JP2975049B2 - Electric revolver controller for microscope - Google Patents

Description

The present invention relates to a motorized revolver control device for a microscope.

[Conventional technology]

Conventionally, as a motorized revolver of a microscope, a push button switch for clockwise rotation and counterclockwise rotation is provided, and each time one of them is pressed, the revolver is rotated one step at a time to observe the revolver hole with the objective lens of the desired magnification By providing a push button switch corresponding to each revolver hole of the revolver and a push button switch corresponding to the revolver hole equipped with an objective lens having a desired magnification, the revolver hole is positioned by positioning the revolver hole in the optical path. There has been proposed one that is positioned in the observation optical path.

[Problems to be solved by the invention]

However, in the former driving method of the electric revolver, when switching the revolver from the objective lens used for observation to the objective lens to be used next, the operator determines the rotation direction and the number of operations of the revolver each time. However, there is a problem that the operability is poor.

In the latter driving method of the electric revolver, a switch corresponding to a revolver hole equipped with an objective lens having a desired magnification must be selected and operated from among a plurality of push button switches. As in the inspection in the manufacturing process of a semiconductor device, a low-magnification objective lens for performing screening and a high-magnification objective for performing detailed observation among a plurality, usually 5 to 6, objective lenses set in a revolver. When two limited objective lenses are alternately used with the objective lens, the push button switch corresponding to the predetermined objective lens must be selected and operated one by one, so that the operability deteriorates. There is a problem. That is, in the inspection in the semiconductor device manufacturing process,
Generally, after observing a wide area roughly with an objective lens having a relatively low magnification (5 to 20 ×) and locating a desired portion, switching to an objective lens having a relatively high magnification (40 to 200 ×) to perform detailed inspection. Therefore, in this type of routine work, only two objective lenses, a low-magnification objective lens for screening and a high-magnification objective lens for detail observation, are used among a plurality of objective lenses set in the revolver. It is often used alternately and frequently. For this reason, after detailed observation with a high-magnification objective lens, when screening the next point or when performing detailed observation after screening, the operator must select and operate the corresponding push button switch each time. The operation becomes very troublesome.

In the case of using the former electric revolver drive type microscope for such semiconductor inspection, the operator judges the rotation direction and the number of times of operation of the revolver for each screening and detailed observation, and operates the microscope. The operation becomes more troublesome.

The present invention has been made in view of such a conventional problem, and provides a motorized revolver control device for a microscope appropriately configured so as to improve operability particularly when the same objective lens is repeatedly selected. The purpose is to do.

[Means and actions for solving the problem]

In order to achieve the above object, an invention according to claim 1 is an apparatus for controlling the driving of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; First switch means for causing the means to store the position information of the desired revolver hole; second switch means for reading the position information stored in the storage means; and each of the revolver holes of the electric revolver. And a selection switch for positioning the second switch means in the observation optical path, when the second switch means is operated while the rotation of the electric revolver is stopped, based on the position information read by the operation. When the electric revolver is rotated to position the corresponding revolver hole in the observation optical path, and when the second switch is operated during the rotation of the electric revolver, Serial is characterized in that a corresponding revolver hole configured so as to return to the observation optical path on the basis of the position information stored in the storage means.

The invention according to claim 2 is an apparatus for controlling the drive of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; First switch means for storing the position information stored in the storage means, second switch means for reading the position information stored in the storage means, and positioning each revolver hole of the electric revolver in the observation optical path. When the second switch means is operated while the rotation of the electric revolver is stopped, the electric revolver is rotated based on the position information read by the operation. A corresponding revolver hole is positioned in the observation optical path, and when the second switch means is operated during the rotation of the electric revolver, the rotation of the electric revolver is stopped. It is characterized in that it has configured to locked.

The invention according to claim 3 is an apparatus for controlling the driving of the electric revolver of the microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; And a recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path at the time of the readout in the storage means. A selection switch for positioning each revolver hole of the electric revolver in the observation optical path, and when the recall switch is operated while the rotation of the electric revolver is stopped, a position read by the operation. The electric revolver is rotated based on the information to position a corresponding revolver hole in the observation optical path, and the rotation of the electric revolver is performed. When the recall switch is operated during operation, a corresponding revolver hole is returned to the observation optical path based on the position information stored in the storage means.

The invention according to claim 4 is an apparatus for controlling the drive of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; And a recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path at the time of the readout in the storage means. A selection switch for positioning each revolver hole of the electric revolver in the observation optical path, and when the recall switch is operated while the rotation of the electric revolver is stopped, a position read by the operation. The electric revolver is rotated based on the information to position a corresponding revolver hole in the observation optical path, and the rotation of the electric revolver is performed. When the recall switch is operated during operation, the rotation of the electric revolver is stopped.

According to a fifth aspect of the present invention, in the electric revolver control device for a microscope according to any one of the first to fourth aspects, the selection switch is provided corresponding to each of three or more revolver holes of the electric revolver. It is characterized by being carried out.

The invention according to claim 6 is an apparatus for controlling the drive of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; And a recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path at the time of the readout in the storage means. A selection switch corresponding to each of three or more revolver holes of the electric revolver, and for positioning each revolver hole directly on the observation optical path, based on position information read by operating the recall switch. The electric revolver is rotated to position a corresponding revolver hole in the observation optical path. Things.

According to a seventh aspect of the present invention, in the electric revolver control device for a microscope according to any one of the first to sixth aspects, a position display means corresponding to each revolver hole of the electric revolver is provided, and the position is set in the observation optical path. The position display means corresponding to the set revolver hole is lit in one color, and the position display means corresponding to the revolver hole stored in the storage means is lit in a color different from the lighting color of the position display means. It is characterized by having it constituted so that it might be.

〔Example〕

FIG. 1 shows a first embodiment of the present invention. This embodiment has left-hand and right-hand push-button switches, and controls the rotation of the revolver 1 shown in FIG. 2 and observes the revolver holes A to E each time one of them is pressed. The present invention is applied to a type that is selectively positioned on the optical path O, and includes an operation unit 2, a control circuit 3, a storage circuit 4, a motor drive circuit 5, and a revolver rotation motor 6.

As shown in FIG. 3, the operation unit 2 includes left and right push button switches 7 and 8, a memory switch 9, a recall switch 10, and position display LEDs 11A to 11E corresponding to the revolver holes A to E. Provide. Each time the push button switches 7 and 8 are pressed, the revolver 1 is rotated one step at a time in the designated direction via the control circuit 3, the motor drive circuit 5 and the revolver rotation motor 6, and the LEDs 11A to 11E turns on the one corresponding to the revolver hole located in the observation optical path O under the control of the control circuit 3. When the memory switch 9 is depressed, the position information of the revolver hole located in the observation optical path O at that time is stored in the storage circuit 4 via the control circuit 3, and the recall switch 10 is depressed. The position information stored in the storage circuit 4 is read out, and based on the position information, the revolver 1 is rotated through the control circuit 3, the motor drive circuit 5, and the revolver rotation motor 6, and the corresponding revolver hole is set in the observation optical path. To be located at O.

Hereinafter, the operation of this embodiment will be described according to a specific operation order. In the following description, the revolver holes A to E
In addition, it is assumed that objective lenses having magnifications of A; 5 ×, B; 10 ×, C; 20 ×, D; 50 ×, E; 100 × are respectively mounted.

Now, when the revolver push button switch 7 is pressed in a state where the revolver hole A (5 ×) is located in the observation optical path O, the revolver 1 is rotated one step to the left and revolved to the observation optical path O. Hole B (10 ×) is positioned. here,
When it is determined that the objective lens (10 ×) of the revolver hole B is suitable for screening, and the memory switch 9 is pressed in that state, the position information of the revolver hole B is stored in the storage circuit 4.

Thereafter, when the left-turn push button switch 7 is pressed in order to perform a detailed inspection, the revolver 1 rotates one step to the left to position the revolver hole C (20 ×) in the observation optical path O, and further turns to the left. When the push button switch 7 is pressed, the revolver hole D (50 ×) is positioned in the observation optical path O. The objective lens (50 ×) mounted in the revolver hole D is determined to be most suitable for the detailed inspection, and when the recall switch 10 is pressed after the completion of the detailed inspection, the revolver hole B stored in the storage circuit 4 is stored. Is read out, and based on the read out position information and the position information of the revolver hole D located in the present observation optical path O, via the control circuit 3, the motor drive circuit 5, and the revolver rotation motor 6, The revolver 1 rotates rightward, and the revolver hole B is positioned on the observation optical path O. Therefore, a screening operation for immediately searching for the next sample position becomes possible.

Thereafter, similarly, by pressing the recall switch 10 after completion of the detailed inspection, the position information of the revolver hole B stored in the storage circuit 4 is read out, whereby the revolver hole B is positioned on the observation optical path O, The next screening work becomes possible.

In the above operation, the LEDs 11A to 11E are connected to the observation optical path O
The one corresponding to the revolver hole located at is lit.

As is clear from the above description, after performing a detailed inspection with the objective lens (50 ×) attached to the revolver hole D,
Conventionally, when screening is performed with an objective lens (10 ×) mounted in the revolver hole B, the operator determines the rotation direction and the number of times of operation of the revolver 1, and in this case, determines that the revolver 1 is in the right direction and turns right. Push button switch 8
Although it is necessary to push the revolving switch once, according to this embodiment, the revolver hole B can be positioned on the observation optical path O by pushing the recall switch once only, so that the operability can be improved.

FIG. 4 shows a configuration of a main part of a second embodiment of the present invention. This embodiment is different from the first embodiment in that the memory switch 9 is omitted, the recall switch 10 is provided with the function of the memory switch 9, and the position stored in the storage circuit 4 by operating the recall switch 10. Information is read, the rotation of the revolver 1 is controlled based on the position information, and the position information of the revolver hole located in the observation optical path O is stored in the storage circuit 4 at the time of the operation. The configuration is the same as in the first embodiment.

Hereinafter, similarly to the first embodiment, the operation of this embodiment is described as follows: A; 5 ×, B; in the revolver holes A to E of the revolver 1 shown in FIG.
Description will be made assuming that objective lenses having magnifications of 10 ×, C; 20 ×, D; 50 ×, E; and 100 × are respectively mounted.

Now, when the revolver push button switch 7 is pressed in a state where the revolver hole A (5 ×) is located in the observation optical path O, the revolver 1 is rotated one step to the left and revolved to the observation optical path O. Hole B (10 ×) is positioned. here,
When it is determined that the objective lens (10 ×) in the revolver hole B is suitable for screening, and the recall switch 10 is pressed in this state, the position information of the revolver hole B is stored in the storage circuit 4.

Thereafter, when the left-turning push button switch 7 is pressed to perform a detailed inspection, the revolver 1 turns one step to the left and the revolver hole C (20 ×) is positioned in the observation optical path O, and further turned to the left. When the push button switch 7 is pressed, the revolver hole D (50 ×) is positioned in the observation optical path O. It is determined that the objective lens (50 ×) mounted in the revolver hole D is optimal for the detailed inspection, and when the recall switch 10 is pressed after the inspection of the detailed inspection is completed, the revolver hole stored in the storage circuit 4 is stored. B is read out, and at the time of the operation, the position information of the revolver hole D located in the observation optical path O is newly stored in the storage circuit 4. The revolver 1 stores the read position information and the current observation optical path O Based on the position information of the located revolver hole D, the revolver hole B is rotated rightward via the control circuit 3, the motor drive circuit 5, and the revolver rotation motor 6, and the revolver hole B is positioned on the observation optical path O. . Therefore, a screening operation for immediately searching for the next sample position becomes possible.

When the recall switch 10 is pressed again after the screening, the position information of the revolver hole D stored in the storage circuit 4 is read out, and the position information of the revolver hole B located on the observation optical path O at the time of the operation is newly updated. The revolver 1 controls the control circuit 3, the motor drive circuit 5, and the revolver rotation motor 6 based on the read position information and the position information of the revolver hole B located in the current observation optical path O. Then, the revolver hole D is positioned in the observation optical path O. Therefore, a detailed inspection can be immediately performed.

Thereafter, every time the recall switch 10 is pressed, the revolver hole B with the objective lens (10 ×) suitable for screening
And a revolver hole D equipped with an objective lens (50 ×) suitable for detail observation are alternately switched.

Also in the above operation, the LEDs 11A to 11E corresponding to the revolver holes located in the observation optical path O are turned on.

Thus, according to this embodiment, by pressing the recall switch 10 in a state where the respective revolver holes on which the objective lenses suitable for screening and detailed observation are mounted are located in the observation optical path O, the revolver is operated. Since the holes can be alternately positioned in the observation optical path O, the operability can be further improved.

FIG. 5 shows a third embodiment of the present invention. This embodiment has, for example, push button switches corresponding to each of the revolver holes A to E of the revolver 1 shown in FIG. 2, and presses the push button switches corresponding to the revolver holes provided with the objective lens having a desired magnification. Thus, the present invention is applied to a type in which the rotation of the revolver 1 is controlled to selectively position the corresponding revolver holes A to E in the observation optical path O. As in the first embodiment, the operation unit 2, It comprises a control circuit 3, a storage circuit 4, a motor drive circuit 5, and a revolver rotation motor 6.

As shown in FIG. 6, revolver holes A to
Push button switches 15A to 15E corresponding to E, recall switch 10, LED1 for position display corresponding to revolver holes A to E
1A to 11E are provided. When the push button switches 15A to 15E are pressed, the control circuit 3, the motor drive circuit 5, and the revolver rotation are operated based on the position information of the corresponding revolver hole and the position information of the revolver hole currently located in the observation optical path O. By rotating the revolver 1 in a predetermined direction via the moving motor 6, the revolver hole corresponding to the push button switch operated is positioned in the observation optical path O, and at the time of the operation, the revolver hole is positioned in the observation optical path O. The position information of the revolver hole is stored in the storage circuit 4. The recall switch 10 reads the position information of the revolver hole stored in the storage circuit 4 by pressing the switch, and reads the read position information and the position information of the revolver hole currently located in the observation optical path O. Based on the control circuit 3,
The revolver 1 is rotated in a predetermined direction via the motor drive circuit 5 and the revolver rotation motor 6 to make a revolver hole corresponding to the position information read from the storage circuit 4 into the observation optical path O.
The position information of the revolver hole located in the observation optical path O at the time of the operation is stored in the storage circuit 4. The LEDs 11A to 11E are also turned on by the control of the control circuit 3 corresponding to the revolver holes located in the observation optical path O.

Hereinafter, similarly to the first embodiment, the operation of this embodiment is described as follows: A; 5 ×, B; in the revolver holes A to E of the revolver 1 shown in FIG.
Description will be made assuming that objective lenses having magnifications of 10 ×, C; 20 ×, D; 50 ×, E; and 100 × are respectively mounted.

Now, when the push button switch 15B is pressed in a state where the revolver hole A (5 ×) is located in the observation optical path O, the revolver 1 rotates one step to the left and the revolver hole B ( 10 ×) is positioned, and the position information of the revolver hole A is stored in the storage circuit 4. It is determined that the objective lens (10 ×) in the revolver hole B is suitable for the screening, and after the screening by this is completed, when the push button switch 15C is pressed, the revolver 1
Is rotated one step to the left to position the revolver hole C (20 ×) in the observation optical path O, and the position information of the revolver hole B is newly stored in the storage circuit 4. Further, when the push button switch 15D is pressed, the revolver 1 rotates one step to the left and the revolver hole D (50
X) is positioned, and the position information of the revolver hole C is newly stored in the storage circuit 4.

The objective lens (50x) attached to the revolver hole D is judged to be the most suitable for the detailed inspection, the detailed inspection is completed, and the push button switch is used for the next screening.
When the pusher 15B is pressed, the revolver 1 rotates two steps to the right to position the revolver hole B (10 ×) in the observation optical path O and the revolver hole D positioned in the observation optical path O at the time of the operation. Is newly stored in the storage circuit 4.

Then recall switch 10 for detailed inspection
Is pressed, the position information of the revolver hole D stored in the storage circuit 4 is read, and the position information of the revolver hole B located in the observation optical path O at the time of the operation is newly stored in the storage circuit 4. The revolver 1 is rotated leftward two steps through the control circuit 3, the motor drive circuit 5, and the revolver rotation motor 6 based on the read position information and the position information of the revolver hole B located in the current observation optical path O. Then, the revolver hole D moves to the observation optical path O.
Therefore, a detailed inspection can be immediately performed.

Thereafter, each time the recall switch 10 is pressed, as in the second embodiment, the revolver hole B equipped with the objective lens (10 ×) suitable for screening and the objective lens (50 ×) suitable for detailed observation are provided. The mounted revolver hole D is alternately switched.

Also in the above operation, the LEDs 11A to 11E corresponding to the revolver holes located in the observation optical path O are turned on.

As described above, according to this embodiment, the operation of the push button switches 15A to 15E and the recall switch 10 causes the storage circuit 4 to store the position information of the revolver hole located in the observation optical path O at the time of the operation. Therefore, after selecting the respective revolver holes on which the objective lenses suitable for screening and detailed observation are mounted, the revolver holes are alternately switched to the observation optical path O only by operating the recall switch 10 as in the second embodiment. Can be located.
Therefore, it is not necessary to select each of the desired push button switches 15A to 15E, so that operability can be improved.

It should be noted that the present invention is not limited to the above-described embodiment, and various modifications or changes can be made. For example, in the above-described embodiment, the position display LED corresponding to the revolver hole is provided, and the LED of the revolver hole located in the observation optical path O is turned on. However, such a position display LED can be omitted. . Further, in the case where the position indicating LED is provided, the LED corresponding to each revolver hole is constituted by, for example, a red / green two-color LED, and the green LED indicates the revolver hole located in the observation optical path O. The revolver hole stored in the storage circuit 4 may be displayed by a red LED. In this way, the position display LE
Since the revolver hole located in the observation optical path O and the revolver hole stored in the storage circuit 4 can be recognized by D, the operability can be further improved.

In the second embodiment, the recall switch 10 is also provided with the function of a memory switch. However, as in the third embodiment, the function of the memory switch is also provided to the left-turn and right-turn push button switches 7 and 8. It can also be configured to have the same effect. In addition, the third
In the embodiment, the push button switches 15A to 15E corresponding to the revolver holes A to E and the recall switch 10 also have a function of a memory switch. However, a dedicated memory switch is provided as in the first embodiment. May be configured to perform the operation of (1).

Furthermore, in the above-described embodiment, the operation of the recall switch 10 may cause the revolver 1 to rotate two or more steps, and the objective lens may come into contact with the sample during the rotation. In order to avoid such danger, when the recall switch 10 is operated during the rotation of the revolver 1, the recall switch 10 is provided with an emergency stop switch function so that the rotation is immediately stopped. You can also. In the third embodiment, since the position information of the revolver hole at the time when the push button switches 15A to 15E and the recall switch 10 are operated is stored in the storage circuit 4, the rotating recall switch 10 After an emergency stop due to an operation, the revolver 1 may be rotated in the reverse direction to return the revolver hole stored in the storage circuit 4 to the observation optical path O. If you do this,
After the emergency stop, the last positioned revolver hole is located in the observation optical path O, so that subsequent operations can be easily continued.

〔The invention's effect〕

As described above, according to the first and second aspects of the present invention, one storage unit is used, and storage and reading of the position information of the revolver hole with respect to this storage unit are controlled by the first and second switch units. With a simple configuration, and according to each of the inventions according to claims 3, 4, and 6, a single storage unit is used, and storage and reading of the revolver hole position information with respect to this storage unit are controlled by one recall switch. With an inexpensive configuration, the operability when the same objective lens is repeatedly selected can be improved. For example, in the inspection in the semiconductor device manufacturing process, the fatigue of the operator can be reduced, and the work time in the inspection process can be reduced. Can be shortened.

Furthermore, according to each of the first and second aspects of the present invention, by operating the second switch means during rotation of the electric revolver,
According to each of the inventions according to Claims 3 and 4, by operating the recall switch during rotation of the electric revolver, it is possible to avoid the danger of the objective lens coming into contact with the sample.
According to each of the inventions according to the fifth and sixth aspects, a desired revolver hole can be easily and quickly positioned on the observation optical path by operating the corresponding selection switch from three or more revolver holes. According to the invention according to the seventh aspect, Since the revolver hole located in the observation optical path can be easily recognized by the position display means, the operability can be further improved.

[Brief description of the drawings]

 FIG. 1 is a block diagram showing a first embodiment of the present invention, FIG. 2 is a diagram showing a configuration of an example of a revolver, FIG. 3 is a diagram showing a configuration of an operation unit shown in FIG. 1, and FIG. FIG. 5 is a diagram showing a configuration of a main part of a second embodiment of the present invention. FIG. 5 is a block diagram showing a third embodiment of the present invention. FIG. 6 is a diagram showing a configuration of an operation unit shown in FIG. . DESCRIPTION OF SYMBOLS 1 ... Revolver, 2 ... Operation part 3 ... Control circuit 4, ... Storage circuit 5 ... Motor drive circuit, 6 ... Revolver rotation motor 7, 8 ... Push button switch 9 ... Memory switch, 10 … Recall switches 11A to 11E… Position display LEDs 15A to 15E… Push button switches AE… Revolver holes, O… Observation light path

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G02B 7 / 16,21 / 00

Claims (7)

(57) [Claims] 1. An apparatus for controlling driving of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole to be positioned in an observation optical path; and position information of the desired revolver hole in the storage means. Switch means for reading the position information stored in the storage means, and selection for positioning each revolver hole of the electric revolver in the observation optical path. When the second switch is operated while the electric revolver is stopped rotating, the electric revolver is rotated based on the position information read by the operation, and the corresponding revolver is turned on. When the hole is positioned in the observation optical path and the second switch is operated during rotation of the electric revolver, the position information stored in the storage is stored. Microscope electric revolver control apparatus characterized by a corresponding revolver hole configured so as to return to the observation optical path based on. 2. An apparatus for controlling driving of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole positioned in an observation optical path; and position information of the desired revolver hole in the storage means. Switch means for reading the position information stored in the storage means, and selection for positioning each revolver hole of the electric revolver in the observation optical path. When the second switch is operated while the electric revolver is stopped rotating, the electric revolver is rotated based on the position information read by the operation, and the corresponding revolver is turned on. A hole is positioned in the observation optical path, and when the second switch is operated during the rotation of the electric revolver, the rotation of the electric revolver is stopped. Microscope electric revolver control apparatus characterized by the Uni configuration. 3. An apparatus for controlling the driving of an electric revolver of a microscope, comprising: storage means for storing position information of a required revolver hole located in an observation optical path; and position information of the desired revolver hole in the storage means. A recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path in the storage means at the time of the reading; A selection switch for positioning each revolver hole of the revolver in the observation optical path, and when the recall switch is operated while the rotation of the electric revolver is stopped, based on the position information read by the operation. The electric revolver is rotated to position the corresponding revolver hole in the observation optical path, and the electric revolver is rotated during the rotation of the electric revolver. When the recall switch is operated,
An electric revolver control device for a microscope, wherein a corresponding revolver hole is returned to the observation optical path based on the position information stored in the storage means. 4. An apparatus for controlling driving of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole positioned in an observation optical path; and position information of the desired revolver hole in the storage means. A recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path in the storage means at the time of the reading; A selection switch for positioning each revolver hole of the revolver in the observation optical path, and when the recall switch is operated while the rotation of the electric revolver is stopped, based on the position information read by the operation. The electric revolver is rotated to position the corresponding revolver hole in the observation optical path, and the electric revolver is rotated during the rotation of the electric revolver. When the recall switch is operated,
An electric revolver control device for a microscope, wherein the electric revolver is configured to stop rotating. 5. The electric revolver control device for a microscope according to claim 1, wherein the selection switches are provided corresponding to three or more revolver holes of the electric revolver, respectively. A motorized revolver control device for a microscope. 6. An apparatus for controlling driving of an electric revolver of a microscope, comprising: storage means for storing position information of a desired revolver hole positioned in an observation optical path; and position information of the desired revolver hole in the storage means. A recall switch for reading the position information stored in the storage means and for storing the position information of the revolver hole located in the observation optical path in the storage means at the time of the reading; A selection switch corresponding to each of three or more revolver holes of the revolver and directly positioning each revolver hole in the observation optical path, wherein the electric revolver is operated based on position information read out by operating the recall switch. The microscope is characterized in that it is configured to rotate so that the corresponding revolver hole is located in the observation optical path. Electric revolver control device. 7. The electric revolver controller for a microscope according to claim 1, further comprising: a position display means corresponding to each revolver hole of the electric revolver, wherein the revolver is positioned in the observation optical path. The position display means corresponding to the hole is lit in one color, and the position display means corresponding to the revolver hole stored in the storage means is lit in a color different from the lighting color of the position display means. A motorized revolver control device for a microscope, comprising: