JP3013073U - Photosensitive material fixing device for exposure device - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] To provide a photosensitive material fixing device for an exposure apparatus capable of easily vacuum-adsorbing various sizes of photosensitive materials on a drawing table. [Structure] Lead screw 2 by servo motor 30
When the beam 4 is rotationally driven, the beam 22 is moved and the movable cover 21 is pulled out from the movable cover storage portion 20. As a result, the beam 22 and the moving cover storage 2
All the suction ports H existing between 0 and 0 are covered by the moving cover 21. On the other hand, open only some solenoid valves B,
When the other solenoid valve B is closed, suction is performed only from the suction port array H communicating with the opened solenoid valve B. In this state, the photosensitive material P is covered so as to cover the suction port H which is not covered by the moving cover 21 among the suction ports H where suction is performed.
Are arranged on the surface of the drawing table 15. Then, all the suction pipes 28 or the suction ports H are closed, so that the degree of vacuum in the suction pipes 28 rises to a level sufficient to adsorb and fix the photosensitive material.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a photosensitive material fixing device in an exposure apparatus.

[0002]

[Prior art]

 Conventionally, a photoplotter has been known as an example of an exposure apparatus. This photoplotter draws a high-density pattern, for example, a wiring pattern on a printed circuit board or a master such as a glass scale for an encoder, by scanning a photosensitive material with a laser beam. As the photosensitive material, a photoresist material itself, a silver salt film for a photomask, or the like is used.

In order to draw such a high-density pattern without any deviation, the photosensitive material must be firmly fixed to the drawing table in the exposure apparatus. Therefore, in the conventional exposure apparatus, a vacuum suction device is incorporated in the drawing table to suction the photosensitive material in vacuum. In this case, the vacuum suction device forms a large number of minute openings (suction openings) on the drawing table surface so as not to affect the smoothness of the drawing table surface. It was configured to suck with a suction pump.

[0004]

[Problems to be solved by the device]

 However, the sizes of photosensitive materials vary widely, and some photosensitive materials have a large area and some have a small area. Therefore, if the suction ports are distributed over the entire surface of the drawing table according to the photosensitive material having a large area, there arises a problem that the photosensitive material having a smaller area cannot be sufficiently adsorbed. That is, in the conventional vacuum suction device, since the suction pipes from many suction ports are integrated into one inside the vacuum suction device, if there is a suction port that is not covered by the photosensitive material, a large amount of air will flow from it. Flowed in, and the degree of vacuum in the vacuum adsorption device did not reach a sufficient degree for vacuum adsorption.

In this case, in order to vacuum-adsorb the photosensitive materials of various sizes, the microscopic openings that are not covered with the photosensitive material are masked with a film or the like only when adsorbing the photosensitive material of a relatively small area. It is conceivable to prepare in advance a plurality of drawing tables with suction ports formed in various distribution patterns according to the photosensitive material of the above. However, the former method has a problem that it takes time to prepare a film according to the shape of the photosensitive material to be actually exposed and mount it on the drawing table, and the latter method enables exposure. The problem is that the size of various photosensitive materials is limited.

The present invention has been made to solve the above problems. That is, it is an object of the present invention to provide a photosensitive material fixing device for an exposure apparatus that can easily vacuum-adsorb photosensitive materials of various sizes on a drawing table.

[0007]

[Means for Solving the Problems]

 The present invention adopts the following means in order to solve the above problems. That is, the photosensitive material fixing device of the exposure apparatus according to the present invention includes a table having a plurality of suction ports formed on a mounting surface on which the photosensitive material is mounted, and air from the plurality of suction ports into the table. Suction means for sucking, and a suction port that is provided so as to be movable along the placement surface and that is formed in an area other than the area covered by the photosensitive material on the placement surface. And a cover holding means for movably holding the cover member (corresponding to claim 1).

[0008]

【Example】

 Before describing an embodiment of the present invention, the concept of each constituent element of the present invention will be described. <Exposure Device> The exposure device includes a photo plotter such as a laser photo plotter and a copying device. <Photosensitive Material> The photosensitive material includes a silver salt film and a photoresist material. <Mounting Surface> The mounting surface may be a table on which the photosensitive material is placed as it is, or a transparent member for fixing the photosensitive surface of the photosensitive material to the inner surface thereof. <Suction Port> The suction port may be configured to communicate with a suction pump (corresponding to claim 2).

In addition, at least two of the plurality of suction ports may be connected to each other and to the same suction pump (corresponding to claim 3). With this configuration, it is possible to save the trouble of preparing a suction pump for each suction port. Even with this structure, if one of the suction ports is closed by the cover, the other suction port can suction and fix the photosensitive material.

A plurality of the plurality of suction ports may be arranged side by side in the vertical and horizontal directions (corresponding to claim 4). According to this structure, it is possible to appropriately suck the light-sensitive material having various lengths in the vertical and horizontal directions.

Further, the plurality of suction ports may be formed by being uniformly distributed on the mounting surface of the table (corresponding to claim 18). By doing so, the photosensitive material of any size can be fixed on the mounting surface with a uniform force.

[0012] The plurality of suction ports are arranged side by side in a direction perpendicular to the cover withdrawing direction and the cover member withdrawing direction, and are arranged in the cover member withdrawing direction. The suction ports may be communicated with each other so that they are communicated with the same suction pump (corresponding to claim 5). With this configuration, the range of the suction port for sucking the photosensitive material is adjusted by adjusting the pulling-out length of the cover member with respect to the pulling-out direction of the cover member, and the suction pump is used for the orthogonal direction. The range of the suction port for sucking the photosensitive material can be adjusted depending on whether or not.

In this case, a suction pipe that connects the suction port and the suction pump is provided, and a valve that opens and closes the suction pipe between the suction port and the suction pump is provided. (Claim 6). With this configuration, it is possible to easily adjust whether or not to perform suction only by opening and closing the valve.

In this case, in particular, one valve is provided for each suction port that communicates with each other, and all the suction pipes communicate with each other on the suction pump side of this valve, and communicate with a common suction pump. It may be configured as described above (corresponding to claim 7). With this configuration, even if only one suction pump is provided, it is possible to adjust whether or not suction is performed for each of the suction port groups that are in communication with each other. <Cover member> The cover member may be made of rubberized cloth (corresponding to claim 8). According to this structure, the cover itself does not have air permeability, the adhesion to the mounting surface is improved, and the sealing property of the suction port is improved. As described above, since it is sufficient that the cover member has no air permeability and can close the suction port, it may be a flexible sheet-shaped member or a non-equal plate-shaped member. . <Cover Holding Means> The cover holding means may be a storage part for storing the cover member therein (claim 9). With this structure, the excess cover member does not interfere. The cover holding means may be configured so as to incorporate a take-up roller for taking up the cover member (corresponding to claim 10). With this structure, the extra cover member can be compactly stored, and the space can be saved.

The take-up roller may be configured to constantly urge the cover member in the take-up direction (corresponding to claim 11). With this structure, the excess cover member is automatically stored in the cover holding portion.

A columnar rod may be fixed to the tip edge of the cover member over the width direction of the cover member (corresponding to claim 12). According to this structure, the cover member can be pulled out with a uniform force in the width direction, so that the cover member does not swell.

In this case, it is possible to provide a driving means for driving the rod in the pull-out direction of the cover member (corresponding to claim 13). According to this structure, it is possible to pull out the cover member while controlling the driving means without directly pulling the cover member by hand.

A drive means for driving the rod in the pull-out direction and the winding direction of the cover member may be provided (corresponding to claim 14). According to this structure, the amount of withdrawal of the cover member can be adjusted while controlling the driving means also in the winding direction.

The driving means is provided with a lead screw rotatably provided parallel to the pulling-out direction of the cover member and rotatably with respect to the mounting surface, and is screwed to the lead screw and fixed to the rod. And a nut (corresponding to claim 15). With this configuration, the torque when pulling out the cover member can be increased, so that even if the cover member is slid on the mounting surface and pulled out, the sliding resistance is overcome and the cover member is pulled out. It can be performed.

In this case, the nut is fixed to one end of the rod, and a tubular slider is fixed to the other end of the rod, and a slide shaft inserted into the slider is provided in parallel with the lead screw. It may be configured as described above (corresponding to claim 16). According to this structure, both ends of the rod are held, so that the cover member can be held so that it does not swell.

The lead screw may be configured to be rotated by a motor (corresponding to claim 17). With this configuration, the amount of pulling out the cover member can be easily adjusted by controlling the amount of rotation of the motor.

[0022]

Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings. [Structure of Embodiment] In one embodiment of the present invention shown below, a photosensitive material fixing device of an exposure apparatus according to the present invention is used in a laser photoplotter. FIG. 2 is a perspective view showing a schematic configuration of this laser photo plotter.

In FIG. 2, two argon laser oscillators L for current use (L1) and standby (L2) are fixed on the base B. The two laser beams b1 and b2 oscillated from the argon laser oscillator L are both incident on the polarization beam splitter 1. The polarization beam splitter 1 has a function of axially aligning the two laser beams b1 and b2 and sending them to a subsequent optical system. Therefore, at the time of entering the polarization beam splitter 1, the linear polarization directions of the laser beams b1 and b2 of both systems are adjusted so as to be orthogonal to each other. That is, the linear polarization direction of the laser beam b1 from the working argon laser oscillator L1 is adjusted so as to be reflected by the polarization beam splitter 1, and the laser beam b2 from the spare argon laser oscillator L2 is The linear polarization direction is determined so as to pass through the polarization beam splitter 1.

The laser beam b axially aligned by the polarization beam splitter 1 enters the λ / 2 switching unit 2. In the λ / 2 switching unit 2, a λ / 2 wave plate (not shown) that rotates the linear polarization direction by 90 ° is inserted into and removed from the optical axis. That is, the linear polarization direction of the laser beam b2 oscillated from the spare argon laser oscillator L2 and transmitted through the polarization beam splitter 1 is inclined by 90 ° with respect to the laser beam b1 oscillated from the active argon laser oscillator L1. There is. Therefore, when using the spare argon laser oscillator L2, the linear polarization direction is rotated by 90 ° by inserting a λ / 2 wave plate (not shown) on the optical axis, and the working argon laser oscillator L1 is It is adapted to the linear polarization direction when used.

The laser beam 3 that has passed through the λ / 2 switching unit 2 is divided into two systems by the half prism 3 and is incident on the acousto-optic element 4, respectively. The acousto-optic element 4 has a function of modulating the laser beam b, which is continuous light, into discontinuous light (writing light m) for forming drawing dots based on drawing data (not shown).

The drawing light m modulated by the acousto-optic element 4 is separated into a plurality of beams by the beam separator 5, and the pitch conversion condensing optical system 6 receives the pitch conversion, and the polarization beam splitter 7 Are bundled coaxially again.

The drawing light m that has passed through the polarization beam splitter 7 is inverted in the vertical direction by the image rotator 8 and is incident on the polygon mirror 9. The polygon mirror 9 has a function of swinging a plane mirror formed on its peripheral surface in a certain direction by rotating at a constant speed, and deflecting the drawing light m reflected by the plane mirror at a constant angular velocity. . The direction in which the reflected light is deflected by the polygon mirror 9 is called the main scanning direction.

The drawing light m deflected (scanned) by the polygon mirror 9 enters the fθ lens 10. The fθ lens 10 is a lens having a characteristic of correcting a change in scanning speed on the image surface due to an angle change of the drawing light m scanned at a constant angular speed with respect to the image surface. Therefore, the drawing light m 1 whose exit angle is corrected by the fθ lens is scanned at a constant speed on the drawing table 15.

The drawing light m that has passed through the fθ lens 10 is bent by the turning mirror 11 toward the drawing table 15 and then enters the condenser lens 12. The condenser lens 12 has a function of refracting the writing light m so that the writing light m is incident on the writing table 15 in a vertical direction.

Most of the drawing light m that has passed through the condenser lens 12 is applied to the photosensitive material (not shown) on the drawing table 15, but a part thereof enters the fluorescent fiber 13. The fluorescent fiber 13 has a function of axially propagating the light incident from the peripheral surface and emitting the light from the end surface. Since the end surface of the fluorescent fiber 13 faces the photodiode 14, the light emitted from the fluorescent fiber 13 enters the photodiode 14. That is, the light quantity of the drawing light applied to the photosensitive material is monitored by the photodiode 14 and the output of the argon laser oscillator L is adjusted so that it becomes a predetermined constant value.

The drawing table 15 is installed on the base B via an X table 17 and a θ table 18. The X table 17 has a function of moving the photosensitive material (not shown) in the sub-scanning direction (direction orthogonal to the main scanning direction of the drawing light m 2 by the polygon mirror 9) during exposure of the photosensitive material (not shown). have. Therefore, two slide rails 16a are fixed on the base in the sub-scanning direction, and two slide guides 17a provided on the lower surface of the X table 17 for each slide rail 16a. Are configured to slidably engage. A lead screw 16b that rotates at a constant speed is provided between the slide rails 16a, and a ball nut (not shown) that engages with the lead screw 16b is provided on the lower surface of the X table 17. . As a result, the X table 17 moves at a constant speed in the sub-scanning direction with respect to the base B.

The θ table 18 has a function of rotating with respect to the X table 17 in a plane parallel to the upper surface thereof. As a result, the position of the X-axis and Y-axis of the photosensitive material placed on the drawing table 15 can be adjusted so as to coincide with the sub-scanning direction and the main-scanning direction.

The Z drive unit 19 provided between the θ table 18 and the drawing table 15 adjusts the position of the drawing table 15 with respect to the θ table 18 in the height direction (the direction in which the drawing light m enters). It is a device that does.

The drawing table 15 can be adjusted in any direction with respect to the base B by the above-mentioned tables and the like. A large number of suction ports H for vacuum suction are formed in a matrix on the upper surface of the drawing table 15 as a mounting surface on which the photosensitive material is mounted. That is, the suction ports H are formed by being evenly distributed. Further, a movable cover storage portion 20 is fixed to one end edge of the drawing table 15. The movable cover storage unit 20 as the cover holding unit is a box for winding and storing the movable cover 21 for covering the suction port H. Hereinafter, the structures of the drawing table 15, the suction port H, the moving cover storage section 20, etc. will be described in detail.

A detailed configuration around the drawing table 15 is shown in a plan view of FIG. A vertical cross section taken along the line II-III of FIG. 1 is shown in FIG. In FIG. 1, the movable cover storage section 20 is fixed to one end edge of the drawing table 15 in the sub-scanning direction (horizontal direction in FIG. 1) along the edge. A prismatic bearing member 23 is fixed to the other end along the edge.

A slide shaft 25 is provided between the movable cover storage portion 20 and the bearing member 23, slightly above the upper surface of the drawing table 15 (see FIG. 3) and in parallel with the drawing table 15. The lead screw 24 is bridged. The slide shaft 25 and the lead screw 24 are installed in the sub-scanning direction. The slide shaft 25 is non-rotatably fixed, but the lead screw 24 is rotatable by a servo motor 30 installed on the outer surface of the bearing member 23.

The slide shaft 25 is inserted into a slider 27 having a cylindrical through hole. Since the through hole of the slider 27 has an inner diameter that is substantially equal to the outer diameter of the slide shaft 25, the slider 27 can slide on the slide shaft 25 without play.

On the other hand, a ball nut 26 is screwed onto the lead screw 24. The ball nut 26 is fixed to a slider 27 via a rod-shaped beam 22. Therefore, the ball nut 26 cannot rotate with respect to the drawing table 15. Therefore, when the lead screw 24 is rotated by the servo motor 30, the ball nut 26 moves back and forth in the axial direction (sub-scanning direction) of the lead screw 24. To do. As the ball screw 26 moves back and forth, the slider 27 and the beam 22 also move back and forth in the sub scanning direction. At this time, as described above, since the slider 27 slides with respect to the slide shaft 25 without play, the direction of the beam 22 is always maintained at right angles to the sub-scanning direction. The lead screw 24 and the ball nut 26 constitute a driving means.

On the lower surface of the beam 22, the tip of the moving cover 21 that is pulled out from the moving cover housing portion 20 is fixed. Since the thickness of the moving cover 21 is almost equal to the distance between the lower surface of the beam 22 and the upper surface of the drawing table 15, there is almost no gap between the drawing table 15 and the moving cover 21. The moving cover 21 functions as a cover that selectively covers a part of the plurality of suction ports.

A roller shaft 20 a, which is urged to rotate in the counterclockwise direction in FIG. 3 by a spring, is built in the moving cover housing portion 20 that houses the moving cover 21. Since the base end of the moving cover 21 is fixed to the roller shaft 20a, a biasing force is applied to the moving cover 21 in the winding direction by the roller shaft 20a. Therefore, the moving cover 21 pulled out from the moving cover storage portion 20 by the beam 22 is always under tension in the pulling direction, and wrinkles and waves are not generated. The roller shaft 20a functions as a winding roller.

The moving cover 21 is made of a silk cloth with rubber on both sides. Therefore, it has no air permeability and is excellent in adhesion to the surface of the drawing table 15 which is a smooth surface. Further, the length of the moving cover 21 has a length required to cover the entire surface of the drawing table 15. However, when the beam 22 is brought closest to the movable cover storage unit 20, the entire movable cover 21 is caught in the movable cover storage unit 20.

On the surface of the drawing table 15, as shown in FIG. 1, a total of 63 suction ports are formed in a matrix of 9 vertically (7 in the sub-scanning direction) and 7 horizontally. In FIG. 1, the rows of the suction ports in the vertical direction are indicated by Hn1 to Hn9 (where n = 1, 2, ..., 7), and the rows of the suction ports in the horizontal direction are indicated by H1m to H7m (where m = 1. , 2, ..., 9). That is, the ten digit (n) of the suffix of H indicates the position of the suction port in the horizontal direction, and the one digit (m) indicates the position of the suction port in the vertical direction.

As shown in FIG. 3, the suction ports (Hn 1 to Hn 9) belonging to the same row of suction ports arranged in the vertical direction are connected to each other by a suction pipe 28 inside the drawing table 15. On the other hand, the suction ports belonging to different suction port rows are independent from each other.

The suction tube 28, which connects the rows of suction ports (Hn 1 to Hn 9) arranged in the vertical direction to each other, extends from the end surface of the drawing table 15 to the outside and is provided for each suction tube 28. After passing through the magnetic valve Bn (the suffix n of B coincides with the suffix n of the suction port H communicated therewith), they are combined into one and connected to one suction pump 29.

The suction pump 29 is a general rotary pump and constantly sucks air from all the suction pipes 28. Each electromagnetic valve Bn opens and closes each suction pipe 28 in which it is provided by receiving a control signal from the control device 31 independently. Therefore, if all the solenoid valves Bn are opened, suction can be performed from all the suction ports Hnm. However, if some solenoid valves Bn are selectively opened and the other solenoids are closed, the opened solenoid valves can be opened. Suction is performed only from the suction port row communicating with the valve Bn through the suction pipe 28, and suction is not performed from other suction port rows.

The control device 31 controls the opening / closing of each of the solenoid valves Bn and the rotation direction and the rotation amount of the servo motor 30 for rotating the lead screw 24 in accordance with the input from the operation panel 32. [Operation of Embodiment] Next, the operation of the photosensitive material fixing device of the exposure apparatus according to the present embodiment configured as described above will be described.

First, when vacuum-adsorbing a photosensitive material having a relatively large area covering the entire suction port Hnm, the operation panel 32 is operated to control the beam 22 from the control device 31 to the servo motor 30. A control signal for rotating the movable cover storage unit 20 to the maximum extent is output.

Then, the lead screw 24 is rotationally driven by the servo motor 30, and accordingly, the ball nut 26 and the beam 22 and the slider 27 that move integrally with the ball nut 26 approach the moving cover storage section 20. As the beam 22 approaches the movable cover storage portion 20, the movable cover 21 is wound into the movable cover storage portion 20 by the roller shaft 20a. As a result, all the suction ports Hnm are exposed to the outside.

Next, the operation panel 32 is operated to cause the control device 31 to output a control signal for opening all the solenoid valves Bn. Then, suction is performed from all suction ports Hnm through all suction tubes.

Then, when the photosensitive material is arranged on the surface of the drawing table 15 so as to cover all the suction ports Hnm, it is vacuum-sucked onto the drawing table 15 with an even force over the entire surface of the photosensitive material.

On the other hand, for example, as shown in FIG. 4, it has a relatively small area covering only the suction ports (H41 to H44, H51 to H54, H61 to H64, H71 to H74) of four columns and four rows. When vacuum-adsorbing the photosensitive material P, the operation panel 32 is operated to move the beam 22 from the control device 31 to the servomotor 30 to a position that covers the row of the suction ports indicated by Hn5. , Output the control signal.

Then, the lead screw 24 is rotationally driven by the servo motor 30, and accordingly, the ball nut 26 and the beam 22 and slider 27 that move integrally with the ball nut 26 move to the position shown in FIG. With the movement of the beam 22, the moving cover 21 is pulled out from the inside of the moving cover storage portion 20, and all the suction ports (Hn5 to Hn9) existing between the beam 22 and the moving cover storage portion 20 are moved by the moving cover 21. To be covered.

Next, by operating the operation panel 32, the control device 31 outputs a control signal for closing the valves to the solenoid valves B1 to B3, and outputs a control signal for opening the valves to the solenoid valves B4 to B7. Let As a result, suction is not performed from the suction port row (H1m to H3m) communicating with the solenoid valves B1 to B3, and only from the suction port row (H4m to H7m) communicating with the solenoid valves B4 to B7. Suction is performed.

In this state, the photosensitive material P is arranged on the surface of the drawing table 15 so as to cover the suction ports (H41 to H44, H51 to H54, H61 to H64, H71 to H74). Then, among the suction ports belonging to the suction port row (H4m to H7m), the suction ports (H45 to H49, H55 to H59, H65 to H69, H75 to H79) covered by the moving cover 21 are the moving covers 21. Is adsorbed, and the rest adsorbs the photosensitive material P.

As described above, since the moving cover 21 is in close contact with the drawing table 15, the suction ports (H45 to H49, H55 to H59, H65 to H69, H75 to H79) covered by the moving cover 21 are attached. ) Does not draw air. Moreover, since the solenoid valves B1 to B3 are closed, air is not sucked from here. Therefore, the inside of the suction pipe 28 extending from the suction pump 29 to each of the suction port rows (H4m to H7m) is sufficiently sucked, and the degree of vacuum thereof is increased to a degree sufficient for vacuum-sucking the photosensitive material P.

After the photosensitive material is vacuum-sucked as described above, the X table 17, the θ table 18, and the Z drive unit 19 are adjusted to adjust the exposure start position of the photosensitive material. Then, the argon laser oscillator L is oscillated, the laser beam 1 is started to be modulated by the acoustooptic device 4, the polygon mirror 9 is rotated at a predetermined rotation speed, and the X table 17 is moved at a predetermined constant speed in the sub-scanning direction. By moving, it is possible to draw (expose) a dot pattern on the photosensitive material.

[0057]

[Effect of device]

 According to the present invention configured as described above, the photosensitive materials of various sizes can be easily vacuum-adsorbed on the drawing table by adjusting the amount of drawing of the cover.

[Submission date] February 6, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0002

[Correction method] Change

[Correction content]

[0002]

[Prior art]

Conventionally, a photoplotter has been known as an example of an exposure apparatus. The full Otopurotta high-density patterns by scanning the photosensitive materials with a laser beam, for example, is to render the glass scale HitoshiHara version of the wiring pattern or an encoder of the printed circuit board. As the photosensitive material, a photoresist material itself, a silver salt film for a photomask, or the like is used.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

In this case, in particular, one valve is provided for each suction port that communicates with each other, and all the suction pipes communicate with each other on the suction pump side of this valve, and communicate with a common suction pump. It may be configured as described above (corresponding to claim 7). With this configuration, even if only one suction pump is provided, it is possible to adjust whether or not suction is performed for each of the suction port groups that are in communication with each other. <Cover member> The cover member may be made of rubberized cloth (corresponding to claim 8). According to this structure, the cover itself does not have air permeability, the adhesion to the mounting surface is improved, and the sealing property of the suction port is improved. Thus, since the cover member is sufficient if closing the suction port without ventilation, even may be a sheet-like member having flexibility may be a plate-like member having no property flexures Yes . <Cover Holding Means> The cover holding means may be a storage part for storing the cover member therein (claim 9). With this structure, the excess cover member does not interfere. The cover holding means may be configured so as to incorporate a take-up roller for taking up the cover member (corresponding to claim 10). With this structure, the extra cover member can be compactly stored, and the space can be saved.

[Brief description of drawings]

FIG. 1 is a plan view of a drawing table to which a photosensitive material fixing device according to an embodiment of the present invention is applied.

FIG. 2 is a perspective view showing an outline of a laser photoplotter incorporating the drawing table of FIG.

FIG. 3 is a sectional view taken along line II-II in FIG.

FIG. 4 is a drawing table of FIG. 1 showing a state in which a photosensitive material having a relatively small area is adsorbed and fixed.

[Explanation of symbols]

 15 Drawing Table 20 Moving Cover Storage 21 Moving Cover 24 Lead Screw 26 Ball Nut 28 Suction Pipe 29 Suction Pump 30 Servo Motor 31 Control Device

Claims (18)

[Scope of utility model registration request] 1. A table having a plurality of suction ports formed on a mounting surface on which a photosensitive material is mounted, suction means for sucking air from the plurality of suction ports into the table, and the mounting surface. A suction port formed in a region other than the region covered by the photosensitive material on the mounting surface, the suction port being suctioned by the suction means. A photosensitive material fixing device for an exposure apparatus, comprising: a cover member that covers and closes the cover member; and a cover holding unit that movably holds the cover member. 2. The photosensitive material fixing device for an exposure apparatus according to claim 1, wherein said suction means is a suction pump which is communicated with said suction port. 3. The photosensitive material fixing device of an exposure apparatus according to claim 2, wherein at least two of said plurality of suction ports are communicated with each other and are communicated with the same suction pump. 4. The photosensitive material fixing device for an exposure apparatus according to claim 1, wherein the plurality of suction ports are arranged side by side in the vertical direction and the horizontal direction, respectively. 5. The plurality of suction ports are arranged side by side in the moving direction of the cover and in a direction orthogonal to the moving direction of the cover, and are arranged in the moving direction of the cover. 4. The photosensitive material fixing device for an exposure apparatus according to claim 2, wherein the suction ports are communicated with each other and are communicated with the same suction means. 6. A suction pipe that connects the suction port and the suction pump is provided, and a valve that opens and closes the suction pipe between the suction port and the suction pump is provided. The photosensitive material fixing device of the exposure apparatus according to claim 3 or 5. 7. One of the valves is provided for each suction port that communicates with each other, and all the suction pipes communicate with each other on the suction pump side of the valve and communicate with a common suction pump. 7. The photosensitive material fixing device for an exposure apparatus according to claim 6, wherein. 8. The photosensitive material fixing device for an exposure apparatus according to claim 1, wherein the cover member is made of a rubber-like sheet material. 9. The cover holding means is a storage portion for storing the cover member therein.
9. The photosensitive material fixing device of the exposure apparatus according to any one of 8 to 8. 10. The photosensitive material fixing device for an exposure apparatus according to claim 9, wherein the cover holding means has a built-in winding roller for winding the cover member. 11. The photosensitive material fixing device of an exposure apparatus according to claim 10, wherein the take-up roller is constantly biased in a direction in which the cover member is taken up. 12. A photosensitive member for an exposure apparatus according to claim 1, wherein a columnar rod is fixed to a front edge of the cover member over a width direction of the cover member. Material fixing device. 13. A photosensitive material fixing device for an exposure apparatus according to claim 12, further comprising driving means for driving the rod in a direction of pulling out the cover member. 14. A photosensitive material fixing device for an exposure apparatus according to claim 12, further comprising drive means for driving the rod in the pull-out direction and the winding direction of the cover member. 15. The drive means is provided with a lead screw which is provided in parallel with a drawing direction of the cover member and is rotatable with respect to the mounting surface, and is screwed to the lead screw and fixed to the rod. 15. The photosensitive material fixing device for an exposure apparatus according to claim 13 or 14, comprising a nut. 16. The nut is fixed to one end of the rod, and a cylindrical slider is fixed to the other end of the rod, and a slide shaft inserted into the slider is provided in parallel with the lead screw. 16. The photosensitive material fixing device of the exposure apparatus according to claim 15, wherein: 17. The photosensitive material fixing device for an exposure apparatus according to claim 15, wherein the lead screw is rotated by a motor. 18. The exposure device according to claim 1, wherein the plurality of suction ports are formed so as to be uniformly distributed on the mounting surface of the table. Material fixing device.