JP2932588B2 - Exhaust device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to an exhaust device having an exhaust condition control device for controlling a variation in exhaust air volume, and to provide an exhaust device having an exhaust condition control device which can be provided simply and easily. For the purpose, a plurality of devices including a device to maintain the processing chamber pressure at a predetermined static pressure are connected to the main duct via branch ducts, and are operated simultaneously by the exhaust fan connected to the main duct. In the exhaust device for removing the exhaust gas generated in the plurality of devices, the branch duct connected to the device for maintaining the indoor pressure of the processing chamber at a predetermined static pressure is connected to the static duct in the branch duct. A static pressure detecting unit for detecting the pressure, a setting unit for setting a value of the static pressure in the branch duct corresponding to the indoor pressure of the processing chamber, and a value of the static pressure detected by the static pressure detecting unit and the setting. Part And a motor that rotates an axial fan that controls the flow rate of the branch duct, and the number of rotations of this motor can be set based on the comparison result of this comparison unit. It is configured to include an exhaust state control device provided with an appropriate rotation speed setting unit.

[Industrial applications]

The present invention relates to an exhaust device including an exhaust state control device that controls a change in exhaust air volume.

In a conventional exhaust device, a branch duct connected to each of a plurality of devices is connected to a main duct, and exhaust from each device is eliminated by an exhaust fan connected to the main duct.

Therefore, the static pressure in each branch duct fluctuates greatly, and the exhaust air volume of each device fluctuates. Such fluctuations in the static pressure in the branch duct adversely affect the performance of a normal pressure CVD apparatus or the like that requires a constant pressure in the apparatus.

Under the circumstances described above, there is a demand for an exhaust device capable of suppressing a variation in static pressure in a branch duct of each device.

[Conventional technology]

The third exhaust device that exhausts three conventional devices
This will be described in detail with reference to the drawings.

In the conventional exhaust device, the individual devices 13a, 13b, 13c are connected to the main duct 11 by branch ducts 12a, 12b, 12c,
An exhaust fan 14 connected to the main duct 11 exhausts exhaust gas generated in each device.

Since the exhaust air volume of the exhaust fan 14 is distributed according to the flow resistance of the branch ducts of the individual devices, the exhaust air volume of the individual devices fluctuates, and thus the static pressure in each branch duct varies, resulting in variation. I have.

[Problems to be solved by the invention]

In the conventional exhaust device described above, since the static pressure in the branch duct of each device connected to the main duct varies, in a device in which this static pressure is required to be constant, There is a problem that the performance is adversely affected.

An object of the present invention is to provide an exhaust device provided with an exhaust condition control device that can be provided simply and easily from the above situation.

[Means for solving the problem]

The exhaust device according to the present invention is configured such that a plurality of devices including a device that is to maintain the processing chamber at a predetermined static pressure are connected to a main duct via branch ducts, and an exhaust fan connected to the main duct. In the exhaust device for eliminating exhaust gas generated in the plurality of devices operating at the same time, the branch duct connected to the device that should maintain the indoor pressure of the processing chamber at a predetermined static pressure is connected to the branch duct. A static pressure detecting section for detecting a static pressure in the duct, a setting section for setting a value of the static pressure in the branch duct corresponding to an indoor pressure of the processing chamber, and a static pressure detecting section for detecting the static pressure in the branch pressure. A comparing unit that compares the value with the value of the static pressure set in the setting unit;
An exhaust state control device including a motor that rotates an axial fan that controls the air flow of the branch duct, and a rotation speed setting unit that can set the rotation speed of the motor based on the comparison result in the comparison unit. It is constituted so that.

[Action]

That is, in the present invention, a static pressure detection unit is separately provided in each branch duct connecting the main duct and each device to detect a static pressure in the branch duct, and this static pressure and each setting unit are individually set. The set static pressure is compared in each comparing section, and the rotational speed of the motor of the axial fan is set in each rotational speed setting section according to the comparison result. Accordingly, the rotation speed of each axial fan can be changed, and each static pressure value in these branch ducts can be maintained at the value set in each setting unit.

〔Example〕

An exhaust system for exhausting three units according to an embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 is a system diagram of an exhaust device according to an embodiment of the present invention,
FIG. 2 is a configuration diagram of an exhaust state control device of one embodiment according to the present invention.

As shown in FIG. 1, the exhaust device of the present embodiment has a normal pressure CV
The D device 3a and the devices 3b, 3c are connected to the main duct 1 by branch ducts 2a, 2b, 2c, and the exhaust fan 4 connected to the main duct 1 discharges exhaust gas generated in each device.

Since the exhaust air volume of the exhaust fan 4 is distributed according to the flow resistance of the branch ducts of the individual devices, the exhaust air volume of the individual devices fluctuates, and thus the static pressure in each branch duct varies.

In this embodiment, in particular, the branch duct 2 of the atmospheric pressure CVD device 3a in which the static pressure in the branch duct 2a must be kept constant.
a is provided with an exhaust state control device as shown in FIG.

As shown in FIG. 2, the exhaust state control device includes a static pressure detecting unit 5, a display unit 6, a setting unit 7, a comparing unit 8, a rotation speed setting unit 9, a motor 10a, and an axial fan 10. .

The axial flow fan 10 is provided near the connection between the branch duct 2a and the main duct 1 as shown in FIG.
air inlet 5a near the connection between a and the branch duct 2a
When the air taken in from the air intake port 5a is guided to the static pressure detecting unit 5, a change in the pressure of the air is converted into a vertical movement of the diaphragm, and a core fixed to the diaphragm is formed. Since it moves, the amount of change in the inductance of the coil having this core as the center is converted into a DC voltage by an electronic circuit and output to the display unit 6 and the comparison unit 8.

This output is displayed on the display unit 6, and this output and the normal pressure CVD set by the setting unit 7 are displayed on the comparison unit 8.
The output is compared with a DC voltage output corresponding to a predetermined static pressure required for the device 3a.

The DC current is output to the rotation speed setting unit 9 based on the difference obtained by the comparison in the comparison unit 8, the frequency to be supplied to the motor 10a is set in the rotation speed setting unit 9, and the axial current is output to the motor 10a. By rotating the fan 10 and adjusting the exhaust capacity of the axial fan 10, the room pressure of the processing chamber of the atmospheric pressure CVD apparatus 3a can be maintained at a predetermined static pressure. 3a can be operated.

〔The invention's effect〕

As is apparent from the above description, according to the present invention, by providing the exhaust state control device in each branch duct,
It has the advantage that the static pressure in the branch duct can be maintained at a value required for each device, and that each device can be operated simultaneously in a stable state, which is extremely economical and reliable. It is possible to provide an exhaust device that can be expected to improve the performance.

[Brief description of the drawings]

1 is a system diagram of an exhaust system according to an embodiment of the present invention, FIG. 2 is a configuration diagram of an exhaust state control device according to an embodiment of the present invention, and FIG. 3 is a system diagram of a conventional exhaust system. . In the figure, 1 is a main duct, 2a, 2b, 2c are branch ducts, 3a is a normal pressure CVD device, 3b, 3c is a device, 4 is an exhaust fan, 5 is a static pressure detecting unit, 5a is an air intake, and 6 is A display unit, 7 is a setting unit, 8 is a comparison unit, 9 is a rotation speed setting unit, 10 is an axial fan, and 10a is a motor.

Claims (1)

(57) [Claims] A plurality of devices including a device for maintaining the processing chamber at a predetermined static pressure are connected to a main duct via branch ducts, respectively, and an exhaust fan connected to the main duct connects the plurality of devices to the main duct. In an exhaust device for eliminating exhaust gas generated in the plurality of devices operating at the same time, the branch duct connected to a device that is to maintain a room pressure of the processing chamber at a predetermined static pressure is provided inside the branch duct. A static pressure detection unit that detects the static pressure of the, and a setting unit that sets a value of the static pressure in the branch duct corresponding to the indoor pressure of the processing chamber,
A comparison unit that compares the value of the static pressure detected by the static pressure detection unit with the value of the static pressure set by the setting unit, a motor that rotates an axial fan that controls the air volume of the branch duct, An exhaust state control device comprising: a rotation speed setting unit configured to set a rotation speed of the motor based on a comparison result in the unit.