JP3005521U - Clean air blowing device - Google Patents

Clean air blowing device

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Publication number
JP3005521U
JP3005521U JP1994009164U JP916494U JP3005521U JP 3005521 U JP3005521 U JP 3005521U JP 1994009164 U JP1994009164 U JP 1994009164U JP 916494 U JP916494 U JP 916494U JP 3005521 U JP3005521 U JP 3005521U
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Japan
Prior art keywords
air
hepa filter
chamber
blowing
blowout
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JP1994009164U
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Japanese (ja)
Inventor
芳郎 大熊
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Hosokawa Micron Corp
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Hosokawa Micron Corp
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  • Filtering Of Dispersed Particles In Gases (AREA)
  • Air-Flow Control Members (AREA)
  • Duct Arrangements (AREA)

Abstract

(57)【要約】 【目的】 清浄空気吹出装置内の空気摩擦抵抗を少なく
して所望の吹出風速が得られるようにする。 【構成】 供給口5が設けられHEPAフイルタ3を内
蔵したフイルタボックス1の下方にフイルタボックス1
よりも平面積の大きな吹出チャンバ2を形成させ、吹出
チャンバ2内には該吹出チャンバ2よりも小さな面積の
多孔性の整流板7をHEPAフイルタ3の下方に取付け
て整流板の周囲に空気通路を設けると共に、吹出チャン
バ2下方の吹出口9にも多孔パネル8を付設して空気摩
擦抵抗と発生騒音とを減少する。
(57) [Abstract] [Purpose] To reduce the air frictional resistance in the clean air blowing device to obtain a desired blowing air velocity. [Structure] Below a filter box 1 having a supply port 5 and a built-in HEPA filter 3, a filter box 1 is provided.
A blowout chamber 2 having a larger flat area than that of the blowout chamber 2 is formed, and a porous straightening plate 7 having an area smaller than that of the blowing chamber 2 is attached below the HEPA filter 3 to form an air passage around the straightening plate. In addition to the above, the perforated panel 8 is attached to the blowout port 9 below the blowout chamber 2 to reduce air friction resistance and generated noise.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は、クリーンルームやバイオロジカルクリーンルーム用の清浄空気供給 装置に関するもので、例えば病院の手術室や病室において感染防止の目的で部分 的に必要範囲を清浄域に保持するためのものである。 The present invention relates to a clean air supply device for a clean room or a biological clean room, and is for partially maintaining a necessary range in a clean area in order to prevent infection in an operating room or a hospital room of a hospital, for example.

【0002】[0002]

【従来の技術】[Prior art]

従来のクリーンルームやバイオロジカルクリーンルームでは、清浄度維持のた めに吹出口全面にHEPAフイルタを取付けたり、要求される清浄域確保のため に図3に示すように、HEPAフイルタ3の下面に複雑な拡散用の整流部材12 を組込んで吹出空気を拡散させ、かつ吹出口9から均一に吹き出させるようにす ることで吹出面積を拡大させていた。 In a conventional clean room or biological clean room, a HEPA filter is attached to the entire surface of the air outlet to maintain cleanliness, or a complicated bottom surface of the HEPA filter 3 is installed as shown in Fig. 3 to secure a required clean area. The blowout area is expanded by incorporating the flow regulating member 12 for diffusion so that the blown air is diffused and is blown out uniformly from the blowout port 9.

【0003】 しかし、前者の場合は吹出口と同面積のHEPAフイルタを必要とし、後者の 場合は整流部材11による空気の摩擦抵抗が増加するため、吹出風速を高くする ことは困難であった。However, in the former case, a HEPA filter having the same area as that of the air outlet is required, and in the latter case, the frictional resistance of the air by the rectifying member 11 increases, so that it is difficult to increase the blowing air velocity.

【0004】[0004]

【考案が解決しようとする課題】[Problems to be solved by the device]

つまり、定められた清浄域に対して要求される清浄度を維持するには清浄域と 同程度以上の吹出面積を必要とし、しかも均一な風速による清浄空気の供給が望 ましい。これに対応して前者のようにHEPAフイルタを吹出面に取付け、例え ば標準的な吹出風速である0.35m/secに設定した場合のHEPAフイル タの面積は、該HEPAフイルタの標準処理風量時の2倍以上にも相当すること になる。 In other words, in order to maintain the required cleanliness for a specified clean area, it is necessary to have a blowing area that is at least as large as the clean area, and it is desirable to supply clean air at a uniform wind speed. Corresponding to this, the area of the HEPA filter when the HEPA filter is attached to the blowing surface like the former and the standard blowing air speed is set to 0.35 m / sec, for example, is the standard processing air volume of the HEPA filter. This is more than twice the time.

【0005】 一方、HEPAフイルタを標準処理風量で設定し、吹出風速を0.35m/s ec程度にした場合、後者のように均一な吹出風速を確保する目的でHEPAフ イルタ6の出口側に複雑な整流部材11を組込むと、該整流部材11による空気 摩擦抵抗が増大して吹出風速は0.2m/sec以上にはならなかった。また、 発生騒音も大きくなるほか、整流部材11の付設に伴い価格も高くなるという問 題があった。On the other hand, when the HEPA filter is set with a standard processing air volume and the blowout air velocity is set to about 0.35 m / sec, the HEPA filter 6 is installed on the outlet side for the purpose of ensuring a uniform blowout air velocity as in the latter case. When the complicated rectifying member 11 was incorporated, the air frictional resistance due to the rectifying member 11 increased, and the blowing air velocity did not exceed 0.2 m / sec. Further, there is a problem that the generated noise is increased and the price is increased due to the attachment of the rectifying member 11.

【0006】 本考案は、こうした点に鑑みなされたもので、整流部材を簡素化して空気摩擦 抵抗を減少し、HEPAフイルタの標準処理風量時においては少なくとも0.3 5m/secの吹出風速が得られる安価な装置を提供することを目的とするもの である。The present invention has been made in view of the above points, and simplifies the rectifying member to reduce the air friction resistance, and at the standard processing air volume of the HEPA filter, the blowing air velocity of at least 0.35 m / sec can be obtained. The purpose is to provide an inexpensive device that can be used.

【0007】[0007]

【課題を解決するための手段】[Means for Solving the Problems]

本考案は、HEPAフイルタを内蔵したフイルタボックスの下方にフイルタボ ックスよりも平面積の大きな吹出チャンバを取付け、該吹出チャンバ内に吹出口 に付設する多孔パネルとは別にHEPAフイルタの下方に吹出チャンバよりも平 面積の小さな多孔性の整流板を配設して整流板の周囲に通路を形成させたことに あり、以下にその作用を述べる。 According to the present invention, a blow-out chamber having a flat area larger than that of a filter box is installed below a filter box having a built-in HEPA filter, and a perforated panel attached to a blow-out port in the blow-out chamber is provided below the blow-out chamber below the HEPA filter. In other words, a porous straightening vane with a small flat area was arranged to form a passage around the straightening vane, and its operation will be described below.

【0008】[0008]

【作用】[Action]

供給口からフイルタボックス内に送り込まれた空気はフイルタボックス内に内 蔵されたHEPAフイルタを通過して清浄化され、フイルタボックス下方の吹出 口から送り出されるが、フイルタボックスと吹出口との間には吹出チャンバが設 けられており、フイルタボックスを通過した空気は吹出チャンバ内において、H EPAフイルタの下方に設けられた多孔性の整流板により拡散整流されることに なる。 The air sent from the supply port into the filter box passes through the HEPA filter stored in the filter box to be cleaned and sent out from the outlet below the filter box, but between the filter box and the outlet. Is provided with a blowing chamber, and the air that has passed through the filter box is diffused and rectified in the blowing chamber by a porous rectifying plate provided below the HEPA filter.

【0009】 この整流板は、HEPAフイルタからの空気を該整流板に設けられた多数の開 孔を通過させることで整流するほか、整流板に当たった空気の一部をその周囲に 流すことにより吹出口に均一な速度分布の空気流を送ることができる。すなわち 、HEPAフイルタの下方に整流板がなければHEPAフイルタからの空気は直 進してほとんど拡散することがないため、均一な速度分布の空気流を得ることは できないが、HEPAフイルタ下方に多少の通気抵抗を持った多孔性の整流板を 付設すればある程度空気を拡散させることができる。This rectifying plate rectifies the air from the HEPA filter by passing it through a large number of holes provided in the rectifying plate, and also allows a part of the air hitting the rectifying plate to flow around it. An air flow with a uniform velocity distribution can be sent to the air outlet. In other words, if there is no baffle plate below the HEPA filter, the air from the HEPA filter goes straight and hardly diffuses. Therefore, it is not possible to obtain an air flow with a uniform velocity distribution, but some air flow below the HEPA filter. If a porous rectifying plate with ventilation resistance is attached, the air can be diffused to some extent.

【0010】 しかし、単に整流板を設けただけでは不十分で、例えば吹出チャンバの全面に 整流板を付設して空気の流れを抑制し拡散させようとすると、通気抵抗の少ない 開口率の大きい整流板を使用すると空気が中心部を多く流れて周辺部まで十分空 気が行きわたらなくなり、逆に開口率が小さ過ぎると通気抵抗が増えて空気量が 減り所望の吹出風速が得られなくなる。すなわち、通気抵抗が小さな整流板を使 用すると全体にわたり均一な空気流を得ることができず、また通気抵抗が大きく なると所望の吹出風速が得られなくなるという問題が生じる。However, it is not enough to simply provide a straightening vane. For example, if a straightening vane is attached to the entire surface of the blowout chamber to suppress and diffuse the air flow, a straightening vane with a small ventilation resistance and a large opening ratio is obtained. If a plate is used, a large amount of air will flow through the central part and will not reach the peripheral part sufficiently. Conversely, if the aperture ratio is too small, the ventilation resistance will increase and the amount of air will decrease, making it impossible to obtain the desired blowing air velocity. That is, if a straightening vane with a small air flow resistance is used, a uniform air flow cannot be obtained over the whole, and if the air flow resistance increases, a desired blowing air speed cannot be obtained.

【0011】 こうした点からすると、全面にわたり一律の開口率を持った多孔性の整流板で は適用不可能であり、中心部はある程度の通気抵抗を有するものの周辺部になる に従って次第に通気抵抗が小さくなるように開口率が変化するものが望ましい。 しかし、このような整流板は製作上費用が高くなるという別の問題が生じる。From this point of view, it is not applicable to a porous straightening plate having a uniform opening ratio over the entire surface, and although the central portion has a certain amount of ventilation resistance, the ventilation resistance gradually decreases as it becomes the peripheral portion. It is desirable that the aperture ratio be changed so that However, such a rectifying plate has another problem that the manufacturing cost is high.

【0012】 これに対し、本考案ではHEPAフイルタからの空気の一部を整流板を通さな いで整流板の周囲に設けた通路からも流れるようにすることで、ほぼ均一な速度 分布を持った空気流にすることができる。つまり、HEPAフイルタからの空気 の一部は整流板を通過させて拡散整流させ、残りは通気抵抗のない整流板の周囲 の通路を通すことで、吹出チャンバ内の吹出面の中心部と周辺部を流れる空気量 をほぼ均等にすることができる。こうして、整流板を通過し吹出面に向けて送り 出された空気は、吹出口に設けた多孔パネルを通過することにより、均一に整流 され層流状態の清浄空気としてクリーンルーム内に供給される。On the other hand, in the present invention, a part of the air from the HEPA filter does not pass through the straightening vanes and also flows from the passages provided around the straightening vanes, so that a substantially uniform velocity distribution is obtained. Can be an air stream. In other words, a part of the air from the HEPA filter is passed through the straightening vanes to be diffused and straightened, and the rest is passed through the passage around the straightening vanes that have no air flow resistance. The amount of air flowing through can be made almost equal. In this way, the air that has passed through the straightening vane and is directed toward the blowing surface passes through the perforated panel provided at the blowing outlet, and is uniformly rectified and supplied as clean air in a laminar flow state into the clean room.

【0013】[0013]

【考案の効果】[Effect of device]

本考案によれば、HEPAフイルタの下方に適当な大きさの多孔性の整流板を 適当な間隔を保って取付けるという簡単な整流機構で吹出チャンバ内の空気摩擦 抵抗を大幅に少なくすることができる。その結果、吹出量と吹出風速が同じであ れば、吹出口の面積を小さくすることができる。例えば、同じHEPAフイルタ を使用した場合、0.35m/sec程度の吹出風速を従来の1/2程度のフイ ルタ面積で実現することがことができるようになった。 According to the present invention, the air friction resistance in the blowout chamber can be greatly reduced by a simple rectifying mechanism in which a porous rectifying plate of an appropriate size is attached below the HEPA filter with an appropriate interval. . As a result, the area of the air outlet can be reduced if the air outlet and the air velocity are the same. For example, when the same HEPA filter is used, a blowing air velocity of about 0.35 m / sec can be realized with a filter area of about 1/2 of the conventional size.

【0014】[0014]

【実施例】【Example】

次に、本考案の実施例を図1及び図2により説明する。 本装置は、HEPAフイルタ3を内蔵するフイルタボックス1と、その下部に連 結されてHEPAフイルタ3を通過した清浄空気を整流してクリーンルーム内に 吹き込み供給する吹出チャンバ2とで構成されている。フイルタボックス1内は 仕切板6により区画され、仕切板6の上部側はチャンバ4として供給口5が設け られ、図示省略の空気供給源からの供給ダクトが接続される。また、仕切板6の 下部にはHEPAフイルタ3が配置され、取付金具10により仕切板6に気密に 固定される。 Next, an embodiment of the present invention will be described with reference to FIGS. This apparatus comprises a filter box 1 containing a HEPA filter 3 and a blowout chamber 2 connected to the lower part of the filter box 1 to rectify and blow clean air that has passed through the HEPA filter 3 into a clean room. The inside of the filter box 1 is partitioned by a partition plate 6, and a supply port 5 is provided as a chamber 4 on the upper side of the partition plate 6 and a supply duct from an air supply source (not shown) is connected. Further, the HEPA filter 3 is arranged under the partition plate 6, and is fixed to the partition plate 6 in an airtight manner by a mounting bracket 10.

【0015】 吹出チャンバ2はフイルタボックス1よりも平面積を大きくしており、吹出チ ャンバ2には下方に吹出口9を設けるほか、吹出チャンバ2内にはHEPAフイ ルタ3の下方に適当な間隔を保って多孔性の整流板7を配設している。この整流 板7は吹出チャンバ2よりも平面積を小さくし、整流板7の周囲に吹出チャンバ 2の壁面との間に通路11を形成している。また、整流板7は吹出チャンバ2の 壁面部に取付けた図示省略の支持部材によって保持されている。The blow-out chamber 2 has a larger plane area than the filter box 1. The blow-out chamber 2 is provided with a blow-out port 9 below, and the blow-out chamber 2 is provided with an appropriate blow-down chamber below the HEPA filter 3. Porous straightening vanes 7 are arranged at intervals. The flow straightening plate 7 has a smaller plane area than the blowout chamber 2, and a passage 11 is formed around the flow straightening plate 7 with the wall surface of the blowout chamber 2. The current plate 7 is held by a support member (not shown) attached to the wall surface of the blowout chamber 2.

【0016】 また、本実施例では整流板7を供給口5と離れた側のHEPAフイルタ3の端 部側に合わせて配置させ、供給口5に近い側の通路11aを遠い側の通路11b よりも広くしている。この整流板7をHEPAフイルタ3の中心からずらして配 置した理由は、HEPAフイルタを通過した空気をHEPAフイルタより面積の 拡大した吹出チャンバ2内に拡散させて吹出空気量を均一にするためである。つ まり、HEPAフイルタを通過した空気は供給口5に近い側より遠い側の方によ り流れ易く、それによって吹出空気の速度分布が不均一になるのを防止するため で、整流板7を供給口5と離れた遠い側に多少ずらして前記通路11bを狭く、 通路11aを広くすることで、通路11bの空気量を抑え、通路11aの空気量 を増やして吹出面への吹出空気の速度分布をある程度均一化させることができる 。こうして、整流板7を通過した空気と整流板7を通過しないで通路11を流れ る空気とが吹出口9でほぼ均一な速度分布を持った空気流として吹出面に向けて 送り出すことができる。また、吹出口9にも別の多孔パネル8を付設させ、吹出 空気をさらに整流して層流状態を形成するようにしている。Further, in this embodiment, the straightening vanes 7 are arranged so as to be aligned with the end side of the HEPA filter 3 on the side remote from the supply port 5, and the passage 11a on the side closer to the supply port 5 than the passage 11b on the far side. Is also wide. The reason why the straightening vanes 7 are arranged so as to be displaced from the center of the HEPA filter 3 is that the air passing through the HEPA filter is diffused into the blowing chamber 2 having an area larger than that of the HEPA filter to make the blowing air amount uniform. is there. That is, the air that has passed through the HEPA filter is more likely to flow on the far side than on the side closer to the supply port 5, so that the velocity distribution of the blown air is prevented from becoming non-uniform. By narrowing the passage 11b to a side farther away from the supply port 5 to narrow the passage 11a and widening the passage 11a, the air amount in the passage 11b can be suppressed, and the air amount in the passage 11a can be increased to increase the speed of the air blown to the blowing surface. The distribution can be made uniform to some extent. In this way, the air that has passed through the straightening vanes 7 and the air that does not pass through the straightening vanes 7 but flows through the passages 11 can be sent out toward the blowing surface as an air flow having a substantially uniform velocity distribution at the blowout ports 9. Further, another perforated panel 8 is attached to the outlet 9 so that the blown air is further rectified to form a laminar flow state.

【0017】 ところで、整流板7と多孔パネル8の開口率、及び整流板7の大きさと取付位 置、通路11の広さなどについては、通気抵抗を左右するので、これら部材の付 設によって所望の吹き出し風速が得られなくなることのないように適切な開口率 のものを選択すると共に、整流板7の取付位置の配慮が必要である。また、HE PAフイルタ3の交換は室内側より多孔パネル8と整流板7を取り除いた後、取 付金具10を取外すことにより容易に行えるようになっている。By the way, regarding the aperture ratio of the straightening vanes 7 and the perforated panel 8, the size and the mounting position of the straightening vanes 7, the size of the passages 11, etc., influence the ventilation resistance. It is necessary to select the one with an appropriate opening ratio so as not to lose the blowout air velocity and to consider the mounting position of the current plate 7. Further, the HEPA filter 3 can be easily replaced by removing the perforated panel 8 and the rectifying plate 7 from the indoor side and then removing the mounting bracket 10.

【0018】 以上のような構成で、供給口5からフイルタボックス1内に導入された空気は HEPAフイルタ3を通過することにより浄化される。次に、HEPAフイルタ 3を通過した清浄空気は吹出チャンバ2内において、整流板7により拡散整流さ れた後、さらに吹出口9に付設された吹出パネル8によって均一な風速に整流さ れてクリーンルーム内に供給される。With the above configuration, the air introduced into the filter box 1 from the supply port 5 is purified by passing through the HEPA filter 3. Next, the clean air that has passed through the HEPA filter 3 is diffused and rectified by the rectifying plate 7 in the blowout chamber 2, and is further rectified to a uniform wind speed by the blowout panel 8 attached to the blowout port 9 so that the cleanroom is clean. Supplied within.

【0019】[0019]

【実験例】[Experimental example]

上記の装置において、610mm×915mm、厚さ150mmの寸法で、0 .3μmの捕集率が99.97%のHEPAフイルタ3と、吹出面の寸法が90 0mm×680mmで開口率26%の整流板7と、900mm×1500mmの 寸法で開口率16%の多孔パネル8を取付け、風量1680m/h、吹出風速 0.35m/secにおいて運転したところ、吹出チャンバ2内の空気摩擦抵抗 は2〜3mmAqであった。これは従来の装置で、同じHEPAフイルタ3と多 孔パネル8を取付けて風量1000m/hで運転して吹出チャンバ2内の空気 摩擦抵抗が6mmAq以上になったのと比べると、空気摩擦抵抗は半分以下に減 少したことになる。また、これに伴って発生騒音も大幅に減少した。In the above device, the dimensions of 610 mm × 915 mm and the thickness of 150 mm were 0. A HEPA filter 3 with a collection rate of 3 μm of 99.97%, a rectifying plate 7 with a blowing surface dimension of 900 mm × 680 mm and an aperture rate of 26%, and a porous panel 8 with a dimension of 900 mm × 1500 mm and an aperture rate of 16% 8 Was attached and operated at an air flow rate of 1680 m 3 / h and a blowing air velocity of 0.35 m / sec, the air friction resistance in the blowing chamber 2 was 2 to 3 mmAq. This is a conventional device. Compared with the air friction resistance of 6 mmAq or more in the blowout chamber 2 when the same HEPA filter 3 and multi-hole panel 8 were attached and the air flow rate was 1000 m 3 / h and the air friction resistance was 6 mmAq or more. Is less than half. In addition, the noise generated was also significantly reduced.

【0020】[0020]

【別の実施例】[Another embodiment]

前記整流板7および多孔パネル8のパンチプレートは鋼板やステンレス、アル ミニウム等の金属製のほか、合成樹脂製の網や多孔板、更にはフイルタ状のもの であってもよい。また、その開口は円形のほか、楕円形や四角形や細長いスリッ ト状のものであってもよい。 The punch plate of the straightening plate 7 and the perforated panel 8 may be made of a steel plate, a metal such as stainless steel or aluminum, or a net or a perforated plate made of a synthetic resin, or a filter-like one. In addition to the circular shape, the opening may be an elliptical shape, a square shape, or an elongated slit shape.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本実施例の平面図である。FIG. 1 is a plan view of the present embodiment.

【図2】 図1のII−II断面図である。FIG. 2 is a sectional view taken along line II-II of FIG.

【図3】 従来例を示す。FIG. 3 shows a conventional example.

【0021】[0021]

【符号の説明】[Explanation of symbols]

1 フイルタボックス 2 吹出チャンバ 3 HEPAフイルタ 5 供給口 6 仕切板 7 整流板 8 吹出パネル 9 吹出口 10 取付具 11 通路 1 Filter Box 2 Blow Chamber 3 HEPA Filter 5 Supply Port 6 Partition Plate 7 Rectifier Plate 8 Blowout Panel 9 Blowout Port 10 Fixture 11 Passage

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 空気の供給口5が設けられHEPAフイ
ルタ3を内蔵したフイルタボックス1の下方にフイルタ
ボックス1よりも平面積の大きな吹出チャンバ2を取付
けて一体化し、吹出チャンバ2下方の吹出口9の全面に
多孔パネル8を付設すると共に、HEPAフイルタ3と
多孔パネル8との間に相互に適当な間隔を保って吹出チ
ャンバ2よりも平面積の小さな多孔性の整流板7を配設
し、整流板7の周囲に通路11を形成させたことを特徴
とする清浄空気吹出装置。
1. A blow-out chamber 2 having a plane area larger than that of the filter box 1 is attached below a filter box 1 having an air supply port 5 and a built-in HEPA filter 3 to integrate the blow-out chamber 2 with the blow-out chamber 2. A perforated panel 8 is attached to the entire surface of 9, and a perforated straightening plate 7 having a smaller plane area than that of the blowing chamber 2 is disposed between the HEPA filter 3 and the perforated panel 8 with an appropriate interval therebetween. A clean air blowing device characterized in that a passage 11 is formed around the straightening vane 7.
JP1994009164U 1994-06-22 1994-06-22 Clean air blowing device Expired - Lifetime JP3005521U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1994009164U JP3005521U (en) 1994-06-22 1994-06-22 Clean air blowing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1994009164U JP3005521U (en) 1994-06-22 1994-06-22 Clean air blowing device

Publications (1)

Publication Number Publication Date
JP3005521U true JP3005521U (en) 1995-01-10

Family

ID=43141415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1994009164U Expired - Lifetime JP3005521U (en) 1994-06-22 1994-06-22 Clean air blowing device

Country Status (1)

Country Link
JP (1) JP3005521U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002282712A (en) * 2001-03-28 2002-10-02 National Institute Of Advanced Industrial & Technology Purging vessel
CN114322124A (en) * 2020-09-29 2022-04-12 芝浦机械电子装置株式会社 Blower and electronic component mounting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002282712A (en) * 2001-03-28 2002-10-02 National Institute Of Advanced Industrial & Technology Purging vessel
CN114322124A (en) * 2020-09-29 2022-04-12 芝浦机械电子装置株式会社 Blower and electronic component mounting device

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