JP2908921B2 - Lot stocker and wafer storage method using lot stocker - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a lot stocker for storing wafers used in, for example, semiconductor manufacturing and a method of storing wafers by the lot stocker.

[0002]

2. Description of the Related Art FIGS. 8A and 8B are perspective views showing the entire structure and the internal structure of a conventional lot stocker, respectively, and FIG. 9 is a schematic diagram for explaining a method of using the conventional lot stocker. FIG. In the figure, 1 is a main body of a lot stocker for storing and storing a case 2 in which a wafer is stored,
3 is a case loading / unloading port provided in the main body 1, 4 is a storage shelf for storing the case 2 provided in the main body 1, 5 is provided in the main body 1, and its operation is controlled by a control unit (not shown). Robot. 6 is a wagon for carrying case 2;
7 is a worker who carries the case, 8 is an IC card attached to the case 2, 9 is a case loading / unloading port 3 of the main body 1.
Is installed in the vicinity of the IC card 8 and controlled by the control unit.
A read / write machine that reads information written in the IC card 8, for example, information about a wafer manufacturing process, or writes new information to the IC card 8.

Next, a method of using the above-mentioned conventional lot stocker will be described. After a predetermined number of wafers having undergone a predetermined manufacturing process are stored in the case 2, the case 2 is loaded on the wagon 6 and moved to the main body 1 of the lot stocker. Then, the worker 7 takes out the case 2 from the wagon 6 and sets it on the reading / writing machine 9. The read / write unit 9 is controlled by the control unit to read information of a wafer written in the IC card 8 or write information to the IC card 8. Next, the case 2 is moved to the case entrance 3
, The robot 5 transports the case 2 to an appropriate storage shelf 4 based on a command from the control unit, and stores the case 2. In this way, the worker 7 repeats the above-described series of operations and stores all the cases 2 in the main body 1.

[0004] Here, the case 2 is controlled by the control unit.
Are stored in the main body 1 of the lot stocker in such a manner that the storage locations in the inside and the information stored in the IC card 8 are managed correspondingly.

[0005] When the operator 7 inputs the information of the desired case 2, the robot 5 selects the corresponding case 2 from the many cases 2 stored in the storage shelf 4 based on a command from the control unit. It is transported to the loading / unloading port 3. Thus, the operator 7 takes out the desired case 2 from the lot stocker.

[0006]

As described above, in the conventional lot stocker, the worker 7 manually transports the case 2 to the read / write device 9 and the loading / unloading port 3 and thus the working efficiency is low. As the diameter of the wafer increases, the size of the case 2 increases, the weight increases, and it becomes difficult to carry in and out by hand. In addition, since the inside of the main body 1 of the lot stocker communicates with the outside air, oxygen in the air causes Oxidation causes problems in the subsequent process, and furthermore, since the robot 5 operates in the main body 1 of the lot stocker, dust is generated along with the operation of the robot 5, and the wafers need to be stored and stored in the case 2. In addition, since there is no function of confirming the presence or absence of the case 2 in the storage shelf 4 of the lot stocker, collision between the cases 2 can occur when the robot 5 loads and unloads the case 2. Since the inventory management of the case 2, which is accommodated in each Ttosutokka, may take time to search for the case 2 for taking out, storage performance Rottosutokka there is a problem of a decrease.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a lot stocker in which a case 2 to be stored is easily carried in and a wafer storage method using the lot stocker.

[0008]

A lot stocker according to the present invention includes a storage shelf for storing a case containing a wafer in a main body provided with a case loading / unloading port, and a storage shelf between the case loading / unloading port and the storage shelf. a robot carrying the case, equipped with a plurality of cases, and the case mounting base that can be set in case the transfer port, a first detecting means for outputting a set state to the case mounting base of the case transfer port, a first detection inputs the set detection signal means, Te Rottosutokka odor and control means for controlling the robot so as to carry the case from the case transfer port in the storage rack, the IC card information about U Fine is recorded A read / write device that can be attached to the case and that can read and write the recorded information content of the IC card is provided inside the case entrance,
The reader / writer reads and writes information from / to an IC card.
Update.

Further, in the method of storing a wafer by the roto-stocker according to the present invention, an IC card in which information on a wafer is recorded is attached to a case, and a reading / writing machine capable of reading and writing the recorded information content of the IC card is provided in the case loading / unloading port. , The case mounting table is set at the case entrance
After that, the reader / writer reads and writes the information recorded on the IC card, and then the robot transports the case to a desired storage shelf and moves the case to the storage information of the IC card. Is stored correspondingly.

[0010]

In the present invention, the first detecting means outputs that the case mounting table on which the case is mounted is set at the case loading / unloading port, and the control means detects the set from the first detecting means. Input the signal, activate the robot,
The case is transported from the case loading / unloading port to the storage shelf, and the case loading work by the operator is omitted, thereby improving the efficiency of the case loading operation.

In addition, the case mounting table is set in the case loading / unloading port.
After being set, the read / write machine is
And that reading and writing information recorded in the IC card that is attached to the case, then the robot case
It is transported and moved to a desired storage shelf, and the recorded information of the IC card and the storage location of the case are stored correspondingly.

[0012]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. Embodiment 1 FIG. 1A and 1B are a perspective view showing the overall structure of a lot stocker according to a first embodiment of the present invention and a schematic diagram for explaining a use state, respectively. FIG. 2 is a diagram showing a control mechanism of the first embodiment of the present invention. FIG. 10 is a block diagram, in which FIGS.
The same or corresponding parts as those of the conventional lot stocker shown in FIG.

In the first embodiment, the case loading / unloading port 3 provided in the main body 1 of the lot stocker is formed large so that a wagon 6 serving as a case mounting table on which a plurality of cases 2 are mounted is inserted and set. An IC card 8 attached to the case 2 mounted on the wagon 6 and a reading / writing machine 9 for reading and writing information are installed on the inner wall of the case loading / unloading port 3. The control unit 11 is electrically connected to the mechanical switch 10, the read / write device 9 and the robot 5, and the ON / OFF of the mechanical switch 10 is provided.
It is configured to be able to determine OFF and control the operations of the reader 9 and the robot 5.

Here, each of the IC card 8 and the reader / writer 9 is provided with, for example, a transmitter / receiver to exchange data by wireless communication and to read information recorded on the IC card 8. We are updating.

Next, the operation of the first embodiment will be described. First, the operator 7 loads the case 2 containing the wafers for which the predetermined manufacturing process has been completed into the wagon 6 and inserts the case 2 into the case loading / unloading port 3. Wagon 6 at case loading / unloading port 3
Is inserted, the tip of the wagon 6 is
And the mechanical switch 10 is turned on. Therefore, a set detection signal for turning on the mechanical switch 10 is input to the control means 11, and the control means 11 determines that the setting of the wagon 6 into the case entrance 3 is completed.

Next, the control means 11 controls the drive of the read / write device 9 to read and update information recorded on the IC card 8 attached to the case 2, for example, manufacturing process information. After reading and updating information recorded in each IC card 8 for all cases 2 mounted on the wagon 6, the robot 5 is driven and controlled, and the cases 2 are transported to a desired storage shelf 4. Move.

As described above, according to the first embodiment, the mechanical switch 10 detects the setting state of the wagon 6 in the case loading / unloading port 3 and inputs the set detection signal of the mechanical switch 10 so that the control means 11 Reads and updates information recorded on the IC card 8 of the case 2 by driving and controlling the reader 9, and further drives and controls the robot 5 to transport the case 2 mounted on the wagon 6 to the storage shelf 4. Therefore, the carrying-in work of the case 2 is automatically performed, the work load of the worker 7 can be reduced, the carrying-in work can be made more efficient, and the storing place of the case 2 and the IC card 8 of the case 2 can be improved.
There is an effect that inventory management can be performed by corresponding to the record information.

In the first embodiment, the mechanical switch 10 is used as the first detecting means. However, the first detecting means is not limited to the mechanical switch 10 and the wagon 6 is set at the case loading / unloading port 3. The light-emitting device and the light-receiving device may be disposed on the inner wall surface of the case loading / unloading port 3 to detect the setting state of the wagon 6 based on whether or not the light-receiving device receives light. Alternatively, an operation switch is provided on the main body 1 as first detection means, and the operator 7 operates the operation switch after setting the wagon 6 on the case loading / unloading port 3 to output to the control means 11 that the setting is completed. May be.

Further, in the first embodiment, the control means 11
Automatically drives the reader 9 and the robot 5. However, after the control unit 11 receives an instruction to drive the reader 9 and the robot 5 from an operation switch by the operator 7, The reading machine 9 and the robot 5 may be driven.

In the first embodiment, the lot stocker for storing the case 2 containing the wafer is described. However, the semiconductor manufacturing apparatus, for example, the charging chamber, the reaction chamber, and the unloading chamber, each of which is independently exhausted. A plurality of cases containing wafers are set in a charging chamber, and the wafers are sequentially fed into a reaction chamber. After a film is deposited in the reaction chamber, the wafer is sent to an unloading chamber.
It can also be applied to devices.

Embodiment 2 FIG. FIG. 3 is a perspective view showing the overall structure of a lot stocker according to Embodiment 2 of the present invention. In the figure, 3a and 3b are the outer door and the inner door of the case entrance 3 respectively, 12 is a nitrogen gas cylinder, 13a and 13
b is an intake port and an exhaust port respectively provided in the main body 1,
Reference numeral 23 denotes a pipe connecting the nitrogen gas cylinder 12 and the intake port 13a. The nitrogen gas cylinder 12 and the pipe 23 constitute an inert gas supply unit.

Next, the operation of the second embodiment will be described. First, nitrogen gas is introduced into the main body 1 from the nitrogen gas cylinder 12 via the pipe 23, and the air in the main body 1 is replaced with nitrogen gas. Next, the outer door 3a is opened, the wagon 6 on which the case is mounted is inserted and set in the case entrance 3, and the outer door 3a is closed. Then, the information recorded in the IC card 8 is read and updated, the air in the case entrance 3 is replaced with nitrogen gas, the inner door 3b is opened, and the case 2 is transported to the storage shelf 4 by the robot 5. Moving. When the storage of all the cases 2 is completed, the inner door 3b is closed, the outer door 3a is opened, and the wagon 6 is taken out.
The loading operation of is completed.

As described above, according to the second embodiment, since the nitrogen gas is supplied into the main body 1 from the nitrogen gas cylinder 12 via the pipe 23, the air in the main body 1 is replaced with the nitrogen gas, and Oxidation is prevented.

In the second embodiment, the description is made using nitrogen gas. However, it is sufficient that the air in the main body 1 containing oxygen, which causes oxidation of the wafer, can be replaced with an inert gas. May be used.

Embodiment 3 FIG. FIG. 4 is a perspective view showing the internal structure of a lot stocker according to Embodiment 3 of the present invention. In the figure, 4a is case 2
A grid provided on the storage shelf 4 at intervals at which does not fall, 14 is a blower, 15 is a first flow path 15a for guiding the medium blown by the blower 14 above the storage shelf 4, and a medium passing through the grid 4a. A down-flow blowing means for flowing a medium from above to below the case 2 stored in the storage shelf 4 from the blower 14 and the flow path 15 Is composed. Reference numeral 16 denotes a filter provided as dust collecting means provided in the first flow path 15a of the downflow blowing means.

Here, for convenience of explanation, one
Only one storage shelf 4 is described, and the medium blown by the downflow blower is a gas filled in the main body 1 such as air or nitrogen gas.

Next, the operation of the third embodiment will be described. By driving the blower 14, the medium filled in the main body 1 flows downward from above the storage shelf 4 through the first flow path 15a, passes through the grid 4a, and flows through the second flow path 15b. Through the blower 14 and circulates downflow airflow to the case 2 stored in the storage shelf 4. Further, dust is generated by the operation of the robot 5 in the main body 1. While the dust floats and flies in the direction of the case 2, it falls by the downflow airflow and is sent to the blower 14 through the second flow path 15 b. Further, the air is sent into the first flow path 15a together with the medium by the blower 14, and the filter 16
Collected at.

As described above, according to the third embodiment, the blower 14, the flow path 15, and the filter 16 are provided for the downflow airflow with respect to the case 2 stored in the storage shelf 4. The dust in the main body 1 can be removed to prevent dust from adhering to the wafer, and the wafer can be stored without being stored in the case 2.

Embodiment 4 FIG. FIG. 5 is a perspective view showing the internal structure of a lot stocker according to Embodiment 4 of the present invention. In the figure, 17 is case 2
Is a mechanical switch provided as a second detection means provided at the position of the storage shelf 4 in which the mechanical switch 17 is turned on when the case 2 is stored, and the presence of the case 2 is detected.

In the fourth embodiment, the mechanical switch 17 is electrically connected to the control means 11 and a case detection signal of the mechanical switch 17 is input to the control means 11. Of the case 2 can be reliably grasped, and collision between the cases 2 at the time of carrying and moving the case 2 of the robot 5 can be prevented.

Embodiment 5 FIG. FIG. 6 is a perspective view showing a robot arm in a lot stocker according to a fifth embodiment of the present invention, and FIG. 7 is an exploded perspective view showing a case structure in the fifth embodiment of the present invention. In the drawing, reference numeral 5a denotes a pair of transfer arms attached to the arm holding portion 5b of the robot 5 and slidable left and right. A pressure sensing sensor 18 using a piezoelectric element is provided on the inner wall surface of the transfer arm 5a. I have. Case 2
Is composed of a wafer cassette 2a into which wafers 19 can be inserted one by one, a case box 2b for accommodating the wafer cassette 2a, and a case lid 2c. The case box 2b is provided with a flange portion 20.

In the fifth embodiment, the robot 5 sandwiches the case box 2b from the left and right by the transfer arm 5a and transports the case box 2b. In addition, the flange 20 of the case box 2b abuts on the transfer arm 5a, so that the case 2 does not drop during the transfer and the case 2 is not damaged due to the excessive clamping force of the transfer arm 5a, and the case 2 is securely and safely provided. Can be transported.

[0033]

Since the present invention is configured as described above, it has the following effects.

According to the present invention, in a body casing transfer port is provided, a storage rack for storing the case the wafer is housed, and a robot to transport the case with the case transfer port and the storage rack, with multiple case, the input and the case mounting base that can be set in case the transfer port, a first detecting means for outputting a set state to the case mounting base of the case transfer port, the set detection signal of the first sensing means together, Te Rottosutokka odor and control means for controlling the robot so as to carry the case from the case transfer port in the storage rack, information about U Fine is recorded IC to
The card is attached to the case, and a read / write device capable of reading and writing the recorded information content of the IC card is provided in the case loading / unloading port. Therefore, the operator can automatically carry in the case simply by setting the case mounting table at the case entrance / exit, thereby improving the efficiency of the carrying-in operation and improving the storage performance of the lot stocker.
Recording information C card Rottosutokka that can be updated is obtained by reading and writing machine in case the transfer port.

According to the invention, an IC card in which information on a wafer is recorded is attached to a case,
And, provided the read-write device that can read and write information recorded contents of the IC card into the case carrying the outlet, the case mounting base is cable
After being set at the loading / unloading port, the reader / writer reads and writes information recorded on the IC card,
The cliff over the scan transported moved to a desired storage shelves, because the store in response to a storage location of the recorded information and the case of the IC card,
Correspondence between the record information and the case of the storage locations of the IC card is reduced, it is possible to inventory management, wafer storing method according Rottosutokka recording information of the IC card is cut with update by writing machine in case transfer port is obtained.

[Brief description of the drawings]

FIGS. 1 (a) and 1 (b) are a perspective view showing a general structure of a lot stocker according to a first embodiment of the present invention and a schematic diagram illustrating a use state, respectively.

FIG. 2 is a block diagram of a control mechanism of the lot stocker according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing an overall structure of a lot stocker according to a second embodiment of the present invention.

FIG. 4 is a perspective view showing an internal structure of a lot stocker according to a third embodiment of the present invention.

FIG. 5 is a perspective view showing an internal structure of a lot stocker according to a fourth embodiment of the present invention.

FIG. 6 is a perspective view showing a robot arm in a lot stocker according to a fifth embodiment of the present invention.

FIG. 7 is an exploded perspective view showing a case structure of a lot stocker according to a fifth embodiment of the present invention.

8A and 8B are a perspective view showing an entire structure of a conventional lot stocker and a perspective view showing an internal structure, respectively.

FIG. 9 is a schematic diagram illustrating a method of using a conventional lot stocker.

[Explanation of symbols]

1 body, 2 cases, 3 case loading / unloading, 4 storage shelves, 5 robots, 5a transfer arm, 6 wagon (case mounting table), 8 IC card, 9 reading / writing machine, 10
Mechanical switch (first detection means), 11 control means,
12 nitrogen gas cylinder (inert gas supply means), 14
Blower (downflow blower), 15 flow paths (downflow blower), 16 filter (dust collection means), 1
7 Mechanical switch (second detecting means), 18 Pressure sensor, 19 Wafer, 23 piping (Inert gas supply means).

Continuation of front page (58) Field surveyed (Int.Cl. ⁶ , DB name) B65G 1/00-1/20

Claims (2)

(57) [Claims] 1. A body provided with a case loading / unloading port,
A storage rack for accommodating the wafer is housed case, the Ke
A robot to transport the case with the over scan transfer port and said storage rack, with multiple of said case, and a case mounting base that can be set in the case <br/> transfer opening, said case mounting base of the A first detection unit that outputs a set state to a case loading / unloading port, and a robot that receives a set detection signal of the first detection unit and transports the case from the case loading / unloading port to the storage shelf. in Rottosutokka and control means for controlling, before Kiu with information IC card is recorded is attached to the casing about Fine, the reading and writing machine cable that can read and write information recorded contents of the IC card
The reading and writing machine is provided in the
A lot stocker for reading and updating information with a card. 2. In a main body provided with a case loading / unloading port,
A storage rack for accommodating the wafer is housed case, the Ke
A robot to transport the case with the over scan transfer port and said storage rack, with multiple of said case, and a case mounting base that can be set in the case <br/> transfer opening, said case mounting base of the A first detection unit that outputs a set state to a case loading / unloading port, and a robot that receives a set detection signal of the first detection unit and transports the case from the case loading / unloading port to the storage shelf. A wafer storage method by a lot stocker having a control means for controlling an IC card, wherein an IC card in which information on the wafer is recorded is attached to the case, and a read / write device capable of reading and writing the recorded information content of the IC card is provided. Provided in the case loading / unloading port, wherein the case mounting table is set in the case loading / unloading port
Later, to read and write information to the read-write device is recorded in the IC card, thereafter the robot said case
Transporting and transferring the information to a desired storage shelf and storing the recorded information of the IC card and the storage location of the case in correspondence with each other.