JP3001542B1 - Cooling system - Google Patents

Cooling system

Info

Publication number
JP3001542B1
JP3001542B1 JP10310424A JP31042498A JP3001542B1 JP 3001542 B1 JP3001542 B1 JP 3001542B1 JP 10310424 A JP10310424 A JP 10310424A JP 31042498 A JP31042498 A JP 31042498A JP 3001542 B1 JP3001542 B1 JP 3001542B1
Authority
JP
Japan
Prior art keywords
chamber
groove
pulse tube
phase adjusting
buffer tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10310424A
Other languages
Japanese (ja)
Other versions
JP2000130873A (en
Inventor
敬次 滝澤
健一 奈良
Original Assignee
株式会社移動体通信先端技術研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社移動体通信先端技術研究所 filed Critical 株式会社移動体通信先端技術研究所
Priority to JP10310424A priority Critical patent/JP3001542B1/en
Application granted granted Critical
Publication of JP3001542B1 publication Critical patent/JP3001542B1/en
Publication of JP2000130873A publication Critical patent/JP2000130873A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1407Pulse-tube cycles with pulse tube having in-line geometrical arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1421Pulse-tube cycles characterised by details not otherwise provided for
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1423Pulse tubes with basic schematic including an inertance tube

Abstract

【要約】 【課題】従来の位相調整器(中空細管)と同様な機能を
備え、通気性・気密性の要件を満たし、放熱の点でも優
れている位相調整手段の開発。 【解決手段】チャンバ外に設けられた圧縮機によりチャ
ンバ内に置かれたパルス管冷凍機を運転して、チャンバ
内を冷却する装置であって、パルス管と、該パルス管に
接続する位相調整手段23と、該位相調整手段に接続す
るバッファタンクと、チャンバを形成する壁材とを主た
る構成要素とする冷却装置であって、壁材の一部を2枚
の金属鈑を貼合わせ可能とし,貼合わせ面に溝17加工
を施して、金属鈑を張合わせて、溝により通気路を形成
し、該溝の入口をパルス管(又はパルス管と連結してい
る中空管)の先端に接続し、該溝の出口を前記バッファ
タンクに連結している中空管に接続することにより、位
相調整機能を維持しながら、放熱効果を一段と高めるこ
とができる。
[PROBLEMS] To develop a phase adjusting means which has the same function as a conventional phase adjuster (hollow thin tube), satisfies the requirements of air permeability and air tightness, and is excellent in heat dissipation. An apparatus for cooling a chamber by operating a pulse tube refrigerator placed in a chamber by a compressor provided outside the chamber, comprising: a pulse tube; and a phase adjustment connected to the pulse tube. A cooling device comprising, as main components, a means 23, a buffer tank connected to the phase adjusting means, and a wall material forming a chamber, and a part of the wall material is capable of bonding two metal plates. A groove 17 is formed on the surface to be bonded, a metal plate is bonded, a ventilation path is formed by the groove, and the entrance of the groove is formed at the tip of a pulse tube (or a hollow tube connected to the pulse tube). By connecting and connecting the outlet of the groove to the hollow tube connected to the buffer tank, the heat radiation effect can be further enhanced while maintaining the phase adjustment function.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】チャンバ内に置かれたパルス
管冷凍機のパルス管先端に設ける位相調整手段の改良技
術に関し、更に詳しくは、チャンバを形成する壁材に位
相調整手段を納め、位相調整と放熱処理とを兼ねたコン
パクトな構造とした冷却装置に係る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improved technique of a phase adjusting means provided at a tip of a pulse tube of a pulse tube refrigerator placed in a chamber. More specifically, the phase adjusting means is provided in a wall material forming a chamber. The present invention relates to a cooling device having a compact structure that also serves as a cooling device.

【0002】[0002]

【従来技術とその問題点】衛星や移動体通信の地上中継
局等では、受信に際し、高感度化と干渉軽減化とが図ら
れる。この目的達成のために、中継局等には高温超伝導
フィルタと低雑音増幅手段が必要となる。前者の高温超
伝導(HTS)フィルタは、最近の技術ではYBCO膜
を用いることによって、液体窒素温度(約70K)近傍
で動作できるまでに到っている。また、後者の低雑音増
幅器(LNA)も低温ほど雑音が少ない利点を活かし
て、低温のチャンバ内に納められている。
2. Description of the Related Art In a satellite or a ground relay station for mobile communication, high sensitivity and interference reduction are achieved at the time of reception. To achieve this goal, a relay station or the like needs a high-temperature superconducting filter and a low-noise amplifier. The former high-temperature superconducting (HTS) filter has been able to operate near liquid nitrogen temperature (about 70 K) by using a YBCO film in recent technology. Also, the latter low noise amplifier (LNA) is housed in a low-temperature chamber, taking advantage of the advantage that the noise is lower at lower temperatures.

【0003】このように、液体窒素温度程度の温度で、
HTSフィルタやLNAを動作せしめるためには、これ
らの装置を収容できる冷却室と冷却手段とが不可欠であ
る。しかるに、冷却効率が高く、メンテナンスを要する
ことが少ない、優れた冷却技術を備えていないと、時代
の要請に応えられない。もっとも、現時点では、冷凍機
としては第3世代パルス管冷凍機の種類の中に極めて冷
却能率がよく、30〜50K程度の低温まで到達するも
のが有ると言われている。
Thus, at a temperature of about the temperature of liquid nitrogen,
In order to operate the HTS filter and the LNA, a cooling chamber and a cooling means capable of accommodating these devices are indispensable. However, the demands of the times cannot be met without high cooling efficiency, low maintenance, and excellent cooling technology. However, at the present time, it is said that some refrigerators of the third generation pulse tube refrigerator have extremely high cooling efficiency and reach a low temperature of about 30 to 50K.

【0004】そこで、冷凍手段として、まずパルス管冷
凍機を取上げ、HTSフィルタやLNAを収納したチャ
ンバ内をパルス管冷凍機によって、冷却することを検討
したところ、冷却システム全体として、一層の効率化が
更に求められることが判った。HTSフィルタやLNA
に加えて、チャンバ内には冷凍機のパルス管部分や位相
調整手段が場所を占めている。位相調整手段の端部とな
るバッファタンクはチャンバ外に置くことができるが、
中空管からなる位相調整手段の要部はチャンバ内にあっ
て、相当な容積を有していて、機能的には位相調整に加
えて、放熱機能も要求される。従って、機能を維持・向
上せしめながら、この位相調整手段のコンパクト化を図
らねばならず、抜本的な技術の改良が為さらねばならな
い。
[0004] Therefore, as a refrigerating means, a pulse tube refrigerator was first taken up, and it was examined that the inside of the chamber containing the HTS filter and the LNA was cooled by the pulse tube refrigerator. Was found to be further required. HTS filter and LNA
In addition, the pulse tube portion of the refrigerator and the phase adjusting means occupy a place in the chamber. The buffer tank at the end of the phase adjustment means can be placed outside the chamber,
The main part of the phase adjusting means consisting of a hollow tube is located in the chamber and has a considerable volume, so that in addition to the phase adjustment, a heat dissipation function is required. Therefore, it is necessary to reduce the size of the phase adjusting means while maintaining and improving the function, and it is necessary to further improve the fundamental technology.

【0005】ここで、まず従来技術を、図面を参照して
説明すると、図6は従来技術の一例を示すパルス管冷凍
機である。従来技術では、圧縮機50を運転して、パル
ス管冷凍機30(蓄冷器、低温端部等の機械部を含む)
のパルス管部分11の先端に連結される中空の細管13
(通常内径1〜3mm程度)からなる位相調整器と、位
相調整器の末端に設けられるバッファタンク18と、か
ら構成されている。パルス管冷凍機は、同一チャンバ4
0内の高温超伝導フィルタ等被冷却物を冷却し、機能せ
しめるためのものであるから、パルス管冷凍機自体や位
相調整手段自体はチャンバ内で占める容積が、可能な限
り、小さいことを要請され、従って大きな場所を占めな
いための工夫が要る。しかも位相調整の機能と共に、効
率のよい放熱が要求される。
Here, the prior art will be described first with reference to the drawings. FIG. 6 shows a pulse tube refrigerator as an example of the prior art. In the prior art, the compressor 50 is operated to operate the pulse tube refrigerator 30 (including mechanical parts such as a regenerator and a low-temperature end).
Hollow tube 13 connected to the tip of pulse tube portion 11
(Usually about 1 to 3 mm in inner diameter), and a buffer tank 18 provided at the end of the phase adjuster. The pulse tube refrigerator has the same chamber 4
Since the cooling target, such as a high-temperature superconducting filter in 0, is used for cooling and functioning, it is required that the pulse tube refrigerator itself and the phase adjusting means themselves occupy as little space as possible in the chamber. Therefore, it is necessary to devise a device that does not occupy a large area. In addition, efficient heat dissipation is required together with the phase adjustment function.

【0006】[0006]

【課題を解決するための手段】位相調整器の有つ細管の
構造を、2枚の密着できる金属製の曲面又は平面からな
る金属鈑の張合わせ面に溝を形成して、細管と同等な通
気性を与え、同時に溝以外の面を気密となるように密着
せしめた構造体に変える。この金属鈑は、チャンバの
壁、天井及び床に用いることができる材料であり、以下
「位相調整部材」と称する。2枚の金属鈑を気密に密着
せしめる手段は公知の方法、例えば溶接や接着剤による
接合が例示できる。張合わせ面は蝋付けされることから
同一材料が好ましいが、勿論接合により気密が保持で
き、充分な機械的強度があれば、別異の材料でも構わな
い。
Means for Solving the Problems The structure of a thin tube of a phase adjuster is formed by forming a groove in a bonding surface of a metal sheet made of a metal curved surface or a flat surface that can be brought into close contact with each other, so as to be equivalent to a thin tube. The structure is changed to a structure in which air permeability is given, and at the same time, the surfaces other than the grooves are tightly adhered so as to be airtight. This metal plate is a material that can be used for the walls, ceiling, and floor of the chamber, and is hereinafter referred to as a “phase adjusting member”. Means for bringing the two metal plates into close contact with each other in an airtight manner can be exemplified by a known method, for example, welding or joining with an adhesive. The same material is preferable because the brazing surface is brazed, but of course, another material may be used as long as airtightness can be maintained by joining and sufficient mechanical strength is provided.

【0007】本発明の位相調整器の代わりとなる位相調
整部材は、中空の細管と同様な機能を備え、中空細管と
比較して、通気性・気密性の点で遜色ないうえに、放熱
の点で数段優れている。金属鈑に穿った溝は2枚を張合
わせることから極めて多様な溝パターンを設計できる。
更に、金属鈑の材質を適宜選択することも可能で、熱伝
導性に優れた材料を選び、張合わせ面(溝)以外の部分
の材料を放熱し易い銀や銅とし、更に位相調整部材の外
形を、例えばフィンのような、表面積の大きい形状に加
工することも可能である。
[0007] The phase adjuster as a substitute for the phase adjuster of the present invention has a function similar to that of a hollow thin tube. It is a few steps better. Since the two grooves formed in the metal plate are attached to each other, extremely various groove patterns can be designed.
Further, the material of the metal plate can be appropriately selected, a material having excellent thermal conductivity is selected, and the material of the portion other than the bonding surface (groove) is made of silver or copper which is easy to dissipate heat. It is also possible to process the outer shape into a shape having a large surface area, such as a fin.

【0008】請求項1の発明は、チャンバ外に設けられ
た圧縮機によりチャンバ内に置かれたパルス管冷凍機を
動作して、チャンバ内(被冷却物をも含む)を冷却する
装置であって、チャンバ内に置かれたパルス管と、該パ
ルス管に接続する位相調整手段と、該位相調整手段に接
続するバッファタンクと、チャンバを形成する壁材とを
含み、前記壁材の一部は2枚の金属鈑を貼合わせてなる
位相調整部材からなり、該位相調整部材を構成する該金
属鈑の少なくとも1枚の貼合わせ面には溝加工が施され
て、該溝により通気路が形成されており、前記位相調整
部材の溝の一端(入口)を前記パルス管又は前記パルス
管と連結している中空管の先端に接続し、前記位相調整
部材の溝の他端(出口)を前記バッファタンクに連結し
ている中空管に接続することにより、金属等からなる細
管を、溝付きの金属鈑に変えることで、位相調整機能を
維持しながら放熱効果を高めることが可能となる。しか
もチャンバ内部の有効容積を拡張できる。
[0008] The invention of claim 1 is an apparatus for cooling the inside of a chamber (including an object to be cooled) by operating a pulse tube refrigerator placed in the chamber by a compressor provided outside the chamber. A pulse tube placed in the chamber, a phase adjusting unit connected to the pulse tube, a buffer tank connected to the phase adjusting unit, and a wall material forming the chamber, and a part of the wall material. Is composed of a phase adjusting member formed by bonding two metal plates, and at least one bonding surface of the metal plate forming the phase adjusting member is subjected to a groove processing, whereby the ventilation path is formed by the groove. One end (inlet) of the groove of the phase adjusting member is connected to the tip of the pulse tube or a hollow tube connected to the pulse tube, and the other end (outlet) of the groove of the phase adjusting member is formed. Into the hollow tube connected to the buffer tank. By the capillary made of metal or the like, by changing the metal 鈑 grooved, it is possible to enhance the heat dissipation effect while maintaining a phase adjusting function. Moreover, the effective volume inside the chamber can be expanded.

【0009】請求項2の発明は、バッファタンクを溝付
き位相調整部材と接するように配置して成る位相調整手
段である。位相調整部材とバッファタンクとが接続する
ことで、一層コンパクトな構成となり、チャンバ内にH
TSフィルタやLNA等を収納するための充分なスペー
スが確保でき、チャンバ全体を小型化できる。請求項3
の発明は、バッファタンク全体を位相調整部材に収納
し、チャンバを含めて冷凍装置全体のコンパクト化を徹
底した構成である。
According to a second aspect of the present invention, there is provided a phase adjusting means in which the buffer tank is disposed so as to be in contact with the grooved phase adjusting member. By connecting the phase adjusting member and the buffer tank, a more compact configuration is obtained, and H
A sufficient space for accommodating the TS filter, the LNA, and the like can be secured, and the entire chamber can be reduced in size. Claim 3
The invention has a configuration in which the entire buffer tank is housed in a phase adjusting member, and the entire refrigeration system including the chamber is made compact.

【0010】[0010]

【作用】パルス管冷凍機は、主として圧縮機、蓄冷器、
パルス管及び位相調整手段から構成され、このうちパル
ス管及び位相調整手段の一部は冷凍チャンバの中に納め
られる。圧縮機と位相調整手段とは圧縮・膨張の位相が
相互に一致しないように位相調整されている。主として
溝部分からなる位相調整手段の一部は、細い中空管の有
する位相調整機能と溝周囲の熱伝達による放熱機能を備
え、位相調整部材の末端にはバッファタンクが接続され
る。位相調整が好適に機能すると、圧縮状態側から膨張
状態側に熱エネルギの移動が起こり、低温のチャンバ内
から位相調整部材に熱が汲み上げられ、チャンバ内部の
被冷却物は更に冷却される。言い換えると、パルス管に
おける圧力と変位との関係を、位相調整手段によって位
相調製して、仕事流の増幅と最適化とを図り、仕事流を
増幅された熱に変換することから、大きな冷却効果を発
生せしめことが可能となる。従って、チャンバの壁材で
もある本発明の位相調整部材の機能は重要である。そし
て、位相調整部材の材質、溝形状は本発明の冷却装置の
性能を左右するものである。
[Function] A pulse tube refrigerator mainly includes a compressor, a regenerator,
It is composed of a pulse tube and a phase adjusting means, of which a part of the pulse tube and the phase adjusting means is housed in a freezing chamber. The phase of the compressor and the phase adjusting means are adjusted so that the phases of compression and expansion do not coincide with each other. Part of the phase adjusting means mainly composed of the groove portion has a phase adjusting function of the thin hollow tube and a heat radiating function by heat transfer around the groove, and a buffer tank is connected to an end of the phase adjusting member. When the phase adjustment functions properly, heat energy is transferred from the compression state to the expansion state, heat is pumped from the low temperature chamber to the phase adjustment member, and the object to be cooled in the chamber is further cooled. In other words, the phase between the pressure and the displacement in the pulse tube is adjusted by the phase adjusting means, the work flow is amplified and optimized, and the work flow is converted into amplified heat. Can be generated. Therefore, the function of the phase adjusting member of the present invention, which is also a wall material of the chamber, is important. The material and groove shape of the phase adjusting member affect the performance of the cooling device of the present invention.

【0011】なお、位相調整手段による位相調整が不適
切であると、仕事流が相殺されてしまう結果、充分な仕
事流が得られず、熱変換の後での冷却効率が低くなる。
If the phase adjustment by the phase adjusting means is inappropriate, the work flow is canceled, so that a sufficient work flow cannot be obtained and the cooling efficiency after heat conversion is reduced.

【0012】[0012]

【実施の態様】本発明に供する位相調整部材は溝加工面
と対向面(又は突合わされる2枚の溝加工面)とからな
り、少なくとも1面が溝加工を施されている。また、位
相調整部材の材質としては、溝に接する部分が熱伝導性
の高い銅、銀、錫、銀合金及び銅合金が好ましい。勿
論、例えば、溝加工面(蝋付け面)が銅層であって、そ
の外側が鋼鈑である2層の組合せでもよい。このような
溝付き積層鈑と対向面となる非加工の金属板との張合わ
せ積層材が示される。対向面(蝋付け面)の材料も同一
素材の銅を選択し、貼り合せを容易にするとよい。勿
論、この場合も単一層としてもよく、銅と他の金属鈑と
の張合わせ積層材でもよい。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A phase adjusting member according to the present invention comprises a grooved surface and an opposing surface (or two grooved surfaces to be abutted), and at least one surface is grooved. In addition, as a material of the phase adjusting member, copper, silver, tin, a silver alloy, and a copper alloy having a high thermal conductivity in a portion in contact with the groove are preferable. Of course, for example, a combination of two layers in which the groove processing surface (brazing surface) is a copper layer and the outside thereof is a steel plate may be used. A laminated laminated material of such a grooved laminated plate and a non-processed metal plate serving as an opposing surface is shown. It is good to select the same material copper as the material of the opposing surface (brazing surface) to facilitate bonding. Of course, in this case as well, a single layer may be used, or a laminated laminate of copper and another metal plate may be used.

【0013】溝の幅や深さは、0.1〜10mm程度
の、横断面がU字型や半円型のものが例示できる。この
形状では2枚の貼り合せ鈑両面に溝加工を施して、楕円
や円の横断面を有する溝を形成することも可能である。
図面を参照して、更に詳しく説明する。図1は、本発明
の一実施例を示す概略図である。パルス管11の先端に
連結した位相調整器10の中空細管13の部分を、チャ
ンバの天井15において、溝付き壁材(位相調整部材2
3)に置換えた態様を示す。この図面ではバッファタン
ク18がチャンバ40内に置かれている。
The width and depth of the groove may be, for example, about 0.1 to 10 mm, and the cross section may be U-shaped or semicircular. In this shape, grooves can be formed on both surfaces of the two bonded plates to form grooves having an elliptical or circular cross section.
This will be described in more detail with reference to the drawings. FIG. 1 is a schematic diagram showing one embodiment of the present invention. The portion of the hollow thin tube 13 of the phase adjuster 10 connected to the tip of the pulse tube 11 is connected to a grooved wall material (phase adjusting member 2) on the ceiling 15 of the chamber.
An example in which the substitution is performed is shown in 3). In this drawing, the buffer tank 18 is placed in the chamber 40.

【0014】図2(a)は、本発明に供する位相調整部
材23の溝17の形状を示す例であって、溝幅が変化す
る態様を示すほか、溝が渦巻き状を呈する図2(b)の
例もある。図3(a)は、本発明の請求項2に該当する
実施例である。バッファタンク18が位相調整部材23
の上に接するように連結配置された例である。バッファ
タンクに接続する中空の連結管が不要となり、一層コン
パクトな構成となる。
FIG. 2A shows an example of the shape of the groove 17 of the phase adjusting member 23 used in the present invention, showing the manner in which the groove width changes, and FIG. ). FIG. 3A shows an embodiment corresponding to claim 2 of the present invention. Buffer tank 18 is a phase adjusting member 23
This is an example in which the components are connected and arranged so as to be in contact with the top of the device. The need for a hollow connecting pipe connected to the buffer tank is eliminated, resulting in a more compact configuration.

【0015】位相調整部材23の溝が渦巻き状のときは
バッファタンク18が位相調整部材の上に置かれる。中
空連結管が省略できるように溝の出口がバッファタンク
に直ちに接続される。図4(a)は、本発明請求項2の
別な実施例を示す。バッファタンク18が位相調整部材
23と接触し、両者が並ぶように配置された例である。
この場合も中空連結管が不要となり、コンパクトな構成
となる。位相調整部材23に設ける溝パターンは、図4
(b)や図4(c)が一案であって、溝の流路が長く放
熱が充分為される。
When the groove of the phase adjusting member 23 is spiral, the buffer tank 18 is placed on the phase adjusting member. The outlet of the groove is immediately connected to the buffer tank so that the hollow connecting tube can be omitted. FIG. 4A shows another embodiment of the present invention. This is an example in which the buffer tank 18 is in contact with the phase adjustment member 23 and arranged so that both are lined up.
Also in this case, the hollow connecting pipe is not required, and the configuration is compact. The groove pattern provided on the phase adjusting member 23 is shown in FIG.
(B) and FIG. 4 (c) are one plan, and the flow path of the groove is long and heat is sufficiently released.

【0016】図5(a)は、本発明請求項3の冷却装置
の実施例を示す。図5(b)や(c)ではバッファタン
ク18が位相調整部材23の中に収納され、極めてコン
パクトになったものである。バッファタンクの容積は、
冷却機固有の最適容量があるものの、位相調整部材の中
に収められたものも相応の冷却機能を発現し得る。
FIG. 5A shows an embodiment of the cooling device according to claim 3 of the present invention. 5B and 5C, the buffer tank 18 is housed in the phase adjusting member 23, and is extremely compact. The volume of the buffer tank is
Although there is an optimum capacity inherent to the cooler, the one housed in the phase adjusting member can also exhibit a corresponding cooling function.

【0017】[0017]

【発明の効果】請求項1の発明は、チャンバ外に設けら
れた圧縮機によりチャンバ内に置かれたパルス管冷凍機
を運転して、チャンバ内を冷却する装置であって、チャ
ンバ内に置かれたパルス管と、該パルス管に接続する位
相調整手段と、該位相調整手段に接続するバッファタン
クと、チャンバを形成する壁材とを主たる構成要素と
し、前記壁材の一部が2枚の金属鈑を貼合わせてなる位
相調整部材となり、該位相調整部材を構成する該金属鈑
の少なくとも1枚の貼合わせ面には溝加工が施されてい
て、該2枚の金属鈑が張合わされて、溝により通気路が
形成され、前記位相調整部材の溝の一端(入口)が前記
パルス管又は前記パルス管と連結している中空管の先端
に接続され、前記位相調整部材の溝の他端(出口)が前
記バッファタンクに連結している中空管に接続されて冷
却装置となしたことにより、金属製細管が、溝付きの金
属鈑に変えられたことで、気密性・通気性の要件を保
ち、位相調整機能を維持しながら、放熱効果を一段と高
めることができた、という効果が生じている。
According to the first aspect of the present invention, there is provided an apparatus for cooling a chamber by operating a pulse tube refrigerator placed in the chamber by a compressor provided outside the chamber. The pulse tube, the phase adjusting means connected to the pulse tube, a buffer tank connected to the phase adjusting means, and a wall material forming a chamber are main components, and a part of the wall material is two pieces. A phase adjusting member is formed by laminating the metal plates. At least one laminating surface of the metal plates constituting the phase adjusting member is grooved, and the two metal plates are laminated. A vent is formed by the groove, and one end (inlet) of the groove of the phase adjusting member is connected to a tip of the pulse tube or a hollow tube connected to the pulse tube. The other end (outlet) is connected to the buffer tank By connecting the hollow tube to the cooling tube and connecting it to the cooling device, the metal thin tube was changed to a grooved metal plate, maintaining the requirements of airtightness and air permeability, and providing a phase adjustment function. The effect that the heat radiation effect was able to be further enhanced while maintaining the same is produced.

【0018】また、請求項2の発明は、バッファタンク
をチャンバの壁、天井等の壁材である位相調整部材と接
するように配置したため、中空細管からなる連結管を不
要とし、冷却装置全体をコンパクト化する、という効果
が生じた。更に、請求項3の発明により、バッファタン
クを位相調整部材の中に収容せしめたので、極めてコン
パクトな冷却装置が誕生した。
According to the second aspect of the present invention, since the buffer tank is arranged so as to be in contact with the phase adjusting member which is a wall material such as a wall or a ceiling of the chamber, a connecting pipe composed of a hollow thin tube is not required, and the entire cooling device is not required. The effect of reducing the size was brought about. Further, according to the third aspect of the present invention, the buffer tank is housed in the phase adjusting member, so that an extremely compact cooling device has been born.

【0019】本発明の位相調整器の代わりとなる位相調
整部材は、中空の細管と同様な機能を備え、中空細管と
比較して、通気性・気密性の点で遜色ないうえに、放熱
の点で数段優れている。金属鈑に穿った溝は2枚を張合
わせることから極めて多様な溝パターンを設計できる。
更に、金属鈑の材質を適宜選択することも可能で、熱伝
導性に優れた材料を選び、溝以外の部分を放熱し易い、
例えばフィンのような、表面形状に加工することもでき
る。
The phase adjusting member as a substitute for the phase adjuster of the present invention has a function similar to that of a hollow thin tube. It is a few steps better. Since the two grooves formed in the metal plate are attached to each other, extremely various groove patterns can be designed.
Furthermore, it is also possible to appropriately select the material of the metal plate, select a material having excellent heat conductivity, and easily radiate heat to portions other than the groove.
For example, it can be processed into a surface shape such as a fin.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す概略図である。位相調
整手段の細管の部分を溝付き壁材に換えた態様を示す。
FIG. 1 is a schematic diagram showing one embodiment of the present invention. This shows an aspect in which the thin tube portion of the phase adjusting means is replaced with a grooved wall material.

【図2】本発明の一実施例を示す概略図である。位相調
整部材の溝の形状を示す例であって、溝幅が変化する態
様のほか、溝が渦巻き状を示す例である。
FIG. 2 is a schematic diagram showing one embodiment of the present invention. This is an example showing the shape of the groove of the phase adjusting member, and is an example in which the groove has a spiral shape in addition to the mode in which the groove width changes.

【図3】本発明の別な実施例を示す概略図である。バッ
ファタンクが位相調整部材の上に接するように連結配置
された例。バッファタンクに接続する中空の連結管が不
要となり、一層コンパクトな構成となる。
FIG. 3 is a schematic view showing another embodiment of the present invention. An example in which a buffer tank is connected and arranged so as to be in contact with a phase adjusting member. The need for a hollow connecting pipe connected to the buffer tank is eliminated, resulting in a more compact configuration.

【図4】本発明の別な実施例を示す概略図である。バッ
ファタンクが位相調整部材と接触し、両者が並ぶように
連結した例。この場合も中空の連結管が不要となり、コ
ンパクトな構成となる。
FIG. 4 is a schematic view showing another embodiment of the present invention. An example in which a buffer tank is in contact with a phase adjusting member and connected so that both are lined up. Also in this case, a hollow connecting pipe is not required, and a compact configuration is obtained.

【図5】本発明の更に別な実施例を示す概略図である。
バッファタンクが位相調整部材の中に収納され、極めて
コンパクトになったものである。
FIG. 5 is a schematic view showing still another embodiment of the present invention.
The buffer tank is housed in the phase adjustment member and is extremely compact.

【図6】従来技術の例を示す概略図であって、位相調整
器は中空細管からなり、冷凍チャンバーの空間の一部を
占めている。
FIG. 6 is a schematic view showing an example of the prior art, in which the phase adjuster is formed of a hollow thin tube and occupies a part of the space of the freezing chamber.

【符号の説明】[Explanation of symbols]

10 位相調整手段 11 パルス管冷凍機のパルス管部分 13 パルス管冷凍機の先端に設けられた中空細管 15 チャンバーの壁 17 壁材(金属鈑)に加工された溝 18 バッファタンク 19 細管と位相調整部材との連結部 21 壁材を構成する金属鈑 23 位相調整部材 30 パルス管冷凍機 40 チャンバ 50 圧縮機 REFERENCE SIGNS LIST 10 phase adjusting means 11 pulse tube portion of pulse tube refrigerator 13 hollow thin tube provided at tip of pulse tube refrigerator 15 wall of chamber 17 groove processed in wall material (metal plate) 18 buffer tank 19 phase adjustment with thin tube Connection part with member 21 Metal plate constituting wall material 23 Phase adjustment member 30 Pulse tube refrigerator 40 Chamber 50 Compressor

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) F25B 9/00 311 ──────────────────────────────────────────────────続 き Continuation of front page (58) Field surveyed (Int. Cl. 7 , DB name) F25B 9/00 311

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】チャンバ外に設けられた圧縮機によりチャ
ンバ内に置かれたパルス管冷凍機を動作して、チャンバ
内を冷却する装置であって、 チャンバ内に置かれたパルス管と、 該パルス管に接続する位相調整手段と、 該位相調整手段に接続するバッファタンクと、 チャンバを形成する壁材とを含み、 前記壁材の一部は2枚の金属鈑を貼合わせてなる位相調
整部材からなり、該位相調整部材を構成する該金属鈑の
少なくとも1枚の貼合わせ面には溝加工が施されて、該
溝により通気路が形成されており、 前記位相調整部材の溝の一端が前記パルス管又は前記パ
ルス管と連結している中空管の先端に接続され、 前記位相調整部材の溝の他端が前記バッファタンクに連
結している中空管に接続されてなる冷却装置。
An apparatus for cooling a chamber by operating a pulse tube refrigerator placed in a chamber by a compressor provided outside the chamber, comprising: a pulse tube placed in the chamber; A phase adjusting means connected to the pulse tube; a buffer tank connected to the phase adjusting means; and a wall material forming a chamber, wherein a part of the wall material is formed by laminating two metal plates. A groove is formed on at least one bonding surface of the metal plate constituting the phase adjustment member, and a ventilation path is formed by the groove; one end of the groove of the phase adjustment member Is connected to the tip of the pulse tube or the hollow tube connected to the pulse tube, and the other end of the groove of the phase adjustment member is connected to the hollow tube connected to the buffer tank. .
【請求項2】バッファタンクを請求項1に記載の位相調
整部材と接するように配置してなる冷却装置。
2. A cooling device comprising a buffer tank arranged in contact with the phase adjusting member according to claim 1.
【請求項3】バッファタンクを請求項1に記載の位相調
整部材の中に収容せしめた冷却装置。
3. A cooling device in which a buffer tank is accommodated in the phase adjusting member according to claim 1.
JP10310424A 1998-10-30 1998-10-30 Cooling system Expired - Fee Related JP3001542B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10310424A JP3001542B1 (en) 1998-10-30 1998-10-30 Cooling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10310424A JP3001542B1 (en) 1998-10-30 1998-10-30 Cooling system

Publications (2)

Publication Number Publication Date
JP3001542B1 true JP3001542B1 (en) 2000-01-24
JP2000130873A JP2000130873A (en) 2000-05-12

Family

ID=18005096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10310424A Expired - Fee Related JP3001542B1 (en) 1998-10-30 1998-10-30 Cooling system

Country Status (1)

Country Link
JP (1) JP3001542B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009058875A1 (en) * 2007-10-31 2009-05-07 Raytheon Company Inertance tube and surge volume for pulse tube refrigerator

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5415502B2 (en) * 2011-09-28 2014-02-12 住友重機械工業株式会社 Cryogenic refrigerator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009058875A1 (en) * 2007-10-31 2009-05-07 Raytheon Company Inertance tube and surge volume for pulse tube refrigerator

Also Published As

Publication number Publication date
JP2000130873A (en) 2000-05-12

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