JP2978370B2 - Electronic scanning ultrasonic flaw detection method and apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic scanning ultrasonic flaw detector and, more particularly, to an electronic scanning ultrasonic flaw detector suitable for quickly inspecting a variety of defects in a test object while replacing various flaw detection probes. The present invention relates to an ultrasonic method and an apparatus thereof.

[0002]

2. Description of the Related Art As a conventional ultrasonic flaw detector, there is one disclosed, for example, in Japanese Patent Application Laid-Open No. Hei 4-62467. Ultrasonic flaw detectors are usually manufactured as dedicated devices, for example, for inspection of piping in nuclear power plants, for inspection of pressure vessels, and the like. This is because, for pipe inspection, a dedicated flaw detection probe corresponding to the pipe diameter is required, and the focal position is determined according to the pipe wall thickness and the like. For this reason, the type of the object to be inspected by the ultrasonic flaw detector is
It is usually limited to a range that can be handled by a dedicated probe attached to the ultrasonic flaw detector. This range is narrow, and only one type of subject can be usually tested. For example, when a pipe is used as a subject, the pipe is limited to a pipe having a diameter and a wall thickness that can be handled by the dedicated probe. However, even if the range of the testable object is limited, it is necessary to set various flaw detection conditions for each test object. For example, it is necessary to set the focus position, set the ultrasonic wave incident direction, and set the scanning pitch of the flaw detection probe. This is a tedious and specialized task. The ultrasonic inspection apparatus according to the prior art described above is for inspecting the presence or absence of a defect in an IC package. Inspection conditions for inspecting a large IC package such as an LSI, and inspection of a small IC package are examined. In order to save the trouble of setting each of the flaw detection conditions when performing the flaw detection, the flaw detection conditions for each inspection object are stored in a memory in advance, and the stored flaw detection conditions are read for each inspection object.

[0003]

As ultrasonic flaw detectors become more widespread, the types of subjects to be inspected become more diverse. However, as far, than were prepared individually by a dedicated ultrasonic flaw detector application specific, it is impossible to reduce the cost, thereby inhibiting the spread. However, when manufactured as a general-purpose ultrasonic flaw detector, there is a problem that the user must set detailed flaw detection conditions in accordance with the type of the subject.

[0004] It is an object of the present invention to provide an electronic scanning ultrasonic flaw detection method and apparatus capable of enabling a wide variety of subjects to be inspected and easily setting flaw detection conditions.

[0005]

The object of the present invention is to detect flaw detection in advance.
Create a table according to the type of probe and the condition of the test object.
Settings and processing based on input from external devices.
Create a flaw detection condition data table, and
From the data table, select the
The appropriate flaw detection conditions are selected and ultrasonic flaw detection is performed
When selected, ultrasound based on the selected flaw detection data
Transmission / reception switching data
Data, transmission / reception delay data, and image display data sequentially
And a transmission / reception circuit based on the read data.
While displaying the image of the inspection result
Is achieved.

[0006]

The flaw detection condition data stored in the storage means is set and processed as data suitable for the object and flaw detection conditions by, for example, an external device, and the data is transmitted to the electronic scanning ultrasonic flaw detection apparatus body online or offline. . Then, from the flaw detection condition data table,
Flaw detection conditions corresponding to the flaw detection probe
When the flaw detection is executed, based on the selected flaw detection condition data,
Each time according to the ultrasonic transmission / reception timing
Switching data, transmission / reception delay data, and image display data in order
Read, send and receive based on each read data
Control the transmission circuit, so that
Change the turn data to assign the flaw detection conditions and control sequence.
Can be changed at will, thereby controlling
Add probe types without modifying software, within control
It is possible to easily cope with a change in the content. Further, flaw detection can be performed on one subject under various conditions by using various kinds of flaw detection probes, and moreover, less expertise is required for setting flaw detection conditions.

[0007]

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an overall configuration diagram of an electronic scanning ultrasonic flaw detector according to one embodiment of the present invention. The present apparatus includes a flaw detection probe having a built-in multi-array probe 2 for transmitting and receiving ultrasonic waves to and from an object to be inspected via a couplant, and an apparatus body 1 for driving the multi-array probe 2 and performing flaw detection and processing. And an external device 11 for setting parameters such as an object and flaw detection conditions.

In this embodiment, a recording medium 12, such as an FD, is used as a medium for delivering flaw detection condition data. As shown in FIG. 8, the multi-array probe 2 of the flaw detection probe has a subdivided ultrasonic transducer 50 built therein.
Probes having different numbers of transducers and different arrangement shapes are prepared depending on the inspection object and the inspection content, and the probes are replaced for each inspection purpose and connected to the apparatus main body 1.

The apparatus body 1 includes a transmission circuit 3 and a reception circuit 4
, A control circuit 5, an eco-digital circuit 6, an image processing circuit 7, a CPU circuit 9, and an external recording device 10. The flaw detection condition data set and processed by the external device 11 is stored in the storage circuit in the control circuit 5 via the external recording device 10 and the CPU circuit 9 in accordance with the type of the probe, the flaw detection, and the condition of the inspection object. It is tabled.

The flaw detection condition data selected from the tabulated data is set in the transmission circuit 3, the reception circuit 4, and the image processing circuit 7 at the transmission / reception timing of the ultrasonic wave, and the flaw detection is performed. And an image display operation.

FIG. 2 to FIG. 4 are detailed structural views of the above-mentioned apparatus main body. FIG. 2 is a detailed configuration diagram of a transmission circuit for driving the multi-array probe 2 to transmit an ultrasonic signal. The transmission circuit 3 includes a transmission pulse switch 20, a transmission pulse generator 21, a transmission delay time setting circuit 22, a data setting circuit 23, and a strobe signal conversion circuit 24. In this embodiment, the transmission pulse switching circuit 20, the transmission pulse generator 21, and the transmission delay time setting circuit 22
Circuits (NO1 block to NO12 block) are provided, which can realize up to 12 open channels. Next, the transmission pulse switch 20
Is designed to connect up to 48 ultrasonic vibration elements. A transmission pulse switch 20 and a transmission delay time setting circuit 22 are connected to a data setting circuit 23 by a common bus,
Predetermined data is set by the strobe signal of the strobe signal conversion circuit 24, and operation is performed by a synchronizing signal.

FIG. 3 is a detailed configuration diagram of a receiving circuit that receives and amplifies an ultrasonic signal from the multi-array probe 2. The receiving circuit 4 includes a receiving signal switch 30 with an amplifier, a receiving delay time setting circuit 31, a data setting circuit 23, a strobe signal converting circuit 24, a resistor 32, and an adder 33. Similarly to the transmission circuit 3, the reception switching circuit with amplifier 30 and the reception delay time setting circuit 31 are each 12 (NO1 to NO12).
Block). Reception switching circuit with amplifier 3
0 and the reception delay time setting circuit 31
3 is connected by a common bus, predetermined data is set by a strobe signal from a strobe signal conversion circuit 24, an ultrasonic signal is received and added by an adder 33, and an echo signal is output. I do.

In the embodiment shown in FIG. 1, two transmission circuits 3 and two reception circuits 4 are provided so that the number of ultrasonic elements can be set to 96 and the maximum number of aperture channels can be set to 24. The data setting circuit 23 in FIGS.
The transmission signal conversion circuit 24 can use a circuit having a common specification for both the transmission circuit 3 and the reception circuit 4, and can control connection to the control circuit 5 by a common signal line. According to the present embodiment, it is possible to cope with a flaw detection probe using a linear probe or a sector probe having up to 96 ultrasonic transducers frequently used in industrial use at present. The lower part of FIG. 8 is an example in which the inspection object 51 is detected by a linear probe and displayed in a cross section.

FIG. 4 is a block diagram of a control circuit for controlling the transmission circuit 3, the reception circuit 4, and the image processing circuit 7 and for setting data. The control circuit 5 includes a synchronization circuit 40 for generating a synchronization signal for the entire apparatus, a timing control circuit 41 for controlling timing in the control circuit 5, and an MPU circuit 4 for performing processing.
2. A storage circuit 43 for storing flaw detection condition data for various probes and various test objects in a table, a data and strobe control circuit 44 for controlling data and strobe signals, Transmission / reception circuit strobe signal output circuit 45, transmission / reception circuit data output circuit 46, image processing circuit parameter data
It comprises a data output circuit 47.

When the flaw detection condition data for each probe created by the external unit 11 shown in FIG. 1 is taken into the apparatus main body via a storage medium or the like, the CPU circuit 42 converts the flaw detection condition data into, for example, a diagram as shown in FIG. As shown in FIG. 5, the data is converted into a table and stored in the storage circuit 43. When the operator sets conditions, a menu-type condition setting screen is displayed on the display unit 8, and the data corresponding to the flaw detection probe to be used among the tabulated data, and also corresponds to the subject and the test content. Prompt for the selection of the data. When the operator selects a flaw detection condition using a keyboard or the like, it is recognized at which address in the storage circuit 43 the selected data is located. Based on the read signal from the timing control circuit 41, the selected data is sequentially read out, and the strobe control circuit 44 controls the transmission / reception circuit strobe signal output circuit 45, the transmission / reception circuit data output circuit 46, It is output to a predetermined circuit via an image processing circuit parameter output circuit 47.

FIG. 6 is a flowchart showing a data control procedure in the control circuit 5, and the control circuit 5 repeatedly operates according to the control procedure. The repetition timing is performed based on the timing of transmission and reception of ultrasonic waves.

First, a register start address is set (step 1), and a data table start address is set (step 2). Next, the register and data table addresses are updated (step 3), and the process waits until the synchronization signal becomes "1" (step 4). When the synchronizing signal becomes "1", switch data in the transmission circuit is set (step 5), delay data in the transmission circuit is set (step 6), and switch data in the reception circuit is set. (Step 7), delay data in the receiving circuit is set (Step 8), and parameter data in the image processing circuit are set (Step 9). And the next step 10
It is determined whether or not the channel is a fixed channel. The fixed channel is used when electronic scanning is performed only on a fixed channel, and generally corresponds to a fixed angle flaw detection method for detecting a flaw. Next, it is determined whether or not the current channel is the last channel. If the current channel is the last channel, the process returns to step 1;
The channel count is updated at 2 and the process returns to step 3.

FIG. 7 shows an example of coordinate calculation for displaying a cross section in the embodiment. In this calculation example, items (offset, V, S
in.theta., Cos .theta., X, YRANG) are stored as parameters in the storage circuit in the control circuit 5 as tables.

[0019]

According to the present invention, a flaw detection condition data table is provided.
Flaw detection conditions corresponding to the flaw detection probe used
Is selected, and a supersonic sound is generated based on the selected flaw detection condition data.
Transmission / reception switching data every time according to the wave transmission / reception timing
Data, transmission / reception delay data, and image display data sequentially
And a transmission / reception circuit based on the read data.
The ultrasonic transmission and reception timing
Flaw detection conditions and control sequence by changing pattern data
As a result, the control software can be changed
Add probe types and change control details without modification
Etc. can be easily dealt with, and
The required number of oscillators and aperture channels.
Instead, we will introduce electronically operated ultrasonic flaw detectors with necessary specifications.
It can be manufactured for use.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of an electronic scanning ultrasonic flaw detector according to one embodiment of the present invention.

FIG. 2 is a detailed configuration diagram of a transmission circuit shown in FIG.

FIG. 3 is a detailed configuration diagram of a receiving circuit shown in FIG. 1;

FIG. 4 is a detailed configuration diagram of a control circuit shown in FIG. 1;

FIG. 5 is an explanatory diagram of table data in a storage circuit.

FIG. 6 is a flowchart illustrating a control procedure of a control circuit.

FIG. 7 is an explanatory diagram showing an example of a cross-section display coordinate calculation.

8 is a cross-sectional display example of the electronic scanning ultrasonic flaw detector shown in FIG. 1;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Device main body, 2 ... Multi-array probe, 3 ... Transmission circuit, 4 ... Receiving circuit, 5 ... Control circuit, 6 ... Eco-digital circuit, 7 ... Image processing circuit, 8 ... Display, 9 ... CPU circuit Reference numeral 10: external recording device, 11: external device, 12: recording medium 20: transmission pulse switcher, 21: transmission pulse generator, 2
2 ... transmission delay time setting circuit, 23 ... setting data circuit, 2
4 strobe signal conversion circuit, 30 reception signal switcher with amplifier, 31 reception delay time setting circuit, 32 resistor
33 adder, 40 synchronization circuit, 41 timing control circuit, 42 MPU circuit, 43 storage circuit, 44 data
Strobe signal output circuit, 45: transmission / reception circuit strobe signal output circuit, 46: transmission / reception circuit data output circuit, 47: image processing circuit parameter data output circuit, 5
0: ultrasonic vibration element, 51: test object.

──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Tsutomu Inayama 3-2-1 Sachimachi, Hitachi City, Ibaraki Prefecture Within Hitachi Engineering Co., Ltd. (72) Mitsui Kotori 3-2-1 Sachimachi, Hitachi City, Ibaraki Prefecture No. Hitachi Engineering Co., Ltd. (56) References JP-A-4-62467 (JP, A) JP-A-61-276548 (JP, A) JP-A-2-32810 (JP, U) (58) Fields surveyed (Int.Cl. ⁶ , DB name) G01N 29/00-29/28

Claims (2)

(57) [Claims] 1. A flaw detection probe incorporating a plurality of electronic scanning ultrasonic transducers, and a selected flaw detection probe.
In an electronic scanning ultrasonic flaw detector including a transmitting / receiving circuit to be connected and a control circuit for controlling operating conditions of the transmitting / receiving circuit, the type of flaw detection probe and the condition of the object to be inspected are determined in advance.
Tables are also created according to the input from external devices.
Flaw detection condition data table
In advance, use this flaw detection condition data table
When the flaw detection conditions corresponding to the flaw detection probe are selected,
When the ultrasonic inspection was performed, the selected inspection conditions
According to the transmission / reception timing of the ultrasonic wave based on the data,
Transmission / reception switching data, transmission / reception delay data, image display data
Data is read sequentially, and the read data
While controlling the transmission / reception circuit based on the
Electronic scanning ultrasonic flaw detection method characterized by Shimesuru. 2. A flaw detection probe incorporating a plurality of electronic scanning ultrasonic transducers, and a selected flaw detection probe.
In an electronic scanning ultrasonic flaw detector including a transmitting / receiving circuit to be connected and a control circuit for controlling operating conditions of the transmitting / receiving circuit, the type of flaw detection probe and the condition of the object to be inspected are determined in advance.
Tables are created according to the input, and input from external devices and instruments
Flaw detection condition data table set and processed based on
From the flaw detection condition data table,
Selection means for selecting flaw detection conditions corresponding to lobes, and supersonic
When performing flaw detection, based on the selected flaw detection condition data
The transmission / reception is turned off each time according to the transmission / reception timing of the ultrasonic wave.
Data, transmission / reception delay data, and image display data in order.
As well as sending the
Means for controlling the receiving circuit and displaying the image of the flaw detection result
Electronic scanning ultrasonic flaw detection apparatus characterized by comprising a display device.