JP2989559B2 - Microtome - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microtome suitable for use in preparing a specimen consisting of ultrathin sections, for example, for inspection with an electron microscope.

[0002]

2. Description of the Related Art Generally, a transmission electron microscope (hereinafter referred to as TE) is used.
M), there are sample preparation methods such as ultra-thin section method, replica method, negative staining method, shadowing method, etc., and the ultra-thin section method is used for TEM observation. It is often used as a standard technique.

In order to inspect a fine form as a transmission image with a TEM, an electron beam must pass through a sample. For this reason, it is required that the thickness of the sample is made into an ultrathin section of 50 to 70 nm, and the microtome is an indispensable device used for sample making in the TEM research department.

Here, the microtome according to the prior art is
A base, a cutter holder fixed to one of the bases and holding a glass or diamond cutter, a sample holder fixed to the other of the base, and a sample holder positioned on the sample holder side. A cutting mechanism that cuts the sample as a thin slice by moving the sample with respect to the cutter, and a fine movement feed mechanism that performs a fine movement to make the distance between the sample holder and the cutter holder closer.

The fine movement feed mechanism includes a screw,
There are a mechanical feeding method using a combination of a lever and the like, and a thermal expansion feeding method using thermal expansion by a light bulb or the like.

[0006]

However, in the microtome according to the above-mentioned prior art, there is a limit to the feed amount whether the mechanical feed system or the thermal expansion feed system is used for the fine feed mechanism.

Further, in order to eliminate the limit of the feed amount, the above-mentioned mechanical feed type screw is rotated using a stepping motor, and a ball screw or the like for changing the rotary motion into a linear motion is used. For this reason, due to occurrence of backlash or backlash of the ball screw or the like, high-precision feeding cannot be performed, and positioning accuracy is inferior.

The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a microtome that can increase the precision of a fine movement feed mechanism and reduce the thickness of a sample.

[0009]

According to a first aspect of the present invention, there is provided a microtome comprising: a base;
A first holding means provided on the base, for holding either the cutter or the sample, provided on the base in a state facing the first holding means in the X-axis direction; A fine feed mechanism capable of fine feed by a small distance in the X-axis direction by arranging the first feed means and the second feed means so as to be movable with a small intersection angle across the Y axis; And a second holding unit that is provided to face the first holding unit and holds one of the other of the cutter and the sample.

With this configuration, the first feed means of the fine movement feed mechanism is moved in a small angle direction with respect to the Y axis, and the second feed means is moved in a small angle direction with respect to the Y axis. . Therefore, it is possible to feed the second holding means provided in the fine movement feed mechanism by a minute distance in the X-axis direction at a minute feed amount corresponding to the intersection angle between the first feed means and the second feed means. Thereby, for example, the first
When the cutter is held by the holding means and the sample is held by the second holding means, each time the sample is finely moved, a sample piece having a thickness corresponding to the fine movement can be prepared.

In the invention according to claim 2, the first feeding means constituting the fine movement feeding mechanism is provided at a small angle with respect to the Y-axis with the first fixing portion fixed on the base.
And a first moving portion movably provided on the fixed portion of the first moving portion. The second feeding means includes a second fixed portion fixed on the first moving portion, and a Y-axis. And a second moving portion movably provided on the second fixed portion at a small angle.

According to a third aspect of the present invention, the first feed means and the second feed means forming the fine movement feed mechanism are provided on the guide for guiding the moving part with respect to the fixed part, and on the fixed part. A linear motor stage including a magnet provided and a coil provided in the moving unit and displaced by a magnetic field formed between the magnet and the magnet when energized.

As described above, by using the linear motor stage as the feeding means, it is possible to prevent occurrence of backlash or backlash for converting a rotary motion into a linear feeding motion like a ball screw, thereby achieving highly accurate positioning and smoothness. Movement can be realized.

On the other hand, a microtome according to a fourth aspect of the present invention includes a base, a first linear stage provided on the base, and movable in the X-axis and Y-axis directions; A cutter holder for holding a cutter for cutting a sample, a first linear motor stage and a second linear motor stage provided opposite to the first linear stage in the X-axis direction The first linear motor stage is provided so as to be movable on the base at a small angle + θ with respect to the Y axis, and the second linear motor stage is provided with a small angle −θ with respect to the Y axis. A fine movement feed mechanism movably provided on the first linear motor stage; and a second fine movement feed mechanism movably provided in the Z-axis direction on a second linear motor stage of the fine movement feed mechanism.
And a sample holder mounting arm provided on the second linear stage, the sample holder mounting arm having a sample holder facing the cutter at the distal end side, and the sample holder mounting arm together with the second linear stage. Linear stage driving means for driving in the Z-axis direction.

In the microtome having the above configuration, the intersection angle between the first linear motor stage and the second linear motor stage is 2θ , and in the initial state, the sample holder mounting arm is located on the upper side in the Z-axis direction. I do. Here, the first and second linear motor stages are driven to move a distance a
Are moved to each other, the second linear stage and the sample holder mounting arm disposed on the second linear motor stage are moved 2a in the X-axis direction toward the opposed cutter holder.
× sinθ can be moved. Also,
By moving the sample holder mounting arm downward by the linear stage driving means in the moved state, the sample mounted on the sample holder mounting arm descends from the upper side toward the cutter, and the cutter thins the sample. To cut. Further, after the cutting, each linear motor stage is returned, and then the sample holder mounting arm is moved upward in the Z-axis direction by the linear stage driving means to return to the initial state.

Further, the microtome according to the invention of claim 5 includes a base, a first linear stage provided on the base and movable in the X-axis and Y-axis directions, and a microtome on the first linear stage. And a first linear motor stage provided opposite to the first linear stage with respect to the X-axis direction. Is provided so as to be movable on the base with a small angle + θ with respect to the Y axis, and the second linear motor stage is movable with respect to the first linear motor stage with a small angle −θ with respect to the Y axis. A fine-movement feed mechanism provided; a second linear stage provided on the second linear motor stage of the fine-movement feed mechanism so as to be movable in the Z-axis direction; and a fine movement mechanism provided on the second linear stage. A cutter holding base attached to the cutter holding base, a cutter holding base provided at a tip side of the cutter holding base mounting arm so as to face the sample holder, and holding a cutter for cutting a sample; and the cutter holding base mounting arm. The cutter holder may be constituted by linear stage driving means for driving the cutter holder together with the second linear stage in the Z-axis direction.

The microtome having the above-described structure is arranged on the second linear motor stage when the first and second linear motor stages are driven to move each other by a moving distance a in the same manner as described above. The second linear stage and the cutter holder mounting arm can be moved toward the opposed sample holder by a distance of 2a × sin θ in the X-axis direction. The cutter is raised by moving the cutter holder mounting arm from the lower side to the upper side by the linear stage driving means in the moving state, and the cutter thinly cuts the sample held by the sample holder. .

[0018]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

1 to 7 relate to a first embodiment, in which 1 indicates a microtome according to the embodiment. Reference numeral 2 denotes a rectangular base that forms the main body of the microtome 1. The base 2 is formed of a metal material such as a casting. For the sake of convenience, in FIG.
Axis, the Y axis, and the direction perpendicular to the plane of the paper is the Z axis direction.

Reference numeral 3 denotes an XY-axis stage which is located on the right side of the base 2 and serves as a first linear stage and is fixed. The XY-axis stage 3 includes a fixed base 3A and a fixed base 3A. And a second movable table 3B provided on the first movable table 3B and movably in the Y-axis direction, and a second movable table 3C provided on the first movable table 3B and movably provided in the Y-axis direction. Consists of The position of the first movable table 3B in the X-axis direction is adjusted by an adjustment knob 3B1, and the position of the second movable table 3C is adjusted by the adjustment knob 3C1 in the Y-axis direction.

Reference numeral 4 denotes a tilt stage.
Consists of a fixed base 4A fixed on a second movable base 3C of the XY axis stage 3 and an inclined base 4B for finely moving the fixed base 4A in the X-axis inclined axis direction. 4B
1 adjusts the tilt angle of the tilt base 4B.

Reference numeral 5 denotes a cutter holder fixed on the tilt table 4B of the tilt stage 4, and a cutter 6 is held on the cutter holder 5 by fixing screws 5A.

Here, the cutter 6 is formed in a triangular prism shape using glass, diamond, sapphire, or the like.
It is installed on the cutter holder 5 so that the upper side has a cutting angle (40 ° to 60 °). Further, a sample recovery tank 6A is formed in the cutter 6, and distilled water is stored in the sample recovery tank 6A, and the cut sample pieces are recovered by floating on the distilled water.

The X / Y axis stage 3 positions the cutter 6 with respect to a sample 14 described later, and the tilt stage 4 sets the angle of the cutter 6.

Reference numeral 7 denotes a fine movement feed mechanism provided on the left side of the base 2, and the fine movement feed mechanism 7 is provided on the base 2 at a + θ angle with respect to the Y axis. It comprises a linear motor stage 8 and a second linear motor stage 9 disposed so as to intersect with the first linear motor stage 8 at an angle of -θ with respect to the Y axis. Therefore, the first linear motor stage 8 and the second
Linear motor stage 9 has an intersection angle of 2
are arranged with θ.

Reference numeral 10 denotes a spacer provided between the first linear motor stage 8 and the second linear motor stage 9.
And the fixed base 9A of the second linear motor stage 9 are connected in an intersecting state.

Here, the first linear motor stage 8
A fixed base 8A fixed on the base 2 so as to face the X / Y axis stage 3 in the X axis direction, and a small angle + θ with respect to the Y axis on the fixed base 8A as described later. So-called X-axis linear motor stage composed of a movable table 8B movably provided with the above. The second linear motor stage 9 also has a fixed base 9A fixed to the moving base 8B and a movable base 9A on the fixed base 9A at a small angle -θ with respect to the Y axis as described later. It is configured as a so-called X-axis linear motor stage including the movable table 9B provided.

As shown in FIG. 4, the first linear motor stage 8 has a guide 8C for guiding the moving table 8B.
And a magnet 8D provided on the fixed base 8A side;
And a coil 8E provided on the movable table 8B so as to face the magnet 8D. When the coil 8E is energized, the magnetic field generated from the coil 8E is
It attracts and repels the magnetic field of the magnet 8D. Thereby, the movable table 8B moves linearly along the guide 8C with respect to the fixed table 8A. This is also true for the second linear motor stage 9, the fixed base 9 A and the movable base 9
B, a guide 9C, a magnet 9D, and a coil 9E.

Therefore, the use of the linear motor stages 8 and 9 for the fine movement feed mechanism 7 has the following advantages.

First, since the motor movable portion is composed of a coil, a bobbin and the like and can be moved linearly, the backlash can be eliminated by eliminating the ball screw and the like, and the inertial mass can be reduced. Second, the current and thrust are straighter than the stepping motor, and the instantaneous torque with respect to the rating can be increased. Third, the coil and the inductance are small and the electrical response is excellent. 4th
In addition, there is no magnetic pulsation such as cogging, and high-precision and smooth control is possible.

Here, the first linear motor stage 8 is configured such that the fixed base 8A is fixed on the base 2 at an angle of + θ with respect to the Y-axis so that the movable base 8 on the fixed base 8A is fixed.
B moves in one movement direction at an angle of + θ with respect to the Y axis. In addition, the second linear motor stage 9 fixes the fixed base 9A on the movable base 8B at an angle of -θ with respect to the Y axis so that the movable base 9B on the fixed base 9A
It moves in another movement direction having an angle of -θ with respect to the axis. The moving directions of the moving table 8B and the moving table 9B move in opposite directions.

As described above, in the fine movement feed mechanism 7, the first linear motor stage 8 and the second
Is the same distance a. The moving table 8B of the first linear motor stage 8 moves forward by a distance a in the upper left OA direction and moves on the moving table 8B ', and at this time, the moving table 8B moves in the X-axis direction by a × sin θ.
Just move. On the other hand, the moving table 9B of the second linear motor stage 9 moves forward by a distance a in the AB direction on the lower right side and moves to the moving table 9B '. At this time, the moving table 9B moves by a × sin θ in the X-axis direction. I do. As a result, the moving table 9B of the second linear motor stage 9 moves 2a × si in the X-axis direction.
nθ, the fine movement feed mechanism 7
Then, the movement distance 2a × sin θ is the fine movement feed amount d.

Here, it is desirable that the intersection angle 2θ between the first linear motor stage 8 and the second linear motor stage 9 is set to a small value. For example, intersection angle 2θ
Is set to 5 °, the fine movement feed amount d is d = 0.08.
7 × a. Therefore, the first linear motor stage 8
And the moving distance a of the second linear motor stage 9,
The fine movement feed amount d in the X-axis direction can be set to a value smaller than 1/10.

Next, reference numeral 11 denotes a Z-axis stage serving as a second linear stage. The Z-axis stage 11 is set up on a moving table 9B of a second linear motor stage 9 constituting the fine movement feed mechanism 7. Fixed base 11A and fixed base 11A
11B provided to be movable in the Z-axis direction with respect to
Consists of

Reference numeral 12 denotes a sample holder mounting arm extending in the X-axis direction. The sample holder mounting arm 12 has a base end fixed to a moving table 11 B of a Z-axis stage 11, and a sample holding arm provided at a distal end thereof through an inclined stage 13. Sample holder 15 holding 14
Is fixed. In the middle of the sample holder mounting arm 12 in the longitudinal direction, an elliptical insertion hole 1 long in the X-axis direction into which a transmission rod 16C of a Z-axis stage driving unit 16 described later is inserted.
2A is formed. Further, the tilt of the sample 14 is adjusted by an adjustment knob 13A of the tilt stage 13. Here, the sample holder mounting arm 12 and the tilt stage 13 constitute a sample holding table.

Reference numeral 16 denotes a Z-axis stage drive unit serving as a linear stage drive means. The Z-axis stage drive unit 16 includes a stand 16A provided on the base 2 and a stand 16A.
Z-axis stage drive motor 16 provided on the upper end side of 6A
B, and a transmission rod 16C that moves up and down in the Z-axis direction by the Z-axis stage drive motor 16B.
6C is an insertion hole 12A of the sample holder mounting arm 12.
Has been inserted. Then, by driving the Z-axis stage drive motor 16B, the transmission rod 16C moves up and down, so that the sample holder mounting arm 12 moves up and down together with the moving table 11B of the Z-axis stage 11. It has become.

Reference numeral 17 in FIG. 6 denotes a controller. The controller 17 is configured as a microcomputer having an operation program as shown in FIG. 7, and its storage area 17A stores the fine movement feed amount d of the sample 14 and The number n of samples is set and stored, and the initial moving distance a0 is stored in advance. Also, on the input side of the controller 17,
A keyboard 18 and various sensors and switches (not shown) are connected, and a first linear motor stage 8, a second linear motor stage 9, a Z-axis stage drive motor 16B, and the like are connected to the output side. The initial movement distance a0 is for setting a position where the sample 14 is first cut, regardless of the fine movement feed amount d.

The microtome 1 according to the present embodiment has the above-described configuration.
This will be described based on the program shown in FIG.

First, before operating the microtome 1,
As an initial setting, setting of the cutter 6 and the sample 14 is performed. That is, the cutter 6 is positioned in the X-axis and Y-axis directions with respect to the sample 14 by the X / Y-axis stage 3, and the clearance angle of the cutter 6 is adjusted by adjusting the tilt of the tilt stage 4. On the other hand, the sample 14 is the tilt stage 1
3, the inclination of the sample 14 is adjusted.

As an initial position, the sample 14 and the cutter 6 are separated from each other in the X-axis direction, and the sample holder mounting arm 12 is located above.

Next, when the processing by the controller 17 is started, the fine movement feed amount d (thickness d of the sample) and the number n of the samples are input by the keyboard 18 in step 1, and in step 2, the input fine movement amount d is input. , The moving distance a1 between the first linear motor stage 8 and the second linear motor stage 9 is calculated by a1 = d / 2 × sin ⁻¹ θ.

In step 3, the initial moving distance a0 is read from the storage area 17A, the initial moving distance a0 is set as the moving distance a, and the counter N is set to "0".

Next, in step 4, the moving table 8B of the first linear motor stage 8 and the moving table of the second linear motor stage 9 are moved by the moving distance a (initial moving distance a0) set in step 3. 9B are moved forward in opposite directions. As a result, Z is placed on the second mobile platform 9B.
The sample 14 provided via the axis stage 11 and the sample holder mounting arm 12 moves by 2a0 × sin θ in the X-axis direction.

Also, even when the sample holder mounting arm 12 moves in the X-axis direction, the insertion hole 12
A is formed as a long hole in the X-axis direction.
The transmission rod 16C of the axis stage driving unit 16 can be maintained in the inserted state, and the movement in the Z-axis direction from the Z-axis stage driving unit 16 is transmitted to the sample holder mounting arm 12 via the transmission rod 16C.

In step 5, the Z-axis stage drive motor 16B is operated to lower the sample holder mounting arm 12 slowly. At this time, the first cutting of the sample 14 is performed by applying the tip of the sample 14 to the cutter 6. At this time, the cut sample pieces float on the water surface of the sample recovery tank 6A. However, the sample piece formed by the first cutting is a sample for initial cutting, and is not used for inspection.

In step 6, the first distance is set by the moving distance a.
When the moving table 8B of the linear motor stage 8 and the moving table 9B of the second linear motor stage 9 are respectively moved backward, the distance between the sample 14 and the cutter 6 is increased, and the sample holder mounting arm 12 is raised. The sample 14 is prevented from contacting the cutter 6.

In step 7, the Z-axis stage drive motor 16B is operated to raise the sample holder mounting arm 12,
The sample holder mounting arm 12 is returned to the initial position.

Further, in step 8, it is determined whether or not the counter N has reached a preset number n of samples.
If it is determined to be “O”, since the set number of samples has not yet been created, the process proceeds to step 9 where the counter N
Is incremented by “1”, and the moving distance a is set to a =
a + a1 is set, and the routine returns to step 4.

Then, by the second and subsequent processes from step 4, in step 4, the respective linear motor stages 8, 9 are moved from the leading end of the previously cut sample 14 by a moving distance a1 that is the fine movement feed amount d. . As a result, the tip of the sample 14 is set at 2a1 × sin θ higher than the cutter 6
That is, it is made to protrude by the fine movement feed amount d. In step 5, Z
The sample holder mounting arm 12 is slowly lowered by the shaft stage drive motor 16B, the tip of the sample 14 is applied to the cutter 6 to perform a second cutting on the sample 14, and the cut sample piece is placed in the sample collection tank 6A. Float on the water. By this operation, the prepared sliced sample pieces are collected in the sample collection tank 6A.

Further, in step 6, the moving table 8B of the first linear motor stage 8 is
The moving table 9B of the linear motor stage 9 is moved backward in the direction opposite to the set direction, and in step 7, the sample holder mounting arm 12 is raised by the Z-axis stage driving motor 16B and returned to the initial position.

By sequentially repeating the processing from step 4 to step 7, a thin slice having a thickness d is manufactured and collected in the sample collection tank 6A.

On the other hand, if "YES" is determined in step 8, it means that the number of the sample pieces collected in the sample collection tank 6A has reached the number n, and the process proceeds to step 11 and the operation of the microtome 1 is performed. To end.

However, in the microtome 1 according to the present embodiment, the fine movement feed mechanism 7 is composed of the first linear motor stage 8 and the second linear motor stage 9, so that the conventional linear motor stage can be used due to the advantages of the linear motor. By eliminating the ball screw and the like, the inertia mass can be reduced and the occurrence of backlash can be prevented, and the fine movement of the sample 14 can be accurately performed.

The linear motor stages 8 and 9 constituting the fine movement feed mechanism 7 are arranged so as to intersect each other with a small intersection angle 2θ across the Y axis. Even if a is a long distance, the fine movement feed amount d can be reduced by the set intersection angle 2θ.

Here, for example, the intersection angle 2θ is defined as 2θ = 1.
When the angle is set to 5 °, the relationship between the movement distance a and the fine movement feed amount d is d = 0.26a. When 2θ = 11.5 °, the relationship between the moving distance a and the fine movement feed amount d is d
= 0.2a. Further, the intersection angle 2θ is set to 2θ = 5 °
In this case, d = 0.087a. Furthermore, the intersection angle 2θ can be set to a small angle of 4 ° or 3 °.

Therefore, if the intersection angle 2θ is 2θ = 1
In the case of 1.5 °, when the resolution of the linear motor stage is 100 nm, the minimum fine movement amount d is about 20 n.
m, making it possible to prepare a sample piece having a thickness of 20 nm.

On the other hand, when the crossing angle 2θ is 2θ = 11.5 °, and the resolution of the linear motor stage is 10 nm, the microtome 1 according to the present embodiment is composed of an ultrathin section having a theoretical thickness of 2 nm. A sample piece can be created. As a result, by setting the intersection angle 2θ to an appropriate angle, it is possible to easily produce an ultra-thin sample which could not be produced conventionally.

When the intersection angle 2θ is 2θ = 5.0 °, the resolution of the linear motor stage is 100 nm.
In the case of, the minimum fine movement feed amount d is about 10 nm,
It becomes possible to prepare a sample piece having a thickness of 10 nm. At this time, if the resolution of the linear motor stage is 10 nm, the microtome 1 according to the present embodiment theoretically has a thickness of 1 nm.
It is possible to prepare a sample piece consisting of an ultra-thin section of nm.

Further, the first linear motor stage 8 and the second linear motor stage 9
Since it is set to move individually in the Y-axis direction orthogonal to the axis, the second moving table 9B on which the Z-axis stage 11 is mounted
Holding power can be increased. Thereby, the sample 14
Can prevent the sample 14 from escaping when the cutter 6 hits, eliminating the deviation of the fine movement feed amount d, and making the fine movement feed amount d equal to the thickness of the sample piece.

On the other hand, the transmission rod 16C on the Z-axis stage driving section 16 side is inserted into the insertion hole 12A on the sample holder mounting arm 12, and the sample holder mounting arm 1 by the Z-axis stage driving section 16 is inserted.
2, the movement transmission in the Z-axis direction is performed by moving the transmission rod 16C in the Z-axis direction, so that the sample holder mounting arm 12 is moved up and down by the Z-axis stage driving unit 16. Therefore, when the sample holder mounting arm 12 is moved up and down, the vibration of the Z-axis stage drive motor 16B of the Z-axis stage drive unit 16 is prevented from being directly transmitted to the sample holder mounting arm 12, and the sample holder mounting arm 12 Can be prevented from falling while vibrating during cutting. As a result, the specimen made of an ultrathin section can be neatly finished as a flat surface without its cutting surface being wavy.

Thus, the microtome 1 according to the present embodiment
Then, the first linear motor stage 8 of the fine movement feed mechanism 7
And the second linear motor stage 9 are arranged to intersect. Therefore, even if the moving distance between the first linear motor stage 8 and the second linear motor stage 9 is large, the fine feed amount can be reduced by reducing the crossing angle 2θ, and the fine feed amount can be reduced. As the thickness of the piece, accurate cutting can be performed. As a result, the fine movement feed mechanism 7 can easily create a sample piece composed of an ultrathin section having a resolution lower than that of the linear motor stages 8 and 9.

Next, FIG. 8 shows a second embodiment according to the present invention. The feature of the microtome 1 'according to the present embodiment is that a cutter is provided on the side of the fine movement feeding mechanism, and the cutter is finely moved with respect to the sample. It is something to do. In the present embodiment, the same components as those in the above-described first embodiment are denoted by the same reference numerals, the description thereof will be omitted, and only portions having different configurations will be described with dashes (').

In the figure, reference numeral 12 'denotes a cutter holder mounting arm extending in the X-axis direction. The cutter holder mounting arm 12' has a base 11B having a movable base 11B of the Z-axis stage 11 of the fine feed mechanism 7.
It is stuck to. Then, the cutter holder mounting arm 12 '
A cutter holder 5 'is fixed to the leading end side of the device via an inclined stage 13', and a cutter 6 'is attached to the cutter holder 5'. Further, in the middle of the cutter holding base mounting arm 12 'in the longitudinal direction, an oblong insertion hole 1 long in the X-axis direction into which the transmission rod 16C of the Z-axis stage driving unit 16 is inserted.
2A 'is formed, and the inclination of the cutter 6' is adjusted by an adjustment knob 13A 'of the tilt stage 13'.

Reference numeral 15 'denotes a sample holder for holding the sample 14'.
・ Tilt table 4 of tilt stage 4 provided on Y-axis stage 3
B. The inclination of the sample holder 15 'is adjusted by adjusting the adjustment knob 4B1 of the tilt table 4B.

In the microtome 1 'constructed as described above, the operation is almost the same as that of the microtome 1 described in the first embodiment, but the cutter 6' is finely fed by the fine movement feed mechanism 7. For this reason, for example, by moving the cutter 6 ′ from the lower side to the upper side by the Z-axis stage drive unit 16, the sample 14 ′ can be cut by the cutter 6 ′ to easily prepare a sample piece. Can be recovered by floating on distilled water in a sample recovery tank 6A 'of the cutter 6'.

In each of the above embodiments, the fine movement feed mechanism 7
The inclination of the first linear motor stage 8 with respect to the Y axis is set to + θ,
The inclination with respect to the axis was -θ. However, the present invention is not limited to this. For example, the inclination of the first linear motor stage 8 with respect to the Y axis may be set to + α, and the inclination of the second linear motor stage 9 with respect to the Y axis may be set to −β. In this case, the moving distances of these stages 8 and 9 may be different distances. Further, the inclination of the first linear motor stage 8 with respect to the Y axis may be set to + α, the inclination of the second linear motor stage 9 with respect to the Y axis may be set to + β, and the intersection angle may be set to (α + β). Even in this case, the movement distances of the stages 8 and 9 may be different, and the fine movement feed mechanism 7 may be configured as an X-axis motor stage.

Further, the sample holder mounting arm 12 is made to linearly move in the Z-axis direction by the Z-axis stage 11, but the base end side of the sample holder mounting arm 12 is used as a fulcrum, and the sample 14 on the distal side moves circularly. In this case, the length of the sample holder mounting arm 12 may be increased.

The present invention is as described in detail above. By arranging the first feed means and the second feed means constituting the fine movement feed mechanism so as to be movable at an intersecting angle across the Y axis, Since one of the sample and the cutter can be finely moved toward the other by a small distance in the X-axis direction, a fine movement that is much smaller than the moving resolution of the first and second feeding means can be performed. It is possible to prepare an ultra-thin sliced sample piece having a thickness corresponding to the amount of fine movement.

The above description of the embodiments is merely for describing preferred embodiments of the present invention, and various modifications can be made without departing from the basic concept of the present invention.

[0070]

As described above in detail, according to the microtome according to the present invention, the first feed means and the second feed means constituting the fine feed mechanism are arranged so as to be movable at an intersection angle across the Y axis. By doing so, one of the sample and the cutter can be finely moved by a small distance in the X-axis direction toward the other, so that it is far more than the moving resolution of the first feeding means and the second feeding means. An ultra-thin specimen can be made that enables small fine movement and has a thickness corresponding to the fine movement.

[Brief description of the drawings]

FIG. 1 is a front view showing a microtome according to a first embodiment.

FIG. 2 is a plan view of the microtome shown in FIG. 1 as viewed from above.

FIG. 3 is a side view of the microtome shown in FIG. 1 as viewed from the right side.

FIG. 4 is a partially broken perspective view showing a configuration of a linear motor stage.

FIG. 5 is an explanatory diagram illustrating the movement of the fine movement feed mechanism.

FIG. 6 is a block diagram illustrating a circuit configuration of a microtome.

FIG. 7 is a flowchart showing the operation of the microtome.

FIG. 8 is a front view showing a microtome according to a second embodiment.

[Explanation of symbols]

 Reference Signs List 1, 1 'microtome 2 base 3 XY axis stage (first linear stage) 5, 5' cutter holder 6, 6 'cutter 7 fine movement feed mechanism 8 first linear motor stage (first moving means) 8A, 9A Fixed base 8B, 9B Moving base 8C, 9C Guide 8D, 9D Magnet 8E, 9E Coil 9 Second linear motor stage (second moving means) 11 Z-axis stage (second linear stage) 12 Sample Holder mounting arm 12 'Cutter holding base mounting arm 14, 14' Sample 15, 15 'Sample holder 16 Z-axis stage driving unit (linear stage driving means)

Claims (5)

(57) [Claims] 1. A base, first holding means provided on the base and holding either a cutter or a sample, and a state facing the first holding means in the X-axis direction. And the first feed means and the second feed means are arranged so as to be movable with a small crossing angle across the Y-axis by fine movement by a small distance in the X-axis direction. A microtome comprising: a feeding mechanism; and a second holding means provided on the fine movement feeding mechanism so as to face the first holding means, and holding one of the other of the cutter and the sample. 2. A first feeding means constituting the fine movement feeding mechanism is provided on a first fixed portion fixed on the base and on the first fixed portion at a small angle with respect to a Y axis. A first moving unit movably provided, the second feeding means includes a second fixing unit fixed on the first moving unit,
2. The microtome according to claim 1, further comprising a second moving portion movably provided on said second fixed portion at a small angle with respect to the Y axis. 3. A first feeding means and a second feeding means constituting the fine movement feeding mechanism, a guide for guiding the moving part with respect to the fixed part, a magnet provided on the fixed part, 2. The microtome according to claim 1, wherein said microtome is constituted by a linear motor stage provided on said moving section and comprising a coil for displacing said moving section by a magnetic field formed between said moving section and said magnet when energized. 4. A base, and a first base provided on the base and movable in X-axis and Y-axis directions.
A linear stage provided on the first linear stage, and a cutter holder for holding a cutter for cutting a sample, a cutter stage provided opposite to the first linear stage in the X-axis direction. The first linear motor stage comprises a first linear motor stage and a second linear motor stage. The first linear motor stage is provided movably on the base at a small angle + θ with respect to the Y axis. A fine feed mechanism movably provided on the first linear motor stage at a small angle -θ with respect to the Y axis; and a fine feed mechanism movable in the Z axis direction on the second linear motor stage of the fine feed mechanism. A second linear stage provided; a sample holder mounting arm provided on the second linear stage, the sample holder mounting arm having a sample holder facing the cutter at a distal end side; Microtome comprising constituting the sample holder mounting arm and a linear stage driving means for driving the Z-axis direction together with the second linear stage. 5. A base, and a first base provided on the base and movable in X-axis and Y-axis directions.
A linear stage, a sample holder provided on the first linear stage, a first linear motor stage provided opposite the first linear stage in the X-axis direction, and a second linear stage. A first linear motor stage is provided so as to be movable on the base with a small angle + θ with respect to the Y axis, and a second linear motor stage is provided with a small angle −θ with respect to the Y axis. A fine movement mechanism movably provided on the first linear motor stage; a second linear stage movably provided in the Z-axis direction on a second linear motor stage of the fine movement mechanism; A cutter holder mounting arm provided on the second linear stage; and a tip provided on the tip side of the cutter holder mounting arm facing the sample holder to cut a sample. A cutter holder for holding the jitter, microtome comprising consist of a linear stage driving means for driving the Z-axis direction the cutter holder mounting arm and said cutter holder together with the second linear stage.