JP2962296B2 - Magnetic head slider and magnetic disk drive - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flying magnetic head slider, and more particularly to a magnetic head slider capable of improving the flying uniformity of a magnetic head slider, reducing the flying height, and simplifying a production process.

[0002]

2. Description of the Related Art FIG. 9 is a schematic plan view of a conventional general magnetic disk drive. Referring to FIG. 9, a spindle 12 on which a medium 11 is mounted and rotated at a high speed, and information recording / reproduction on / from the medium 11 are shown. Head slider 81 attached to a suspension 83 that performs
Actuator 14 for seeking operation 1 on medium 11
And a voice coil motor 15 for driving the actuator 14 to rotate, and an air filter 16 for purifying the circulating air inside the magnetic disk device.

[0003] The operation of the magnetic head slider 81 in the magnetic disk apparatus thus constructed is described with reference to FIGS. 10 and 11.
This will be described with reference to FIG. FIG. 10 is an enlarged cross-sectional view taken along the line EE of FIG. 9, and FIG.
FIG. 2 shows a schematic view of a mechanism that floats with one rotation.

The magnetic head slider 81 employs a contact start / stop method, and is shown in FIG.
As shown in the figure, the medium 11 and the magnetic head slider 81 are in contact from the time when the medium 11 is stopped until immediately after the rotation of the medium is started. Thereafter, when the rotation speed of the medium 11 increases, FIG.
The air 22 when the medium 11 rotates as shown in FIG.
The air 22 enters between the medium facing surface 21 of the magnetic head slider 81 and the medium 11 due to the viscoelasticity of the magnetic head slider 81, and the magnetic head slider 81 starts flying. When the medium 11 has reached a certain number of revolutions, the magnetic head slider 81 is in a completely floating state as shown in FIG.

Therefore, in order to improve the durability of the magnetic disk drive, a technique for causing the magnetic head slider 81 to fly quickly with the start of rotation of the medium 11 has become very important.

In order to increase the efficiency of the magnetic transducer 84, the distance between the magnetic transducer 84 and the medium 11 must be as small as possible, that is, the flying height of the magnetic head slider 81 from the medium 11 must be reduced. However, if the magnetic head slider 81 and the medium 11 come into contact with each other, the durability of the magnetic disk device is impaired. Therefore, it is necessary to control the flying height of the magnetic head slider 81 with high accuracy.

Next, a specific example of the conventional magnetic head slider 81 will be described with reference to FIGS. 12, 13, 14, and 15. FIG.

FIG. 12A is a plan view showing a first embodiment of the conventional magnetic head slider 101, and FIG. 12B is a sectional view taken along line FF of FIG. 12A.

Referring to FIGS. 12 (a) and 12 (b), as described above, the taper flat type in which the chamfer 31 is provided on the air inflow end 105 side so that the magnetic head slider 101 flies quickly as the medium 11 rotates. The magnetic head slider 101 is referred to as a magnetic head slider 101. However, in this magnetic head slider 101, since the chamfer angle 32 and the chamfer 31 are machined, the processing variation of the chamfer angle 32 and the chamfer length 33 is large.
01 has a drawback that the flying height cannot be reduced.

FIG. 13 (a) is a plan view showing a second embodiment of the conventional magnetic head slider 201, and FIG. 13 (b) is a sectional view taken along the line GG of FIG. 13 (a).

Referring to FIGS. 13 (a) and 13 (b), in order to make the magnetic head slider 201 fly quickly with the rotation of the medium 11 as described above, the magnetic head slider 201 is moved from the pressure side 202 to the air inflow end 205 side. 0.2μ
Step portion 34 patterned by photolithography with a thickness of about m to 1.0 μm and cut out by milling
And a processing surface 203 which is patterned by photolithography on the outside again and cut by milling. The floating stability of the magnetic head slider 201 is determined by the magnetic head slider having the chamfer 31 described above. It has characteristics superior to 101.

However, this magnetic head slider 201
It is necessary to perform the processing of cutting the step portion 34 and the processing of cutting the processing surface 203 in two or more times.
Since the positioning accuracy when processing the step portion 34 and the processing surface 203 is strict, there is a problem that the production process becomes complicated.

A third embodiment of the conventional magnetic head slider 301 shown in FIG. 14 disclosed in Japanese Patent Application Laid-Open No. 4-195876 has a rectangular shape on the pressure surface 302 except for a part of the air inflow end 305 in the width direction. However, leaving a part 52 of the air inflow end causes a problem that the rising rise time due to the rotation of the medium becomes long. In the third embodiment of the conventional magnetic head slider 301, the rectangular cut 51 has a depth of 0.5 μm and the processing surface 204 has a depth of 50 μm. Must be performed in a separate step from the processing of the groove for shaving. In other words, the processing for making the cut 51 must be newly performed after the processing for cutting the positive pressure surface 302 is completed, and there is a disadvantage that the manufacturing process becomes complicated.

Further, in the fourth embodiment of the conventional magnetic head slider 401 shown in FIG. 15 disclosed in JP-A-6-333354, the positive pressure surface 402 is formed in one plane, and one milling process is performed. And the processing process can be simplified, but the air inflow end 405 and the positive pressure surface 4
Since one side of 02 is on the same line, the time from the start of rotation of the medium 11 to the floating of the magnetic head slider 401 is lengthened, and the durability of the magnetic disk device is reduced.

[0015]

The above-described conventional magnetic head slider has a chamfer or a step portion so as to be quickly lifted with the rotation of the medium. However, chamfering is difficult to perform with high precision. In addition, the production process becomes complicated, and high precision is required for the positioning of the step portion and the positive pressure portion. In addition, the magnetic head slider of the type disclosed in Japanese Patent Application Laid-Open No. Since a part of the edge is left, the rise time of the rising due to the rotation of the medium is long, and a process of making a cut must be performed, which complicates the production process.
The magnetic head slider disclosed in JP-A-333354 has drawbacks in that it cannot fly quickly with the rotation of the medium.

An object of the present invention is to provide a magnetic head slider having a simple structure in which a V-shaped or trapezoidal cut is provided on the air inflow side of a cross rail serving as a positive pressure surface. An object of the present invention is to provide a magnetic head slider which can be simplified, has a small flying height, and has stable flying characteristics.

[0017]

A magnetic head slider according to the present invention includes a pair of positive pressure surfaces disposed on each side in a width direction intersecting an air inflow / outflow direction and disposed on a rotating medium. And a cross rail formed with the same air bearing surface on the air inflow side and a plurality of V-shaped cuts on the air inflow side, and surrounded by the cross rail and the respective pressure surfaces. It has a reverse stepped recess which becomes negative pressure, the interior angle 120 ° or more cuts a V-shaped
Bottom, set the radius of chamfer at the vertex to 50μm or less,
Hang the bottom shape of the entanglement from the air inflow side to the V-shaped top
And tapered .

[0018]

Furthermore, the virtual vertex of the V-shaped cut is
It is located in a reverse step-shaped concave portion serving as a negative pressure portion surrounded by the cross rail and each positive pressure surface, has a trapezoidal shape on the cross rail, and has a trapezoidal upper side of the concave side on the cross rail of 100 μm or less. The shape of the bottom of the
The cross rail is tapered from the air inflow side to the recess side.

The magnetic head slider according to the present invention is arranged so as to face a rotating medium, and has a pair of pressure surfaces provided on each side in the width direction crossing the air inflow / outflow direction, and a pair of pressure surfaces and the air inflow. The opposite step is a cross rail connected to form the same air bearing surface on the side and provided with a plurality of trapezoidal cuts on the air inflow side, and a negative pressure part surrounded by the cross rail and each positive pressure surface have a and Jo of the recess,
The air inlet side is the base of the trapezoid and the top of the trapezoid is 100 μm
The bottom shape of the trapezoidal cut is
It is characterized by being tapered from the side to the upper side of the trapezoid .

[0021]

Further, the present invention is characterized in that it is a magnetic disk drive provided with the magnetic head slider of the present invention.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a magnetic head slider according to the present invention will be described in detail with reference to the drawings.

FIG. 1A is a plan view showing a first embodiment of a magnetic head slider 1 according to the present invention, and FIG.
It is an arrow AA sectional view of (a).

Referring to FIGS. 1A and 1B, the magnetic head slider 1 of the present invention is disposed to face a rotating medium, and is provided on each side in the width direction crossing the air inflow / outflow direction. A pair of pressure surfaces 2a, 2b, a cross rail 70 connected to the respective pressure surfaces 2a, 2b so as to form the same floating surface on the air inflow side, and a cross rail 70 and the respective pressure surfaces 2a, 2b. A cross-rail 7 comprising an inverted stepped concave processing surface 3 serving as an enclosed negative pressure portion.
A plurality of V-shaped cuts 7 are provided on the air inflow end 5 side of the cross rail 70. The bottom shape of the V-shaped cut 7 is tapered from the air inflow end 5 side of the cross rail 70 to the V-shaped apex. Has become.

The size of the magnetic head slider 1 is 1.2 mm in length and 1.times. In width, which is generally called a 30% slider.
A sheet type resist having a thickness of 0 mm and a height of 0.3 mm and a thickness of 50 μm is applied to the medium facing surface 90, and the shapes of the positive pressure surfaces 2 a and 2 b and the cross rail 70 are patterned by photolithography, and a milling device is used. While rotating the magnetic head slider 1, the ion gun was inclined by 45 ° and etched for 8 hours to cut the processing surface 3 by 3.5 μm to form the positive pressure surface 2. At the same time, the V-shaped cut portion 8 was tapered by the shadow effect of the resist. Surface 108 is formed. In the present embodiment, the shape has five V-shaped cuts 7.

The shortest distance between the air inflow end 5 and the cross rail 70 is 40 μm, and the angle of the V-shaped cut 7 is 3 μm.
0 °, cut length 200 μm, taper angle 1.1
゜.

Next, this magnetic head slider 1 is mounted on a magnetic disk drive (not shown), and the number of rotations is 7200 rpm.
FIG. 2 shows the relationship between the radial position of the medium (not shown) when rotated at m and the flying height of the magnetic transducer 4 of the magnetic head slider 1 from the medium. According to FIG. 2, an experimental result is obtained in which uniform flying height characteristics are obtained at each radial position, and fluctuations in the flying height due to manufacturing variations can be suppressed to ± 10 nm or less.

FIG. 3 shows the result of measuring a frictional force between the medium and the magnetic head slider 1 by attaching a strain gauge between the magnetic head slider 1 and a suspension (not shown) in the magnetic disk drive. . As the experimental conditions in FIG. 3, the rotation condition of the medium is a time cycle as shown in FIG. The load at which the suspension presses the magnetic head slider 1 against the medium at this time is 1.5 grf.
It is.

Referring to FIG. 3 and FIG.
While the time required to reach 200 rpm is 7 seconds, the time required for the magnetic head slider 1 to float is where the frictional force becomes zero and is about 0.5 seconds from the start of rotation. The results are getting.

Referring to FIG. 8 showing the relationship between the frictional force between the conventional magnetic head slider and the medium and the rise time, the flying rise time of the magnetic head slider is 0.9.
Second, which clearly indicates that the magnetic head slider 1 of the present invention is superior in terms of the rise time as compared with the conventional magnetic head slider having the chamfer and the step, and improves the durability of the magnetic disk device. be able to.

Further, as a result of conducting a repetition test of 40,000 times of contact start / stop (hereinafter referred to as CSS) in the time cycle of the rotation condition of the medium shown in FIG.
The result shows that there is almost no change in the maximum static friction coefficient.

The angle of the V-shaped cut 7 is 120 °,
The cut length is 100 μm, the chamfer radius of the apex of the V-shaped cut 7 is 50 μm, and the resist film thickness when the positive pressure surfaces 2 a and 2 b and the cross rail 70 are cut is 100 μm.
However, the flying rise time of the magnetic head slider 1 is almost the same.

Next, a magnetic head slider 61 according to a second embodiment of the present invention will be described with reference to FIG.

FIG. 5A is a plan view of a magnetic head slider 61 according to a second embodiment of the present invention, and FIG.
FIG. 6 is a sectional view taken along the line BB in FIG.

Referring to FIGS. 5 (a) and 5 (b), a cross rail 71 which is connected to the pressure surfaces 95a and 95b by forming the same floating surface on the air inflow side, and the cross rail 71 and the respective pressure surfaces 95a , 95b surrounded by an inverted stepped recessed surface 45 which is a negative pressure portion, and a plurality of trapezoidal cuts 9 are provided on the cross rail 71 on the air inflow end 65 side. The bottom surface of the cross rail 55 has a tapered surface 55a extending from the air inflow end 65 side of the cross rail 71 to the upper side of the trapezoid.

Also, a sheet-type resist having a thickness of 50 μm is applied to the medium facing surface 91, the shapes of the positive pressure surfaces 95 a and 95 b and the cross rail 71 are patterned by photolithography, and the 3.5 μm processed surface 45 is cut by milling. ,
The positive pressure surfaces 95a and 95b and the cross rail 71 are formed, and at the same time, the tapered surface 55a is formed in the trapezoidal cut portion 55. In the present embodiment, the shape has five trapezoidal cuts 9.

At this time, the shortest distance between the air inflow end 65 and the cross rail 71 is 40 μm, and the shape of the trapezoidal cut 9 has a bottom length of 150 μm, a top length of 30 μm, a cut length of 180 μm, and a taper angle of 180 μm. 1.1 °, the flying uniformity is good, and the time from when the medium starts rotating until the magnetic head slider 61 flies is:
It takes about 0.5 seconds.

Further, a magnetic head slider 62 according to a third embodiment of the present invention will be described with reference to FIG.

FIG. 6A is a plan view showing a third embodiment of the magnetic head slider 62 according to the present invention, and FIG. 6B is a sectional view taken along the line CC of FIG. 6A. .

Referring to FIGS. 6A and 6B, in the magnetic head slider 62, the virtual apex of the V-shaped cut portion 56 provided on the cross rail 72 is on the concave processing surface 46, and the cross rail 72 The upper side has a trapezoidal shape, the upper side of the trapezoid on the processing surface 46 side of the cross rail 72 is 100 μm or less, and the step 4 between the cut portion 56 on the upper side of the trapezoid and the processing surface 46
By setting the value 2 to 1.5 μm or more, the negative pressure hardly decreases, and the fluctuation of the flying height does not increase.

A magnetic head slider 63 according to a fourth embodiment of the present invention will be described with reference to FIG.

FIG. 7A is a plan view showing a fourth embodiment of the magnetic head slider 63 of the present invention, and FIG. 7B is a sectional view taken along the line DD of FIG. 7A. .

Referring to FIGS. 7A and 7B, the cross rail 73 is in point contact with the air inflow end 67 and has a V-shaped notch 57 over the entire width of the air inflow end 67. And the cross rail 7 serving as an air inflow end 67 and a positive pressure surface
In order to solve the problem that the rise time is prolonged due to the contact between the magnetic head slider 63 and the magnetic head slider 63, the V-shaped notch 57 is provided throughout the air inflow end 67 so that the magnetic head slider 63 flies after the medium starts to rotate. The time required to perform the operation can be made equal to that of the magnetic head sliders 1, 61, and 62 of the first, second, and third embodiments.

The magnetic head sliders 1, 61, 6 of the present invention
Numerals 2 and 63 indicate a cut length, a cut angle, and a change in the rotational speed and geometry of the magnetic disk device (the angle between the center line of the magnetic head slider at each radial position of the medium and the direction of the linear velocity of the medium). By adjusting the resist film thickness used for patterning for forming the positive pressure surface, the flying uniformity is good, and the time from when the medium starts rotating until the magnetic head slider flies can be shortened.

As described above, the magnetic head sliders 1 and 6 of the present invention
Although the description has been made of the case where the magnetic head sliders 1, 61, 62, 63 are mounted on the CSS type magnetic disk drive, the magnetic head sliders 1, 61, 62, 63
The same good flying characteristics can also be obtained in a ramp-load type magnetic disk drive having a mechanism for loading the data, but it goes without saying that it is included in the present invention.

[0047]

The first effect is that the flying uniformity of the magnetic head slider from the medium is good. Thus, the flying height of the magnetic head slider can be designed to be low, and the magnetic transducer mounted on the magnetic head slider can be effectively operated.

The reason for this is that the air inflow end has a cut, and the cut makes the cut surface a tapered surface, so that the time required for the magnetic head slider to float with the rotation of the medium can be shortened, and This is because the taper angle can be easily adjusted by the cut shape and the resist film thickness, the processing variation is reduced, and the fluctuation of the flying height can be reduced.

The second effect is that high-precision processing of chamfers and steps can be eliminated. Thereby, the production process of the magnetic head slider can be simplified.

The reason is that, as described above, the tapered surface of the cut portion is formed simultaneously with the processing of the positive pressure surface, has an effect equal to or higher than that of the conventional chamfer and step, and eliminates the need for chamfer and step processing. Because.

[Brief description of the drawings]

FIG. 1A is a plan view showing a first embodiment of a magnetic head slider according to the present invention. FIG.
It is an arrow AA sectional view of (a).

FIG. 2 is a diagram showing the relationship between the radial position of the medium and the flying height of the magnetic head slider from the medium in the magnetic head slider of the present invention.

FIG. 3 is a diagram showing a frictional force between a magnetic head slider of the present invention and a medium.

FIG. 4 is a time cycle diagram showing rotation conditions of a medium.

FIG. 5A is a plan view illustrating a magnetic head slider according to a second embodiment of the present invention. FIG. 5B shows FIG.
FIG. 3A is a sectional view taken along line BB in FIG.

FIG. 6A is a plan view showing a third embodiment of the magnetic head slider according to the present invention. FIG. 6B shows FIG.
It is CC sectional view taken on the arrow of (a).

FIG. 7A is a plan view showing a fourth embodiment of the magnetic head slider according to the present invention. FIG. 7B shows FIG.
It is arrow DD sectional drawing of (a).

FIG. 8 is a diagram showing a frictional force between a conventional magnetic head slider and a medium.

FIG. 9 is a schematic diagram of a conventional magnetic disk drive.

10 is an enlarged cross-sectional view taken along the line EE in FIG. 9;

FIG. 11 is a view showing a flying mechanism of a magnetic head slider of a conventional magnetic head slider accompanying rotation of a medium.

FIG. 12A is a plan view showing a first embodiment of a conventional magnetic head slider. FIG. 12B shows FIG.
It is an arrow FF sectional view of 2 (a).

FIG. 13A is a plan view showing a second embodiment of the conventional magnetic head slider. FIG. 13B shows FIG.
It is GG sectional drawing of arrow 3 of (a).

FIG. 14 is a perspective view showing a third embodiment of the conventional magnetic head slider.

FIG. 15 is a perspective view showing a fourth embodiment of the conventional magnetic head slider.

[Explanation of symbols]

 1, 61 magnetic head slider 62, 63 magnetic head slider 81, 101 magnetic head slider 201, 301 magnetic head slider 401 magnetic head slider 2a, 2b positive pressure surface 95a, 95b positive pressure surface 202, 302 positive pressure surface 402 positive pressure surface 3, 45 processing Surfaces 46, 203 Processing surface 204 Processing surface 84 Magnetic transducer 5, 65 Air inflow end 67, 105 Air inflow end 205, 305 Air inflow end 405 Air inflow end 7, 57 V-shaped notch 8, 56 V-shaped notch 9 Trapezoid Cut 55 trapezoidal cut portion 11 medium 12 spindle 83 suspension 14 actuator 15 voice coil motor 16 air filter 21, 90 medium facing surface 91 medium facing surface 22 air 31 chamfer 32 chamfer angle 33 chamfer length 34 ste Tap portion 42 Step 51 Rectangular cut 52 Part of air inflow end 70, 71 Cross rail 72, 73 Cross rail 108, 55a Tapered surface

Claims (4)

(57) [Claims] 1. A pair of pressure surfaces provided on each side in a width direction intersecting an air inflow / outflow direction and arranged opposite to a rotating medium, and the same floating surface on each of the pressure surface and the air inflow side. A cross-rail formed and connected, and provided with a plurality of V-shaped cuts on the air inflow side, and a reverse step-shaped concave portion serving as a negative pressure portion surrounded by the cross rail and the respective positive pressure surfaces. have a door, cut of the V-shaped
Angle of 120 ° or less and chamfer radius of apex 50μm or less
The bottom shape of the V-shaped cut is the air inlet side
A magnetic head slider tapered from the top to the top of the V-shape . 2. An imaginary vertex of the V-shaped cut is in an inverted step-shaped concave portion serving as a negative pressure portion surrounded by the cross rail and each of the pressure surfaces, and has a trapezoidal shape on the cross rail. None, the upper side of the trapezoid on the concave side on the cross rail is 100 μm or less, and the bottom shape of the V-shaped cut is tapered from the air inflow side of the cross rail to the concave side. claim 1 Symbol mounting of the magnetic head slider and. 3. A pair of pressure surfaces provided on each side in the width direction intersecting with the air inflow / outflow direction, and a pair of positive pressure surfaces provided on each side in the width direction intersecting with the air inflow / outflow direction, and the same floating surface on each of the positive pressure surfaces and the air inflow side A cross rail formed and connected and having a plurality of trapezoidal cuts on the air inflow side, and a reverse step serving as a negative pressure portion surrounded by the cross rail and the respective positive pressure surfaces. possess a Jo recess, the air inflow side of the trapezoid
The bottom side, the upper side of the trapezoid is 100 μm or less,
The bottom shape of the trapezoidal cut is from the bottom on the air inflow side.
A magnetic head slider characterized by being tapered over the upper side of a trapezoid . 4. A magnetic disk apparatus having a magnetic head slider according to any one of claims 1 to 3.