JP2980806B2 - Monitoring system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a monitoring system for monitoring and detecting toxic gas and the like, particularly for safely evacuating workers and stopping leakage of toxic gas in the event of toxic gas generation. The present invention relates to a technique for displaying necessary operation information.

[0002]

2. Description of the Related Art Conventionally, in a clean room or the like that handles toxic gas, various monitoring systems have been installed so that the toxic gas does not reach workers. These monitoring systems monitor the status (concentration, temperature, pressure and usage) of toxic gas used in the clean room and oxygen gas in the clean room, and collect detection data indicating the status of this toxic gas. If the detected data exceeds the reference data or falls below the reference data as a result of comparison with reference data (concentration, temperature, pressure, or usage amount) indicating a state in which this toxic gas is considered dangerous, Is determined to have occurred and an alarm is issued. In addition, the monitoring system records detection data from the past to the present, detects a toxic gas trend from a change in the detection data, and detects a time when an abnormality occurs and an abnormality based on the detected data at that time. The gas concentration at the time is also recorded.

On the other hand, the above-mentioned monitoring system has a specific configuration in which various toxic gas sensors for detecting toxic gas in each part of a room and detection data output from each toxic gas sensor are set in advance. A sequencer that compares the reference data (first reference data) and outputs an alarm according to the result of the comparison, captures the detection data output from the gas sensor through the sequencer, and stores the detection data in the preset reference data. (Second reference data), and control means for outputting an alarm in accordance with the comparison result. Double abnormality management is performed by such a sequencer and control means.

[0004]

In the monitoring system described above, the sequencer compares the first reference data with the detection data of the gas sensor to detect an abnormality, and the control means detects the second reference data and the detection of the gas sensor. Since it is configured to detect an abnormality by comparing with data, for example, the sequencer may output "abnormal", while the control means may output "normal". There was also a problem that it was not possible to take appropriate measures. Specifically, when adding a gas sensor to an existing facility equipped with a monitoring system, reference data for the gas detected by the gas sensor is created, and the reference data is used as first reference data and second reference data, and the sequencer When the first reference data and the second reference data are stored differently due to an input error of the reference data by the operator, for example, in the sequencer, "abnormal" On the other hand, the control means may output "normal", which causes a problem that an accurate measure cannot be taken when an abnormality occurs.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a monitoring system capable of accurately coping with the occurrence of an abnormality by collectively managing detection data output from a gas sensor. For the purpose of providing.

[0006]

In order to achieve the above object, according to the present invention, a detecting means for detecting a state of a gas in a room and outputting the same as detection data; a sequencer to which the detecting means is connected; The sequencer comprises a monitoring device connected via a communication line, and the sequencer comprises:
A first reference data storage unit that stores first reference data indicating a dangerous condition of the gas detected by the detection unit; and a second unit that compares the detection data output from the detection unit with the first reference data. A first data comparing unit, a first abnormality determining unit that determines an abnormality according to a result of the comparison by the first data comparing unit, and a first notifying unit that notifies the abnormality when the first abnormality determining unit determines that the abnormality is abnormal. Notification means, wherein the monitoring device is configured to store second reference data indicating second danger conditions of the gas detected by the detection means, and a detection output by the detection means. Second data comparing means for comparing data with the second reference data; second abnormality determining means for determining an abnormality according to a result of the comparison by the second data comparing means; When it is determined that the first reference data and the second reference data are compared, the monitoring device includes a reference data comparing unit that compares the first reference data and the second reference data. And a first reference data setting means for setting, as the first reference data, the reference data having a stricter condition among the first and second reference data.

[0007]

According to the present invention, in the sequencer, the first data comparing means compares the detected data output from the detecting means with the first reference data stored in the first reference data storing means. Thereafter, the first abnormality determining means determines an abnormality according to the result of the comparison by the first data comparing means, and when the abnormality is determined, the first notification means notifies the abnormality. Further, in the monitoring device, after the detection data output from the detection unit is captured via the communication line, the detection data is stored in the second reference data storage unit by the second data comparison unit. After comparing with the second reference data, the second abnormality determining means determines an abnormality according to the result of the comparison by the second data comparing means. Notify.
On the other hand, the monitoring device includes a reference data comparing unit that compares the first reference data and the second reference data, and a result of the comparison by the reference data comparing unit. The first reference data setting means for setting the strict reference data as the first reference data in the first reference data storage means of the sequencer is provided, so that if the determination result of the sequencer is preferentially followed, Monitoring can be performed in a form that emphasizes safety,
Further, even if different abnormality determinations are made in the sequencer and the monitoring device, confusion when an abnormality occurs can be prevented by giving priority to the determination results of the sequencer.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a functional block diagram of the monitoring system. The monitoring system includes a display unit 1, a storage unit 2, a processing unit 3, a communication unit 4, an input unit 5, a sequencer 6, a gas sensor 7, and a flow rate sensor 8. In the element, the storage unit 2,
The processing unit 3, the communication unit 4, and the input unit 5 constitute the monitoring unit 100. As shown in FIG. 1, the display unit 1, the storage unit 2, the processing unit 3, and the communication unit 4 are installed in a monitoring room 50, and the sequencer 6, the gas sensor 7, and the flow sensor 8 The communication unit 4 is arranged in a monitored room 51 such as a clean room, and the communication unit 4 and the sequencer 6 are connected by a communication line 52.

Hereinafter, the components will be described.
First, the gas sensor 7 is installed at a position where the generated or leaked toxic gas can be detected in various places in the clean room. Several to several tens are installed according to the requirements. The flow rate sensor 8 is installed in the middle of a toxic gas supply pipe for supplying a toxic gas to CVDs 10 to 12 (see FIG. 3) which are chemical vapor deposition apparatuses, and measures a flow rate of the toxic gas used in the clean room. Like the gas sensor 7, several to several tens are attached along the toxic gas supply pipe. When there are a plurality of toxic gas supply pipes, these flow sensors 8 are provided for each type of toxic gas.

The detection data output from the gas sensor 7 and the flow sensor 8 are all supplied to the sequencer 6 through a cable. The sequencer 6 takes in the detection data from the gas sensor 7 and the flow rate sensor 8 at a fixed cycle, and stores the toxic gas concentration and the toxic gas in a storage unit (first reference data storage unit) (not shown) in which the detection data is stored in advance. Normal / abnormal judgment is made by comparing with sequencer reference data (first reference data) regarding the flow rate of the poisonous gas. The sequencer 6 is provided for each clean room in which the poisonous gas is to be detected. More specifically, the sequencer 6 is compared with detection data on concentration output from the gas sensor 7 and sequencer reference data on toxic gas concentration stored in advance (by the first data comparison means). If the detected data exceeds the sequencer reference data on the toxic gas concentration, it is determined that the abnormality is present (by the first abnormality determining means), and an alarm is output from an alarm (not shown) as an alarming means (not shown). Means), and compares the detection data on the flow rate of the toxic gas output from the flow rate sensor 8 with sequencer reference data on the flow rate of the toxic gas stored in advance (by the first data comparison means).
If the detection data of the flow rate sensor 8 exceeds the sequencer reference data on the toxic gas concentration, it is determined that the abnormality is present (by the first abnormality determining means), and an alarm is output from an alarm (not shown) as an alarming means. (By the first notification means).

The sequencer 6 also has a function of supplying the detection data output from the gas sensor 7 and the flow rate sensor 8 to the processing unit 3 via the communication unit 4, but is not limited thereto. Instead, the detection data from the gas sensor 7 and the flow sensor 8 may be directly supplied to the communication unit 4.

Next, the processing section 3 and its peripheral configuration will be described. First, the storage unit 2 (second reference data storage unit)
A control program for controlling the processing unit 3 is stored, and as shown partially in FIG.
Physical property data 13 indicating the nature of the toxic gas detected by the flow sensor 8 (data such as burning, toxic, corroding, smelling, etc. and specific gravity), detection data output from the gas sensor 7 and the flow sensor 8 And the like. Processing unit reference data 14 (second reference data) and the like are stored, and these control programs, physical property data 13,
The processing unit reference data 14 are all supplied to the processing unit 2.

Although FIG. 2 shows the processing unit reference data 14 relating to the toxic gas concentration, the processing unit reference data 14 for the flow rate is omitted because it is omitted. In addition, as shown in FIG.
Although arsine, diborane, chlorine, and hydrogen chloride have been exemplified as toxic gases, this is merely an example and other types of toxic gases may be used. The storage unit 2 is not limited to the physical property data 13 as shown in FIG. 2, and it goes without saying that other physical property data 13 may be stored.

The processing section 3 mainly has the following functions (1) to (4). (1) By comparing the detection data output from the gas sensor 7 and the flow rate sensor 8 with the processing unit reference data 14 (second reference data) relating to the toxic gas concentration and the toxic gas flow rate stored in advance, Judge the abnormality.
That is, the detection data on the concentration output from the gas sensor 7 is compared with the processing unit reference data 14 (see FIG. 2) on the toxic gas concentration stored in the storage unit 2 (by the second data comparison unit). If the detected data exceeds the processing unit reference data 14 relating to the toxic gas concentration, it is determined to be abnormal (by the second abnormality determining means), and an alarm is output from an alarm (not shown) as an alarming means (not shown). Also, the detection data on the flow rate of the toxic gas output from the flow rate sensor 8 is compared with the processing unit reference data 14 (not shown) on the flow rate of the toxic gas stored in the storage unit 2 (by the second notification unit). If the detection data of the flow rate sensor 8 exceeds the processing unit reference data 14 relating to the toxic gas concentration, it is determined that there is an abnormality (by the second data comparing means) (second abnormalities). By the discrimination means), and outputs an alarm from the alarm as a warning device (not shown) (by the second notification unit).

(2) Based on the result of normality / abnormality determination in (1), the positions of the gas sensor 7 and the flow rate sensor 8 which are determined to be abnormal are detected, and the current status of the CVDs 10 to 12 relating to the occurrence of abnormality. (Power ON / OF
F, opening / closing of a valve, operation of a ventilator). The detection of the situation of the CVD 10 to 12 is performed based on an operation signal output from the processing unit 3 and operating the CVD 10 to 12. The detection result of the processing unit 2 in (2) is
As shown in FIG. 4, “abnormality location 16”, “safety confirmation 17”, and “abnormality detection 18” are displayed on the display unit 1.

(3) The type of the toxic gas is determined based on the detection data from the gas sensor 7 and the flow sensor 8, and based on the determination result, the toxic gas is included in the physical property data 13 for each toxic gas shown in FIG. Property data 1 corresponding to the type of
3 is read out, and further, an evacuation method such as an evacuation posture and an evacuation direction (stored in the storage unit 2 in advance) is instructed to the operator based on the physical property data 13. (4) The detection data from the gas sensor 7 and the flow rate sensor 8 are recorded at regular intervals, and (a) the gas concentration and the gas flow rate are increasing or decreasing, (b) the gas concentration and the gas Current value, maximum value of flow rate, (c) abnormality occurrence time,
(D) Elapsed time of occurrence of abnormality, (e) Danger value, etc. are detected.
Note that the processing result of the processing unit 2 in (4) is shown in FIG.
Is displayed on the display unit 1 as "Situation 15".

Next, the display unit 1 and the input unit 5 will be described. The display unit 1 displays a part or all of the processing results (1) to (4) performed by the processing unit 3 as shown in FIGS. 3 and 4. Specifically, The display contents such as “Situation 15”, “Abnormality location 16”, “Safety confirmation 17”, “Abnormality detection 18”, “Guidance menu 19”, “Evacuation method (not shown)”, etc. To display. The input unit 5 has operation means such as a keyboard, a mouse, and a touch panel. The operator (operator) of the monitoring system reads out the detection data of each gas sensor 7 and the flow rate sensor 8 to the display unit 1 manually, for example. , The storage unit 2, the sequencer reference data, the processing unit reference data 14, the physical property data 13, and the like stored in the sequencer 6 and the like.

Next, the operation of the monitoring system will be described with reference to the flowchart of FIG. << Step 1 >> First, after the power is turned on to the monitoring system, the display unit 1 is erased and the color is set through the input unit 5, and the processing unit reference data 14 and the physical property data to be stored in the storage unit 2 are stored. 13. Input sequencer reference data to be stored in the sequencer 6.

<< Step 2 >> The detection data from the gas sensor 7 and the flow rate sensor 8 are read at regular intervals through the sequencer 6, and the detection data is also supplied to the processing section 3. << Step 3 >> In the sequencer 6, the gas sensor 7,
The detection data from the flow rate sensor 8 is compared with the preset sequencer reference data, and the normal / abnormal judgment is made based on the comparison result. Specifically, the detection data on the concentration output from the gas sensor 7 is compared with the sequencer reference data on the toxic gas concentration stored in advance, and the detection data on the gas sensor 7 exceeds the sequencer reference data on the toxic gas concentration. In this case, it is determined that there is an abnormality, and the detection data on the flow rate of the toxic gas output from the flow rate sensor 8 is compared with sequencer reference data on the flow rate of the toxic gas stored in advance, and the detection data of the flow rate An abnormality is determined when the value exceeds the sequencer standard data on the poison gas concentration.

In such a normal / abnormal judgment, among the gas sensor 7 and the flow rate sensor 8 relating to the same type of toxic gas, the detection data from one of the sensors 7.8 exceeds the sequencer reference data. In that case, it is determined to be abnormal. Then, in this step 3, if the sequencer 6 determines that there is an abnormality, the process proceeds to the next step 4, and if the sequencer 6 determines that it is normal, the process proceeds to the next step 5.

<< Step 4 >> When the sequencer 6 determines that an abnormality has occurred, the processing unit 2 detects the detection data output from the gas sensor 7 and the flow sensor 8 and the sequencer reference data stored in the sequencer 6. Is compared with the processing unit reference data 14 stored in the storage unit 2 (by the reference data comparison unit of the processing unit 3), and the smallest one of the detected data and the reference data is set as new sequencer reference data. Update setting to the sequencer 6 (by the first reference data setting means of the processing unit 3) (such update setting is performed for the sequencer reference data relating to the concentration and the sequencer reference data relating to the flow rate, respectively). That is, the strictest criterion for the sequencer 6 is set as sequencer reference data. In this step 4, as a result of comparing the detection data from the gas sensor 7 and the flow rate sensor 8 with the preset sequencer reference data and the processing unit reference data 14, the currently set sequencer reference data becomes the minimum value. If it is determined that the sequencer is not satisfied, the sequencer reference data is not rewritten.

<Step 5> If the sequencer 6 does not judge the abnormality, the processing unit 3 detects the detection data from the gas sensor 7 and the flow rate sensor 8 and the processing unit reference data set in the storage unit 2 in advance. 14 is compared, and normal / abnormal is determined based on the comparison result. Specifically, the detection data regarding the concentration output from the gas sensor 7 is
It is compared with the processing unit reference data 14 on the toxic gas concentration stored in advance, and when the detection data of the gas sensor 7 exceeds the processing unit reference data 14 on the toxic gas concentration, it is determined that there is an abnormality. The output detection data on the toxic gas flow rate is compared with the processing unit reference data 14 on the toxic gas flow rate stored in advance, and the detection data of the flow rate sensor 8 exceeds the processing unit reference data 14 on the toxic gas concentration. In that case, it is determined to be abnormal. In such a normal / abnormal judgment, among the gas sensor 7 and the flow sensor 8 relating to the same type of toxic gas, if the detection data from one of the sensors 7.8 exceeds the processing unit reference data 14, Is determined to be abnormal. In this step 5, when the processing section 3 determines that there is an abnormality, the process proceeds to the next step 6, and when the processing section 3 determines that it is normal, the process proceeds to the next step 7.

<< Step 6 >> An alarm is output assuming that an abnormality has been detected in the sequencer 6 or the processing section 3.
In the above-described embodiment, as a means for outputting an alarm, a warning color such as red, which indicates danger, flashes on the display screen of the display unit 1, and an alarm sound is emitted. The alarm output in step 6 is based on the abnormality determination in the sequencer 6 (determination result in step 3) or based on the abnormality determination in the processing unit 3 (determination result in step 5). ) Is identifiable. << Step 7 >> to << Step 8 >> In step 7, it is determined whether or not an instruction to stop the alarm generated in step 6 has been input from the input unit 5, and if an instruction to stop the alarm has been input, In the next step 8, the alarm is stopped.

[Step 9] The sequencer reference data stored in the sequencer 6, the processing unit reference data 14 (see FIG. 2) stored in the storage unit 2, and the abnormal toxic gas "Situation 15", "Abnormality location 16", "Safety confirmation 17", "Abnormality detection 1"
8 "," guidance menu 19 ", an instruction to read display contents (see FIG. 4) such as" evacuation method (not shown) "and the like (hereinafter, referred to as a data read request) are determined. If YES, proceed to the next step 10, NO
In the case of, the process proceeds to the original step 2.

<Step 10> The information requested to be read is displayed on the display unit 1 as shown in FIGS. 2 and 3, and the operator is referred to and inspected the display contents. Then, the process proceeds to the next step 11. << Step 11 >> A process of changing the contents of the sequencer reference data and the processing unit reference data 14 through the input unit 4 by an operator who refers to the display screen of the display unit 1 or a valve in the CVD 10 to 12 in response to an alarm. It is determined whether or not a process for operating the ventilator, a process for performing evacuation broadcasting in a room where an abnormality has occurred, and the like (hereinafter, these processes are referred to as operation inputs) are performed. The process proceeds to step 13 if NO.

<Step 12> If it is necessary to change the contents of the sequencer reference data and the processing unit reference data 14 due to the operation input performed in step 11, these data are rewritten. The various operation inputs performed are stored in the storage unit 2 as the histories 20 and 21 after adding the abnormality occurrence date and time (histories 20 and 21).
6 is shown in FIG. 6) and used for the management of toxic gas thereafter. After the step 12, the display screen is switched to, for example, a normal screen shown in FIG.

<< Step 13 >> If there is no operation input in step 11, the display screen is switched to a normal screen as shown in FIG. 3, for example. Then, these steps 12.1
After passing through step 3, the process returns to step 2 again, and the processing of steps 2 to 13 is repeated. The flowchart in FIG. 5 is not executed for all types of toxic gases, but is executed for each type of toxic gas.

As described in detail above, in the monitoring system according to the present embodiment, when an abnormality is detected by the sequencer 6 (NO in step 3), the detection data output from each gas sensor 7 and the flow sensor 8 Is compared with the sequencer reference data and the processing unit reference data 14, and the smallest of the detected data and the reference data is set as new sequencer reference data in the sequencer 6 (step 4). In the sequencer 6, the strictest criterion can be set as the reference data, and even when the diffusion speed of the toxic gas varies depending on the nature of the toxic gas, it can be reliably determined based on the detection data from the gas sensors 7 and the flow sensor 8. Abnormality determination can be performed. That is, in the monitoring system of the present embodiment, the gas sensor 7 and the flow rate sensor 8 can generate an alarm in the sequencer 6 only by detecting a toxic gas having a slight concentration regardless of the mounting position. As a result, it is possible to manage toxic gas in the most secure form,
An effect of reliably performing the abnormality determination can be obtained.

In the monitoring system shown in this embodiment,
Since information relating to the sequencer reference data and the processing unit reference data 14 is collectively displayed on the display unit 1 (steps 9 to 10), the display contents of the display unit 1 are referred to by the operator so that the sequencer can be displayed. 6, the processing unit reference data 14 set in the storage unit 2, and the difference between them can be grasped. As a result, the sequencer 6, the processing unit 3
In the case where a different abnormality judgment is made in
Even in step 6), the operator can clearly grasp the reason, and the effect of appropriately coping with the occurrence of the abnormality can be obtained.

In the above embodiment, in step 4, the detection data, the sequencer reference data, and the processing unit reference data 14 output from the gas sensor 7 and the flow rate sensor 8 are compared with each other. The smallest one (that is, one with strict conditions) is set in the sequencer 6 as new sequencer reference data.
This is because the smaller the flow rate value output from the flow sensor 8 is, the smaller the danger is.
When the value indicated by the sequencer reference data and the processing unit reference data 14 is larger, which means that the danger is smaller, for example, a pressure sensor for detecting the pressure in the pipe of the toxic gas is provided as a detecting means, and this pressure sensor is provided. If the lowering of the toxic gas in the pipes based on the detection data indicates that the toxic gas has leaked, in step 4 described above, the detection data output from the pressure sensor, the sequencer reference data, The detected data is compared with the reference data 14, and the largest of these detected data and reference data (that is,
Is set in the sequencer 6 as new sequencer reference data.

In the above embodiment, only one sequencer 6 is provided as shown in FIG. 1, but when there are a plurality of toxic gas monitoring areas, the communication unit 4
It is preferable to connect a plurality of sequencers 6 via a LAN to form a LAN. When such a LAN is formed, the control of each sequencer 6 is performed by a common program transmitted from the processing unit 3, whereby the processing unit 3 is controlled.
By simply changing the common program, the control contents of each sequencer 6 can be changed collectively, thereby improving the handling of the monitoring system. In the above embodiment, the sequencer reference data and the processing unit reference data 1
4 are compared with each other, and among the detected data and the reference data, the data of the severer condition are set as the sequencer reference data in the sequencer 6, but the present invention is not limited to this.
Of the detection data and the reference data, the one with severe conditions may be stored in the storage unit 2 as the processing unit reference data 14.

[0032]

As is apparent from the above description, according to the present invention, in the sequencer, the first data comparing means stores the detected data output from the detecting means and the first reference data storing means. After comparing with the first reference data, the first abnormality determining means determines an abnormality according to the result of the comparison by the first data comparing means, and when it is determined to be abnormal, the first notification means Notify the abnormality. Also,
In the monitoring device, after the detection data output from the detection unit is captured via the communication line, the second data comparison unit compares the detection data with the second reference data stored in the second reference data storage unit. After comparing with the reference data, the second abnormality determining means determines an abnormality according to the result of the comparison by the second data comparing means, and when it is determined to be abnormal, the second notifying means reports the abnormality. I do. On the other hand, the monitoring device includes a reference data comparing unit that compares the first reference data and the second reference data, and a result of the comparison by the reference data comparing unit. The first reference data setting means for setting the strict reference data as the first reference data in the first reference data storage means of the sequencer is provided, so that if the determination result of the sequencer is preferentially followed, It is possible to perform monitoring in a form that emphasizes safety, and even if there is a different abnormality judgment in the sequencer or monitoring device, by giving priority to the judgment result of the sequencer, it is possible to prevent confusion when an abnormality occurs. can get.

[Brief description of the drawings]

FIG. 1 is a functional block diagram of a monitoring system.

FIG. 2 is a diagram showing storage contents of a storage unit 2;

FIG. 3 is a view showing a display example of a display unit 1;

FIG. 4 is a view showing a display example of a display unit 1;

FIG. 5 is a flowchart showing the operation of the monitoring system.

FIG. 6 is a diagram showing a record of operation contents of the input unit 5 when an abnormality occurs.

[Explanation of symbols]

 Reference Signs List 1 display unit 2 storage unit (second reference data storage unit) 3 processing unit 4 communication unit 5 input unit 6 sequencer 7 gas sensor (detection unit) 8 flow sensor (detection unit) 10 CVD 11 CVD 12 CVD 13 physical property data 14 processing unit Reference data (second reference data) 50 Monitoring room 51 Monitored room 52 Communication line 100 Monitoring means

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-4-80631 (JP, A) JP-A-2-144,698 (JP, A) JP-A-61-19756 (JP, U) (58) Survey Field (Int.Cl. ⁶ , DB name) G08B 19/00-21/00 623

Claims (1)

(57) [Claims] 1. A detecting means for detecting a state of a gas in a room and outputting the same as detection data, a sequencer connected to the detecting means, and a monitoring device connected to the sequencer via a communication line. The sequencer comprises: first reference data storage means for storing first reference data indicating a dangerous condition of the gas detected by the detection means; and first detection data output from the detection means. First data comparing means for comparing with the reference data, first abnormality determining means for determining an abnormality according to the result of the comparison by the first data comparing means, and when the first abnormality determining means is determined to be abnormal, The monitoring device includes a second notification data storing second reference data indicating a dangerous condition of the gas detected by the detection device. Stage, second data comparison means for comparing the detection data output by the detection means with the second reference data, and second abnormality determination means for determining abnormality according to the result of comparison by the second data comparison means And second notifying means for notifying an abnormality when the abnormality is judged by the second abnormality judging means. The monitoring device compares the first reference data with the second reference data. Reference data comparing means, and a result of comparison by the reference data comparing means,
A first reference data setting means for setting, as the first reference data, reference data having strict conditions among the second reference data.