JP3008408B2 - Dielectric ceramic composition for multilayer ceramic capacitors - Google Patents

Dielectric ceramic composition for multilayer ceramic capacitors

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Publication number
JP3008408B2
JP3008408B2 JP1156503A JP15650389A JP3008408B2 JP 3008408 B2 JP3008408 B2 JP 3008408B2 JP 1156503 A JP1156503 A JP 1156503A JP 15650389 A JP15650389 A JP 15650389A JP 3008408 B2 JP3008408 B2 JP 3008408B2
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Japan
Prior art keywords
dielectric
composition
multilayer ceramic
capacitance
temperature coefficient
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JPH0323262A (en
Inventor
秀紀 倉光
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、誘電率、絶縁抵抗、絶縁破壊電圧が高く、
良好度Qに優れ、静電容量温度係数が小さく、チップ立
ちの発生を抑制することのできる積層セラミックコンデ
ンサ用誘電体磁器組成物に関するものである。
DETAILED DESCRIPTION OF THE INVENTION INDUSTRIAL APPLICATION The present invention has a high dielectric constant, high insulation resistance, high dielectric breakdown voltage,
The present invention relates to a dielectric ceramic composition for a multilayer ceramic capacitor which has excellent quality factor Q, has a small capacitance temperature coefficient, and can suppress the occurrence of chip standing.

従来の技術 従来から誘電率,絶縁抵抗が高く、良好度Qにすぐ
れ、静電容量温度係数が小さい誘電体磁器組成物として
下記のような系が知られている。
2. Description of the Related Art Conventionally, the following system has been known as a dielectric ceramic composition having a high dielectric constant, a high insulation resistance, an excellent quality factor Q, and a small capacitance temperature coefficient.

・BaO−TiO2−Nd2O3系 ・BaO−TiO2−Sm2O3系 発明が解決しようとする課題 しかし、これらの組成は、例えば0.09BaO−0.55TiO2
−0.36NdO3/2の組成比からなる誘電体材料を使用し、円
板形磁器コンデンサを作製すると、絶縁抵抗の平均値:
8.0×1012Ω,絶縁破壊強度の平均値:30Kv/mmであり、
満足のできる値ではない。また、この誘電体磁器の密度
は、5.6g/cm3であるが、一般に長さL3.2×幅W1.6mm以下
の積層セラミックコンデンサのリフローはんだ付け、特
にベーパーリフローはんだ付けでは、チップ立ち(通
常、ツームストーン現象,フンハッタン現象と呼ばれて
いる。)が発生しやすく、このチップ立ちを防ぐための
誘電体磁器の密度をより大きくしなければならないとい
う課題があった。
And issues BaO-TiO 2 -Nd 2 O 3 based · BaO-TiO 2 -Sm 2 O 3 system to be Solved by the Invention However, these compositions, for example, 0.09BaO-0.55TiO 2
When a disc-shaped porcelain capacitor is manufactured using a dielectric material having a composition ratio of −0.36 NdO 3/2 , the average value of the insulation resistance is:
8.0 × 10 12 Ω, average value of dielectric breakdown strength: 30 Kv / mm,
Not a satisfactory value. Although the density of this dielectric porcelain is 5.6 g / cm 3 , in general, in reflow soldering of a multilayer ceramic capacitor having a length of L3.2 × width W1.6 mm or less, especially in a vapor reflow soldering, a chip ( Usually, the tombstone phenomenon and the Funhattan phenomenon are easily generated), and there is a problem that the density of the dielectric porcelain for preventing the chip from standing must be increased.

課題を解決するための手段 そこで本発明の積層セラミックコンデンサ用誘電体磁
器組成物は、一般式xBaO−y{(TiO2(1-m)(SnO2
}−zReO3/2(ただし、x+y+z=1.00、0.01≦m
≦0.20、Reは、La,Pr,Nd,Smから選ばれる一種類以上の
希土類元素。)と表した時、x,y,zが以下の表に示す各
点a,b,c,d,e,fで囲まれるモル比の範囲からなる主成分1
00重量部に対し、副成分としてTa2O5を0.1〜10.0重量部
含有したものである。
Means for Solving the Problems Accordingly, the dielectric ceramic composition for a multilayer ceramic capacitor of the present invention has a general formula xBaO-y {(TiO 2 ) (1-m) (SnO 2 )
m } −zReO 3/2 (however, x + y + z = 1.00, 0.01 ≦ m
≦ 0.20, Re is one or more rare earth elements selected from La, Pr, Nd, and Sm. ), X, y, z are the main components 1 consisting of a range of molar ratios surrounded by points a, b, c, d, e, f shown in the following table.
It contains 0.1 to 10.0 parts by weight of Ta 2 O 5 as an auxiliary component with respect to 00 parts by weight.

作用 この構成によると、誘電体磁器組成物中の4価のTiお
よびSnの一部を5価のTaで置換することにより生じた陽
イオン空孔で、焼成時の酸素欠陥によるe-を補償し、Ti
O2が還元されるのを抑制できる。従って積層セラミック
コンデンサを作製する場合、誘電体層中のTiとPd等の内
部電極を形成する金属との化合物の生成を防止でき、誘
電体層と内部電極の界面の密着性が向上するため、静電
容量とQ値が大きく、そのバラツキが小さい積層セラミ
ックコンデンサを得ることができる。
According to the action this configuration, cation vacancies generated by replacing a part of tetravalent Ti and Sn in the dielectric ceramic composition in pentavalent Ta, e due to oxygen defect during firing - compensating for And Ti
O 2 can be suppressed from being reduced. Therefore, when producing a multilayer ceramic capacitor, it is possible to prevent the formation of a compound of Ti and Pd and other metals forming an internal electrode in the dielectric layer, and to improve the adhesion at the interface between the dielectric layer and the internal electrode, A multilayer ceramic capacitor having a large capacitance and a large Q value and a small variation can be obtained.

また従来の誘電体磁器組成物は、焼成時に還元された
TiO2が冷却過程である程度再酸化されるが、誘電体層の
内部、及び各結晶粒子の内側は再酸化されにくく酸素欠
乏状態のまま残る。この酸素欠乏が電気伝導に寄与し、
誘電体磁器組成物の絶縁抵抗、絶縁破壊強度を劣化させ
る。本発明の誘電体磁器組成物は、4価のTi及びSnの一
部を5価のTaで置換することにより生じた陽イオン空孔
で、焼成時の酸素欠陥によるe-を補償する。
Also, the conventional dielectric ceramic composition was reduced during firing.
Although TiO 2 is reoxidized to some extent during the cooling process, the inside of the dielectric layer and the inside of each crystal particle are hardly reoxidized and remain in an oxygen-deficient state. This oxygen deficiency contributes to electrical conduction,
It degrades the insulation resistance and dielectric breakdown strength of the dielectric ceramic composition. The dielectric porcelain composition of the present invention compensates for e due to oxygen vacancies during sintering, by cation vacancies generated by partially replacing tetravalent Ti and Sn with pentavalent Ta.

従って絶縁抵抗、絶縁破壊強度が従来よりも向上した
積層セラミックコンデンサを得ることができる。
Therefore, it is possible to obtain a multilayer ceramic capacitor having improved insulation resistance and dielectric breakdown strength as compared with the prior art.

さらにTiの一部をSnで置換することにより、誘電体磁
器組成物の密度が向上するため、積層セラミックコンデ
ンサにした場合、チップ立ちの発生を抑制することがで
きる。
Further, by substituting a part of Ti with Sn, the density of the dielectric ceramic composition is improved. Therefore, when a multilayer ceramic capacitor is used, the occurrence of chip standing can be suppressed.

実施例 以下に、本発明を具体的実施例により説明する。EXAMPLES Hereinafter, the present invention will be described with reference to specific examples.

(実施例1) 出発原料には化学的に高純度のBaCo3,TiO2,SnO2,La2O
3,Pr6O11,Nd2O3,Sm2O3およびTa2O5粉末を下記の第1表
に示す組成比になるように秤量し、めのうボールを備え
たゴム内張りのボールミルに純水とともに入れ、湿式混
合後、脱水乾燥した。この乾燥粉末を高アルミナ質のル
ツボに入れ、空気中で1100℃にて2時間仮焼した。この
仮焼粉末を、めのうボールを備えたゴム内張りのボール
ミルに純水とともに入れ、湿式粉砕後、脱水乾燥した。
この粉砕粉末に、有機バインダーを加え、均質とした
後、32メッシュのふるいを通して整粒し、金型と油圧プ
レスを用いて成形圧力1ton/cm2で直径15mm,厚み0.4mmに
成形した。次いで、成形円板をジルコニア粉末を敷いた
アルミナ質のサヤに入れ、空気中にて下記の第1表に示
す温度で2時間焼成し、第1表に示す組成比の誘電体磁
器を得た。
(Example 1) Chemically high purity BaCo 3 , TiO 2 , SnO 2 , La 2 O was used as a starting material.
3 , Pr 6 O 11 , Nd 2 O 3 , Sm 2 O 3 and Ta 2 O 5 powders are weighed so as to have the composition ratios shown in Table 1 below, and purified in a rubber-lined ball mill equipped with an agate ball. It was put together with water, wet-mixed, and dehydrated and dried. The dried powder was placed in a high alumina crucible and calcined in air at 1100 ° C. for 2 hours. The calcined powder was put together with pure water in a rubber-lined ball mill equipped with an agate ball, wet pulverized, and then dehydrated and dried.
An organic binder was added to the pulverized powder, and the mixture was homogenized, sieved through a 32-mesh sieve, and molded into a diameter of 15 mm and a thickness of 0.4 mm using a mold and a hydraulic press at a molding pressure of 1 ton / cm 2 . Next, the molded disc was placed in an alumina sheath covered with zirconia powder and fired in air at a temperature shown in Table 1 for 2 hours to obtain a dielectric ceramic having a composition ratio shown in Table 1. .

このようにして得られた誘電体磁器円板は、厚みと直
径と重量を測定し、重量を厚みと直径より算出した体積
で除算し、誘電体磁器の密度とした。
The thickness, diameter and weight of the thus obtained dielectric porcelain disk were measured, and the weight was divided by the volume calculated from the thickness and diameter to obtain the density of the dielectric porcelain.

また、誘電率,良好度Q,静電容量温度係数測定用試料
は、誘電体磁器円板の両面全体に銀電極を焼き付け、絶
縁抵抗,絶縁破壊強度測定用試料は、誘電体磁器円板の
外周より内側に1mmの幅で銀電極のない部分を設け、銀
電極を焼き付けた。そして、誘電率,良好度Q,静電容量
温度係数は、YHP社製デジタルLCRメータのモデル4275A
を使用し、測定温度20℃,測定電圧1.0Vrms,測定周波数
1MHzでの測定より求めた。なお、静電容量温度係数は、
20℃と85℃の静電容量を測定し、次式により求めた。
In addition, the sample for measuring dielectric constant, goodness Q, and temperature coefficient of capacitance was prepared by baking silver electrodes on both sides of the dielectric porcelain disk, and the sample for measuring insulation resistance and dielectric strength was the same as that of the dielectric porcelain disk. A portion having no silver electrode with a width of 1 mm was provided inside the outer periphery, and the silver electrode was baked. The dielectric constant, goodness Q, and capacitance temperature coefficient are the YHP digital LCR meter model 4275A.
Measurement temperature 20 ℃, measurement voltage 1.0Vrms, measurement frequency
It was determined from measurement at 1 MHz. Note that the capacitance temperature coefficient is
The capacitances at 20 ° C. and 85 ° C. were measured and determined by the following equation.

TC=(C−Co)/Co×1/65×106 TC:静電容量温度係数(ppm/℃) Co:20℃での静電容量(pF) C :85℃での静電容量(pF) また、誘電率は次式より求めた。TC = (C-Co) / Co × 1/65 × 10 6 TC: Temperature coefficient of capacitance (ppm / ° C) Co: Capacitance at 20 ° C (pF) C: Capacitance at 85 ° C ( pF) The dielectric constant was determined by the following equation.

K=143.8×Co×t/D2 K:誘電率 Co:20℃での静電容量(pF) D :誘電体磁器の直径(mm) t :誘電体磁器の厚み(mm) さらに、絶縁抵抗は、YHP社製HRメータのモデル4329A
を使用し、測定電圧50V.D.C.,測定時間1分間による測
定より求めた。
K = 143.8 × Co × t / D 2 K: dielectric constant Co: capacitance at 20 ° C. (pF) D: diameter of dielectric porcelain (mm) t: thickness of dielectric porcelain (mm) Is YHP HR meter model 4329A
And a measurement voltage of 50 V DC for a measurement time of 1 minute.

そして、絶縁破壊強度は、菊水電子工業(株)製高電
圧電源PHS35K−3形を使用し、試料をシリコンオイル中
に入れ、昇圧速度50V/secにより求めた絶縁破壊電圧を
誘電体厚みで除算し、1mm当たりの絶縁破壊強度とし
た。
The dielectric breakdown strength was measured by using a high voltage power supply PHS35K-3 manufactured by Kikusui Electronics Co., Ltd., placing the sample in silicon oil, and dividing the dielectric breakdown voltage obtained at a step-up speed of 50 V / sec by the dielectric thickness. And the dielectric breakdown strength per 1 mm.

試験条件を第1表に併せて示し、試験結果を下記の第
2表に示す。
The test conditions are shown in Table 1, and the test results are shown in Table 2 below.

また第1図は本発明にかかる組成物の主成分の組成範
囲を示す三元図であり、主成分の組成範囲を限定した理
由を第1図を参照しながら説明する。すなわち、A領域
では焼結が著しく困難である。また、B領域では良好度
Qが低下し実用的でなくなる。さらに、C,D領域では静
電容量温度係数がマイナス側に大きくなりすぎて実用的
でなくなる。そして、E領域では静電容量温度係数がプ
ラス方向に移行するが、誘電率が小さく実用的でなくな
る。また、ReをLa,Pr,Nd,Smから選ぶことにより、La,P
r,Nd,Smの順で誘電率を大きく下げることなく、静電容
量温度係数をプラス方向に移行することが可能であり、
La,Pr,Nd,Smの1種あるいは組合せにより静電容量温度
係数の調節が可能である。
FIG. 1 is a ternary diagram showing the composition range of the main component of the composition according to the present invention. The reason for limiting the composition range of the main component will be described with reference to FIG. That is, sintering is extremely difficult in the region A. Further, in the region B, the degree of goodness Q is reduced and is not practical. Furthermore, in the C and D regions, the temperature coefficient of capacitance becomes too large on the minus side, which is not practical. Then, in the E region, the capacitance temperature coefficient shifts in the positive direction, but the dielectric constant is too small to be practical. Also, by selecting Re from La, Pr, Nd, and Sm, La, P
It is possible to shift the capacitance temperature coefficient in the positive direction without greatly lowering the dielectric constant in the order of r, Nd, Sm,
The capacitance temperature coefficient can be adjusted by one or a combination of La, Pr, Nd, and Sm.

また、TiO2をSnO2で置換することにより、誘電率、良
好度Q、静電容量温度係数、絶縁抵抗、絶縁破壊強度の
値を大きく変えることなく、誘電体磁器の密度を大きく
する効果を有し、その置換率mが0.01未満では置換効果
はなく、一方0.20を越えると誘電率、良好度Qが低下
し、静電容量温度係数もマイナス側に大きくなりすぎ実
用的でなくなる。
In addition, by replacing TiO 2 with SnO 2 , the effect of increasing the density of the dielectric porcelain without significantly changing the values of the dielectric constant, the quality factor Q, the temperature coefficient of capacitance, the insulation resistance, and the dielectric breakdown strength. When the substitution rate m is less than 0.01, there is no substitution effect. On the other hand, when it exceeds 0.20, the dielectric constant and the goodness Q decrease, and the temperature coefficient of capacitance becomes too large on the minus side, which is not practical.

また、主成分に対し、副成分Ta2O5を含有することに
より、絶縁抵抗、絶縁破壊強度が向上する効果を有し、
Ta2O5の含有量が主成分100重量部に対し0.1重量部未満
はそれほど絶縁破壊強度が大きくなく、この発明の範囲
から除外した。一方、Ta2O5の含有量が主成分に対し、1
0.0重量部を越えると良好度Q、絶縁抵抗が低下し、静
電容量温度係数がマイナス側に大きくなり実用的でなく
なる。
In addition, by containing a sub-component Ta 2 O 5 with respect to the main component, there is an effect of improving insulation resistance and dielectric breakdown strength,
When the content of Ta 2 O 5 is less than 0.1 part by weight with respect to 100 parts by weight of the main component, the dielectric breakdown strength is not so large and is excluded from the scope of the present invention. On the other hand, the content of Ta 2 O 5
If the amount exceeds 0.0 parts by weight, the degree of goodness Q and insulation resistance decrease, and the temperature coefficient of capacitance increases to the minus side, which is not practical.

なお、実施例における誘電体磁器の作製方法では、Ba
CO3,TiO2,SnO2,La2O3,Pr6O11,Nd2O3,Sm2O3およびTa2O3
を使用したが、この方法に限定されるものではなく、所
望の組成比になるように、BaTiO3などの化合物、あるい
は炭酸塩,水酸化物など空気中での加熱により、BaO,Ti
O2,SnO2,La2O3,Pr6O11,Nd2O3,Sm2O3およびTa2O5となる
化合物を使用しても実施例と同程度の特性を得ることが
できる。
Note that in the method of manufacturing the dielectric porcelain in the example, Ba
CO 3 , TiO 2 , SnO 2 , La 2 O 3 , Pr 6 O 11 , Nd 2 O 3 , Sm 2 O 3 and Ta 2 O 3
However, the method is not limited to this method, and BaO, Ti is heated by heating in the air such as a compound such as BaTiO 3 or a carbonate or a hydroxide so as to obtain a desired composition ratio.
Even if a compound that becomes O 2 , SnO 2 , La 2 O 3 , Pr 6 O 11 , Nd 2 O 3 , Sm 2 O 3 and Ta 2 O 5 can be used, the same characteristics as those of the example can be obtained. .

また、主成分をあらかじめ仮焼し、副成分を添加して
も実施例と同程度の特性を得ることができる。
Further, even if the main component is calcined in advance and the subcomponent is added, the same characteristics as those of the embodiment can be obtained.

また、上述の基本組成のほかに、SiO2,MnO2,Fe2O3,Zn
Oなど一般にフラックスと考えられている塩類,酸化物
などを、特性を損なわない範囲で加えることもできる。
Further, in addition to the above basic composition, SiO 2 , MnO 2 , Fe 2 O 3 , Zn
Salts, oxides, and the like, which are generally considered to be fluxes, such as O, can be added as long as the properties are not impaired.

発明の効果 以上本発明によると、誘電体磁器組成物中の4価のTi
およびSnの一部を5価のTaで置換することにより生じた
陽イオン空孔で、焼成時の酸素欠陥によるe-を補償し、
TiO2が還元されるのを抑制できる。従って積層セラミッ
クコンデンサを作製する場合、誘電体層中のTiとPd等の
内部電極を形成する金属との化合物の生成を防止でき、
誘電体層と内部電極の界面の密着性がを向上するため、
静電容量とQ値が大きく、そのバラツキが小さい積層セ
ラミックコンデンサを得ることができる。
Effects of the Invention According to the present invention, tetravalent Ti in a dielectric porcelain composition is
And cation vacancies generated by substituting a part of Sn with pentavalent Ta to compensate for e due to oxygen deficiency during firing,
The reduction of TiO 2 can be suppressed. Therefore, when manufacturing a multilayer ceramic capacitor, it is possible to prevent the generation of a compound of Ti in the dielectric layer and a metal forming an internal electrode such as Pd,
In order to improve the adhesion at the interface between the dielectric layer and the internal electrode,
A multilayer ceramic capacitor having a large capacitance and a large Q value and a small variation can be obtained.

また従来の誘電体磁器組成物は、焼成時に還元された
TiO2が冷却過程である程度再酸化されるが、誘電体層の
内部、及び各結晶粒子の内側は再酸化されにくく酸素欠
乏状態のまま残る。この酸素欠乏が電気伝導に寄与し、
誘電体磁器組成物の絶縁抵抗、絶縁破壊強度を劣化させ
る。本発明の誘電体磁器組成物は、4価のTi及びSnの一
部を5価のTaで置換することにより生じた陽イオン空孔
で、焼成時の酸素欠陥によるe-を補償する。
Also, the conventional dielectric ceramic composition was reduced during firing.
Although TiO 2 is reoxidized to some extent during the cooling process, the inside of the dielectric layer and the inside of each crystal particle are hardly reoxidized and remain in an oxygen-deficient state. This oxygen deficiency contributes to electrical conduction,
It degrades the insulation resistance and dielectric breakdown strength of the dielectric ceramic composition. The dielectric porcelain composition of the present invention compensates for e due to oxygen vacancies during sintering, by cation vacancies generated by partially replacing tetravalent Ti and Sn with pentavalent Ta.

従って絶縁抵抗、絶縁破壊強度が従来よりも向上した
積層セラミックコンデンサを得ることができる。
Therefore, it is possible to obtain a multilayer ceramic capacitor having improved insulation resistance and dielectric breakdown strength as compared with the prior art.

さらにTiの一部をSnで置換することにより、誘電体磁
器組成物の密度が向上するため、積層セラミックコンデ
ンサにした場合、チップ立ちの発生を抑制することがで
き、実装性を向上させることができる。
Further, by replacing a part of Ti with Sn, the density of the dielectric ceramic composition is improved, so that when a multilayer ceramic capacitor is used, occurrence of chip standing can be suppressed, and mountability can be improved. it can.

【図面の簡単な説明】 第1図は本発明にかかる組成物の主成分の組成範囲を説
明する三元図である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a ternary diagram illustrating a composition range of a main component of a composition according to the present invention.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】一般式xBaO−y{(TiO2(1-m)(SnO2
}−zReO3/2と表した時(ただし、x+y+z=1.0
0、0.01≦m≦0.20、Reは、La,Pr,Nd,Smから選ばれる一
種類以上の希土類元素。)、x,y,zが以下の表に示す各
点a,b,c,d,e,fで囲まれるモル比の範囲からなる主成分1
00重量部に対し、副成分としてTa2O5を0.1〜10.0重量部
含有したことを特徴とする積層セラミックコンデンサ用
誘電体磁器組成物。
1. The formula xBaO-y {(TiO 2 ) (1-m) (SnO 2 )
m } −zReO 3/2 (where x + y + z = 1.0
0, 0.01 ≦ m ≦ 0.20, and Re is one or more rare earth elements selected from La, Pr, Nd, and Sm. ), X, y, and z are principal components 1 composed of a range of molar ratios surrounded by points a, b, c, d, e, and f shown in the following table.
A dielectric ceramic composition for a multilayer ceramic capacitor, comprising 0.1 to 10.0 parts by weight of Ta 2 O 5 as an auxiliary component with respect to 00 parts by weight.
JP1156503A 1989-06-19 1989-06-19 Dielectric ceramic composition for multilayer ceramic capacitors Expired - Fee Related JP3008408B2 (en)

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