JP2898805B2 - Non-contact 3D measuring machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact type three-dimensional measuring machine, and more particularly to a non-contact type three-dimensional measuring machine capable of easily and accurately measuring coordinates of various parts of an external shape of an object. The present invention relates to a contact type three-dimensional measuring machine.

[0002]

2. Description of the Related Art A three-dimensional measuring device for detecting a three-dimensional shape as three-dimensional coordinate data is disclosed, for example, in US Pat.
No. 42, No. 4102051, No. 4149317
No. 4,282,654. The three-dimensional measuring machine includes a movable body (arm) movable in each coordinate axis of a spatial rectangular coordinate system, that is, X, Y, and Z axes orthogonal to each other, and a needle (needle) provided on the movable body. The three-dimensional shape is measured by bringing the needle into contact with the outer shape of the object to be measured and detecting the three-dimensional coordinates of the moving body at the time of the contact, and is a contact type.

[0003] However, in such a contact type three-dimensional measuring machine, when the object to be measured is molded from a soft material such as clay, for example, when the tip of the needle is brought into contact with the object to be measured. The tip may bite into the object to be measured, causing errors in the detection coordinates of the object to be measured, and the outer shape of the object to be measured may be uneven.

In order to solve such a problem, a distance between an object to be measured and a laser light source is measured by using, for example, a laser light source and a light receiving element for receiving a laser beam emitted from the light source. A non-contact type three-dimensional measuring device that detects the coordinates of the outer shape of the measured object when the distance reaches a predetermined value may be used.

By the way, in the contact type three-dimensional measuring machine, if the needle is oriented perpendicularly to a predetermined position on the surface of the object to be measured, the coordinates of the position can be accurately detected. Therefore, even in the non-contact type three-dimensional measuring machine as described above, the coordinate detection is performed using such a conventional method.

The above coordinate detection method will be described with reference to FIG. In the figure, the Y axis is arranged in a direction perpendicular to the paper surface. Reference numeral 100 denotes a device under test, and reference numeral 1 denotes
Reference numeral 01 denotes a laser unit in which a laser light source and a light receiving element for a laser beam are disposed, and detects a distance from the object 100 in a non-contact manner. Symbols 101A and 101B
Are a light emitting part and a light receiving part of the laser light, respectively.

[0007] As shown in FIG.
The laser unit 1 has a laser beam emitted from the light emitting unit 101A of the laser unit 101 so as to be irradiated almost vertically on a portion of the laser unit 101 whose coordinates are to be detected.
Then, the laser unit 101 is simultaneously moved in the X and Z directions so that the laser unit 101 moves in the laser beam irradiation direction (the direction of the arrow L). When the laser unit 101 approaches the DUT 100 as shown in FIG.
The laser beam reflected by the device under test 100 is detected through a lens system provided in the light receiving unit 101B, and the laser unit 101 is switched to the laser unit 1 based on the detection result.
When it is determined that the distance has reached a predetermined distance from 01, the coordinate data of the laser unit 101 or an arm (not shown) supporting the laser unit 101 at that time corresponds to the laser light irradiation position of the DUT 100. Is taken in as coordinate data.

[0008]

As described above, in the method in which the irradiation direction L of the laser beam is directed perpendicular to the predetermined surface of the external shape of the object to be measured and the laser unit is moved in the irradiation direction, The unit 101 needs to be simultaneously moved in two axis directions (X axis and Z axis in the example of FIG. 28) or three axis directions. That is, in order to move from the state of FIG. 28A to the state of FIG. 28B, the laser unit 101 is moved in the X direction by xf and Y as shown in FIG.
Yf in the direction, need to send at the same time. Such simultaneous feeding of the laser unit 101 in a plurality of axial directions requires a very complicated mechanism and poor operability.

A method in which the above-mentioned simultaneous feeds are separately performed (for example, a first feed by xf in the X direction and a second feed by yf in the Y direction), or a feed in which the X and Y directions are alternately fed little by little. In this case, when the laser unit 101 reaches a predetermined distance from the measured object 100 (that is, the coordinate detection time), there is a possibility that the irradiation position of the laser light may be different from the target position where the coordinates are to be detected. . In this case, the coordinates of the target position cannot be detected.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and has as its object to provide a non-contact three-dimensional system capable of easily detecting coordinates of a desired (target) position of an object to be measured. To provide a measuring machine.

[0011]

In order to solve the above-mentioned problems, according to the present invention, the direction of the center axis is directed to one of the coordinate axes of the spatial rectangular coordinate system. A main shaft provided on an arm of the layout machine, a first intermediate arm rotatably provided on the main shaft, and a first intermediate arm provided on the first intermediate arm so as to form an angle of 45 degrees with the main shaft. And the second intermediate arm rotatably provided with respect to the sub-shaft, and the direction of the laser beam emitted from the laser unit forms an angle of 45 degrees with respect to the sub-axis. Another feature is that a non-contact three-dimensional measuring machine is constituted by using a laser unit attaching means for attaching the laser unit to the second intermediate arm.

In the present invention, a point (hereinafter, referred to as a "reference point") on a predetermined distance in the laser beam irradiation direction from the laser unit, which is a reference position for taking in coordinates, is referred to as the main axis. It is characterized in that the laser unit mounting means is configured so as to be located at the intersection of the counter shaft and the counter shaft.

According to a third aspect of the present invention, when the laser unit is configured to irradiate a laser beam from a position other than the center portion, the mounting means of the laser unit can mount the laser unit upside down. There is a feature in that it is configured as described above.

According to a fourth aspect of the present invention, the first intermediate arm comprises a core material made of epoxy honeycomb, bearings disposed at both ends of the core material, and a carbon fiber wound around the surface of the core material and the bearing. The feature is that it is composed of

[0015]

In the non-contact type three-dimensional measuring machine according to the first aspect, the laser light is adjusted by adjusting the rotation angle of the first intermediate arm with respect to the main axis and the rotation angle of the second intermediate arm with respect to the sub-axis. The irradiation direction is set to 3 that constitutes the coordinate system.
It can be oriented in all three axial directions.

In the non-contact type three-dimensional measuring machine according to the present invention, if the position of the arm of the layout machine does not change, the first intermediate arm and / or the second intermediate arm are rotated to irradiate the laser beam. Changing the direction does not change the coordinates of the reference point.

In the non-contact type three-dimensional measuring device according to the third aspect, if the laser unit is mounted upside down, the coordinate measurement can be performed by approaching the concave wall surface of the surface of the object to be measured.

In the non-contact type three-dimensional measuring device according to the fourth aspect, the first intermediate arm can be constructed lightly and firmly.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 2 is a perspective view of one embodiment of the present invention. In the figure, a layout machine 1 is installed on a surface plate 200, and a guide rail 2 thereof is fixed to the surface plate 200. The base 3 of the layout machine 1 is slidable in the Y direction along the guide rail 2, and a slide base 5 is provided with a vertical arm 4 supported vertically by the base 3.
Can slide in the Z direction. Further horizontal arm 6
Is slidable in the X direction along the slide base 5. The laser unit 10 is attached to the tip of the horizontal arm 6 via an intermediate arm (first intermediate arm) 30 and a wing arm (second intermediate arm) 20. The attachment of the wing arm 20 and the laser unit 10
For example, it is performed by screwing.

Therefore, the laser unit 10 can be moved to an appropriate place in the three-dimensional space on the surface plate 200 by sliding the base 3, the slide base 5 and the horizontal arm 6 in each of the above directions. It is. Movement of the laser unit 10, that is, the base 3, the slide frame 5, and the horizontal arm 6.
However, the sliding in each direction described above can be performed by a known appropriate method using a motor, manual operation, or the like.

FIG. 3 shows the structure of the laser unit 10. In FIG. 1, a semiconductor laser 12 is driven by a semiconductor laser drive circuit 11 and emits laser light. This laser light is applied to the device under test 100 via the light projecting lens 13. When the DUT 100 is located at the reference point L1 (for example, at a distance of 50 [mm] from the laser light irradiation position of the laser unit 10 in the laser light irradiation direction),
The laser light irregularly reflected by the device under test 100 is received at the center position of the light position detecting element 15 via the light receiving lens 14. Further, as shown by reference numerals 100A and 100B, when the position of the device under test 100 is closer or farther than the reference point, the light receiving position of the laser light on the light position detecting element 15 is indicated by an arrow. Move in A or B direction. The output of the light position detecting element 15 is supplied to a first signal processing circuit 50 (FIG. 2) via amplifiers 16 and 17.
Is output to

Returning to FIG. 2, the cables 99 connected to the amplifiers 16 and 17 of the laser unit 10 and the semiconductor laser drive circuit 11 (FIG. 3) are connected to the first signal processing circuit 50. This first signal processing circuit 50
Is a power supply of the semiconductor laser drive circuit 11, and outputs an analog signal according to a distance between the laser unit 10 and the device under test 100 due to a difference in a light receiving position of the laser light with respect to the light position detecting element 15. When the distance between the laser unit 10 and the device under test 100 is less than or greater than a preset distance, the device has a function of outputting a signal (digital signal) to that effect. As the laser unit 10 and the first signal processing circuit 50,
For example, a laser displacement meter (LC-2 manufactured by Keyence Corporation)
320) and a controller (LC-2100).

The first signal processing circuit 50 is connected to a personal computer 70 via a second signal processing circuit 60. The second signal processing circuit 60 includes a time constant circuit for giving an output delay process for preventing chattering to an output signal of the first signal processing circuit 50 (for example, a distance signal between the laser unit 10 and the device under test). And an inverter circuit. Note that the second signal processing circuit 60 can be omitted depending on the response state, the polarity, and the like of the output signal of the first signal processing circuit 50.

The layout machine 1 includes a horizontal arm 6
(In other words, the coordinate of the reference point L1) is provided, and an output signal thereof is output to the personal computer 70. The personal computer 70 uses the output signal of the coordinate detection device 1A when the device under test 100 reaches the reference point L1 using the output signal of the second signal processing circuit 60 (or the first signal processing circuit 50). While automatically taking in the coordinates of a certain reference point L1,
If necessary, the contour shape of the measured object is reproduced on the CRT by using the acquired coordinate information. The automatic coordinate acquisition will be described later.

The laser light protection glasses 90 are for protecting the eyes of the measurer from the laser light emitted from the laser unit 10, and are provided with blue and red glasses above the laser light so as to be within the field of view of the measurer. LEDs 91 and 92 are attached. FIG. 1 is an enlarged view of the laser light protection glasses 90.
It is shown in FIG. The blue LED 91 and the red LED 92 are connected to the second signal processing circuit 60 (or the first signal processing circuit 50). How to use the blue LED 91 and the red LED 92 will also be described later.

An object to be measured (not shown) is mounted on the surface plate 200, and a reference cube 80 is also mounted. The configuration of the reference cube 80 and a method of using the same will be described later.

FIG. 4 is a front view of the horizontal arm 6 shown in FIG. 2, and the intermediate arm 30, the wing arm 20, and the laser unit 10 attached to the horizontal arm 6. 2, the same reference numerals as those in FIG. 2 represent the same or equivalent parts. First, bearings 32 and 34 are fixed to both ends of the intermediate arm 30.
A main shaft 31 and a sub shaft 33 are rotatably inserted into 2 and 34, respectively. The main shaft 31 is fixed to a shaft 6A rotatably attached to the tip of the horizontal arm 6, and the sub shaft 33 is fixed to the wing arm 20. Therefore, the tip end portion of the main shaft 31 and the intermediate arm 30 is in the direction of arrow P about the axis 6A, the tip end portion of the intermediate arm 30 is in the direction of arrow Q about the main shaft 31, and the tip end portion of the wing arm 20 is the sub-shaft 33. Can be turned around the center in the direction of arrow R. The rotating part is fixed by using a known appropriate method when measuring coordinates by the non-contact three-dimensional measuring device.

As shown in FIG. 1, the main shaft 31 and the sub shaft 33 provided on the intermediate arm 30 are attached so that the angle formed by the extension of the central axis thereof is 45 degrees. Further, the laser unit 10 emits laser light emitted from the laser unit 10 in the direction of arrow L,
It is attached to the wing arm 20 so as to form an angle of 45 degrees with the central axis of the sub shaft 33.

Therefore, if the horizontal arm 6 is oriented in the X direction as shown in FIG. 2, the center line of the main shaft 31 is set parallel to the center line of the horizontal arm 6 (the imaginary line in FIG. 4). 5A, the rotational position of the intermediate arm 30 with respect to the main shaft 31 and the rotational position of the wing arm 20 with respect to the sub shaft 33 are changed.
As shown in (c), the irradiation direction L of the laser light emitted from the laser unit 10 can be made to coincide with any of the X, Y, and Z directions.

Therefore, in one embodiment of the present invention, as shown in FIG. 6, when the laser beam is irradiated in the X direction, the laser unit 10 is sent only in that direction, and the laser beam is irradiated. The distance to the device under test 100 can be adjusted without changing the position. Therefore, the coordinates of the outer shape of the DUT 100 can be easily detected by the non-contact three-dimensional measuring device. of course,
In such a coordinate detection method, a laser beam is emitted from the DUT 1
Although it is not possible to vertically irradiate the position where the coordinates are to be detected at 00, the coordinate detection method is a non-contact type using a laser beam, so that the coordinate position detection accuracy does not decrease.

By rotating the intermediate arm 30 in the direction of the arrow P (FIG. 4) with respect to the axis 6A, it is possible to direct the laser beam irradiation direction to a direction other than the three-axis direction.

Further, since the laser unit 10 is configured to irradiate the laser beam not from the center but from a position near the side, as shown in FIG. Even when the concave portion 100C is formed on the surface of the concave portion 100, the coordinates can be detected by approaching the wall surface retardation of the concave portion 100C. As described above, since the means for attaching the laser unit 10 to the wing arm 20 is a screw, the laser unit 1
0 is attached to the wing arm 20, even if the recess 100 </ b> D is formed in the direction opposite to the direction shown in FIG.
, And coordinates can be detected at many positions.

When the laser unit 10 is mounted upside down, as shown in FIG.
Is not on the intersection of the main shaft 31 and the sub shaft 33, but when the wing arm 20 is in the state of FIG.
If 0 is formed extending in the direction of the central axis of the main shaft 31 (see FIG. 3C), the reference point L1 is located on the intersection of the main shaft 31 and the sub shaft 33 even if the front and back of the laser unit 10 are reversed. As described above, it is possible to mount the laser unit 10.

As described above, in this embodiment, the inside of the concave portion can be measured easily and accurately. That is, there is little interference and the measurement limit is high.

In this embodiment, as shown in FIGS. 1 and 4, the laser unit 10 is moved so that the reference point L1 is located at the intersection of the central axes of the main shaft 31 and the sub shaft 33. Therefore, even if the wing arm 20 and / or the intermediate arm 30 is rotated to change the irradiation direction of the laser beam as shown in each drawing of FIG. 5, for example, the position of the reference point L1 does not change. Absent. Therefore, it is not necessary to adjust the origin of the layout machine 1 each time the arms 20 and 30 are rotated.

Returning to FIG. 4, the power supply and data output cables 9 drawn from the laser unit 10
9 is the inside of the sub shaft 33 having a hollow structure and the horizontal arm 6.
The horizontal arm 6 is drawn out from the rear end of the horizontal arm 6. Since the cable 99 is housed in the horizontal arm 6 in this manner, the cable 99 does not hinder the measurement operation, and the cable 99 can be protected. Further, the number of cable fixing guides (for example, taping) required for springing the outer cable is reduced, and the appearance is not impaired. In addition, the intermediate arm 30 and the main shaft 3
The first and the like may have a hollow structure, and the inside of them may pass the cable 99.

The intermediate arm 30, the wing arm 20, and the laser unit 10 attached to the distal end of the horizontal arm 6 (FIG. 2) must be light in weight in order to increase the accuracy of the three-dimensional measurement. . For this purpose, the wing arm 2 for attaching the laser unit 10
Numeral 0 has a frame structure as shown in FIG. 8, and a shaft hole 21 for inserting the counter shaft 33 and a mounting hole 22 for mounting the laser unit 10 are formed at appropriate positions. . In addition, in order to reduce the weight of the wing arm 20, each straight member forming the frame structure
Recesses 23 are formed in the front and back portions (see FIG. 9). With such a configuration, the weight and high rigidity of the wing arm 20 can be improved. The wing arm 20 is made of, for example, magnesium in order to further reduce the weight and improve the dimensional accuracy. The wing arm 20 may be made of an epoxy honeycomb, a carbon fiber, and a bearing (for example, made of aluminum), similarly to an intermediate arm 30 described later.

The intermediate arm 30 to which the wing arm 20 is attached is manufactured by winding a carbon fiber around an outer periphery of an epoxy honeycomb serving as a core material, and fixing bearings 32 and 34 at both ends thereof using jigs. The structure and manufacturing method will be described below with reference to FIGS. 10 (b), 11 (b) and 12
In, hatching is omitted.

First, as shown in FIG. 10, a pair of epoxy honeycombs 35 constituting a part of an annular shape, which are core materials of the intermediate arm 30, are bonded to face each other. Thereafter, as shown in FIG. 11, a carbon fiber 37 is bonded to the surface of the epoxy honeycomb 35,
Similarly, a carbon fiber 37 is bonded to the surface of the epoxy honeycomb 36. This bonding is performed, for example, by previously disposing the carbon fiber 37 in a female mold having substantially the same contour shape as the epoxy honeycomb 35 or 36, and inserting the epoxy honeycomb 35 or 36 into the female mold. The carbon fibers 37 may be bonded before the epoxy honeycombs 35 and 36 are bonded to each other. Thereafter, as shown in FIG. 12, the carbon fiber 38 is wound again from above the carbon fiber 37,
Glue.

Since the carbon fibers are longer than the epoxy honeycombs 35 and 36, the carbon fibers are bonded so that concave portions 3 for attaching bearings 32 and 34 to be described later are formed at both ends of the epoxy honeycombs 35 and 36.
9 is formed.

After the bonding of the carbon fibers is completed as described above, a bearing (slide bearing) 32 made of, for example, aluminum is used by using a jig device 110 as shown in FIG.
And 34 are attached. First, the configuration of the jig device 110 will be described. In FIG. 13, first, the first mounting jig 112 is formed with a cylindrical portion 112B so as to form a mounting surface 112A perpendicular to the central axis thereof, and a male screw 112C is formed at the tip thereof. The above-mentioned male screw 112C
On the opposite side, a male screw 112D is formed.
The first mounting jig 112 is mounted on the jig plate 111 by screwing the nut 115 into 2D.

The second mounting jig 113 is mounted on the jig plate 111 such that the mounting surface 113A forms an angle of 45 degrees with the mounting surface 112A. The mounting surface 113
A is provided with a hole 113B perpendicular to the mounting surface 113A.

The third mounting jig 114 has a cylindrical portion 114A.
And a leg 114B smaller in diameter than the columnar portion 114A, and a male screw 114C formed at the tip of the leg 114B. In FIG. 13, the leg 114B is inserted into the hole 113B, and the nut 1 is inserted into the male screw 114C.
Although the third mounting jig 114 is mounted on the second mounting jig 113 by screwing the 16, the third mounting jig 114 is removed before the positioning of the intermediate arm 30. .

In order to manufacture the intermediate arm 30 using such a jig device 110, first, as shown in FIG. 14, a bearing 32 is inserted into a cylindrical portion 112B of the jig device 110, and the insertion is performed. Then, the nut 11 is passed through the washer 117.
8 is screwed into the male screw 112C, so that the bearing 32
Is fixed to the mounting surface 112A, and the bearing 32 is fixed.

Next, as described with reference to FIGS. 10 to 12, the projection 39 of the bearing 34 is inserted into the concave portion 39 at one end of the epoxy honeycombs 35 and 36 around which the carbon fibers are wound, as shown in FIG. The portion 34A is inserted, and in this state, as shown in FIG.
Then, the bearing 34 is attached to the mounting surface 11 such that the projection 32A of the bearing 32 fixed to the first mounting jig 112 is inserted into the mounting surface 11.
Fix to 3A. As shown in FIG. 16, the fixing is performed by inserting the cylindrical portion 114A of the third mounting jig 114 into the bearing 34, then inserting the leg portion 114B into the hole 113B, and inserting the nut 116 into the male screw 114C. This is performed by screwing. Thereby, the bearing 34 is brought into close contact with the mounting surface 113A.

The shaft holes formed in the bearings 32 and 34 are formed perpendicular to the end faces that come into contact with the mounting surfaces 112A and 113A. Therefore, the mounting surface 112A in which the bearing 32 and the bearing 34 are arranged at an angle of 45 degrees with each other.
And, by being in close contact with the mounting surface 113A, the shaft holes formed in the bearings 32 and 34 also make an angle of 45 degrees with each other. When the protrusions 32A and 34A of the bearings 32 and 34 are inserted into the recess 39, an adhesive is interposed between them.

When the state shown in FIG. 16 is set, the carbon fibers are wound around the bearings 32 and 34 using an adhesive so that the carbon fibers 38 are fixed. By this winding, the bearings 32 and 34 are connected to the epoxy honeycombs 35 and 36 and the carbon fiber 3.
7 and 38, thereby completing the intermediate arm 30. When the intermediate arm 30 is completed, the nut 11
6 and 118, and remove the intermediate arm 30 from the jig device 110.
Remove from

Now, as described above, the laser unit 1
When a laser displacement meter (LC-2320) and a controller (LC-2100) manufactured by KEYENCE CORPORATION are used as the 0 and first signal processing circuits 50 (FIG. 2), the functions of the first signal processing circuits 50 are used. Then, the measured object is the reference point L
When the number reaches 1, the coordinates of the reference point L1 output from the coordinate detection device 1A (FIG. 2) can be automatically captured. Hereinafter, a method of automatically acquiring coordinates by the non-contact type three-dimensional measuring machine will be described.

First, the first signal processing circuit 50 is, for example, shown in FIG.
7 to output an analog signal. In the figure, a distance 0 indicates that the measured object has reached the reference point L1, and in the case of the laser unit 10 of the model number, it is a position 50 [mm] from the laser unit 10. The plus / minus of the distance indicates that the measured object has moved away from and closer to the reference point L1, respectively.
As is clear from the figure, the distance measurement range by the laser unit 10 is a reference point ± about 9 [mm], and the analog signal thereof is 0 [V] at the reference point, and on the minus and plus sides from the reference point, respectively. Negative voltage and positive voltage.

The red LED 92 attached to the laser light protection glasses 90 (FIG. 19) is turned on when a negative analog signal is output, so that the second signal processing circuit 6 is turned on.
0 is connected to the first signal processing circuit 50. L
From the general characteristics of the ED, the red LED 92 lights up from the position where the object to be measured is about -3 [mm] from the reference point to the minus side distance measurement limit position (about -9 [mm]). .

As described above, when the distance between the laser unit 10 and the device under test is less than or greater than a preset distance, the first signal processing circuit 50 outputs a digital signal (to that effect). An on / off signal). In this example, as shown in FIG. 18, the object to be measured is located between the position of 1 [mm] from the reference point and the plus side distance measurement limit position (position of about 9 [mm]). A signal to turn on the blue LED 91,
A signal for capturing coordinate data of the coordinate detecting device 1A (FIG. 2) when an object to be measured enters between the reference point and the negative-side distance measurement limit position (hereinafter, “coordinate data capture signal”).
That. ) Is output.

Therefore, when the laser unit 10 is moved closer to the device under test 100 and the device under test 100 enters the inside (minus direction) of the plus side distance measurement limit position, first, the blue LED 91 is turned on (see FIG. 20A). When the device under test 100 comes closer than 1 mm from the reference point L1, the blue LED 91 turns off (FIG. 20).
b) Then, further inside the reference point L1, a coordinate data capture signal is output, and the coordinate data when the device under test 100 reaches the reference point is captured.

Thereafter, when the laser unit 10 is further approached and the device under test 100 is further inside the position of about -3 [mm] from the reference point L1, the red LED 92 is turned on (FIG. 20c). When the laser unit 10 is further inside than the minus side distance measurement limit position, as is apparent from FIG. 18, the reference point L1 is out of the coordinate data capturing area, and the coordinate data capturing signal disappears. Therefore, when the laser unit 10 moves again in the plus direction from the minus distance measurement limit position, a coordinate data capture signal is generated again, and the coordinate data at the minus distance measurement limit position is captured. Will be. As a result, a signal having an error of about 9 [mm] is input. In order to prevent such a situation, the red LED 92 is turned on when the device under test 100 approaches the reference point L1. Then, the operator of the non-contact type three-dimensional measuring machine is warned. That is, when the red LED 92 is turned on, the layout machine 1 (FIG. 2) is operated so as to immediately move the laser unit 10 away, so that double detection of coordinate data can be prevented.

Even if the distance between the laser unit 10 and the device under test 100 is less than or greater than a preset distance, a digital signal to that effect is output to the first signal processing circuit 50 immediately. If there is a function to output a signal for the first time when the distance is still continued even after about 1 second has elapsed, this function is set such that the DUT 100 is moved from the minus side distance measurement limit position. Further, if the present invention is applied to the case where the laser unit 10 enters the minus direction, even if the laser unit 10 is too close to the DUT 100 and the red LED 92 is momentarily turned off,
If the laser unit 10 is moved away from the device under test 100 before about one second elapses, double detection of coordinate data can be prevented.

FIG. 21 is a functional block diagram of one embodiment of the present invention. 2, the same reference numerals as those in FIG. 2 represent the same or equivalent parts. In the figure, a distance signal, which is output data of the laser unit 10, is input to a blue lighting area determination means 301 and a red lighting area determination means 302. The blue lighting area determination unit 301 determines whether the position of the object to be measured is located between the position of 1 [mm] from the reference point and the plus side distance measurement limit position, and in the case of a positive determination, , The blue LED 91 is energized and turned on. In addition, the red lighting area determination means 302 determines that the measured object is about -3 from the reference point.
It is determined whether it is located between the position of [mm] and the minus side distance measurement limit position, and in the case of a positive determination, the red LED 92 is energized and lit.

The inverter 305 generates an output when the device under test comes closer than the reference point. Gate 307
Triggered by the output of the inverter 305, the coordinate data (X, Y and Z coordinate data) output from the coordinate detecting means 308 (coordinate detecting device 1A) at this time is output to the coordinate storing means 309. The image reproducing means 310 reproduces the outline of the image using the coordinate data stored in the coordinate storing means 309 by using a known appropriate method. And
The result is output to the display means 311 and displayed.
The gate 307, the coordinate storage unit 309, the image reproduction unit 310, and the display unit 311 are functions of the personal computer 70 (FIG. 2).

In the above configuration, when the red LED 92 is turned on, the laser unit 10 must be immediately moved away from the object to be measured. However, by performing the processing shown in FIG. Detection can be prevented. This process is executed by the personal computer 70, for example.

In FIG. 22, first, in step S1, the flag F is reset to "0". In step S2, distance data D which is output data of the laser unit 10 (distance data to the object to be measured) is input. In step S3, it is determined whether or not D is within a range from the distance of 1 [mm] from the reference point to the plus side distance measurement limit. If the determination is affirmative, the blue LED 91 is turned on in step S4. If the determination is negative, the blue LED 91 is turned off in step S5.

In step S6, it is determined whether or not D is within the range of minus distance measurement limit from a distance of -3 [mm] from the reference point. If the determination is affirmative, the red LED 92 is turned on in step S7, and if the determination is negative, the red LED 92 is turned off in step S8.

In step S9, it is determined whether or not D is a positive value, that is, whether or not D is within the range from 0 [mm] to the plus side distance measurement limit.
If the determination is affirmative, the flag F is set to "1" in step S10.

In step S11, the flag F
Is determined to be "1", and if it is "1", it is determined in step S12 whether D is negative. If it is negative data, the coordinate data of the reference point L1 is fetched in step S13, and the flag F is reset to "0" in the following step S14. Thereafter, the process returns to step S2. If a negative determination is made in step S11 or S22, the process returns to step S2.

FIG. 23 is a functional block diagram of another embodiment of the present invention for performing such processing. In the figure,
21 denote the same or equivalent parts, and a description thereof will not be repeated. In FIG. 23, a positive area determination unit 303 determines whether or not the position of the object to be measured is within a range from the reference point to the plus side distance measurement limit using the output data of the laser unit 10, and makes an affirmative determination. In this case, the flag generation means 304 is activated to set the flag F to "1" (a flag is generated). The generation of this flag opens the AND gate 306.

The inverter 305 generates an output when the device under test approaches the reference point. Therefore, after the flag is generated, when the device under test approaches the reference point, an output is generated from the AND gate 306, and the gate 307 is opened.
As a result, the coordinate data output from the coordinate detection means 308 is output to the coordinate storage means 309. When the coordinate storage means 309 stores the coordinate data, the flag generation means 3
04 is deactivated and the generation of the flag is stopped.

As described above, in this example, double detection of coordinate data due to excessive approach to the object to be measured is prevented, so that the red LED 92 need not be lit. Although the blue LED 91 and the red LED 92 have been described as being provided on the laser light protection glasses 90, the blue LED 91 and the red LED 92 are simultaneously observed while watching the laser light emitted from the laser unit 10 to the object to be measured. If possible, the blue LED 91 and the red LED 92 may be arranged at any positions.
That is, for example, it may be provided adjacent to the device under test.

By the way, as described above, the measurer sets the blue LE
If you look at the lighting state of D91 and red LED92,
The position of the laser unit 10 can be easily controlled. However, the measurer can control the laser light emitted from the laser unit 10 to the object to be measured and the blue LED 91 and the red LED 92.
You must always keep an eye on both.

On the other hand, in the following example, the position of the laser unit 10 can be easily controlled only by looking at the vicinity of the coordinate measurement position of the measured object. FIG. 24 is a schematic view showing another example of the laser unit. 3, the same reference numerals as those in FIG. 3 denote the same or equivalent parts. As is clear from FIG. 24, an auxiliary light source device 18 is provided in the laser unit 10A. The auxiliary light source device 18 includes an auxiliary light source (for example, a high-brightness LE).
D) It comprises 18A, light guide fiber 18B, and lens 18C. The lens 18C is attached so as not to block the path of the laser light incident on the optical position detecting element 15, and the light S emitted from the auxiliary light source 18A is combined with the laser light L emitted from the semiconductor laser 12. Similarly, it is configured and attached so as to be substantially parallel light and to irradiate the reference point L1. FIG. 25 shows the positional relationship between the laser unit 10A when approaching the device under test 100 and the spot of the laser light and the auxiliary light applied to the device under test 100. The spot diameters of the laser light and the auxiliary light irradiated on the DUT 100 are, for example, 0.4 [mm] and 4 [mm], respectively.
It is.

First, as shown in FIG. 25A, when the reference point L1 is separated from the surface of the device under test 100, the auxiliary light spot SP is located at a position different from the laser light spot LP. . When the laser unit 10A is gradually approached from that position, the spot SP becomes the spot L
Approaching P.

When the reference point L1 reaches the surface of the DUT 100, the center of the spot SP of the auxiliary light coincides with the center of the spot LP of the laser light, as shown in FIG. Then, it moves on the spot LP (ie, becomes concentric). From this state, the laser unit 1
When 0A approaches the DUT 100, the spot SP moves to the opposite side as shown in FIG.

As described above, if the laser unit 10A having the auxiliary light source device 18 is used, the laser light protection glasses 9 can be used.
0 without the blue LED 91 and the red LED 92
The coordinates of the device under test 100 can be easily measured.
Of course, even in such a measuring method, the blue LED 9
The position determination method for the laser unit using the red LED 1 and the red LED 92 may be used together.

By the way, as shown in FIG. 29, the irradiation angle of the auxiliary light S on the DUT 100 becomes smaller, and the auxiliary light source device 18 is in contact with the DUT 100 just before contact (hereinafter referred to as “interference”). ), The laser unit 10 cannot be moved closer to the DUT 100 to perform coordinate detection. However, if the auxiliary light source device 18 is made foldable and the amount of protrusion of the auxiliary light source device 18 from the laser unit 10 is reduced, the laser unit 10 can be further brought closer to the device under test 100. . Of course, in this case, alignment using the auxiliary light is not performed.

FIGS. 30 and 31 are views showing a laser unit 10A having a foldable auxiliary light source device 18. FIG.
FIG. 31 (b) is a bottom view of FIG. 31 (a), FIG. 31 (a) is a view showing a state where the auxiliary light source device 18 is folded, and FIG. Is a bottom view of FIG.

As is clear from FIGS. 30 and 31, a mount 18D is fixed to the casing of the laser unit 10A, and a lens 18 for irradiating the auxiliary light S is attached to the mount 18D.
The arm 18E to which C is attached is rotatably attached.
The pedestal 18D is provided with the arm 18E in a plane different from a plane including the irradiation direction L of the laser beam and the reflection direction thereof.
The arm 18E is rotatably supported so as to rotate.

Therefore, at the time of interference of the auxiliary light source device 18, if the arm 18E is turned toward the laser unit 10A, the auxiliary light source device 18 can be projected from the laser unit 10A without blocking the path of the laser light. The amount can be reduced, and the laser unit 10A can be brought closer to the object to be measured to perform coordinate detection.

In the description related to FIG. 24, the auxiliary light source 18A is arranged inside the laser unit 10A. However, it goes without saying that the auxiliary light source 18A may be installed outside the laser unit 10A.

Now, without changing the mounting position of the laser unit 10 with respect to the horizontal arm 6 (FIG. 2),
If all the coordinates of the measured object can be measured, the outline shape can be identified only by the relative positional relationship of the coordinates of each point on the measured object, but the measured object has a three-dimensional shape. From, when the object to be measured is irradiated with laser light from a certain direction to measure, for example, the coordinates of the front side of the object to be measured,
It is necessary to change the irradiation direction of the laser light, for example, in the opposite direction, and measure the coordinates on the back side of the measured object. In order to more accurately measure the coordinates of the object to be measured, the irradiation direction of the laser beam needs to be changed three times or more.

Here, as described above with reference to FIG. 1, if the laser unit 10 is mounted on the wing arm 20 so that the reference point L1 is located at the intersection of the central axes of the main shaft 31 and the sub shaft 33, Even if the wing arm 20 and / or the intermediate arm 30 is rotated to change the irradiation direction of the laser beam, the position of the reference point L1 does not change. Therefore, it is not necessary to adjust the origin of the layout machine 1 each time the arms 20 and 30 are rotated.

However, in the case where the arms 20 and 30 do not have the above-described configuration, if the mounting position of the laser unit 10 is changed, the reference point L1 is changed by the change.
In the past, each time the mounting position of the laser unit 10 was changed, the origin was adjusted as described below.

That is, in the origin adjustment, before the coordinate measurement by the three-dimensional measuring machine, the reference point of the laser unit is made to coincide with a point marked at a predetermined position on the object to be measured, and output from the layout machine at this time. This is performed by setting the coordinates (X, Y and Z coordinates) as the origin. When the mounting position of the laser unit 10 with respect to the layout machine 1 is changed, this origin adjustment must be performed each time the change is made.

In this origin adjustment, if the reference point L1 in the laser beam irradiation direction is made to coincide with the target marking point, the X, Y and Z coordinates of the reference point L1 are determined simultaneously. Here, even when the irradiation direction of the laser light is changed and the position of the reference point L1 is changed, if the laser light irradiation direction is directed to any of the X, Y, and Z axes, FIGS. As described above with reference to FIG. 6, it is easy to make the reference point coincide with the predetermined point, so that the origin adjustment is also easy.

However, the laser beam irradiation directions are X, Y and Z.
If it is not oriented in any of the axial directions, the reference point L1
To match the marking point with the laser unit,
Since they must be moved in the axial direction at the same time, the positioning is troublesome. Further, in a non-contact type three-dimensional measuring machine using a laser beam, since coordinate detection can be performed with high accuracy, the above-described positioning must be performed accurately, which is troublesome.

Further, when the object to be measured is made of clay and its surface is marked by scribing, irregularities occur at the scribing portion, so that it is difficult to adjust the origin with high accuracy.

Hereinafter, in order to solve such a problem, in a three-dimensional measuring machine having a configuration in which the position of the reference point L1 shifts when the irradiation direction of the laser beam is changed, the reference point is not set to a point. Instead, an origin adjustment method of sequentially determining the X, Y, and Z coordinates of the origin by adjusting to a predetermined surface will be described. In this method of adjusting the origin, the irradiation direction L of the laser light emitted from the laser unit 10 is set in any of the X, Y, and Z directions as shown in FIGS. Applicable if they do not match. Therefore, the horizontal arm 6 (FIG. 2) and the laser unit 10
1 (the wing arm 20 and the intermediate arm 30) need not have the configuration as shown in FIG.

FIG. 26 is a perspective view of a reference cube 80 used in the origin adjustment method. In the figure, a support rod 83 is erected on a gantry 82, and a cube 81 is mounted on the support rod 83. The cube 81 is a rectangular parallelepiped, and the flatness, parallelism, and verticality of the five surfaces excluding the lower surface are accurately set. The upper surface of the cube 81 is set parallel to the bottom surface of the gantry 82. The reference cube 80 is placed on the surface plate 200 as shown in FIG.

The support bar 83 is provided when the layout machine 1 cannot lower the reference point of the laser unit 10 much. Therefore, when the reference point falls to near the surface plate 200,
Even if 1 is placed directly on the surface plate 200, except for its bottom surface, 5
If the reference point L1 can be moved with respect to the surface, the support bar 83 and the gantry 82 are unnecessary.

FIG. 27 is a flowchart for explaining a method of adjusting the origin using the reference cube 80 and a method of measuring the coordinates of an object to be measured using the method. First, step S51
, The reference cube 80 is accurately positioned with respect to the coordinate system defined by the layout machine 1 (FIG. 1). Specifically, the reference cube 80 with respect to the surface plate 200
Is placed at a position that does not interfere with the coordinate measurement of the object to be measured (not shown), and the five surfaces except the lower surface of the cube 81 are
This is performed so as to be parallel to the XY plane, the XZ plane, and the YZ plane defined by the layout machine 1 (FIG. 2). One of the eight corners (points) of the cube 81 is the origin.

In step S52, the positional relationship between a point (hereinafter referred to as "marking point") marked in advance on the measured object by scribing or the like and the origin is measured by an appropriate method.

In step S53, the laser light irradiation direction L is directed to a direction other than the X, Y and Z axis directions.
The angle of the laser unit 10 is adjusted. With such a setting, it becomes possible to irradiate the laser beam to three adjacent surfaces (XY plane, XZ plane, and YZ plane) of the reference cube 80 except the lower surface.

In step S54, the XY plane is irradiated with a laser beam to adjust the reference point L1 to the plane. Then, in step S55, the Z coordinate output from the layout machine 1 at this time is fetched. Similarly, steps S56 and S57, and S58 and S5
In step 9, the reference point L1 is aligned with the XZ plane and the YZ plane, and the Y and X coordinates output from the layout machine 1 at this time are captured. These steps S54 to S59
The origin coordinates are determined by using the X, Y, and Z coordinates obtained by the above processing and, if necessary, the length of each side of the cube 81.

In step S60, the coordinates of the object to be measured are measured. The measured coordinates are stored in step S54.
The correction is performed using the origin coordinates detected in steps S59 to S59. Then, in step S61, the laser unit 1
It is determined whether it is necessary to make an angle adjustment of zero. If the angle adjustment is required, the process returns to step S53, and if the angle adjustment is not required, the process ends.

As described above, since the coordinates of the origin can be detected only by applying the reference point L1 of the laser beam to the three adjacent surfaces of the reference cube 80, the laser beam irradiation direction can be determined in any one of the coordinate axes. Even when it is not suitable, the origin can be easily adjusted. That is, the reference point L
Since 1 only matches on the 1 side of cube 81,
Even if the laser beam is not directed in any of the directions of the three coordinate axes, moving the laser unit 10 in any one of the coordinate axes allows the reference point L1 to be positioned on the target surface. It is possible to do. Therefore, the origin can be easily adjusted as compared with the conventional method of making the reference point coincide with the marking point.

The processing in step S52 can be omitted. Although the description has been made assuming that five surfaces except the lower surface of the cube 81 are used, it is natural that the origin coordinates are determined using the lower surface of the cube 81 if the laser light can be emitted upward. is there.

[0092]

(1) According to the non-contact type three-dimensional measuring device of the first aspect, the laser beam irradiation direction can be directed to all three axial directions constituting the coordinate system. If the desired position of the object to be measured is irradiated with the laser beam in advance, the reference point can be moved to the desired position only by moving the laser unit in the laser beam irradiation direction. Therefore, it is possible to easily detect the coordinates of the target position of the measured object.

(2) According to the non-contact type three-dimensional measuring device according to the second aspect, since the position of the reference point does not change even if the irradiation direction of the laser beam is changed, the origin is adjusted every time the irradiation direction is changed. No need to do. Therefore, coordinate measurement by the non-contact type three-dimensional measuring machine is easy.

(3) According to the non-contact type three-dimensional measuring device of the third aspect, since the coordinate measurement can be performed by approaching the concave wall surface of the surface of the object to be measured, the measurement inside the concave portion can be easily performed. , And with high accuracy. That is, even in the concave portion, the interference is small and the measurable range is wide.

(4) According to the non-contact type three-dimensional measuring device according to the fourth aspect, the first intermediate arm can be made lightweight and rigid, so that the layout for mounting the first intermediate arm, the laser unit, and the like is provided. There is no need to make the structure of the machine particularly rigid. That is, a non-contact type three-dimensional measuring machine can be configured using an existing layout machine applied to a contact type three-dimensional measuring device using a needle.

[Brief description of the drawings]

FIG. 1 is a front view of a main part of an embodiment of the present invention.

FIG. 2 is a perspective view of one embodiment of the present invention.

FIG. 3 is a schematic view showing a structure of a laser unit 10.

4 is a front view of the horizontal arm 6 shown in FIG. 2, and the intermediate arm 30, the wing arm 20, and the laser unit 10 attached to the horizontal arm 6. FIG.

FIG. 5 is a diagram showing a relationship between the rotational positions of the intermediate arm 30 and the wing arm 20 and the laser beam irradiation direction L.

FIG. 6 shows a laser unit 10 according to an embodiment of the present invention.
29 is a diagram for explaining a method of adjusting the distance between the object and the device under test 100, and is a diagram similar to FIG.

FIG. 7 is a diagram showing a state of detecting coordinates of a concave portion of an object to be measured according to an embodiment of the present invention.

8 is a front view of the wing arm 20. FIG.

9 is a sectional view taken along line IX-IX of FIG.

FIGS. 10A and 10B are diagrams showing a pair of epoxy honeycombs 35 constituting the intermediate arm 30. FIG. 10A is a front view thereof, and FIG. 10B is a sectional view taken along line XX of FIG. is there.

FIG. 11 is a view showing a state in which carbon fibers 37 are bonded to a pair of epoxy honeycombs 35, and FIG.
FIG. 1B is a front view, and FIG. 2B is a cross-sectional view taken along the line XI-XI of FIG.

FIG. 12 shows a pair of epoxy honeycombs 35 to which carbon fibers 37 are bonded, and carbon fibers 38
FIG. 12 is a view showing a state in which is adhered, and is a view similar to FIG.

13 is a front view of the jig device 110. FIG.

FIG. 14 is a view showing a state in which a bearing 32 is mounted on the jig device 110.

FIG. 15 is a view showing a state in which a bearing is attached to one end of a pair of epoxy honeycombs 35 to which carbon fibers 37 and 38 are bonded.

FIG. 16 is a view showing a state in which a bearing 32, a pair of epoxy honeycombs 35 to which carbon fibers 37 and 38 are adhered, and a bearing 34 are mounted on a jig device 110.

FIG. 17 is a graph showing an example of an analog signal output from the first signal processing circuit 50.

FIG. 18 is a graph showing an example of a digital signal output from the first signal processing circuit 50.

FIG. 19 is a perspective view of the laser light protection glasses 90.

FIG. 20 is a view for explaining a coordinate measuring method using laser light protection glasses 90.

FIG. 21 is a functional block diagram of one embodiment of the present invention.

FIG. 22 is a flowchart showing a process for preventing double detection of coordinate data.

FIG. 23 is a functional block diagram of another embodiment of the present invention.

FIG. 24 is a schematic view showing another example of the laser unit.

FIG. 25 shows a positional relationship between the laser unit 10A and the device under test 100 when the device is brought close to the device under test 100;
FIG. 4 is a diagram showing a relationship between a laser beam applied to a laser beam and a spot light of an auxiliary light.

26 is a perspective view of a reference cube 80. FIG.

FIG. 27: an origin adjustment method using a reference cube 80,
4 is a flowchart illustrating a method of measuring coordinates of an object to be measured using the method.

28A and 28B are diagrams for explaining a conventional coordinate detection method, wherein FIGS. 28A and 28B show a positional relationship between a laser unit and an object to be measured, and FIG. 6 is a graph showing a change in coordinates when the laser unit is moved from the state shown in FIG. 7A to the state shown in FIG.

FIG. 29 is a diagram illustrating a state in which the auxiliary light source device interferes.

FIG. 30 is a diagram showing a laser unit having a foldable auxiliary light source device, and FIG. 30A is a diagram showing a state in which the auxiliary light source device is set up and the auxiliary light S is emitted to a reference point L1; FIG. 2B is a bottom view of FIG.

31A and 31B are diagrams showing a laser unit having a foldable auxiliary light source device, wherein FIG. 31A shows a state where the auxiliary light source device is folded, and FIG. It is a bottom view.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Layout machine, 1A ... Coordinate detection device, 6 ... Horizontal arm, 10 and 10A ... Laser unit, 18 ... Auxiliary light source device, 20 ... Wing arm, 30 ... Intermediate arm, 3
DESCRIPTION OF SYMBOLS 1 ... Main shaft, 32, 34 ... Bearing, 33 ... Sub shaft, 35, 36
... epoxy honeycomb, 37, 38 ... carbon fiber,
50: first signal processing circuit, 60: second signal processing circuit, 7
0: personal computer, 80: reference cube, 9
0: laser beam protection glasses, 91: blue LED, 92: red L
ED, 100: object to be measured, 110: jig device, 200:
Surface plate, 301: blue lighting area determining means, 302: red lighting area determining means, 303: positive area determining means, 304: flag generating means, 305: inverter, 306: AND gate, 307: gate, 308: coordinate detecting means , 309 ...
Coordinate storage means, 310: Image reproducing means, 311: Display means, L1: Reference point

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Toshio Kurihara 1-4-1 Chuo, Wako-shi, Saitama Pref. Honda Technical Research Institute Co., Ltd. (56) References JP-A-59-190607 (JP, A) JP-A Sho 61-189405 (JP, A) JP-A-63-187103 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G01B 11/00-11/30 102

Claims (4)

(57) [Claims] 1. An arm movable in each coordinate axis direction of a rectangular coordinate system, a laser unit attached to one end of the arm, for detecting a distance from an object to be measured, and a coordinate detecting means for detecting coordinates of the arm. And a main shaft provided on the arm so that a direction of a center axis thereof is directed to one of the coordinate axes, and a rotation with respect to the main shaft. A first intermediate arm provided so as to be able to form an angle of 45 degrees with the main axis.
A sub-axis provided on the intermediate arm; a second intermediate arm rotatably provided with respect to the sub-axis; A laser unit attaching means for attaching the laser unit to the second intermediate arm so as to form an angle.
Dimension measuring machine. 2. The laser unit attaching means attaches the laser unit to the second intermediate arm such that a reference point on a predetermined distance in the laser beam irradiation direction is located at an intersection of the main axis and the sub-axis. The non-contact three-dimensional measuring device according to claim 1, wherein: 3. The laser unit is configured to irradiate a laser beam from a position other than the center of the laser unit, and the laser unit attaching means can attach the laser unit upside down. Item 3. A non-contact three-dimensional measuring device according to item 1 or 2. 4. The first intermediate arm includes an epoxy honeycomb core material, bearings disposed at both ends of the core material, and carbon fibers wound around surfaces of the core material and the bearing. The non-contact type three-dimensional measuring device according to any one of claims 1 to 3, wherein