of ScF 3 is 1515 ° C. and CaF 2
This is supported by the fact that the temperature is 1360 ° C.

これらのことより、従来の接合剤であるCaF2系よりも
ScF3系接合剤を使用した方が高温特性に優れた接合体を
得ることができると思われる。
From these facts, compared to the conventional bonding agent CaF 2 system
Using some form of ScF 3 based bonding agent appears to be able to obtain a high joint body to a high temperature properties.

<実施例> ScF3:50wt%,A2O3:25wt%及びSiO2:25wt%からなる
接合剤を作成し、これを15mm×15mm×20mmの窒化ケイ素
セラミックス成形体間に、接合剤が50mg/cm2となるよう
に介在させ、電流を0.6〜1.0Aに保ち、5cm/minの速度で
移動させながら5〜10分間通電を続け、接合面全体の接
合を行った。
<Example> A bonding agent composed of ScF 3 : 50 wt%, A 2 O 3 : 25 wt% and SiO 2 : 25 wt% was prepared, and the bonding agent was placed between 15 mm × 15 mm × 20 mm silicon nitride ceramic molded bodies. It is interposed so that the 50 mg / cm 2, keeping the current 0.6~1.0A, continued energization 5-10 minutes while moving at a speed of 5 cm / min, was bonded the whole joining surface.

この接合体試料から3mm×4mm×40mmの角棒を切り出
し、スパン30mm、荷重速度0.5mm/minの条件下で三点曲
げ試験を常温の温度条件下で行い、3本の平均値でその
接合強度を求めたところ、次表のとおり416MPaの強度が
得られ、この強度は1050℃まで維持した。
A 3 mm x 4 mm x 40 mm square bar was cut out from this joined body sample, and a three-point bending test was performed under normal temperature conditions under the conditions of a span of 30 mm and a load speed of 0.5 mm / min. When the strength was determined, a strength of 416 MPa was obtained as shown in the following table, and this strength was maintained at 1050 ° C.

なお、被接合体として適用できるセラミックスは、Si
3N4の他、A2O3,ZrO2等の酸化物系セラミックス及び
サイアロン等の非酸化物系セラミックスが例示できる。
Ceramics that can be used as the object to be bonded are Si
In addition to 3 N 4 , oxide ceramics such as A 2 O 3 and ZrO 2 and non-oxide ceramics such as Sialon can be exemplified.

また、配合比によっては、当然A2O3,SiO2の化合物
であるカオリナイト(A2O3・2SiO2・2H2O),ムライ
ト(3A2O3・2SiO2)等で代用できる。
Also, depending on the mixing ratio, kaolinite (A 2 O 3 .2SiO 2 .2H 2 O) or mullite (3A 2 O 3 .2SiO 2 ), which is a compound of A 2 O 3 and SiO 2 , can be used instead.

さらに、本発明の接合剤としては、ScF3の主成分また
はScF3,A2O3及びSiO2の主成分の他に、本発明の作用
効果以外の効果を付加するための成分または本発明の効
果をさらに向上させるための成分、例えば接合層のガラ
ス中にN,Cを含有させるために、Si3N4,AN等の窒化
物、SiC,TiN等の炭化物を添加した接合剤をも包含す
る。この場合、オキシナイトライドガラス化及びオキシ
カーバイドガラス化し、接合体の各種特性が向上する。
Furthermore, as the bonding agent of the present invention, in addition to the main component or ScF 3, the A 2 O 3 and SiO 2 composed mainly of ScF 3, component or the invention for adding the effect of the other operational effects of the present invention In order to further include N, C in the glass of the bonding layer, a bonding agent to which a nitride such as Si 3 N 4 , AN, or a carbide such as SiC, TiN or the like has been added to further improve the effect of Include. In this case, oxynitride vitrification and oxycarbide vitrification improve various properties of the joined body.

<発明の効果> 以上のように、本発明によれば、電気接合方法に用い
る接合剤の有効成分とするScF3を主成分とするか、また
はScF3と、A2O3及びSiO2の少なくとも一種とを主成
分とする接合剤とすることにより、接合強度、特に高温
での強度を向上させることができる。
<Effects of the Invention> As described above, according to the present invention, ScF 3 as an active ingredient of a bonding agent used in an electric bonding method is used as a main component, or ScF 3 is mixed with A 2 O 3 and SiO 2 . By using a bonding agent containing at least one as a main component, bonding strength, particularly strength at high temperatures, can be improved.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平2−160675(JP,A) 特開 平3−153577(JP,A) 特開 平3−199173(JP,A) 特開 昭62−65986(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 37/00 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-160675 (JP, A) JP-A-3-153577 (JP, A) JP-A-3-199173 (JP, A) JP-A-62-162 65986 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C04B 37/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】セラミックス間接合部に導電性を有する接
合剤を介在させ、前記接合剤に電流を通じることによる
ジュール熱によって、前記接合部を加熱する電気接合方
法に用いる接合剤において、ScF3を主成分とするセラミ
ックスの電気接合用接合剤。
A bonding agent used in an electric bonding method for heating a bonding portion by Joule heat caused by passing an electric current through the bonding agent, wherein the bonding agent has ScF 3. A bonding agent for electrical bonding of ceramics whose main component is
【請求項2】セラミックス間接合部に導電性を有する接
合剤を介在させ、前記接合剤に電流を通じることによる
ジュール熱によって、前記接合部を加熱する電気接合方
法に用いる接合剤において、ScF3と、A2O3及びSiO2
の少なくとも一種とを主成分とするセラミックスの電気
接合用接合剤。
2. A is interposed a joining agent having conductive ceramic junction portion, by the Joule heat by passing it through a current to the bonding agent, the bonding agent used in the electric joining method of heating the bonding portion, ScF 3 And A 2 O 3 and SiO 2
A bonding agent for electrical bonding of ceramics containing at least one of the following as a main component.
JP2213068A 1990-06-13 1990-08-10 Bonding agent for electrical bonding of ceramics Expired - Lifetime JP3019378B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2213068A JP3019378B2 (en) 1990-08-10 1990-08-10 Bonding agent for electrical bonding of ceramics
EP91911194A EP0486706B1 (en) 1990-06-13 1991-06-13 Electrical cementing agent for ceramic
PCT/JP1991/000796 WO1991019689A1 (en) 1990-06-13 1991-06-13 Electrical cementing agent for ceramic
US07/834,258 US5352385A (en) 1990-06-13 1991-06-13 Joining agent for joining ceramic with electric joining method
DE69130104T DE69130104T2 (en) 1990-06-13 1991-06-13 ELECTRICALLY CONDUCTIVE ADHESIVE FOR CERAMICS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2213068A JP3019378B2 (en) 1990-08-10 1990-08-10 Bonding agent for electrical bonding of ceramics

Publications (2)

Publication Number Publication Date
JPH0497959A JPH0497959A (en) 1992-03-30
JP3019378B2 true JP3019378B2 (en) 2000-03-13

Family

ID=16633008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2213068A Expired - Lifetime JP3019378B2 (en) 1990-06-13 1990-08-10 Bonding agent for electrical bonding of ceramics

Country Status (1)

Country Link
JP (1) JP3019378B2 (en)

Also Published As

Publication number Publication date
JPH0497959A (en) 1992-03-30

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