JP3018778B2 - Manufacturing method of inner peripheral blade - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inner peripheral grindstone for use in cutting a semiconductor ingot or the like.

[0002]

2. Description of the Related Art In a conventional method for manufacturing an inner peripheral grindstone, first, a disk-shaped base metal made of steel or the like and having an open central portion is prepared. Next, a masking tape is adhered to both ends of the base metal to expose an inner peripheral edge on which an abrasive layer is to be formed, and masking is performed. Next, this base metal is immersed in an electrolytic solution containing diamond superabrasive grains, and by applying a potential between the base metal and the electrolytic solution, electroplating is performed on the inner peripheral edge of the base metal, Thus, the abrasive layer was formed by holding the superabrasives.

[0003]

However, in the above-mentioned conventional method for manufacturing an inner peripheral grindstone, since the inner peripheral grindstone is manufactured one by one in one process, the work efficiency is poor. Occurred.

Further, when masking the base metal, the position where the masking tape is applied may be shifted. In this case, the formed inner peripheral blade is eccentric, and the service life of the inner peripheral blade is reduced. The problem that it ends up.

The present invention has been made in view of the above circumstances. According to the first aspect of the present invention, a plurality of inner peripheral grindstones can be manufactured in a single process, and the time and effort for masking are eliminated. It is a feature of the present invention to provide a method of manufacturing an inner peripheral edge grindstone which can form the inner peripheral edge without eccentricity.

Further, the invention according to claim 2 is characterized in that a method of manufacturing an inner peripheral grinding wheel capable of improving the yield of the manufactured inner peripheral grinding wheel is provided.

The invention according to claim 3 is characterized by providing a method of manufacturing an inner peripheral grindstone capable of easily forming an abrasive layer grown long from a tip of an inner peripheral edge of a base metal. .

[0008]

In order to solve the above-mentioned problems, according to the first aspect of the present invention, an abrasive grain layer is formed by fixing abrasive grains to the inner peripheral edge of an annular base metal by metal plating. Thereby, in the method for manufacturing the inner peripheral blade grinding wheel for manufacturing the inner peripheral blade, (1) the inner diameter is larger than the inner diameter of the base metal (N
+1) the annular spacers and the N bases are alternately arranged, and (2) the N bases are radially positioned on the outer periphery of each other, and then are positioned on the two end plates. (3) Then, the spacer and the base metal are fixed in a circumferential direction in the electrolyte containing abrasive grains, and the spacer and the base are rotated in the circumferential direction. An abrasive layer is formed on the inner periphery of the N base metals by applying a potential between the base metal and the base metal.

In the invention according to claim 2, the inner peripheral edges of two of the N metal bases arranged at both ends in the axial direction are radially inner than the inner peripheral edges of the other base metal. It is characterized by being protruded in the direction.

[0010] Further, the invention according to claim 3 is characterized in that the thickness of the spacer is set to 0.8 to 5.0 mm.

[0011]

According to the first aspect of the present invention, the N base metals are positioned in the radial direction on the outer periphery of each other, and are fixed by being sandwiched between the two end face plates from both sides. To rotate in the circumferential direction. At this time, by applying a potential between the electrolytic solution and the N base metals, a metal plating layer including an abrasive layer is simultaneously formed concentrically on the inner periphery of the N base metals. .

According to the second aspect of the present invention, the electric potential is uniformly applied to the inner peripheral edges of the N-2 metal plates sandwiched between the two metal substrates whose inner peripheral edges protrude from the other metal plates, and the abrasive grains are formed. The metal plating layer including the layer is formed uniformly.

According to the third aspect of the present invention, since the base metals having the same potential are close to each other via the spacer having a thickness of 0.5 to 5.0 mm, the base metals grow long in the radial direction from the tip of the inner periphery of the base metal. The formed abrasive layer is formed.

[0014]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1A is a sectional view showing a configuration of an embodiment of the present invention. In this figure, 1 ₁ ,..., 1 _N
Is an annular base metal made of stainless steel or the like. Mount 1
₁ and The base metal 1 _2, the different radii of the length of the opening formed in the center. 2mm metal base 1 ₁ of inner diameter than the inner diameter of the metal base 1 ₂
It is getting smaller. In this case, the base metal _{1 3, ···, 1 N-} 1
The inner diameter is the same as the base metal 1 ₂ inner diameter, the inner diameter of the base metal 1 _N is the same as the base metal 1 ₁ inner diameter. Therefore, as shown in FIG. 1 (b), the inner peripheral edge of the base metal 1 ₁ base metal 1 _2, are shown projecting 1mm radially inwardly from the inner peripheral edge of .... here,
The base metals 1 ₁ and 1 _N are used as dummy.

2, 2 are spacers having a thickness of 2 mm as shown in FIG. 1B, and polycarbonate or the like is used as a material. Spacers 2, ..., 2
Is formed such that only the inner peripheral edge of the base metal on which the abrasive layer is formed is exposed. Spacer 2, ..., 2,該台gold ₁ 1, ..., because it is sandwiched between each of 1 _N, each of the base metal ₁ 1, ..., 1 _N are arranged in 2mm intervals You.

[0016] 3,3 is an end plate made of a polycarbonate or the like, base metal ₁ 1, ..., a 1 _N spacer 2,2
It is sandwiched through. Reference numerals 4 and 4 denote holding jigs made of stainless steel or the like, and are provided with four openings 5, 5, 5, and 5, as shown in FIG. Holding jig 4, 4
Are provided on the end plates 3 and 3 and are fixed to each other by bolts 6 and nuts 7. At this time, the end plates 3, 3
Metal base 1 ₁ sandwiched, · · ·, 1 _N is pressed from both sides, the base metal 1 _1, · · ·, 1 _N is adapted to rotate the bolt 6 as an axis.

Reference numeral 8 denotes an electrolyte containing diamond superabrasives. The electrolyte 8 is filled up to the position shown in the figure.
The exposed portion of the inner peripheral edge of the base metal 1 ₁ ,..., 1 _N is immersed in the electrolyte 8 through the openings 5, ₅ , 5, 5.

Next, FIG. 3 is an enlarged explanatory view of a portion B in FIG. 9, ..., 9 are energized plate clamp constituted by a copper plate, nickel plate or the like, base metal 1 _1, ..., as well as positioning the outer periphery of 1 _N, for the purpose of energizing the respective base metal It is. The energizing plate clamps 9, ..., 9 and the base metal 1 ₁ , ...
-, A 1 _N, charged plates clamp 9, ..., opening the metal body 1 ₁ provided on the 9, ..., via the first opening of the _N (annular unillustrated fixture , Formed for attachment to a drive) and a bolt 10 and a nut 11
Are fixed to each other. Therefore, the deposit 1 ₁ , ...
・, 1 _N is designed not to cause displacement. One end of a lead wire (not shown) is fixed to the bolt 10, and the base metal 1 ₁ ,.
・ Electricity can be supplied to 1 _N.

In the above configuration, when a potential is applied between the electrolytic solution 8 and the current-carrying plate clamp 9, the bases 1 ₁ ,.
- the exposed portions of 1 _N, the abrasive grain layer formed by dispersing diamond superabrasive to the plating phase is formed. At this time, by the charged plates clamp 9, the metal base _{1 2, ···, 1 N-} 1 is
Since the positioning in the radial direction in the outer periphery of each other, the base metal 1 _2,..., Abrasive particle layer formed on the inner peripheral edge of the 1 _N-1 is formed without eccentricity. Further, since a plurality of such inner peripheral blades can be manufactured in one process, the production efficiency is improved, and the labor for masking can be omitted, so that the operation efficiency is further improved.

Further, the segregation of plating at the ends concentrates on the two metal bases whose inner peripheral edges protrude from the other metal bases, so that the electric potential is applied to the internal peripheral edges of the N-2 metal bases sandwiched between them. Since they are uniformly applied, the metal plating layer including the abrasive layer is uniformly formed. As a result, the yield of the manufactured inner peripheral blade grindstone can be improved.

The metal plates having the same potential have a thickness of 2 m.
Since they are close to each other via the m spacer, their potentials interfere with each other, and as a result, an abrasive layer that is thin in both end face directions and grows long in the radial direction from the tip of the base metal is formed.

[0022]

As described above, according to the first aspect of the present invention, the inner diameter is larger than the inner diameter of the base metal (N
+1) The annular spacers and the N bases are alternately arranged, and the N bases are radially positioned on the outer periphery of each other, and then sandwiched between two end face plates from both sides. These spacers and the base metal are fixed, and then the spacers and the base metal are rotated in the circumferential direction in the electrolytic solution containing abrasive grains, so that the electric potential between the electrolytic solution and the N base metals is changed. By adding an abrasive grain layer to the inner peripheral edge of the N pieces of base metal, a plurality of inner peripheral blade grindstones can be manufactured in a single process, and the time and effort for masking are reduced. This has the advantage that the inner peripheral blade can be formed without eccentricity.

According to the second aspect of the present invention, the inner peripheries of the two bases arranged at both axial ends of the N bases are larger in diameter than the inner peripheries of the other bases. Since the projection is made inward in the direction, the yield of the manufactured inner peripheral grindstone can be improved.

According to the third aspect of the present invention, since the thickness of the spacer is set to 0.8 to 5.0 mm, an abrasive layer that grows long from the tip of the inner peripheral edge of the base metal is formed, The effect is obtained that an inner peripheral grindstone having a long life can be manufactured.

[Brief description of the drawings]

FIG. 1A is a cross-sectional view illustrating an apparatus according to an embodiment used in a manufacturing method according to the present invention. (B) is FIG.
It is a pole part enlarged view of (a).

FIG. 2 is an A-view diagram of FIG. 1;

FIG. 3 is an enlarged explanatory view of a portion B in FIG. 1;

[Explanation of symbols]

1 ₁ ,..., 1 _N base metal 2 Spacer 3 End face plate 4 Holding jig 5 Opening 6, 10 Bolts 7, 11 Nut 8 Electrolyte 9 Electrolytic plate clamp

────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Noriyuki Takaoka 246-1, Egoshi, Kurosuno, Izumi-cho, Iwaki-shi, Fukushima Prefecture Mitsubishi Materials Corporation Iwaki Seisakusho (56) References Japanese Utility Model Showa 62-61461 (JP, U) JP-B-48-35588 (JP, B1) (58) Field surveyed (Int. Cl. ⁷ , DB name) B24D 3/06 B24D 3/00 340 B24D 5/12

Claims (3)

(57) [Claims] 1. A method of manufacturing an inner peripheral blade whetstone for producing an inner peripheral blade by fixing an abrasive grain on an inner peripheral edge of an annular base metal by metal plating to form an abrasive layer. Is larger than the inner diameter of the base metal (N + 1)
(2) N pieces of the base metal are radially positioned on the outer periphery of each other, and then the two sets of the base metal are positioned from both sides by two end face plates. (3) Then, the spacer and the base metal are rotated in the circumferential direction in the electrolytic solution containing abrasive grains, and the electrolytic solution and the N base metals are fixed. And forming an abrasive layer on the inner peripheral edge of the N base metals by applying a potential between the inner peripheral edge and the inner peripheral edge grindstone. 2. An inner peripheral edge of two of the N metal plates arranged at both ends in the axial direction is projected radially inward from an inner peripheral edge of another metal plate. The method for producing an inner peripheral grindstone according to claim 1. 3. The spacer has a thickness of 0.8 to 5.0 mm.
The method for manufacturing an inner peripheral edge grindstone according to claim 1, wherein: