JP2975287B2 - Gas supply nozzle for radical reaction type precision cutting equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a radical (free radical) reaction to produce, for example, a silicon single crystal, a germanium single crystal, a gallium-arsenic compound,
Alternatively, the present invention relates to a gas supply nozzle for a radical reaction type precision cutting device used in a precision cutting device for cutting a relatively thick material such as ceramics or glass which is difficult to cut with a normal mechanical method.

[0002]

2. Description of the Related Art Conventionally, a dicing method using a diamond wheel has been employed for cutting a silicon single crystal or the like. However, in this cutting method, a plastic working layer remains on the surface and fine cracks are generated. This causes a decrease in the yield of the processed wafer.

In order to solve such a problem, a precision processing method utilizing a radical reaction has been proposed (Japanese Patent Laid-Open No. 1-125829). In the precision machining method by this radical reaction, in the vicinity of the workpiece arranged in the atmosphere of the reaction gas, the reaction gas is activated by discharge or laser beam excitation to generate radicals, and the radicals and the constituent atoms of the workpiece or A workpiece is processed by a radical reaction with a molecule.

[0004] In the above-mentioned publication, as an example of a processing method, a voltage is applied to the wire electrode while winding the wire electrode wound on the wire supply bobbin around the wire take-up bobbin, and the wire electrode is covered with the wire electrode. A discharge is generated between the cut objects to activate the reaction gas, and the reaction gas generates radicals to cause a radical reaction between the radicals and the constituent atoms or molecules of the object to be cut. A precise cutting method by a radical reaction that cuts an object to be cut by relatively moving in a direction crossing the wire electrode is disclosed.

[0005] However, in the above-described disclosed technology, if the object to be cut is thin, the radical reaction can be continued and cut by the reaction gas in the chamber. When cutting at the cutting width, the supply of the reaction gas to the bottom of the cutting groove tends to be insufficient, and the reaction product is not removed from the bottom of the groove and plasma may be extinguished. Things cannot be cut smoothly.

For this reason, the present applicant has developed a gas supply nozzle which is formed thinner than the cutting groove formed by the above-mentioned radical reaction and has an ejection hole at one end edge for ejecting a reactive gas at the bottom of the cutting groove. We have developed a radical reaction type precision cutting device that blows out a reaction gas toward the wire electrode and supplies it to the discharge part between the wire electrode and the groove bottom of the workpiece (Japanese Patent Application No. 3-320736). No., Japanese Patent Application No. 3-3
No. 22110).

[0007]

However, even in the gas supply nozzle described above, the supply of the reaction gas to the discharge portion between the wire electrode and the groove bottom of the object to be cut cannot be said to be sufficient. There was room for further improvement.

Accordingly, an object of the present invention is to provide a gas for a radical reaction type precision cutting apparatus which can sufficiently supply a reaction gas to a discharge portion between a wire electrode and a bottom of a cutting groove of an object to be cut. It is to provide a supply nozzle.

[0009]

In order to achieve the above object, a gas supply nozzle for a radical reaction type precision cutting apparatus according to claim 1 of the present invention applies a voltage to a wire electrode to cover the wire electrode. A discharge is generated between the cut objects to activate the reaction gas, a radical is generated by the reaction gas, and a radical reaction is caused between the radicals and constituent atoms or molecules of the object to be cut. It is used in a radical reaction type precision cutting device that cuts an object by relatively moving in a direction crossing the wire electrode, and has a thickness smaller than a cutting groove of the object formed by the radical reaction. In a state where the wire electrode is formed along the one edge portion and is opposed to the one edge portion, the reaction gas is ejected toward the groove bottom of the cutting groove from the ejection hole arranged at the one edge portion. Thing , The ejection hole, as well as divided into a plurality along the extending direction of the one end edge portion, and characterized by being arranged such that adjacent groups can shift the position in the thickness direction alternately.

Further, the gas supply nozzle for a radical reaction type precision cutting device according to claim 2 of the present invention,
It has an internal space communicating with the ejection hole and guiding the reaction gas to the ejection hole, and a plurality of minute joints for preventing swelling due to internal pressure between inner wall surfaces facing each other through the internal space. It is characterized by being provided.

[0011]

According to the gas supply nozzle for the radical reaction type precision cutting device according to the first aspect of the present invention, the ejection hole for ejecting the reaction gas, which is provided at one edge portion, is formed by extending the one edge portion. Since it is divided into a plurality of parts along the existing direction and the adjacent parts are arranged so as to alternately shift the position in the thickness direction, the discharge between the wire electrode and the bottom of the cutting groove of the workpiece is cut. The reaction gas is sufficiently supplied to the section.

According to the gas supply nozzle for a radical reaction type precision cutting device according to the second aspect of the present invention, since a plurality of minute joints are provided between inner wall surfaces facing each other via the internal space, swelling due to internal pressure is caused. It is possible to compensate for the lack of strength due to, for example, improving the strength.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A gas supply nozzle (hereinafter referred to as a gas supply nozzle) for a radical reaction type precision cutting device according to an embodiment of the present invention will be described below with reference to the drawings. The radical reaction type precision cutting device to which the gas supply nozzle is applied has a wire electrode 11 disposed in a chamber (not shown) filled with a chlorine-based or fluorine-based reaction gas, as shown in FIG. And the wire electrode 1 stretched linearly.
1 to generate a discharge between the wire electrode 11 and the object to be cut 12 arranged in the chamber to activate a reaction gas, and generate a radical by the reaction gas to generate a radical. Cutting the object 12 by causing a radical reaction of constituent atoms or molecules of the object 12 with the object 12 and moving the object 12 relatively upward with respect to the wire electrode 11 in a direction crossing the wire electrode 11. It is.

The gas supply nozzle 15 of this embodiment used in such a radical reaction type precision cutting device is
As shown in FIG. 2 and FIG. 3, the thickness is formed in a substantially rectangular thin plate formed to be thinner than the cutting groove 12a of the object 12 formed by the radical reaction.
As shown in FIG. 3, in a state where the wire electrode 11 is opposed to one flat edge 16 in the thickness direction thereof in parallel, the reaction gas is supplied from the ejection holes 17 and 18 provided in the edge 16. Is indicated by a white arrow in FIG. 1 and FIG.
And, it is ejected in the direction of the groove bottom 12b of the cutting groove 12a of the workpiece 12.

As shown in FIG. 3, the gas supply nozzle 15 has an internal space 19 formed therein along the outer shape thereof. A gas inlet 20 is formed to connect the internal space 19 to the outside and to be connected to a cylinder (not shown) for supplying a reaction gas. In addition, a plurality of ejection holes 17 and 18 for ejecting the above-described reaction gas are formed in the edge 16 along the longitudinal direction. These jet holes 1
7 and 18 are all perpendicular to the edge 16 and penetrate the internal space 19 in the direction of the edge 16.

The gas supply nozzle 15 is composed of two metal thin plates 21 and 22 and a cut-off plate 23. One side of each of the metal thin plates 21 and 22 has an internal portion at the center. Spout holes 17, 18 are formed in one half in the thickness direction of the space 19 and in the edge 16 continuously to the half of the internal space 19, and these metal thin plates 21, It is manufactured by joining 22 with a separating plate 23 interposed therebetween. In addition, the metal thin plate 21,
Various shapes to be processed into 22 are manufactured by a method such as chemical etching, and the partition plate 23 is formed of a thin plate without etching.

In this embodiment, the partition plate 2
When the metal thin plates 21 and 22 are fixed in a state where the halves of the internal space portion 19 are aligned with the center of the inner space portion 3, the ejection holes 17 and the ejection holes 18 The positions in the extending direction are shifted from each other. In addition, the spout 1
7 is such that the width of the metal thin plate 21 in the longitudinal direction and the thickness direction are all equal, and the metal thin plate 21 is arranged at the same position in the thickness direction of the metal thin plate 21 so as to be evenly displaced in the longitudinal direction. I have. In addition, the ejection hole 18 has the same width as the ejection hole 17 in the longitudinal direction and the thickness direction of the metal thin plate 22, and the ejection hole 18 extends in the longitudinal direction at the same position in the thickness direction of the metal thin plate 22. 17 are arranged at the same pitch as that of FIG.

Thus, the ejection holes 17 and 18 are divided into a plurality of portions along the extending direction of the edge portion 16, and adjacent ones are alternately shifted in the thickness direction of the gas supply nozzle 15. (So-called zigzag). Here, the distance L between the outermost sides of the ejection holes 17 and the ejection holes 18 in the thickness direction of the gas supply nozzle 15 is set.
Is set to be larger than the diameter of the wire electrode 11 by a predetermined amount. In the present embodiment, the distance X between the ejection holes 17 and 18 adjacent in the length direction of the gas supply nozzle 15 is larger than the width W of the ejection holes 17 and 18 in the same direction and approximately 3 times.
The relationship can be variously changed. For example, as shown in FIG. 5, the distance X and the width W are made substantially equal, and as shown in FIG. Of course, it is also possible to set it to 0.

Here, the internal space 19 is formed by providing the gas supply nozzle 15 with an inner wall substantially along the outer shape thereof. Rectifiers 31, 32, and 33 are provided to divide the area into three sections. The rectifying portion 31 is formed at the center of the gas supply nozzle 15 in the longitudinal direction along the lateral direction from the inner wall portion 34 that is parallel to the edge portion 16 on the opposite side to the edge portion 16 in the short direction. It is formed to extend in 18 directions.
The rectifying sections 32 are arranged symmetrically on both sides of the rectifying section 31, and each of the rectifying sections 32 extends between the gas introducing port 20 and the rectifying section 31 with the gas inlet 20 side being parallel to the inner wall portion 34. At the same time, the rectifying portion 31 extends in the direction of the ejection holes 17 and 18 in parallel with the rectifying portion 31. Rectifier 33
Are symmetrically disposed on the respective ejection holes 17, 18 side of each rectification section 32, and each is provided with a gas introduction port 20.
The side extends in parallel with the inner wall portion 34 between the gas inlet 20 and the rectifying portion 32, and the rectifying portion 32 side has the ejection hole 1.
It extends in the 7 and 18 directions.

The rectifying sections 31, 32, 33 allow the internal space 19 to be symmetrically branched from the gas inlet 20 at each end to jet holes 17, 18 at the end closer to the gas inlet 20. 36, a bilaterally symmetric branch channel 37 leading from each gas inlet 20 side to the ejection holes 17 and 18 located on the rectifying unit 31 side from the branch channel 36, and a rectifying unit 31 side from each gas inlet 20 side to each branch channel 37. A bilaterally symmetric branch channel 38 leading to the ejection holes 17 and 18 is formed.
, The cross-sectional area of the branch channel 37 is larger than that of the branch channel 36, and the cross-sectional area of the branch channel 38 is larger than that of the branch channel 37. As a result, the longer the guiding distance, the larger the cross-sectional area of the branch channel and the larger
The flow rate of the reaction gas ejected from 7, 18 is kept constant.

The gas supply nozzle of the present embodiment passes through the internal space 19 between inner wall surfaces (only one inner wall surface 39 is shown in FIG. 3) opposed in the thickness direction of the gas supply nozzle 15. It has a plurality of extending minute joints 40. In addition, although various shapes are conceivable for the minute joint portion 40, in order to reduce the resistance to the flow of the reaction gas,
Generally, it is a very small diameter circle. In the present embodiment, as shown in FIG. 7, the minute joining portion 40 has a shape protruding into the internal space 19 of the thin metal plates 21 and 22, and the front end portion 40 a is joined to the partition plate 23. .

The gas supply nozzle 1 of the present embodiment described above
According to 5, the ejection holes 17, 18 provided in the one edge portion 16 and ejecting the reaction gas are divided into a plurality along the extending direction of the one edge portion 17, 18, and are divided into adjacent ones. Those that match each other are arranged so as to alternately shift the position in the thickness direction of the gas supply nozzle 15. As a result, the reaction gas can be sufficiently supplied to the discharge portion between the wire electrode 11 and the groove bottom 12b of the cutting groove 12a of the workpiece 12 as compared with the conventional non-split ejection hole. Therefore, the workpiece 12 can be cut more smoothly, and the processing accuracy and the like can be further improved.

Further, since the flow rate of the reaction gas ejected from each of the ejection holes 17 and 18 is kept constant by the rectifying portions 31, 32 and 33, a uniform cutting state can be maintained over the entire cutting portion. , Processing accuracy and the like can be further improved.

Furthermore, since there are a plurality of minute joints 40 extending through the internal space 19,
It is possible to prevent the nozzle from swelling due to the gas pressure inside, to compensate for insufficient strength and to improve strength.

[0025]

As described above, according to the first aspect of the present invention,
According to the gas supply nozzle for a radical reaction type precision cutting device described, the ejection hole provided at one edge and ejecting a reaction gas is divided into a plurality of pieces along the extending direction of the one edge. In addition, since adjacent ones are arranged so as to be alternately displaced in the thickness direction, the reactant gas is sufficiently supplied to the discharge portion between the wire electrode and the bottom of the cut groove of the object to be cut. be able to. Therefore, the object to be cut can be cut more smoothly, and the processing accuracy and the like can be further improved.

According to the gas supply nozzle for a radical reaction type precision cutting device according to the second aspect of the present invention, since a plurality of minute joints are provided between inner wall surfaces opposed to each other via the inner space, Insufficient strength due to the formation of the slab can be compensated for and the strength can be improved.

[Brief description of the drawings]

FIG. 1 is a front view showing a usage state of a gas supply nozzle for a radical reaction type precision cutting device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA shown in FIG.

FIG. 3 is a cross-sectional view of a gas supply nozzle for a radical reaction type precision cutting device according to an embodiment of the present invention.

FIG. 4 is a view of a gas supply nozzle for a radical reaction type precision cutting device according to an embodiment of the present invention, as viewed from an ejection hole side.

FIG. 5 is a view of a gas supply nozzle for a radical reaction type precision cutting device according to another embodiment of the present invention, as viewed from an ejection hole side.

FIG. 6 is a view of a gas supply nozzle for a radical reaction type precision cutting device according to still another embodiment of the present invention as viewed from an ejection hole side.

FIG. 7 shows a metal thin plate of a gas supply nozzle for a radical reaction type precision cutting device according to an embodiment of the present invention, and (a).
Is a partially enlarged view, and (b) is a sectional view taken along line BB shown in (a).

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 11 Wire electrode 12 Object to be cut 12a Cutting groove 12b Groove bottom 15 Gas supply nozzle (gas supply nozzle for radical reaction type precision cutting device) 16 Edge 17, 18 Jet hole 39 Inner wall surface 40 Micro joint

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kazuhiro Tsuno 27, Shinisogo-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Niigata Iron Works, Ltd. 27, Niisogocho, Niigata Iron Works Co., Ltd. Yokohama Development Center Material Structure Research Department Examiner Mitsuru Suzuki (56) References JP-A-6-334038 (JP, A) JP-A-6-310474 (JP, A) (58) ) Surveyed field (Int.Cl. ⁶ , DB name) H01L 21/304 B23H 7/36 B28D 5/04 H01L 21/78

Claims (2)

(57) [Claims] 1. A voltage is applied to a wire electrode to generate a discharge between the wire electrode and an object to be activated, thereby activating a reaction gas. It is used in a radical reaction precision cutting device that cuts an object by radically reacting constituent atoms or molecules and moving the object relative to the wire electrode in a direction crossing the wire electrode. Are formed thinner than the cutting groove of the object to be cut formed by the radical reaction, and are arranged on the one edge portion in a state where the wire electrode is arranged along the one edge portion and opposed to the one edge portion. A gas supply nozzle for ejecting the reaction gas from the ejection hole toward the groove bottom of the cutting groove, wherein the ejection hole is divided into a plurality of pieces along the extending direction of the one edge portion, and is divided into adjacent ones. Matching things alternately Gas supply nozzle for radical Scheme precision cutting apparatus characterized by being arranged so as to shift the directionally position. 2. An internal space portion communicating with the jetting hole and guiding a reaction gas to the jetting hole, and for preventing swelling due to internal pressure between inner wall surfaces facing each other through the internal space portion. 2. The method according to claim 1, wherein a plurality of minute joints are provided.
A gas supply nozzle for a radical reaction type precision cutting device according to the above.