JP3019004U - Pellicle container - Google Patents

Abstract

(57) [Summary] [Structure] The other end surface of the pellicle frame (21) of the pellicle (20) in which the pellicle film (22) is stretched on one end surface side of the pellicle frame (21) is provided with a pellicle mounting part ( 4) A container body (2) placed on the lid body and a lid body (12) provided with a holding portion (12) for pressing one end surface of the pellicle frame (21) when fitted to the container body (2). And a pellicle container (1) including the pellicle mounting portion (4).
A pellicle characterized in that the pellicle mounting plate (5) is detachably mounted on the pellicle mounting plate (5) and the other end surface of the pellicle frame (21) is mounted on the pellicle mounting plate (5). container. [Effect] According to the pellicle container of the present invention, the pellicle is placed on the pellicle mounting plate that is detachably provided from the container body, and this mounting plate is more clean than the pellicle container. Since it is possible to use a material having a high cleaning property, the inner surface of the pellicle is effectively prevented from being contaminated by dust generated from the inner bottom of the container body.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention is used for lithography pellicles, particularly for lithography in an exposure method using light of 500 nm or less, which is used as a dust shield when manufacturing a semiconductor device such as an LSI or VLSI or a liquid crystal display panel. The present invention relates to a container for storing a pellicle.

[0002]

[Prior art]

 In the manufacture of semiconductors such as LSI and VLSI, or liquid crystal display boards, etc., a semiconductor wafer or liquid crystal original plate is irradiated with light to form a pattern, but dust adheres to the exposure original plate used in this case. , The dust absorbs light or bends the light, resulting in deformation of the transferred pattern, sharp edges, and black background stains. There is a problem that the quality and appearance are impaired.

For this reason, although these operations are usually performed in a clean room, it is difficult to always keep the exposure master plate clean even in this clean room. A method of attaching a pellicle that allows the light for exposure to pass therethrough is adopted.

In a pellicle used for such an application, it is not preferable that foreign matter is attached to the pellicle itself. In particular, the adhesion of foreign matter on the inner surface of the pellicle may cause a problem that foreign matter may drop and adhere onto the reticle after the pellicle reticle is mounted, which is a serious problem.

Generally, a pellicle is put in a dedicated container for transportation and storage. By the way, as described in Japanese Utility Model Publication No. 6-45965, a container for storing these pellicles is usually composed of a container body for storing the pellicle and an upper lid, and is used for a container. Since the material is a resin material such as polypropylene, ABS resin, PFA, PTFE, etc., it is easily charged and it is difficult to completely remove the dust adhering to the container by washing, and the dust floating in the air Sometimes, due to impact or changes in the environment, the collected dust may be reattached to the stored product. Especially during transportation, dust generated from the surface inside the container facing the inner surface of the pellicle sometimes contaminated the inner surface of the pellicle.

Therefore, a method has been proposed in which an adhesive material is applied to the inner surface of the container that houses the pellicle (the surface of the bottom surface of the container that faces the inner surface of the pellicle) to prevent dust generation. However, there is a problem that not only is it difficult to apply the adhesive, but also it is difficult to reuse the container, and the container cannot be recycled.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a pellicle container in which the inner surface of the pellicle is extremely unlikely to be contaminated by dust generated from the inner bottom of the container body.

[0008]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention provides a container body for mounting the other end surface of the pellicle frame having a pellicle film stretched on one end surface side of the pellicle frame on a pellicle mounting portion in the center, and the container. In a pellicle container including a lid body having a holding portion that presses one end surface of the pellicle frame when fitted to the main body, a pellicle mounting plate is detachably mounted on the pellicle mounting portion. Then, there is provided a pellicle container characterized in that the other end surface of the pellicle frame is mounted on the pellicle mounting plate.

In this case, it is preferable to provide a convex locking portion that prevents the pellicle frame from moving in the front-rear and left-right directions at the outer peripheral edge of the pellicle mounting portion. It is preferably provided so as to project.

Further, it is effective that the pellicle mounting plate is formed of an amorphous material, a metal or a resin, particularly glass, quartz, stainless steel, aluminum, silicon, or methylmethacrylate each having a smooth surface. It is effective to form the container body and lid with antistatic synthetic resin.

[0011]

[Action]

 The pellicle container of the present invention is placed on a pellicle mounting plate that is removably arranged on the pellicle mounting part on which the pellicle of the container body is to be mounted. This pellicle mounting plate is separate from the container body. It can be sufficiently cleaned, and has good cleaning properties for amorphous materials, metals, resins, especially glass, quartz, stainless steel, aluminum, silicon, polymethylmethacrylate, etc., each of which has a smooth surface. Since the adhered matter can be reliably removed before use, it is possible to reliably prevent the inner surface of the pellicle film from being contaminated due to dust generated from the pellicle placement section.

Further, by providing the convex locking portion as described above, it is possible to restrict the movement of the pellicle frame in the front, rear, left, and right directions, and together with the pressing of the pellicle frame by the pressing part of the lid body, the pellicle is placed in the container. Can be securely fixed.

Further, by providing the pellicle mounting portion so as to project upward from the periphery thereof, dust particles are less likely to collect at a position lower than the mounting portion and adhere to the pellicle.

[0014]

【Example】

 An embodiment of the present invention will be described below with reference to FIG.

In FIG. 1, reference numeral 1 denotes a pellicle container in which a pellicle 20 is housed, which is composed of a container body 2 and a lid 10.

The container body 2 is formed in a dish shape in which a ring-shaped protrusion 3 is integrally provided on an outer peripheral edge portion, and a central portion thereof bulges upward and is higher than its surroundings. The upper surface of the bulging portion is formed as the pellicle mounting portion 4, and the pellicle mounting plate 5 is removably mounted on the mounting portion 4, and the pellicle mounting plate 5 is mounted on the outer peripheral edge of the upper surface of the mounting portion 4. Is provided with a plurality of convex locking portions 6 for restricting the front, rear, left, and right movements of the pellicle 20 when the pellicle 20 is mounted on the mounting plate 5 described above. The convex locking portion may have a continuous ring shape.

In the lid 10, the ring-shaped pressing portion 12 is integrally connected to the outer peripheral edge of the central bulging portion 11, and the fitting portion 13 is integrally connected to the outer peripheral edge of the pressing portion 12. When the lid body 10 is attached to the container body 2 in a state in which the pellicle 20 is placed on the placing plate 5 described above, the lower surface of the holding portion 12 is the pellicle frame 21 of the pellicle 20. The outer peripheral surface of the ring-shaped wall 14 integrally formed on the outer peripheral edge of the upper surface of the fitting portion 13 contacts the one end surface of the ring-shaped protruding portion 3 of the container body 2. The lower surface of the ring-shaped collar portion 15 that is in close contact with the inner peripheral surface and is integrally projected on the outer peripheral edge of the upper end of the ring-shaped wall 14 is in contact with the upper surface of the ring-shaped protrusion portion 3, and the lid 10 Is fitted into the container body. Incidentally, reference numeral 16 in the figure denotes a handle for removing the lid 10.

In the pellicle 20, a pellicle film 22 is stretched so as to cover an open end portion of the pellicle frame 21, and the periphery thereof is fixed to one end surface of the pellicle frame 21.

The material of the container body 2 and the lid 10 of the pellicle container 1 may be a generally used resin material, metal or the like. Examples thereof include resin materials such as polypropylene, polyethylene, ABS resin, PFA, PTFE and PMMA, and metals such as aluminum, aluminum alloys and stainless steel. Further, it is preferable that the container body 2 is made of an antistatic resin because dust in the container body 2 is adsorbed by the lid 10. Further, it is preferable that the container main body 2 is made black so as to inspect foreign matter on the pellicle film 22.

The pellicle mounting plate 5 is made of an amorphous material, a metal, a synthetic resin or the like having a smooth surface, for example, soda lime glass, quartz glass, synthetic quartz, electrolytically polished stainless steel, mirror-polished aluminum. It is possible to use a plate, silicone, antistatic PMMA, or the like, which has much better cleaning properties than conventional resins and can be sufficiently cleaned separately from the body of the container.

In the pellicle container 1, the other end surface of the pellicle frame 21 on which the pellicle film 22 is not stretched is mounted on the mounting plate 5 disposed on the mounting portion 4 of the container body 2. The pellicle 20 is placed in the container 1 by fitting the lid 10 into the container body 2 for use. The container body 1 and the lid body 10 can be further fixed by a fixing clip if necessary. In this case, in the pellicle 20, one end surface of the pellicle frame 21 is pressed by the pressing portion 12 of the lid 10 and the movement of the front, rear, left and right is locked by the locking portion 6 provided on the outer peripheral edge of the mounting portion 4, Since it is regulated, it is accommodated in the container 1 in a fixed state. At this time, the front, rear, left and right movements of the mounting plate 5 are also locked by the locking portion 6. The other end surface of the pellicle frame 21 may be adhered and placed on the placing plate 5 with an adhesive if necessary.

Further, in the container 1, the mounting portion 4 of the container body 2 is located at a position higher than its surroundings, and the pellicle 20 is mounted on the mounting portion 4 via the mounting plate 5. Therefore, the dust particles are less likely to collect at a position lower than the placing section 4 and adhere to the pellicle 20, and in particular, in the present invention, the pellicle 20 is placed on the placing plate 5. However, since the mounting plate 5 can be detached from the container body 2 and can be cleaned separately from the container body 2, and as described above, a material having excellent cleaning properties can be used, the mounting plate 5 can be removed from the inner surface of the pellicle film 22. Dust generation from the opposing mounting portions 4 can be suppressed to an extremely low level.

Next, the effects of the present invention will be specifically described with reference to experimental examples.

[Experimental Example] As a pellicle, a pellicle film is formed on one end surface of a pellicle frame having an outer shape of 120 × 98 mm, an inner shape of 116 × 94 mm, and a height of 6 mm, the surface of which is made of an aluminum alloy and subjected to black alumite treatment. Prepared. An adhesive layer and a liner were provided on the other end surface opposite to the pellicle film.

The pellicle was housed in the pellicle container having the configuration shown in FIG. In this case, the container body was made of PMMA resin, and the lid was made of ABS resin. As the pellicle mounting plate, a thin plate made of quartz glass, electrolytically polished stainless steel, and PMMA mixed with an antistatic agent was used. The thin plate has been cleaned in advance with an ultrasonic cleaning device in ultrapure water and has an extremely high cleaning property. The size and shape of the thin plate is the same size as the pellicle placed closely on this plate. The container body and the lid were fixed with clips.

Next, the dust generation properties of the container illustrated in Japanese Utility Model Publication No. 6-45965 and the container of this example were compared. In this case, the pellicle was stored in each container, and the pellicle was dropped three times from a position at a height of 70 cm to examine the dust generation property. After the test, the pellicle in the container was taken out from the container in a clean room of class 10 and irradiated with light of 400,000 lux in a dark room to examine the number of foreign matters on the surface of the pellicle film. The results are shown in Table 1.

[0027]

[Table 1]

[0028]

[Effect of device]

 According to the pellicle container of the present invention, the pellicle is placed on the pellicle mounting plate that is detachably mounted on the container body, and this mounting plate is cleaner and more clean than the pellicle container. Since it is possible to use a highly flexible material, the inner surface of the pellicle is extremely unlikely to be contaminated by dust generated from the bottom inside the container body.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pellicle container 2 Container body 3 Ring-shaped projection part 4 Pellicle mounting part 5 Pellicle mounting plate 6 Convex locking part 10 Lid 11 Central bulge part 12 Holding part 13 Fitting part 14 Ring-shaped wall 15 Collar part 16 Handle 20 Pellicle 21 Pellicle Frame 22 Pellicle Membrane

Claims (6)

[Scope of utility model registration request] 1. A pellicle (20) having a pellicle film (22) stretched on one end surface side of a pellicle frame (21), the other end surface of the pellicle frame (21) being placed on a pellicle mounting portion (4) at a central portion. A container body (2) to be placed and a lid body (10) provided with a holding portion (12) for pressing one end surface of the pellicle frame (21) when fitted to the container body (2). In the pellicle container (1) provided, the pellicle mounting plate (5) is detachably mounted on the pellicle mounting part (4), and the other end surface of the pellicle frame (21) is placed on the pellicle mounting plate (4). (5) A pellicle container characterized by being placed on the container. 2. The container according to claim 1, wherein a convex locking portion (6) for preventing movement of the pellicle frame (21) in the front-rear direction and the left-right direction is provided on an outer peripheral edge portion of the pellicle mounting portion (4). 3. The container according to claim 1, wherein the pellicle mounting portion (4) is provided so as to project upward from the periphery thereof. 4. The container according to claim 1, wherein the pellicle mounting plate (5) is formed of an amorphous material, metal or resin. 5. The container according to claim 4, wherein the pellicle mounting plate (5) is made of glass, quartz, stainless steel, aluminum, silicon or polymethylmethacrylate each having a smooth surface. 6. The container according to claim 1, wherein the container body (2) and the lid (10) are made of an antistatic synthetic resin.