JP2998500B2 - Cooling water supply device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling water supply device for cooling, for example, a semiconductor device using water as a cooling medium, and more particularly to an improved structure for obtaining a stable cooling water temperature. .

[0002]

2. Description of the Related Art In order to operate a semiconductor device, a machine tool device, or the like at a desired temperature, it is necessary to remove heat due to a loss or the like generated inside the device. The cooling water supply device used as the above is widely used. FIG. 4 is a circuit configuration diagram including a cooling water circuit of a peripheral device of a cooling water circuit of a conventional cooling water supply device, and FIG. 5 is a circuit diagram of a conventional example having the circuit configuration of the cooling water circuit shown in FIG. FIG. 6 is a front view of the cooling water supply device, and FIG. 6 is a top view of the conventional cooling water supply device shown in FIG.

In FIGS. 4 to 6, reference numeral 9 denotes a tank 3 for temporarily storing cooling water 9A which has been cooled by cooling a device to be cooled 92 such as a semiconductor device, and a cooling water 9A.
The heat exchange device 4 for radiating the temperature of the cooling water to a desired temperature, a total of two pumps 31 for applying pressure for circulating the cooling water 9A, pipes to be described later, and various components are housed and mounted. Water supply device provided with a main body frame 91 for use.

[0004] The device to be cooled 92 is divided into three blocks to be cooled 9 in which the flow path of the cooling water 9A is independent of each other.
21. Each cooled block 92
The cooling water 9A, which has become low in temperature, is supplied from the cooling water supply device 9 to the cooling water supply device 9 through the supply pipes 93 laid for each of the blocks 921 to be cooled. The cooling water 9 </ b> A that has become high temperature by removing heat from the cooled blocks 921 returns to the cooling water supply device 9 via return pipes 94 laid for each of the cooled blocks 921.

The reason why the two pumps 31 are provided in total is to provide redundancy in order to increase the operational reliability of the cooling water supply device 9. The heat exchange device 4 includes a supply pipe 93 laid for each of the blocks to be cooled 921.
Are provided in three sets. (If it is necessary to clearly indicate the division of the three sets of heat exchange devices 4, the one located at the left end in FIG. 5 is referred to as a heat exchange device 4A,
The one located at the center is referred to as heat exchange device 4B, and the one located at the right end is referred to as heat exchange device 4C. With the above-described devices, a supply system for each of the cooled blocks 921 having a route of the heat exchange device 4 → the supply pipe 93 → the block to be cooled 921 → the return pipe 94 is independently configured. . The cooling water 9A is branched into these supply systems and supplied to the respective blocks to be cooled 921. Each of the heat exchangers 4 is provided with two unit heat exchangers 41. These unit heat exchangers 41 are provided by a fan 42, which is a blower provided with two units for each heat exchanger 4. Heat is removed from the high-temperature cooling water 9A by the supplied cooling air.

The cooling water supply device 9 includes, as pipes, a pipe connector 81 for connecting each supply pipe 93 and a pipe connector 82 for connecting each return pipe 94.
, A pipe line 3 connecting between the pipe connector 82 and the tank 3
3, a pipe line 34 for branching and flowing the cooling water 9A from the tank 3 to the two pumps 31 after the cooling water 9A is collected,
A pipe line 35 connecting the pump 31 and the header 5; a pipe line 61 on the inlet side connecting the header 5 and the inlet of the cooling water 9A of each unit heat exchanger 41; An outlet-side pipe 62 that connects between the outlet of the cooling water 9A of the exchanger 41 and the header 7 and a supply pipe 71 that connects between the header 7 and each pipe connector 81 are provided. I have. Here, of the pipes 62 on the outlet side, the pipe connected to the outlet of the cooling water 9A of one unit heat exchanger 41 is the pipe 62a, and the outlet of the cooling water 9A of the other unit heat exchanger 41 is connected. Is connected to the pipe 62b.

The header 7 is an elongated circular pipe whose both ends are closed in a water-tight manner. Each pipe 71 is mounted on the side wall of the circular pipe at intervals, and belongs to a certain supply system. On the side wall facing the pipe 71, the pipes 62a and 62b belonging to the same supply system are mounted adjacent to each other. Thereby, the cooling water 9A is supplied to the device to be cooled 92 such that the independent supply system has the same water head, so that each of the blocks to be cooled 921 can be operated under the same cooling condition. It becomes possible.

In the cooling water supply device 9 having the above-described configuration, the cooling water 9 A pressurized by the pump 31 is supplied to the header 5.
Thereafter, the gas flows through the respective supply systems in parallel, and the flow rates thereof are determined by the heat exchanger 4, the supply pipe 93, the block to be cooled 921, the return pipe 94, or the pipes 62a, 62b and It is mainly determined by the reciprocal ratio of the sum of the fluid resistances, such as between 71 and 71. If necessary, a flow control valve (not shown) is provided to make the flow rate of each supply system the same. Set to flow rate. Therefore, in the header 7, the flow rate of the cooling water 9A flowing from the pipe 62a or the pipe 62b belonging to a certain supply system to the pipe 71 belonging to another supply system is such that the inside of the header 7 has an elongated circle. It is composed of a tube and has a very small fluid resistance value per unit length, so that it is extremely small.

Further, in the cooling water supply device 9, since two pumps 31 are provided, even if one of the pumps 31 becomes inoperable, each of the cooled blocks 921 provided in the cooled device 92 is stabilized. Supplies cooling water 9A under the temperature conditions required by the
Even if one of the fans 42 becomes inoperable, the heat is removed from the cooling water 9A by the remaining one fan 42, so that the cooling water 9
The cooling water 9A can be supplied to the device to be cooled 92 with high reliability.

[0010]

In the cooling water supply device 9 according to the prior art described above, one fan 42 is
Even if the operation is stopped at the time of an abnormality such as a failure, the temperature slightly increases, but the cooling water 9A can be continuously supplied. However, in the process of accumulating efforts to reduce the size and cost of the cooling water supply device,
The design margin of the heat exchange device 4 is gradually reduced to the limit. In addition, in the header 7 where the cooling water 9A can only flow to the different supply systems, the flow rate of the cooling water 9A flowing to the different supply systems is extremely small. The cooling waters 9A to which they belong could not mix with one another. Accordingly, when one of the two fans 42 stops operating, the temperature of the cooling water 9A of the supply system to which the fan 42 belongs exceeds the desired temperature. Is becoming more likely to occur.

The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to reduce the temperature of cooling water when a blower for supplying cooling air to a heat exchange device partially stops operating. An object of the present invention is to provide a cooling water supply device capable of reducing a rise value.

[0012]

According to the present invention, an object of the present invention is to provide an apparatus for branching and supplying cooling water to a plurality of supply systems, each of which comprises a plurality of unit heat exchangers and a cooling air supply. A plurality of heat exchangers installed for each supply system consisting of a plurality of blowers, an outlet side pipe line connected to an outlet of cooling water of each unit heat exchanger, and a plurality of heat exchange devices installed for each supply system Water supply having a supply pipe used as a supply port for supplying cooling water to the apparatus to be cooled, and a header for communicating all the outlet pipes and all the supply pipes with each other. In the device: 1) the header is an elongated tube closed at both ends in a watertight manner,
Supply pipes for the respective supply systems are mounted at intervals on the side wall of the elongate pipe, and the side wall at a position substantially opposed to a portion where the supply pipe is mounted is provided on the side wall. An outlet-side pipe connected to some of the unit heat exchangers provided in the heat exchanger belonging to the supply system of the supply pipe, and a heat source belonging to a supply system different from the supply system of the supply pipe. Outlet pipes connected to some of the unit heat exchangers included in the exchanger are mounted adjacent to each other;
2) The header consists of an elongated tube with both ends closed watertight,
A supply pipe line for all supply systems is mounted on a side wall of one end of the elongated tube, and an outlet side connected to a unit heat exchanger included in a heat exchange device belonging to all supply systems. 3) The pipe is mounted on the other end side of this pipe from the position where any supply pipe is mounted. 3) The header is a cylinder whose both ends are water-tightly closed by end plates. One end plate is equipped with supply pipes for all supply systems, and the other end plate is connected to the unit heat exchanger of the heat exchange device belonging to all supply systems. This is achieved by installing the outlet-side conduit provided.

[0013]

In the present invention, the header in the cooling water supply device is, for example, an elongated tube whose both ends are water-tightly closed. A part provided with a heat exchange device belonging to a supply system of the supply pipe is provided on a side wall of the pipe at a position substantially opposed to a portion where the supply pipe is mounted, while the pipe is mounted. And an outlet side connected to some unit heat exchangers of a heat exchanger belonging to a supply system different from the supply system of the supply line. The cooling water obtained from the unit heat exchangers of the different heat exchangers is supplied to the supply pipes after mixing the cooling waters, such that the pipes are installed adjacent to each other. By providing, each supply line and this An outlet-side pipe connected to some of the unit heat exchangers included in the heat exchanger belonging to the supply system of the supply pipe installed at a position facing the pipe, and the supply pipe The fluid resistance value between the outlet side pipeline connected to some of the unit heat exchangers included in the heat exchange device belonging to a different supply system from the supply system is different from the respective outlet side pipelines. It is much smaller than the fluid resistance value between the supply line belonging to the supply system and the supply line.
Thereby, in each supply pipe, an outlet pipe connected to some of the unit heat exchangers provided in the heat exchange device belonging to the supply system of the supply pipe, and The cooling water flows in from the outlet-side pipe connected to some of the unit heat exchangers provided in the heat exchange devices belonging to different adjacent supply systems. Therefore, the two units supplied from some of the unit heat exchangers provided in the different heat exchangers are different from each other.
The cooling water of the system is mixed while flowing through the outlet-side pipe line or the supply pipe. As a result, for example, when one of the blowers included in one heat exchange device stops operating, the temperature value of the cooling water supplied to the independent cooled blocks provided in the cooled device is: And 2 supplied from unit heat exchangers provided in different heat exchangers.
It becomes the average value of each temperature value of the cooling water of the system.

[0014] The header is an elongate tube closed at both ends in a watertight manner, and a supply line for all supply systems is mounted on a side wall of one end of the tube. The outlet pipe connected to the unit heat exchanger of the heat exchanger belonging to the system is installed at the other end of this pipe from the position where any supply pipe is installed. The cooling water from the outlet-side pipe connected to the unit heat exchanger included in the heat exchange device belonging to the supply system all flows through the header at the same time. Therefore, the cooling water belonging to all the supply systems is mixed while flowing through the header, and then flows into the supply pipes for the respective supply systems. As a result, for example,
When one of the blowers provided in any of the heat exchange devices stops operating, the temperature values of all the cooling water supplied to the independent cooled blocks provided in the cooled device are mutually different. The average value of the respective temperature values of the cooling water of all the systems supplied from the unit heat exchangers provided in the different heat exchangers is averaged.

The header is a cylindrical body whose both ends are water-tightly closed by end plates, and one end plate is provided with supply pipes for all supply systems and the other end plate. By having a configuration in which the outlet side pipeline connected to the unit heat exchanger included in the heat exchange devices belonging to all the supply systems is provided, the diameter of each end plate constituting the header is for supply or It is necessary to use a pipe having a diameter large enough to mount all the pipes on the outlet side. For this reason, by increasing the diameter of the tubular body, the internal volume of the header is increased. For this reason, an operation equivalent to the operation by the term is obtained, and the header having the increased internal volume can function as if it were a surge tank, and the pressure of the cooling water supplied to the device to be cooled can be reduced. Reduce fluctuations.

[0016]

Embodiments of the present invention will be described below in detail with reference to the drawings. Embodiment 1 FIG. 1 is a front view of a cooling water supply device according to an embodiment of the present invention corresponding to claims 1 and 2. FIG. FIG.
The same parts as those of the conventional cooling water supply device shown in FIGS. In FIG.
Reference numeral 1 denotes a cooling water supply device in which the header 2 is used in place of the header 7 in the cooling water supply device 9 according to the conventional example shown in FIGS. The header 2 is, like the header 7 provided in the cooling water supply device 9 of the conventional example, an elongated circular pipe whose both ends are watertightly closed, and has a side wall at a position facing a pipe 71 belonging to a certain supply system. For example, in the case of the pipeline 71 located at the left end in FIG. 1, the pipeline 6 connected to the unit heat exchanger 41 provided in the heat exchange device 4A.
2a and a pipe 62a connected to the unit heat exchanger 41 of the heat exchange device 4B are mounted adjacent to each other. The case of the other pipeline 71 is basically configured in the same manner as shown in FIG.

In the present invention, the above-described configuration is employed. For example, in the pipeline 71 located at the left end in FIG. 1, a pipeline 62a connected to the unit heat exchanger 41 provided in the heat exchanger 4A is provided. The cooling water 9A flows from the pipe 62a connected to the unit heat exchanger 41 provided in the heat exchange device 4B. The same applies to the case of the cooling water 9A flowing through the other pipeline 71. Therefore, the two systems of cooling water 9A supplied from the unit heat exchangers 41 provided in the different heat exchange devices 4 are mixed while flowing through the pipeline 71 or the supply pipe 93.

For example, in the case of the pipeline 71 located at the left end in FIG. 1, when one of the fans 42 provided in the heat exchange device 4A stops operating, the supply from the heat exchange device 4A is performed. temperature of the cooling water 9A to be, in order to fan 42 decreases the cooling ability of the cooling air supply, the temperature at the time of normal; becomes [Delta] T ₁ that is higher temperatures for T _0. However, the temperature of the cooling water 9A supplied from the heat exchanging device 4B in which the two fans 42 continue to operate maintains the temperature (T ₀ ). Therefore, in this case, the temperature of the cooling water 9A flowing through the supply pipe 93; T _A becomes a value represented by the following (Equation 1) by averaging both temperatures, and the conventional example In the case of the cooling water supply device 9, the temperature rise value from the normal temperature (T ₀ ) is suppressed to の, whereas T ₀ + ΔT ₁ .

[0019]

[Number 1] T _A = _{[T 0 + (T 0 + ΔT} 1) ] _{/ 2 = T 0 + (ΔT} 1/2) ......... (1) Example 2; FIG. 2 is a claim 1,3 FIG. 4 is a front view of a corresponding cooling water supply device according to an embodiment of the present invention. FIG.
The same parts as those of the conventional cooling water supply device shown in FIGS. In FIG.
Reference numeral 1A denotes a cooling water supply device in which a header 2A is used in place of the header 7 in the cooling water supply device 9 according to the conventional example shown in FIGS. The header 2A is, like the header 7 included in the cooling water supply device 9 of the conventional example, an elongated circular pipe whose both ends are water-tightly closed, and the pipes 71 belonging to all the supply systems are circular pipes in FIG. To the right side wall. Further, a pipe 62a connected to the unit heat exchanger 41 provided in all the heat exchangers 4 and a pipe 6
2b is attached to the side wall of the circular pipe on the left side in FIG.

According to the present invention, the header 2A is provided with cooling water 9A from the pipes 62a, 62b connected to the unit heat exchangers 41 provided in the heat exchangers 4A, 4C. All are flowed in and mixed with each other while flowing through the circular tube of the header 2A. As a result, the temperature of the cooling water 9A flowing in any one of the pipes 71 becomes the same.

Thus, for example, when one of the fans 42 provided in the heat exchange device 4A is stopped operating,
The temperature of the cooling water 9A supplied from the heat exchange device 4A is:
Normal temperature; a temperature higher by ΔT ₁ than T ₀ . However, the temperature of the cooling water 9A supplied from the heat exchange devices 4B and 4C in which the two fans 42 are operating together remains at the temperature (T ₀ ). As a result, even the coolant 9A flowing through any of the conduits 71 medium, therefore, even the coolant 9A to any flowing through the supply pipe 93, the temperature of the cooling water 9A; T _B is The value is expressed by (Equation 2), which is T ₀ + in the case of the conventional cooling water supply device 9.
For ΔT ₁ , the temperature rise from the normal temperature (T ₀ ) is, in this embodiment with three supply systems,
It is suppressed to 1/3.

[0022]

[Number 2] T _B = _{[T 0 + T 0 + (T} 0 + ΔT 1) ] _{/ 3 = T 0 + (ΔT} 1/3) ...................................................... (2) If all the pipes 62a and 62b are mounted on the side wall at the left end of the circular pipe in FIG. 2, all the pipes 62a and 62b and all the pipes 62a and 62b are connected. When the separation distance from the path 71 is increased, the mixing of the cooling water 9A in the header 2A is sufficiently performed, which is preferable.

Embodiment 3 FIG. 3 is a front view of a cooling water supply device according to an embodiment of the present invention corresponding to claims 1 and 4. The same parts as those of the conventional cooling water supply device shown in FIGS. 4 to 6 are denoted by the same reference numerals, and description thereof will be omitted. In FIG. 3, reference numeral 1B denotes a cooling water supply device in which a header 2B is used instead of the header 7 in the conventional cooling water supply device 9 shown in FIGS. The header 2B includes a cylindrical tubular portion 21, an end plate 22A for closing one end of the tubular portion 21 in a watertight manner, and an end plate 22B for closing the other end of the tubular portion 21 in a watertight manner. Have been.

On the end plate 22A, pipes 62a and 62b connected to the unit heat exchangers 41 provided in all the heat exchangers 4 are mounted. Further, the pipes 71 belonging to all supply systems are mounted on the end plate 22B. According to the present invention, the header 2B is provided with the heat exchange device 4 as described above.
A,... All of the cooling water 9A from the pipe lines 62a, 62b connected to the unit heat exchanger 41 provided in the heat exchanger 4C are mixed in while flowing through the header 2B. Thus, even if the cooling water 9A flows through any one of the pipelines 71, any one of the supply pipes 93
Even with the cooling water 9A flowing through, the same temperature (T _B ) as in the case of the cooling water supply device 1A according to the second embodiment.

Incidentally, in the case of the header 2B, the diameter of the end plate 22A and the end plate 22B constituting the header is determined by the pipe 6
It is necessary to have a large diameter enough to mount all of the pipes 2a and 62b or all of the pipes 71. For this reason, by setting the diameter of the tubular portion 21 to be large, the internal volume of the header becomes significantly larger than the internal volume of the header 7, the header 2, or the header 2A.
For this reason, the header 2B having the increased volume acts as if it were a surge tank, so that the supply pressure fluctuation during the steady operation of the cooling water 9A supplied to the device to be cooled 92 is naturally reduced. That, for example,
It also serves to alleviate transient pressure fluctuations at the time of starting the pump.

[0026]

According to the present invention, the following effects can be obtained by using the above-described cooling water supply device. That is, (1) The temperature rise value of the cooling water supplied to the device to be cooled when a part of the plurality of blowers included in the heat exchange device stops operating may be increased in size or increase in manufacturing cost.伴 う of the conventional example regardless of the number of supply systems, or 1 / n of the conventional example when the number of supply systems is n,
It becomes possible to suppress. (2) In addition to the effects of item (1), fluctuations in the supply pressure of cooling water are reduced.

[Brief description of the drawings]

FIG. 1 is a front view of a cooling water supply device according to an embodiment of the present invention corresponding to claims 1 and 2;

FIG. 2 is a front view of a cooling water supply device according to an embodiment of the present invention corresponding to claims 1 and 3;

FIG. 3 is a front view of a cooling water supply device according to an embodiment of the present invention corresponding to claims 1 and 4;

FIG. 4 is a circuit configuration diagram including a cooling water circuit of a peripheral device of a cooling water circuit of a conventional cooling water supply device.

5 is a front view of a conventional cooling water supply device having the circuit configuration of the cooling water circuit shown in FIG. 4;

6 is a top view of the conventional cooling water supply device shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cooling water supply device 1A Cooling water supply device 1B Cooling water supply device 2 Header 2A Header 2B Header 4A Heat exchange device 4B Heat exchange device 4C Heat exchange device 62a Pipe line 62b Pipe line 71 Pipe line 9A Cooling water

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) F25D 17/02 F25D 1/02 H05K 7/20 H01L 23/46

Claims (3)

(57) [Claims] An apparatus for branching and supplying cooling water to a plurality of supply systems, each of which is provided for each supply system comprising a plurality of unit heat exchangers and a plurality of blowers for supplying cooling air. As a plurality of heat exchangers, a pipe on the outlet side connected to the outlet of the cooling water that each unit heat exchanger has, and a supply port that is installed for each supply system and supplies cooling water to the device to be cooled. In a cooling water supply device provided with a supply pipe to be used and a header for communicating all outlet pipes and all supply pipes with each other, the header is water-tightly closed at both ends. A supply pipe for each supply system is installed at intervals on the side wall of the elongated pipe, and is substantially opposed to a portion where the supply pipe is installed. On the side wall at the location An outlet pipe connected to some of the unit heat exchangers provided in the heat exchange device, and a part of the unit heat provided in a heat exchange device belonging to a supply system different from the supply system of the supply pipe. A cooling water supply device, wherein an outlet pipe connected to an exchanger is mounted adjacent to each other. 2. An apparatus for branching and supplying cooling water to a plurality of supply systems, each of which is provided for each supply system including a plurality of unit heat exchangers and a plurality of blowers for supplying cooling air. As a plurality of heat exchangers, a pipe on the outlet side connected to the outlet of the cooling water that each unit heat exchanger has, and a supply port that is installed for each supply system and supplies cooling water to the device to be cooled. In a cooling water supply device provided with a supply pipe to be used and a header for communicating all outlet pipes and all supply pipes with each other, the header is water-tightly closed at both ends. A unit heat exchanger provided in a heat exchange device belonging to all supply systems, and a supply pipe line for all supply systems is mounted on a side wall at one end of the elongated tube. Connect the outlet pipe connected to the Cooling water supply device, characterized in that the conduit is attached to the other end of the tube than the mounted position. 3. An apparatus for branching and supplying cooling water to a plurality of supply systems, each of which is provided for each supply system comprising a plurality of unit heat exchangers and a plurality of blowers for supplying cooling air. As a plurality of heat exchangers, a pipe on the outlet side connected to the outlet of the cooling water that each unit heat exchanger has, and a supply port that is installed for each supply system and supplies cooling water to the device to be cooled. In a cooling water supply device provided with a supply pipe to be used and a header for communicating between all outlet pipes and all supply pipes, the header is water-tight at both ends by end plates. A unit consisting of a closed cylindrical body, one end plate of which is provided with a supply pipeline for all supply systems, and the other end plate of a heat exchange device belonging to all supply systems. The outlet pipe connected to the heat exchanger must be installed. Cooling water supply device according to claim.