JP2953912B2 - On-line equipment for semiconductor test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an online device for controlling a semiconductor test device.

[0002]

2. Description of the Related Art In a conventional on-line semiconductor test apparatus, an operator selects an arbitrary lot from a lot storage shelf before work, inputs a lot number of the work lot to a terminal computer, and performs work. That is, the system is such that the operator inputs the number of the lot selected.

[0003]

As shown in FIG. 3, in a conventional on-line apparatus of a semiconductor test apparatus, a system in which an operator arbitrarily selects a lot to be operated (process 30) and inputs a number of the selected lot. (Processes 31 and 32), it is necessary for a human to check all the operation conditions of the selected lot and the performance of the device to be operated, which requires many man-hours. Another problem is that mistakes are likely to occur.

When selecting a lot to be worked on, the priority of a work-in-progress lot, the progress status with respect to a plan, the operation status of a plurality of semiconductor test apparatuses, the scheduled end time of a lot currently being worked on, and the like are determined. It is very difficult to check all of them and determine the optimal combination (which device should be used), and there is a problem that the operation rate of the semiconductor test device is reduced.

[0005]

According to the present invention, an on-line apparatus of a semiconductor test apparatus in which a plurality of semiconductor test apparatuses are controlled by a host computer, the host computer performs a test based on information input to the host computer. Means for comparing a condition and apparatus performance to extract a workable device or a workable lot, a means for judging a progress status based on a production plan and actual data and determining a priority, and then performing a work It is characterized by comprising means for selecting an optimum lot, and means for instructing the terminal computer of the optimum lot selected by the selecting means.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1 showing an on-line apparatus according to an embodiment of the present invention, the
, A terminal computer 2, a tester 3, and a prober 4.

Referring to FIG. 2 showing the operation of the online apparatus shown in FIG. 1, information is input from a terminal computer in a process 10, and a priority order of the in-process lot is determined by a host computer in a process 11 based on the progress. In the case of priority, the process proceeds to a process 15, and in the case of the device priority, the process of determining to shift to the process 13 is performed. Then, if there is an inactive device in the process 13, the process shifts to the process 16; .

In the process 15, the work condition of the lot having the higher priority is compared with the device performance, the workable device is selected in the next process 17, and the process proceeds to the process 20.

In process 14, the device with the earliest scheduled end time is selected, the next process 18 compares the device performance with the work condition of the in-process lot, and in process 19 the optimum work lot is selected. In a process 20, an optimum work lot is instructed to the terminal computer.

As described above, in the online apparatus of the semiconductor test apparatus according to one embodiment of the present invention, information such as a production plan, a scheduled storage date of a lot, a work condition of a lot, and the like are first input from the terminal computer 2.

The host computer 1 judges the progress of production based on the information input from the terminal computer 2 and determines the priority of the in-process lot.

Next, a search is made to see if there is an inactive device, and if so, that device is selected. If not, select the device with the earliest scheduled work end time. The apparatus performance of the selected apparatus is compared with the work condition of the in-process lot, the next optimum work lot is selected, and the optimum work lot is instructed to the terminal computer 2.

Conversely, a work lot with a higher priority is selected, the work conditions of the lot are compared with the device performance, the optimum workable device is selected, and the terminal computer 2 is selected.
The next optimal work lot can also be specified.

[0014]

As described above, according to the present invention, the priorities of in-process lots are determined based on information input from a terminal computer, and the work conditions of in-process lots are compared with the apparatus performance of the apparatus. Since a workable device or lot is selected and an instruction is given to the terminal computer, the work of the optimum lot is always performed, which has the effect of reducing man-hours to be checked by a human and reduction in the operation rate.

[Brief description of the drawings]

FIG. 1 is a block diagram of an online device of a semiconductor test device according to an embodiment of the present invention.

FIG. 2 is a flowchart of the operation of the online apparatus of the semiconductor test apparatus shown in FIG.

FIG. 3 is a work flow diagram of a conventional online device.

[Explanation of symbols]

 1 host computer 2 terminal computer 3 tester 4 prober 10-20,30,31,32 processing

Claims (1)

(57) [Claims] 1. An on-line device for a semiconductor test device in which a plurality of semiconductor test devices are controlled by a host computer. The host computer compares test conditions with device performance based on information input to the host computer. Means for extracting possible devices or workable lots, then means for determining the priority by judging the progress status based on the production plan and actual data, means for selecting the optimal lot to perform the next work, Means for instructing the terminal computer of the optimum lot selected by the selecting means.