JP2997877B2 - Cooling device for ultra-sensitive analyzer - Google Patents
Cooling device for ultra-sensitive analyzerInfo
- Publication number
- JP2997877B2 JP2997877B2 JP9052628A JP5262897A JP2997877B2 JP 2997877 B2 JP2997877 B2 JP 2997877B2 JP 9052628 A JP9052628 A JP 9052628A JP 5262897 A JP5262897 A JP 5262897A JP 2997877 B2 JP2997877 B2 JP 2997877B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ultra
- gas switching
- switching block
- pulse tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 title claims description 19
- 230000035945 sensitivity Effects 0.000 claims description 13
- 239000012777 electrically insulating material Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 57
- 238000001514 detection method Methods 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PYVHTIWHNXTVPF-UHFFFAOYSA-N F.F.F.F.C=C Chemical compound F.F.F.F.C=C PYVHTIWHNXTVPF-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1408—Pulse-tube cycles with pulse tube having U-turn or L-turn type geometrical arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1418—Pulse-tube cycles with valves in gas supply and return lines
- F25B2309/14181—Pulse-tube cycles with valves in gas supply and return lines the valves being of the rotary type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
Description
【０００１】[0001]
【発明の属する分野】本発明は、電子顕微鏡、蛍光Ｘ線
分析計、ＮＭＲ等の超高感度分析装置での冷却装置に関
し、特に、検出素子等を冷却する冷却源としパルス管冷
凍機を使用する冷却装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling device for an ultra-high sensitivity analyzer such as an electron microscope, an X-ray fluorescence spectrometer, and an NMR, and more particularly, to using a pulse tube refrigerator as a cooling source for cooling a detection element and the like. Cooling device.
【０００２】[0002]
【従来の技術】電子顕微鏡等の超高感度分析装置では、
微小電気信号を検出して分析するものであることから、
わずかな振動も嫌い、従来は液体窒素等の液化ガスを使
用して検出素子を冷却するようにしていた。ところが、
この液化ガスを使用するものでは、液化ガスの気化散逸
を防止することができず、液化ガスの補給作業を頻繁に
行わなければならず、そのたびに検出操作を中断しなけ
ればならず、検出操作の作業性が悪いという問題があっ
た。2. Description of the Related Art In ultra-high sensitivity analyzers such as electron microscopes,
Because it detects and analyzes small electrical signals,
A slight vibration is disliked, and the detection element is conventionally cooled using a liquefied gas such as liquid nitrogen. However,
In the case of using this liquefied gas, the vaporization and dissipation of the liquefied gas cannot be prevented, the liquefied gas must be replenished frequently, and the detection operation must be interrupted each time. There was a problem that the workability of operation was poor.
【０００３】そこで、検出素子の冷却にパルス管冷凍機
を使用するものが提案されている(特公平７−７２６５
０)。パルス管冷凍機は、ガスの出入で寒冷を発生させ
るものであり、圧縮機ユニットやガス切換ブロックを寒
冷発生部分から切り離して配置し、ガス切換ブロックと
寒冷発生部分とをガス導管で接続することにより、寒冷
発生部分では機械運動部分のない構造にすることができ
る。したがって、この寒冷発生部を超高感度分析装置で
の検出素子冷却に使用することにより、振動による影響
がなく、冷却を長時間安定して行うことができるように
なり、検出操作の作業性を向上させることができる。[0003] Therefore, a device using a pulse tube refrigerator for cooling the detecting element has been proposed (Japanese Patent Publication No. 7-7265).
0). The pulse tube refrigerator generates cold when gas enters and exits.The compressor unit and the gas switching block are separated from the cold generating part and arranged, and the gas switching block and the cold generating part are connected by a gas conduit. Thereby, a structure having no mechanical movement part in the cold generation part can be obtained. Therefore, by using this cold generating part for cooling the detection element in the ultra-sensitive analyzer, the cooling can be performed stably for a long time without being affected by vibration, and the workability of the detection operation can be improved. Can be improved.
【０００４】[0004]
【発明が解決しようとする課題】パルス管冷凍機を使用
して検出素子を冷却するようにした従来のものでは、機
械運動部分を有する圧縮機ユニットやガス切換ブロック
を寒冷発生部から切り離した配置し、ガス切換ブロック
と寒冷発生部とをガス導管で接続しているが、圧縮機ユ
ニットやガス切換ブロックでの可動部分の運動に起因す
る微小な電気ノイズがガス導管を介して寒冷発生部に伝
達されることがあり、冷凍機、特に圧縮機ユニットやガ
ス切換ブロックの設置個所により、バックグラウンドノ
イズが変化して、測定精度に影響が出るという問題があ
った。In a conventional apparatus in which a detecting element is cooled by using a pulse tube refrigerator, a compressor unit having a mechanical movement part and a gas switching block are separated from a cold generation part. Then, the gas switching block and the cold generating unit are connected by a gas conduit, but minute electric noise caused by the movement of the movable unit in the compressor unit and the gas switching block causes a small electric noise to the cold generating unit through the gas conduit. In some cases, the background noise changes depending on the location of the refrigerator, particularly the compressor unit or the gas switching block, which affects measurement accuracy.
【０００５】本発明は、このような点に着目してなされ
たもので、寒冷発生部に電気ノイズが伝達されなくし
て、冷凍機の設置如何にかかわらず、安定した測定結果
を得ることができる超高感度分析装置の冷却装置を提供
することを目的とする。The present invention has been made in view of such a point, and electric noise is not transmitted to the cold generation part, so that a stable measurement result can be obtained regardless of the installation of the refrigerator. An object of the present invention is to provide a cooling device for an ultrasensitive analyzer.
【０００６】[0006]
【課題を解決するための手段】上述の目的を達成するた
めに本発明は、超高感度分析装置の冷却をパルス管冷凍
機により行うに当たり、パルス管冷凍機でのガス切換ブ
ロックから寒冷発生部までの間に電気絶縁体を配置し
て、圧縮機ユニットやガス切換ブロックからリークする
微小電気ノイズをカットするようにしたもので、請求項
１に記載した発明は、ガス切換ブロックと寒冷発生部と
のいずれか一方におけるガス導管との継手部分を電気絶
縁体で形成したものであり、請求項２に記載した発明
は、ガス導管と接続する継手をガス切換ブロックや寒冷
発生部のベースフランジと一体に電気絶縁体で形成した
ものであり、請求項３に記載した発明は、ガス切換ブロ
ックのケーシングを電気絶縁体で形成したものであり、
請求項４に記載した発明は、ガス導管の少なくとも一部
を電気絶縁体で形成したものである。なお、ここで超高
感度分析装置とは、電子顕微鏡、蛍光Ｘ線分析計、ＮＭ
Ｒ等、検出部や検出素子を冷却して検出精度を高める装
置をいう。SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a method for cooling an ultra-high sensitivity analyzer by using a pulse tube refrigerator. An electric insulator is arranged between the gas switching block and the gas switching block to reduce minute electric noise leaking from the compressor unit and the gas switching block. The joint part with the gas conduit in either one is formed of an electrical insulator, and the invention described in claim 2 is that the joint connected to the gas conduit is connected to the gas switching block or the base flange of the cold generating part. According to a third aspect of the present invention, the casing of the gas switching block is formed of an electric insulator.
According to a fourth aspect of the present invention, at least a part of the gas conduit is formed of an electric insulator. Here, the ultra-high sensitivity analyzer means an electron microscope, a fluorescent X-ray analyzer, an NM
A device, such as R, that cools a detection unit or a detection element to improve detection accuracy.
【０００７】[0007]
【作用】本発明では、ガス切換ブロックと寒冷発生部と
の間に電気絶縁部を形成することにより、超高感度分析
装置に電気ノイズが伝達されることによる検出精度の低
下を防止する。According to the present invention, by forming an electrical insulating section between the gas switching block and the cold generating section, it is possible to prevent a decrease in detection accuracy due to transmission of electrical noise to the ultra-high sensitivity analyzer.
【０００８】[0008]
【発明の実施の形態】図１は本発明を適用した超高感度
分析装置の一例としての電子顕微鏡である。図１におい
て、符号(１)は本体部分(２)を床面(３)にスプリング等
の振動吸収体(４)を介して支持させた電子顕微鏡、(５)
はパルス管冷凍機(６)の寒冷発生部であり、この寒冷発
生部(５)は電子顕微鏡(１)の本体部分(２)に固定したリ
トラクトレール(７)に走行台(８)を介して支持固定する
ことにより、寒冷発生部(５)を電子顕微鏡(１)の本体部
分(２)に対して、リトラクト移動可能に構成してある。FIG. 1 is an electron microscope as an example of an ultra-high sensitivity analyzer to which the present invention is applied. In FIG. 1, reference numeral (1) denotes an electron microscope in which a main body (2) is supported on a floor (3) via a vibration absorber (4) such as a spring, (5)
Is a cold generating part of the pulse tube refrigerator (6). This cold generating part (5) is connected to a retract rail (7) fixed to the main body part (2) of the electron microscope (1) via a traveling platform (8). Thus, the cold generating part (5) is configured to be retractable with respect to the main body part (2) of the electron microscope (1) by supporting and fixing.
【０００９】パルス管冷凍機(６)は、図２に示すよう
に、寒冷発生部(５)と圧縮機ユニット(９)と、圧縮機ユ
ニット(９)と寒冷発生部(５)との間に配置したガス切換
ブロック(10)とで構成してあり、圧縮機ユニット(９)と
ガス切換ブロック(10)とを寒冷発生部(５)から切り離し
て配置してある。圧縮機ユニット(９)は、圧縮機(11)、
冷却器(12)、油分離器(13)、油吸着器(14)、保圧弁(15)
で構成してある。As shown in FIG. 2, the pulse tube refrigerator (6) includes a cooling unit (5), a compressor unit (9), and a compressor unit (9) and a cooling unit (5). The compressor unit (9) and the gas switching block (10) are separated from the cold generating unit (5). The compressor unit (9) includes a compressor (11),
Cooler (12), oil separator (13), oil adsorber (14), pressure holding valve (15)
It consists of.
【００１０】ガス切換ブロック(10)は、図３に示すよう
に、インバータモータ(16)を内蔵したモータハウジング
(17)と、ロータリ弁で構成した流路切換弁(18)を内蔵し
たバルブハウジング(19)と、バルブハウジング(19)の一
部を構成するベースフランジ(20)を一体に組みつけて形
成して構成してある。そして、このバルブハウジング(1
9)には圧縮機ユニット(９)の高圧路(21)に高圧管(22)で
接続される高圧ポート(23)と、圧縮機ユニット(９)の低
圧路(24)に低圧管(25)で接続される低圧ポート(26)及び
寒冷発生部(５)に可撓性を有するガス導管(27)で接続さ
れる作業用ポート(28)が形成してある。As shown in FIG. 3, the gas switching block (10) is a motor housing having a built-in inverter motor (16).
(17), a valve housing (19) having a built-in flow path switching valve (18) formed of a rotary valve, and a base flange (20) forming a part of the valve housing (19). It is configured. And this valve housing (1
A high pressure port (23) connected to a high pressure pipe (22) of the compressor unit (9) by a high pressure pipe (22) and a low pressure pipe (25) to a low pressure path (24) of the compressor unit (9). ) And a working port (28) connected to the cold generating part (5) by a flexible gas conduit (27).
【００１１】ガス導管(27)は、適度な可撓性と耐圧性及
びガスシール性を併せもつように、四フッ化エチレン樹
脂パイプの外周を金属螺旋管で被覆し、かつ、この金属
螺旋管を金属編管で被覆した構造になっている。そし
て、このガス導管(27)は、床上に取り付けられた除振ブ
ロック(29)に支持されている。これにより、圧縮機ユニ
ット(９)及びガス切換ブロック(10)の作動に起因して発
生する微小振動は、除振ブロック(29)により制振・吸収
される。したがって、電子顕微鏡での検鏡の妨げになる
上記微小振動がガス導管(27)を介して電子顕微鏡の鏡胴
部分に伝達されることを抑制できる構造になっている。The gas conduit (27) is formed by covering the outer periphery of an ethylene tetrafluoride resin pipe with a metal spiral tube so as to have appropriate flexibility, pressure resistance and gas sealing properties. Is covered with a metal knitted tube. The gas conduit (27) is supported by a vibration isolation block (29) mounted on the floor. As a result, minute vibrations generated due to the operation of the compressor unit (9) and the gas switching block (10) are damped and absorbed by the vibration isolation block (29). Therefore, the structure is such that it is possible to suppress transmission of the micro-vibration that hinders the microscopic examination in the electron microscope to the lens barrel of the electron microscope via the gas conduit (27).
【００１２】パルス管冷凍機(６)の寒冷発生部(５)は、
図２及び図４に示すように、パルス管(30)と蓄冷器(31)
とをその下端部同士で吸熱用連結路(32)により連結する
ことにより形成してある。そして、パルス管(30)はその
内部上下両端部に整流板(33)が配置してあり、蓄冷器(3
1)はその内部にステンレス製又は銅製のメッシュ体を積
層配置するとともに、その上下両端部に整流板(34)を配
置してある。[0012] The cold generation part (5) of the pulse tube refrigerator (6)
As shown in FIGS. 2 and 4, the pulse tube (30) and the regenerator (31)
Are connected at the lower ends thereof by a heat absorbing connecting path (32). The pulse tube (30) has rectifying plates (33) arranged at both upper and lower ends of the pulse tube (30).
In 1), a stainless steel or copper mesh body is laminated and arranged inside, and rectifying plates (34) are arranged at both upper and lower ends thereof.
【００１３】蓄冷器(31)の上端は、ベースフランジ(35)
に形成したガス導入路(36)を介してガス導管(27)に接続
してある。また、パルス管(30)の上端は、ベースフラン
ジ(35)に配置したオリィフィス(37)を介してバッファタ
ンク(38)に連通接続してある。The upper end of the regenerator (31) is connected to a base flange (35).
It is connected to a gas conduit (27) via a gas introduction path (36) formed in the above. The upper end of the pulse tube (30) is connected to a buffer tank (38) through an orifice (37) arranged on a base flange (35).
【００１４】上述の構成により、圧縮機ユニット(９)及
びガス切換ブロック(10)の作動に起因して発生する微小
振動が電子顕微鏡(１)の本体に伝達されることを抑制す
ることはできる。ところが、圧縮機ユニット(９)の圧縮
機(11)やガス切換ブロック(10)のインバータモータ(1
6)、あるいはロータリ式流路開閉弁(18)の作動時にその
可動部材が配設個所に存在している磁力線を切る状態に
なって、僅かな電力を発生することになり、この発生電
力が電気ノイズとなってガス導管(27)、寒冷発生部(５)
を介して電子顕微鏡の鏡胴部分に伝達され、検出精度に
影響を及ぼすことがある。このため、本発明では、ガス
切換ブロック(10)の作業用ポート(28)や寒冷発生部(５)
のガス導入路(36)にガス導管(27)を接続するために組み
込まれる管継手(39)、あるいはガス切換ブロック(10)の
高圧ポート(23)や低圧ポート(24)に組み込まれる管継手
(39)をガラスエポキシ樹脂やポリカーボネート樹脂等の
電気絶縁材料で形成し、圧縮機ユニット(９)やガス切換
ブロック(10)からリークする電気ノイズが寒冷発生部
(５)に伝達されるのを防止している。なお、この電気絶
縁材料で形成した管継手(39)は、ガス導管(27)と寒冷発
生部(５)との接続部あるいは、ガス切換ブロック(10)と
ガス導管(27)との接続部の少なくとも一方に使用するこ
とにより、所期の目的は達成することができる。According to the above-mentioned configuration, it is possible to suppress the transmission of the minute vibration generated due to the operation of the compressor unit (9) and the gas switching block (10) to the main body of the electron microscope (1). . However, the compressor (11) of the compressor unit (9) and the inverter motor (1) of the gas switching block (10).
6) Or, when the rotary flow path on-off valve (18) is activated, its movable member cuts off the magnetic lines of force existing at the location where it is to be generated, and a small amount of electric power is generated. Gas noise (27), cold generation part (5) as electric noise
Is transmitted to the lens barrel of the electron microscope via the optical system, and may affect the detection accuracy. For this reason, in the present invention, the working port (28) of the gas switching block (10) and the cold generation part (5)
A pipe fitting (39) incorporated to connect the gas conduit (27) to the gas introduction path (36) of the pipe, or a pipe fitting incorporated in the high pressure port (23) or low pressure port (24) of the gas switching block (10)
(39) is formed of an electrically insulating material such as glass epoxy resin or polycarbonate resin, and electric noise leaking from the compressor unit (9) or the gas switching block (10) is generated in a cold generating part.
It is prevented from being transmitted to (5). The pipe joint (39) formed of this electrically insulating material is used to connect the gas pipe (27) to the cold generating section (5) or the gas switching block (10) to the gas pipe (27). By using at least one of the above, the intended purpose can be achieved.
【００１５】また、寒冷発生部(５)やガス切換ブロック
(10)でガス通路を形成しているベースフランジ(20)(35)
と一体に管継手(39)を電気絶縁材料で形成してもよい。
さらに、ガス切換ブロック(10)のモータハウジング(17)
及びバルブハウジング(19)からなるケーシング(40)を電
気絶縁材料で形成してもよく、ガス切換ブロック(10)と
寒冷発生部(５)とを接続するガス導管(27)の全体あるい
は一部を電気絶縁材料で形成したり、ガス導管(27)同士
を電気絶縁材料性のコネクタで接続するようにしてもよ
い。In addition, a cold generating part (5) and a gas switching block
Base flange forming gas passage in (10) (20) (35)
The pipe joint (39) may be formed integrally with an electrically insulating material.
Furthermore, the motor housing (17) of the gas switching block (10)
And a casing (40) consisting of the valve housing (19) may be formed of an electrically insulating material, and the whole or a part of the gas conduit (27) connecting the gas switching block (10) and the cold generating part (5). May be formed of an electrically insulating material, or the gas conduits (27) may be connected to each other by a connector made of an electrically insulating material.
【００１６】[0016]
【発明の効果】本発明では、ガス切換ブロックから寒冷
発生部にガスを供給する経路を形成する器具やガス導
管、管継手等を電気絶縁部を形成することにより、超高
感度分析装置に装備されている寒冷発生部に電気ノイズ
が伝達されることを防止できるから、伝導電気ノイズに
起因する検出精度の低下を防止することができる。According to the present invention, an instrument for forming a path for supplying gas from the gas switching block to the cold generating section, a gas conduit, a pipe joint, and the like are provided on the ultra-sensitive analyzer by forming an electrical insulating section. Since it is possible to prevent the transmission of the electrical noise to the cold generating section, it is possible to prevent the detection accuracy from being lowered due to the conductive electrical noise.
【図１】本発明を適用した超高感度分析装置の一例とし
ての電子顕微鏡の概略構成図である。FIG. 1 is a schematic configuration diagram of an electron microscope as an example of an ultra-sensitive analyzer to which the present invention is applied.
【図２】パルス管冷凍機の概略構成図である。FIG. 2 is a schematic configuration diagram of a pulse tube refrigerator.
【図３】パルス管冷凍機のガス切換ブロックの縦断面図
である。FIG. 3 is a longitudinal sectional view of a gas switching block of the pulse tube refrigerator.
【図４】パルス管冷凍機の寒冷発生部の縦断面図であ
る。FIG. 4 is a longitudinal sectional view of a cold generating part of the pulse tube refrigerator.
５…パルス管冷凍機の寒冷発生部、６…パルス管冷凍
機、９…パルス管冷凍機の圧縮機ユニット、10…パルス
管冷凍機のガス切換ブロック、20・35…ベースフラン
ジ、27…ガス導管、39…管継手、40…ガス切換ブロック
のケーシング。5 ... Cold generating part of pulse tube refrigerator, 6 ... Pulse tube refrigerator, 9 ... Compressor unit of pulse tube refrigerator, 10 ... Gas switching block of pulse tube refrigerator, 20/35 ... Base flange, 27 ... Gas Conduit, 39 ... Fitting, 40 ... Gas switching block casing.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 川口 悦治 滋賀県守山市勝部町1095番地 岩谷瓦斯 株式会社内 (56)参考文献 特開 平６−109339（ＪＰ，Ａ) 特開 平２−230059（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) F25B 9/00 311 G01N 23/225 H01J 37/26 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Etsuji Kawaguchi 1095 Katsube-cho, Moriyama-shi, Shiga Prefecture Iwatani Gas Co., Ltd. (56) References JP-A-6-109339 (JP, A) JP-A-2-230059 ( JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) F25B 9/00 311 G01N 23/225 H01J 37/26
Claims (4)
の寒冷発生部(５)を配置し、このパルス管冷凍機(６)の
圧縮機ユニット(９)及びガス切換ブロック(10)を寒冷発
生部(５)とは分離して配置し、ガス切換ブロック(10)と
寒冷発生部(５)とをガス導管(27)で接続してなる超高感
度分析装置の冷却装置において、 ガス導管(27)と接続する寒冷発生部(５)での管継手(39)
とガス切換ブロック(10)での管継手(39)との少なくとも
一方を電気絶縁材料で形成したことを特徴とする超高感
度分析装置の冷却装置。1. A pulse tube refrigerator for an ultra-high sensitivity analyzer
And a compressor unit (9) and a gas switching block (10) of the pulse tube refrigerator (6) are arranged separately from the cold generating unit (5), and gas switching is performed. In a cooling device of an ultra-high sensitivity analyzer in which a block (10) and a cold generating unit (5) are connected by a gas conduit (27), a tube in the cold generating unit (5) connected to the gas conduit (27) Fittings (39)
A cooling device for an ultra-sensitive analyzer, wherein at least one of the pipe joint (39) of the gas switching block (10) is formed of an electrically insulating material.
冷発生部(５)又はガス切換ブロック(10)のベースフラン
ジ(35)(20)と一体に電気絶縁材料で形成した請求項１に
記載の超高感度分析装置の冷却装置。2. A pipe joint (39) connected to a gas conduit (27) is formed of an electrically insulating material integrally with a cold generation part (5) or a base flange (35) (20) of a gas switching block (10). A cooling device for the ultra-sensitive analyzer according to claim 1.
の寒冷発生部(５)を配置し、このパルス管冷凍機(６)の
圧縮機ユニット(９)及びガス切換ブロック(10)を寒冷発
生部(５)とは分離して配置し、ガス切換ブロック(10)と
寒冷発生部(５)とをガス導管(27)で接続してなる超高感
度分析装置の冷却装置において、 ガス切換ブロック(10)のケーシング(40)を電気絶縁材料
で形成したことを特徴とする超高感度分析装置の冷却装
置。3. A pulse tube refrigerator (6) for an ultra-sensitive analyzer.
And a compressor unit (9) and a gas switching block (10) of the pulse tube refrigerator (6) are arranged separately from the cold generating unit (5), and gas switching is performed. In the cooling device of the ultra-high sensitivity analyzer, in which the block (10) and the cold generating part (5) are connected by the gas conduit (27), the casing (40) of the gas switching block (10) is formed of an electrically insulating material. A cooling device for an ultra-high sensitivity analyzer.
の寒冷発生部(５)を配置し、このパルス管冷凍機(６)の
圧縮機ユニット(９)及びガス切換ブロック(10)を寒冷発
生部(５)とは分離して配置し、ガス切換ブロック(10)と
寒冷発生部(５)とをガス導管(27)で接続してなる超高感
度分析装置の冷却装置において、 ガス導管(27)の少なくとも一部を電気絶縁材料で形成し
たことを特徴とする超高感度分析装置の冷却装置。4. A pulse tube refrigerator for an ultra-high sensitivity analyzer.
And a compressor unit (9) and a gas switching block (10) of the pulse tube refrigerator (6) are arranged separately from the cold generating unit (5), and gas switching is performed. In a cooling device for an ultra-high sensitivity analyzer in which the block (10) and the cold generating part (5) are connected by a gas conduit (27), at least a part of the gas conduit (27) is formed of an electrically insulating material. A cooling device for an ultra-high sensitivity analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9052628A JP2997877B2 (en) | 1997-03-07 | 1997-03-07 | Cooling device for ultra-sensitive analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9052628A JP2997877B2 (en) | 1997-03-07 | 1997-03-07 | Cooling device for ultra-sensitive analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10246523A JPH10246523A (en) | 1998-09-14 |
| JP2997877B2 true JP2997877B2 (en) | 2000-01-11 |
Family
ID=12920093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9052628A Expired - Lifetime JP2997877B2 (en) | 1997-03-07 | 1997-03-07 | Cooling device for ultra-sensitive analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2997877B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007071515A (en) * | 2005-09-09 | 2007-03-22 | Fuji Electric Holdings Co Ltd | Cooling device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5097823B2 (en) * | 2008-06-05 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | Ion beam equipment |
| JP5120648B2 (en) * | 2008-11-07 | 2013-01-16 | 住友重機械工業株式会社 | Cryogenic cooling device |
| JP5283096B2 (en) * | 2012-03-09 | 2013-09-04 | 住友重機械工業株式会社 | Cryogenic cooling device |
| JP7152876B2 (en) * | 2018-05-17 | 2022-10-13 | キヤノン株式会社 | Exposure apparatus and article manufacturing method |
-
1997
- 1997-03-07 JP JP9052628A patent/JP2997877B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007071515A (en) * | 2005-09-09 | 2007-03-22 | Fuji Electric Holdings Co Ltd | Cooling device |
| JP4655839B2 (en) * | 2005-09-09 | 2011-03-23 | 富士電機ホールディングス株式会社 | Cooling system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10246523A (en) | 1998-09-14 |
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