JP2944605B2 - Solid ion source vapor control method and solid ion source vapor generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid ion source vapor control method and a solid ion source vapor generator.
The present invention relates to a solid ion source vapor control method and a solid ion source vapor generator that reduce the time required for setting the heating temperature of the solid ion source and stabilize the supply amount of the solid ion source vapor with high accuracy.

[0002]

2. Description of the Related Art In a semiconductor ion implantation apparatus, it is necessary to supply a fixed amount (optimum amount) of a solid ion source vapor in order to obtain a stable ion beam.

FIG. 4 is a diagram showing a configuration of a conventional solid ion source vapor generator for supplying the solid ion source vapor.
The solid ion source vapor generator includes a solid heating chamber 1 filled with a solid ion source 2 and a heater 3 for heating the solid heating chamber 1 to generate a solid ion source vapor 4 inside the solid heating chamber 1. An ion generator 13 to which the solid ion source vapor 4 generated by the heating of the heater 3 is supplied through a connection pipe 18, and a pressure signal 32 of the ion generator 13 by detecting the pressure in the ion generator 13. And an ion beam current detector 33 which detects an ion beam current and outputs an ion beam current signal 34
And heating for outputting a temperature setting signal 10 for setting the heating temperature of the solid-state heating chamber 1 based on the pressure signal 32 output from the pressure detector 31 and the ion beam current signal 34 output from the ion beam current detector 33. Temperature setting device 15
A temperature detector 5 for detecting the temperature of the solid heating chamber 1 and outputting a detected temperature signal 6; a temperature setting signal 10 output from the heating temperature setter 15 and a detected temperature signal output from the temperature detector 5 6 and a heating temperature controller 14 for outputting a heater control signal 7 for controlling the amount of heat generated by the heater 3.

[0004] The operation of the conventional solid ion source steam generator having the above configuration will be described below. First, the heating temperature controller 14 controls the solid ion source 2 filled in the solid heating chamber 1.
Is heated by the heater 3 to generate the solid ion source vapor 4, and the generated solid ion source vapor 4 is supplied to the ion generator 13 through the connection pipe 18.

When the supply of the solid ion source vapor 4 is performed,
Accordingly, the internal solid ion source 2 sublimates and decreases (consumes), so that when the heating temperature is fixed, the supply amount of the solid ion source vapor 4 to the ion generating unit 13 gradually decreases. For this reason, in order to make the supply amount of the solid ion source vapor 4 to the ion generation unit 13 constant, the heating temperature of the heater 3 is increased with the consumption of the solid ion source 2 and the unit of the solid ion source 2 is increased. It is necessary to increase the amount of solid ion source vapor 4 generated per unit amount. Therefore, in the heating temperature setting unit 15, the pressure detector 31 detects the pressure of the ion generating unit 13 and checks the pressure signal 32 and the ion beam current signal 34 from the ion beam detector 33 while checking the heating temperature setting unit 15. To set the rise width of the heating temperature and output the temperature setting signal 10. The heating temperature controller 14 compares the temperature setting signal 10 with the detected temperature signal 6 from the temperature detector 5, and controls the heater control signal 7 so that the temperature of the solid heating chamber 1 becomes the set temperature of the heating temperature setter 15. Is output to adjust the heating value of the heater 3.

As described above, in the conventional solid ion source vapor generator, the setting of the increase width of the heating temperature due to the depletion of the solid ion source 2 depends on the pressure signal 32 of the ion generator 13 or the ion beam detector 33. Ion beam current signal 34
The pressure or ion beam current value is adjusted to a specified value by changing the heating temperature while checking the temperature.

[0007]

However, the conventional solid ion source vapor generator has the following problems. (1) Since there is a time difference between the change of the setting of the heating temperature of the solid ion source and the change of the pressure or the ion beam current value,
It takes time to set the heating temperature to the appropriate temperature,
This is a factor that lowers the processing capability of the semiconductor ion implanter. (2) In addition, since the pressure and the ion beam current value fluctuate not only with the heating temperature but also with the set values of other ion generation units, it is difficult to accurately adjust the supply amount of the solid ion source vapor, This is a factor that lowers beam stability.

Accordingly, an object of the present invention is to make it possible to quickly and appropriately set the heating temperature of the solid ion source so that the solid ion source vapor can always be supplied stably and with high precision. It is an object of the present invention to provide a solid ion source vapor control method and a solid ion source vapor generator.

[0009]

According to the present invention, there is provided a method for controlling an amount of a solid ion source vapor generated by heating a solid ion source, the method comprising: Based on the heating temperature and heating time of the ion source, the supply amount of the solid ion source vapor is fixed.
An object of the present invention is to provide a solid ion source vapor control method characterized by controlling a heating temperature increase width of a solid ion source.

In the above configuration, at least one of the pressure of the ion generator to which the solid ion source is supplied and the current value of the ion beam generated by the solid ion source vapor is detected, and the heating is performed based on the detected pressure and current value. It is preferable to correct the newly set heating temperature of the solid ion source from the temperature and the heating time.

Further, the present invention is to achieve the above object, in the solid-state ion source steam generator for generating solid ion source vapor by heating a solid ion source, a heating means for heating the solid ion source, Heating temperature of solid ion source
And the heating time, the solid ion source vapor supply
Increase the heating temperature of the solid ion source so that it is constant.
And a control means for controlling via a heating means .

In the above arrangement, at least one of pressure detecting means for detecting the pressure of the ion generator to which the solid ion source vapor is supplied and ion beam current detecting means for detecting the current value of the ion beam generated by the solid ion source vapor. The control unit further includes: a heating temperature of the solid ion source newly set from the heating temperature and the heating time based on the pressure detected by the pressure detection unit and the current value detected by the ion beam current detection unit. It is preferable to correct.

When the pressure detected by the pressure detecting means and the current value detected by the ion beam current detecting means are not in the predetermined ranges, the control means newly sets the heating temperature and the heating time. It is preferable to correct the heating temperature of the solid ion source to be performed, and further, when the heating temperature of the newly set solid ion source reaches a preset upper limit, it is necessary to replenish the solid ion source. Is preferably notified to the operator.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a diagram showing a configuration of a solid ion source vapor generator according to a first embodiment of the present invention. 4 having the same contents as those in FIG. 4 are denoted by the same reference numerals as those in FIG. 4 and will not be described repeatedly. However, in the solid ion source vapor generator of the present invention, the ion generator 13 and the ion beam current detector are used. 33, a heating time signal 8 and a heating temperature signal 9 are output from the heating temperature controller 14, and a replenishment signal 12 for notifying the replenishment of the solid ion source 2 is output. A required set temperature range is calculated based on the button 17, the heating time signal 8, the heating temperature signal 9, and the replenishment signal 12, and the set temperature change signal 11 is output to the heating temperature setting device 15 to change the heating temperature. The configuration is provided with a calculator 16 and an alarm generator 19 that detects that the heating temperature has reached a preset upper limit temperature and generates an alarm.

That is, the heating temperature of the solid ion source vapor generator is controlled as follows. The temperature rise width calculator 16 receives the heating time signal 8 from the heating temperature controller 14.
And the heating temperature signal 9 and the replenishment signal 12 from the solid ion source replenishment button 17 to calculate the required set temperature range. The calculated set temperature range is output as a set temperature change signal 11 to the heating temperature setter 15 to change the heating temperature. The temperature rise width calculator 16 calculates the replenishment signal 1
2 to detect that the solid ion source 2 has been replenished to a specified amount, and thereafter increase the heating temperature by the heating time signal 8 and the heating temperature signal 9 by the currently required temperature increase width. The supply amount of the solid ion source vapor 4 due to exhaustion of the solid ion source 4 is prevented from decreasing, and is kept at a constant amount.

Next, the operation of this embodiment will be described with reference to FIGS. First, after the solid ion source 2 is refilled into the solid ion chamber 1 shown in FIG. 1, the operator presses a solid ion source refill button 17 and sends a refill signal 12 to the temperature rise calculator 16. Thereby, the temperature rise width calculator 1
6 outputs the set temperature change signal 11 in which the temperature rise width is set to 0 to the heating temperature setter 15, and the heating temperature is changed to the initial temperature as indicated by reference numeral 20 in FIG. After that, as the heating time elapses, the heating time signal 8 and the heating temperature signal 9 are used by the temperature rise width calculator 16 to calculate the required rise width from a preset calculation formula as needed, thereby increasing the heating temperature. To go. When the temperature rise width calculator 16 detects that the heating temperature has reached the preset upper limit temperature (at the time indicated by the reference numeral 21 in FIG. 2) by increasing the required rise width, a warning is issued from the warning generator 19. Generates to alert the operator that the solid ion source needs to be refilled. After the replenishment, when the operator presses the solid ion source replenishment button 17, the above operation is repeated.

As described above, since the heating temperature rise value of the solid ion source is directly calculated and changed (increased) according to the heating time and the heating temperature, the following is possible. (1) Since there is no need to confirm other measured values, the setting of the heating temperature can be quickly set, and the processing capability of the apparatus can be improved. (2) Since the values of the heating time and the heating temperature, which are not affected by other set values, are used, the supply amount of the solid ion source vapor can be accurately stabilized and the stability of the ion beam can be improved. it can. (3) Since the values of the heating time and the heating temperature that do not change during the processing are used and can be calculated and changed even during the processing, the stability of the ion beam during the continuous processing for a long time can be improved.

FIG. 3 is a diagram showing a configuration of a solid ion source vapor generator according to a second embodiment of the present invention. This solid ion source vapor generator is obtained by adding the pressure detector 31 and the ion beam current detector 33 of the ion generator 13 shown in FIG. 4 to the first embodiment. By taking the pressure signal 32 of the pressure detector 31 and the beam current signal 34 of the ion beam current detector 33 into the temperature rise width calculator 16, the calculated value of the heating temperature rise width and the optimum value due to the actual consumption of the solid ion source 2 are obtained. The deviation of the temperature rise value can be corrected. That is, the temperature rise width calculator 16 periodically checks the pressure signal 32 and the beam current signal 34 at certain time intervals, and confirms that the respective values are within a predetermined standard range. When the temperature is out of the standard range, the heating temperature is corrected by adjusting the set temperature change signal 11.

As described above, in the second embodiment, in order to correct the heating temperature from the pressure signal 32 and the beam current signal 34, the heating temperature is set more appropriately as compared with the first embodiment. be able to. Note that the pressure of the ion generator 13 and the current value of the beam may not be detected together, but only one of them may be detected.

[0021]

As described in the foregoing, according to the solid-state ion source vapor control method and a solid ion source steam generator of the present invention, the solid ion source steam based on the heating time and heating temperature
The heating temperature of the solid ion source so that the supply of gas is constant
Since the degree of the degree of increase is controlled , the appropriate heating temperature of the solid ion source can be quickly set as needed. As a result, the solid ion source can always be supplied stably and with high precision.

The heating temperature of the solid ion source set in this way is determined by detecting at least one of the pressure of the ion generator to which the solid ion source is supplied and the current value of the ion beam generated by the solid ion source vapor. In the case of correction, the heating temperature of the solid ion source can be set more appropriately.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a solid ion source vapor generator according to a first embodiment.

FIG. 2 is a diagram illustrating a setting operation of a heating temperature by a temperature rise width calculator.

FIG. 3 is a diagram showing a configuration of a solid ion source vapor generator according to a second embodiment.

FIG. 4 is a diagram showing a configuration of a conventional solid ion source vapor generator.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 solid heating chamber 2 solid ion source 3 heater 4 solid ion source vapor 5 temperature detector 6 detected temperature signal 7 heater control signal 8 heating time signal 9 heating temperature signal 10 temperature setting signal 11 set temperature change signal 12 replenishment signal 13 ion Generation unit 14 Heating temperature controller 15 Heating temperature setting device 16 Temperature rise width calculator 17 Solid ion source refill button 18 Connection pipe 19 Alarm generator

Claims (6)

(57) [Claims] 1. A method for controlling an amount of a solid ion source vapor generated by heating a solid ion source, wherein the solid ion source is heated based on a heating temperature and a heating time of the solid ion source. So that the steam supply is constant
And controlling the heating temperature rise of the solid ion source. 2. detecting at least one of a pressure of an ion generator to which the solid ion source is supplied and a current value of an ion beam generated by the solid ion source vapor, and based on the detected pressure and current value, The heating temperature of the solid ion source newly set from the heating temperature and the heating time is corrected.
3. The method for controlling a solid ion source vapor according to item 1. 3. A solid ion source steam generator for generating solid ion source vapor by heating a solid ion source, a heating means for heating the solid ion source, the heating temperature and the heating time of the solid ion source Based
Thus, the supply amount of the solid ion source vapor is made constant.
The heating means of the heating temperature of the solid ion source
Solid ion source steam generator, characterized in that a control means for controlling through. 4. At least one of a pressure detecting means for detecting a pressure of an ion generator to which the solid ion source vapor is supplied and an ion beam current detecting means for detecting a current value of an ion beam generated by the solid ion source vapor. The solid ion which is newly set from the heating temperature and the heating time based on the pressure detected by the pressure detection means and the current value detected by the ion beam current detection means. 4. The solid ion source steam generator according to claim 3, wherein the heating temperature of the source is corrected. 5. The heating device according to claim 1, wherein the control unit is configured to control the heating temperature and the heating when the pressure detected by the pressure detecting unit and the current value detected by the ion beam current detecting unit are not in a predetermined range. The solid ion source vapor generator according to claim 4, wherein a heating temperature of the solid ion source newly set from time is corrected. 6. When the heating temperature of the newly set solid ion source reaches a preset upper limit value, the control means notifies an operator that replenishment of the solid ion source is necessary. The solid ion source vapor generator according to claim 3, 4 or 5, wherein: